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9030670 Apparatus and method for measuring distance  
A method of tracking the position of an object, comprising using reference interference data from first output beam, reference interference data from a second output beam, measurement interference...
8988690 Interferometric encoder systems  
A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and...
8919219 Precision transfer equipment  
A precision equipment having: a base; a table supported by the base; a tubular rod connected to a side of the table via a joint; a drive mechanism that moves the rod forward and backward; and a...
8909804 Interferometric precise timing distribution with a precision phase detector  
A method distributing data in a network is provided. The method comprises measuring the path lengths between a reference clock and a plurality of remote destinations and sending a timing signal...
8891566 System and method for providing chirped electromagnetic radiation  
A system and method for controllably chirping electromagnetic radiation from a radiation source includes an optical cavity arrangement. The optical cavity arrangement enables electromagnetic...
8830480 Measurement apparatus  
The present invention provides a measurement apparatus which measures a distance between a reference surface and a surface to be measured, including a wavelength reference element configured to...
8797828 Remote optical seismic surveying and detection and imaging of underground objects  
System for optical seismic surveying of an area of interest including at least one seismic source, at least one laser source, at least one optical sensing system and a processor, the processor...
8797542 Measurement apparatus  
A measurement apparatus which measures a distance between a reference surface and a test surface, comprises a light source unit including a plurality of light sources each corresponding to one of...
8724114 Interferometer and distance calculation method therefor  
A method of calculating a geometrical distance of a test optical path on the basis of interfering a test beam and a reference beam includes an optical-path-length calculating step of calculating...
8670127 Interferometric encoder systems  
A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and...
8654341 Interferometric distance measuring method with spectrally separable double chirp and device  
In a distance-measuring method, chirped laser radiation with two separable radiation components is emitted to at least one target to be surveyed and via a local oscillator path, the radiation...
8593632 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method  
A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam...
8582085 Chirped coherent laser radar with multiple simultaneous measurements  
A laser radar system using collocated laser beams to unambiguously detects a range of a target and a range rate at which the target is moving relative to the laser radar system. Another aspect of...
8576404 Optical interferometer  
An optical interferometer including, an analyzer configured to calculate an air dispersion ratio of air in the dispersion measurement interferometer excluding the component gas on the basis of a...
8542347 Super resolution telescope  
A super-resolution telescope. A target is illuminated with at least three laser beams, each beam having a slightly different frequency so as to produce an illumination pattern comprised of several...
8502986 Lightwave interference measurement apparatus that calculates absolute distance using lightwave interference  
A lightwave interference measurement apparatus includes a wavelength-variable laser which periodically performs wavelength scanning between first and second reference wavelengths to emit light...
8494671 Grinding machine having the function of measuring distance  
The invention relates to a grinding machine for grinding a workpiece, which has been set on a chuck top surface, by moving a rotating grinding wheel in relation to the workpiece. The grinding...
8339611 Interferometric distance measurement with harmonic frequency comb generated beams  
The present invention provides a measurement apparatus which measures a distance between a reference surface fixed on a fiducial surface and a test surface located on a test object, the apparatus...
8289523 Method and device for generating a synthetic wavelength  
In a method for generating a synthetic wavelength, particularly for an interferometric distance measuring setup, with a primary laser source defining a primary frequency υ0 and at least a first...
8179534 Fixed wavelength absolute distance interferometer  
A fixed wavelength absolute distance interferometer including a first interferometer comprising a first light source transmitting a first light beam having a wavelength W toward a measurement...
8144334 Fiber-optic, digital system for laser Doppler vibrometers (LDVs)  
An apparatus and method for non-determination of the surface velocity of a target using optical interference and Doppler shifting of the light reflected from the target are disclosed. It may be...
8125647 Charged particle beam apparatus and displacement detecting circuit  
An object of this invention is to provide a charged particle beam apparatus that can easily evaluate the stability of a position that is irradiated with a charged particle beam. To achieve the...
8077036 Systems and methods for security breach detection  
A system for detecting and classifying a security breach may include at least one sensor configured to detect seismic vibration from a source, and to generate an output signal that represents the...
8072609 Enhanced sensitivity vibrometer  
An enhanced sensitivity laser vibrometer with increased output signal strength and more sensitive surface vibration detection, is provided by using a reflective mirror assembly to repeatedly...
7970032 Method and device for reducing laser phase noise  
The present invention relates to a method and device for reducing the phase noise of a laser signal from a laser source. This device comprises a first current generator for supplying a driving...
7928861 Telemetry wave detection apparatus and method  
Non-contacting means of measuring the material velocities of harmonic acoustic telemetry waves travelling along the wall of drillpipe, production tubing or coiled tubing are disclosed. Also...
7920272 Chirped coherent laser radar system and method  
A laser radar system using collocated laser beams to unambiguously detects a range of a target and a range rate at which the target is moving relative to the laser radar system. Another aspect of...
7898669 Absolute distance measurement method and system using optical frequency generator  
The present invention relates to absolute distance measurement method and system using an optical frequency generator. The absolute distance measurement method using the optical frequency...
7880894 Vibration detection device and vibration detector  
A vibration detection device that includes a light source that emits a laser beam; an interferometer, which includes two vibrating bodies that are capable of reflecting the laser beam, that splits...
7876449 Laser interferometer  
A laser interferometer includes: a laser source for emitting a laser beam while stabilizing a center wavelength of the laser beam by modulating the laser beam using a modulation signal of a...
7860681 Dynamic analyzer of a mechanical motion transmission system  
Combination is disclosed for deriving and displaying the full complement of nine dynamic parameters associated with a mechanical motion transmission system; the parameters comprise: (1) angular...
7852487 Heterodyne interferometer device for optically measuring an object  
A device for the optic measuring of an object (1), including a signal processing unit (2) as well as an interferometer with a light source (3) and with at least one detector (4a, 4d). The...
7812964 Distance measuring interferometer and encoder metrology systems for use in lithography tools  
In general, in one aspect, the invention features a system that includes a moveable stage, an interferometer configured to provide information about a first degree of freedom of the stage, an...
7764384 Swept frequency laser metrology system  
A swept frequency laser ranging system having sub-micron accuracy that employs multiple common-path heterodyne interferometers, one coupled to a calibrated delay-line for use as an absolute...
7701587 Position sensing apparatus, and position sensing method  
An apparatus for sensing the position of an object includes an irradiation portion for irradiating the object with continuous electromagnetic radiation, a detection portion for detecting...
7663764 Measuring device and method to optically measure an object  
A measuring device for the optic measuring of an object 13a is provided, in particular for measuring a motion of the object. The device includes an interferometer 20 with a measuring beam exit 12,...
7639366 Position-measuring device for determining the position of two objects movable with respect to each other along a measuring direction, and method for forming a reference pulse for such a position-measuring device  
A position-measuring device for determining the positions of two objects movable with respect to each other along a measuring direction includes a first radiation source for emitting an...
7576868 Cyclic error compensation in interferometry systems  
A first portion of a beam including a first frequency component is directed along a first path. A second portion of the beam is frequency shifted to generate a shifted beam that includes a second...
7545508 Interferometric apparatus utilizing a cantilever array to measure a surface  
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a...
7535578 Lithographic apparatus and interferometer system  
A lithographic apparatus is presented that includes a substrate holder configured to hold a substrate, an illuminator configured to condition a beam of radiation, a support structure configured to...
7477398 Multi-beam heterodyne laser doppler vibrometer  
A multi-beam heterodyne vibrometer for analyzing vibration of an object includes an optical system and a combining element. The optical system generates a plurality of object beams and a plurality...
7436519 System and method for interferometer non-linearity compensation  
A method for non-linearity compensating interferometer position data generated from a measurement signal includes generating a first set of non-linearity parameters based on received digital...
7420689 Method for determining the refractive index during interferometric length measurement and interferometric arrangement therefor  
The aim of the invention is to determine the refractive index and/or compensation of the influence of the refractive index during interferometric length measurement with the aid of an...
7324712 Quality factor  
The present invention concerns the discrimination of good measurement results measured by a computer vision system from bad results. By the method of the invention, values calculated from the...
7317538 Optical two-dimensional velocity and/or movement detector  
In an optical movement information detector, light emitted from a laser diode (1) is split into a first beam (10), a second beam (11) and a third beam (12) by beam splitters (2a, 2b). The first,...
7193721 Systems using polarization-manipulating retroreflectors  
Measurement systems that separate polarization components can use retroreflectors to preserve or transform polarization and avoid unwanted mixing of the polarization components. A suitable...
7126695 Heterodyne frequency modulated signal demodulator and method of operating the same  
A heterodyne interferometer, adaptive optics system, method of measuring movement of a target and/or variations in a beam propagation medium, and method of controlling an adaptive optics system...
7095504 Apodization of beams in an optical interferometer  
An interferometry apparatus comprises one or more beam generators, a detector, and a plurality of optical paths along which one or more beams of light propagate. Disposed along at least one of the...
7057736 Cyclic error reduction in average interferometric position measurements  
The invention features a system and method for reducing the contribution of cyclic errors to an interferometric position measurement of a movable stage. An initial interferometric position...
7046367 Interferometric servo control system for stage metrology  
The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived...

Matches 1 - 50 out of 146 1 2 3 >