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7623239 |
Systems and methods for measurement of a specimen with vacuum ultraviolet light
Various systems for measurement of a specimen are provided. One system includes an optical subsystem configured to perform measurements of a specimen using vacuum ultraviolet light and non-vacuum...
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7619741 |
Modulated reflectance measurement system with multiple wavelengths
A modulated reflectance measurement system includes three monochromatic diode-based lasers. Each laser can operate as a probe beam or as a pump beam source. The laser outputs are redirected using a...
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7619740 |
Microgloss measurement of paper and board
Microgloss is a novel two-dimensional representation of how light is reflected from a target surface area. Systems and methods for measuring the microgloss can yield data for characterizing the...
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7619739 |
Detection and identification of biological agents using Bragg filters
A method of sensing an environmental agent, comprising obtaining a sample from the environment and transferring the sample into the working fluid for dispensation to a detection module. The sample...
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7619724 |
Device and method for detecting changes in the refractive index of a dielectric medium
The device for detecting changes in the refractive index of a dielectric medium comprises: at least one metallic layer ( 300 ) ready to be placed in contact with the dielectric medium ( 200 ); at...
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7612883 |
Dynamic plasmonics-enabled signal enhancement, a device comprising the same, and a method using the same
Disclosed herein is a plasmonics platform comprising a substrate; a plurality of periodically spaced nanoholes and/or nanoparticles disposed upon the substrate; wherein the average first order of...
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7609393 |
Filling test method and device
Method for testing the filling of a container with rod-shaped articles of the tobacco-processing industry and filling test device for the container, in which a depth of the container is at least as...
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7609373 |
Reducing variations in energy reflected from a sample due to thin film interference
A system and method for inspecting a multi-layer sample, such as a silicon wafer, is disclosed. The design reduces variations in total reflected energy due to thin film interference. The design...
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7605361 |
Fuel property detection device
A fuel property detection device for detecting a property of fuel based on a detection signal output from a photoreceptor includes a light guiding member having a reflecting surface located in...
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7604999 |
System and method for universal identification of biological samples
A system and method for identifying a biological sample associated with a container is disclosed. A universally unique identifier is associated with each container. In one or more embodiments, the...
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7602509 |
Method for selecting optical configuration for high-precision scatterometric measurement
The present application discloses a method for selecting an optical configuration for a high-precision scatterometric measurement. A geometric parameterization of a grating is determined, wherein...
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7602496 |
Optical sensor with biologically reactive surface
An improved optical sensor and methods for measuring the presence of various materials or constituents in a fluid sample uses one or more reactive materials in a fluid environment. The reactive...
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7602495 |
Method for measuring dissociation constant by surface plasmon resonance analysis
An object to be solved by the present invention is to determine the dissociation constant of an analyte molecule immobilized on a metal surface and a molecule that interacts therewith in surface...
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7602484 |
Method and apparatus for performing limited area spectral analysis
A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding...
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7599072 |
Method for determining physical properties of a multilayered periodic structure
There is provided a method of calculating physical properties of a periodic structure. At least one physical property related to reflectivity or transmittance of a periodic structure is measured,...
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7599066 |
Localized plasmon resonance sensor
A localized plasmon resonance sensor for detecting a change in optical constant uses a structure including metal. In a response spectrum with respect to light incident on the structure, there are...
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7599064 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods
An overlay marker for use with a scatterometer includes two overlying two-dimensional gratings. The two gratings have the same pitch but the upper grating has a lower duty ratio. Cross-talk between...
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7596422 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables
One or more profile parameters of a structure fabricated on a wafer in a wafer application are determined by developing a correlation between a set of profile models and one or more key profile...
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7595895 |
Laser beam machining system
To provide a laser processing apparatus which can converge a laser beam for processing an object to be processed at a position as close as possible to a predetermined position. This laser...
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7595885 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
A process monitoring system has a process chamber configured to hold an object to be processed, an illumination source configured to emit a light to the object, a polarizer configured to polarize...
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7595884 |
Measurement of sample reflectance
An accessory for a spectrometer for carrying out measurements of specular reflectance of a sample. The accessory is designed so that all components can be located in a housing and the sample can be...
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7593116 |
Apparatus and method for detecting error of transfer system
An apparatus is disclosed for detecting error in a transfer system for transferring a substrate loaded upon fabricating of a liquid crystal display device of a flat panel display device. In an...
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7593111 |
Sensor apparatus
A plasmon sensor apparatus using a metallic fine periodic structure designed to reduce the dependences of the resonance wavelength and sensitivity on the incident angle. The plasmon sensor...
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7593110 |
Surface plasmon resonance detecting apparatus and method thereof
A surface plasmon resonance (SPR) detecting apparatus which controls the flow of fluid without using an additional pressure difference or pump is provided. The SPR detecting apparatus includes a...
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7593107 |
Method and system for diffusion attenuated total reflection based concentration sensing
A system for measuring light absorption levels includes a light source providing a light beam and a container for a liquid. The container includes an opening to provide access to the liquid. A...
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7586616 |
Surface plasmon resonance sensor
An SPR sensor comprising: a thin conducting layer comprising at least one conductive element formed on a surface of a transparent substrate; an illumination system controllable to illuminate an...
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7586615 |
Measuring unit
A measuring unit for use in a sensor utilizing the phenomenon of attenuation in total internal reflection includes a dielectric block which is transparent to a light beam and has a flat and smooth...
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7586614 |
System and method for self-referenced SPR measurements
A system and method of using a refractive index sensor to determine a characteristic of a sample. The operation of the system and method allow for determining a change in a bulk index of the...
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7586608 |
Wafer-level testing of optical and optoelectronic chips
This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.
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7583383 |
Biological property check device using light
A biological property check device includes a plurality of probes ( 20 ) each having a light emitting element ( 26 ) for applying light to a biological tissue and a light reception element ( 28 )...
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7580131 |
Angularly resolved scatterometer and inspection method
In an angularly resolved scatterometer, an aperture plate including at least one obscuration extending into the image of the pupil plane is provided. Defocus values of a target pattern are...
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7576863 |
Horizontal surface plasmon resonance sensor apparatus
Disclosed is a horizontal SPR sensor apparatus that provides a simplified beam path, ease of sample handling with concomitant ease of analysis. The horizontal SPR device disclosed herein includes...
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7576862 |
Measuring time dependent fluorescence
Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. A light beam of a...
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7573576 |
Optical sensor device
An optical sensor device includes a photoconductor structure having first and second partial members ( 16, 18 ) and a coupling surface ( 20 ) for coupling the optical sensor device to an opposing...
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7573567 |
Egg counter for counting eggs which are conveyed on an egg collection conveyer
An egg counter for counting eggs conveyed on an egg collection conveyor, includes first and second light emitting element arrays, a light receiving element array between the first and second light...
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7570409 |
Radiation modulation by reflection from controlled composite material
Modulation of electromagnetic radiation is described in which an incident radiation beam is directed toward a surface of a composite material and at least partially reflects to form a reflected...
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7570362 |
Optical measurement apparatus utilizing total reflection
In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including...
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7570361 |
Test method for the testing of the functional capability of a monitoring sensor, monitoring method and monitoring sensor
The invention relates to a test method for the testing of the functional capability of a monitoring sensor which scans a protective field to be monitored using a scanner. In accordance with the...
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7567348 |
Method and apparatus for the evaluation of the local servers properties of surfaces
A method and a device for a spatially resolved examination and evaluation of the properties of surfaces, in particular such properties of surfaces which affect the optical impression which the...
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7567342 |
Arrangement for the optoelectronic recording of large-area fingerprints
The invention is directed to an arrangement for the optoelectronic recording of large-area fingerprints, particularly for acquiring prints of the entire palm of the hand. The object of the...
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7564541 |
System for obtaining images in bright field and crossed polarization modes and chemical images in raman, luminescence and absorption modes
An integrated system including one or more light sources, at least one processor, an optical lens, a two-dimensional tunable filter, one or more two-dimensional array of detection elements and...
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7561273 |
Device and method for measurement of surfaces
The invention relates to a device for measuring surfaces and to a method, which uses, preferably, the device. The device comprises a light source which is used to produce a multi-colored light...
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7561272 |
Precision correction of reflectance measurements
A system and method of correcting reflectance comprises determining a reflectance constant for a test product at a first wavelength for which reflectance does not substantially change with the...
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7557933 |
Measuring probe, sample surface measuring apparatus and sample surface measuring method
A measurement probe 1 for measuring a surface of sample S comprises a base section 10 , a head section 30 having a probe tip 31 , and a support structure section 15 which supports the head...
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7557926 |
Apparatus for measuring semiconductor physical characteristics
A reflectometry method and apparatus for gathering meaningful reflectance data indicative of one or more characteristics of a substance being grown on a horizontal substrate within a reaction...
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7557909 |
Printed matter inspection device, printing press and printed matter inspection method
A printed matter inspection device includes a light source that irradiates a color printed matter as an inspection object with illuminating light, a detector that detects the quantity of reflected...
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7554665 |
Dual beam set-up for parousiameter
A parousiameter having a dual beam setup and method for use thereof is provided for producing measurements of optical parameters. The dual beam parousiameter includes a hemispherical dome enclosure...
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7554662 |
Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation
Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having a hole therethrough with a non-unity aspect ratio.
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7551286 |
Measurement apparatus
A measurement apparatus includes a dielectric block, a thin film layer formed on the dielectric block and brought into contact with a sample, a light source for generating a light beam, an optical...
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7548317 |
Apparatus and method for angular colorimetry
An apparatus for measuring the reflectance properties of an object having a front reflecting surface and at least one back reflecting surface. The apparatus includes a sample stage for placement of...
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