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7602491 |
Optical gain approach for enhancement of overlay and alignment systems performance
A resultant image of a grating target may be obtained by dividing an image of the target into first and second portions and optically modifying the first and/or second portion such that a final...
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7602490 |
Liquid ejecting head alignment apparatus and liquid ejecting head alignment method
The invention provides a liquid ejecting head alignment apparatus that is used for positional determination and adhesion of nozzle plates and a fixation member, each of the nozzle plates having...
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7602489 |
Lithographic apparatus and device manufacturing method
A lithographic apparatus includes a displacement measuring system to measure a position of a moveable object with respect to a reference frame of the lithographic apparatus, in at least three...
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7593104 |
Method for manufacturing optical module, positioning apparatus, evaluation method and evaluation apparatus for evaluating optical module
A method for evaluating an optical module, the optical module including a light emitting element and a supporting member for supporting an end of an optical fiber for communications, by which...
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7586608 |
Wafer-level testing of optical and optoelectronic chips
This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.
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7573585 |
Detection apparatus detecting predetermined positions of member
A detection apparatus detecting predetermined positions of a member includes: n (n≧2) sensors one-dimensionally disposed at a sensor pitch equal to or greater than a distance D; and a member to...
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7562809 |
Method for detecting component placement errors in product assembly and assemblies made therewith
An article and a method for testing the assembly of that article are disclosed. The article includes a plurality of modules, at least two of the modules are capable of being placed in two different...
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7561260 |
System for verifying the accuracy of lens holder attachment, lens attachment stage, and lens processing system
A system comprises the step for applying a mark in advance in a reference position in which attachment of a lens holder is anticipated on a convex lens surface of a reference lens; the step for...
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7548798 |
Paste dispenser and method for controlling the same
A paste dispenser and a method for controlling the same are disclosed. The paste dispenser includes a stage having a substrate mounted thereon, at least one nozzle dispensing a paste on the...
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7542141 |
Stage controller and exposure method in which position of the stage is controlled based on position measurements of first and second laser interferometers
An apparatus including a stage configured to be moved. A first laser interferometer measures a position of the stage in a first direction. A second laser interferometer measures a position of the...
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7535001 |
Method and system for focusing a charged particle beam
A method for focusing a charged particle beam, the method includes: (a) altering a focal point of a charged particle beam according to a first focal pattern while scanning a first area of a sample...
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7532305 |
Lithographic apparatus and device manufacturing method using overlay measurement
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate includes a reference set of gratings provided in the substrate, the reference set including two...
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7522262 |
Method for determining position of reference point
A method for determining a position of a reference point in which there is no influence of aberration of a camera lens or the like, but an error caused by a failure in shape of an alignment mark...
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7515281 |
Lithographic apparatus and device manufacturing method
A lithographic apparatus includes a displacement measuring system configured to measure the position of a substrate table in at least three degrees of freedom. The displacement measuring system...
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7508514 |
Correction of off-axis translation of optical elements in an optical zoom assembly
A laser beam may be used to provide a virtual reference axis of travel for the in-axis direction of motion of lenses in a zoom assembly to be positioned during a zoom operation. The virtual...
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7508513 |
Measuring apparatus and measuring method
A measuring apparatus and a measuring method are provided, with which an accurate length measurement and position checking are achieved using a simple structure. The measuring apparatus according...
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7508512 |
Continuous optical self-alignment for light curtains and optical presence sensors for simplification and maintenance of alignment
Systems and methods are disclosed that facilitate tolerating and/or correcting light beam misalignment in a light-emitting device, such as a light curtain. Attributes of the light beam can be...
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7505134 |
Automated ellipsometer and the like systems
Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.
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7486397 |
Device for aligning substrate with mask and method using the same
A device for aligning a substrate and a mask, and a method using the same, where the device includes aligning marks in unused portions of the substrate and the mask, a sensing unit for determining...
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7480051 |
Apparatus and method for hard-docking a tester to a tiltable imager
An apparatus and method are disclosed for hard-docking of a tester head to a DUT, while permitting the angular alignment of a specimen to be inspected to the optical axis of an optical testing...
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7471395 |
Light-emitting module and methods for optically aligning and assembling the same
An optical alignment method is for a light-emitting module that includes a housing unit, a light-emitting unit disposed in the housing unit, and a lens unit. The optical alignment method includes:...
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7466412 |
Method of detecting displacement of exposure position marks
Exposure position marks are reliably recognized and the displacement of an exposure position is correctly and efficiently detected based on measurement results produced by recognizing the marks....
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7466411 |
Replacement and alignment of laser
The present invention relates to embodiments of: (1) a unitary holographic drive head assembly mounting structure; (2) an assembly comprising a unitary holographic drive head assembly mounting...
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7460229 |
Beam alignment in spectroscopic microscopes
A spectroscopic microscope includes a laser or other light source which emits light from the entrance aperture of its spectrograph, and also includes a light sensor situated on the microscope...
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7459247 |
Lithographic apparatus and device manufacturing method
A system and method use a substrate with a pattern of individual, indiscrete alignment marks, i.e., the marks are separate and distinct from each other, and each mark is not divided into component...
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7456966 |
Alignment mark system and method to improve wafer alignment search range
The present invention is a system and method for use with alignment marks and search algorithms of diffraction pattern detection tools. The system and method of the invention significantly...
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7446872 |
Positioning apparatus and positioning method using the same
An apparatus for positioning a transport system and a load port is described, including a signal emitting unit disposed on the transport system and a positioning board on the load port. The signal...
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7443505 |
Optical alignment method and apparatus
In disclosed optical alignment method and apparatus thereof, external reflection entering laser diode by feedback from transmission line of low cost bidirectional optical transceiver module without...
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7425093 |
Thermography test method and apparatus for bonding evaluation in sputtering targets
A method and apparatus for thermographically evaluating the bond integrity of a sputtering target assembly is described. The method includes applying a heating or cooling medium or energy to one...
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7417580 |
Object detection system and object detection method
An object detection system includes a radar detection means ( 2 ), an image detection means ( 3 ), and a collating means ( 4 ). The collating means ( 4 ) performs a collation between an object...
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7414713 |
Method of measuring focal point, instrument used therefor, and method of fabricating semiconductor device
A shape value of a pattern having a pivotal characteristic is measured (step S 1 ), an exposure energy variation is detected from the measured value, a first data base is accessed using a result of...
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7411678 |
Alignment apparatus, control method thereof, exposure apparatus and method of manufacturing semiconductor device by exposure apparatus controlled by the same control method
An alignment apparatus which drives to a target position a stage capable of moving at least in a two-dimensional direction. A first measurement device and a second measurement device have a...
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7410880 |
Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate
In a method for measuring the bonding quality of bonded substrates, such as bonded SOI wafers, a plurality of marks are created at a first side of a top substrate after, or before, the bonding of...
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7408642 |
Registration target design for managing both reticle grid error and wafer overlay
A combined overlay target and methods for its use are disclosed. The combined overlay target includes a grating-type overlay target and an image placement error target having substantially...
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7405388 |
Video centerscope for machine alignment
This invention can be attached to the head of a milling machine and performs the functions of a center scope and an edge finder. Unlike a center scope or an edge finder it does not have to be...
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7382448 |
Alignment system for observation instruments
A method and apparatus is disclosed for aligning an optical instrument with respect to a celestial coordinate system, the optical instrument having a field of view and an optical instrument...
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7375810 |
Overlay error detection
An overlay target with gratings thereon is illuminated and radiation scattered by the target is imaged onto detectors. A phase difference is then detected between the outputs of the detectors to...
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7375361 |
Optical alignment device for machine tool
The orientation of a machine 2 relative to a work-piece 10 is manually controlled by means of an alignment device 4 . The device 4 includes a light source 24 rigidly attached to a foot 12...
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7372569 |
Method of correcting alignment errors in a segmented reflective surface
An optical alignment apparatus comprising a plurality of subapertures and a plurality of detectors. The subapertures are optically coupled to a reflective surface which formed by a plurality of...
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7372029 |
Scanning transmission electron microscope and scanning transmission electron microscopy
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted...
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7369238 |
Lens blank alignment and blocking device and method
A lens blocking device is disclosed that includes a frame, a light source mounted on the frame, a carriage having a first end and a second end mounted on the frame for sliding movement between...
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7369237 |
Substrate processing apparatus and substrate processing system
It is an object of the present invention to provide a substrate processing apparatus, comprising a housing body mounting unit that is capable of mounting a plurality of housing bodies which can...
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7369214 |
Lithographic apparatus and device manufacturing method utilizing a metrology system with sensors
A system and method include an object supported on a moveable support, an optical system that transmits radiation onto the object, a support having an aperture therethrough, a sensor system coupled...
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7368206 |
Automated overlay metrology system
Non-imaging measurement is made of misalignment of lithographic exposures by illuminating periodic features of a mark formed by two lithographic exposures with broadband light and detecting an...
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7359053 |
Optical array with beam alignment feature
An array of optical elements for processing a spatially dispersed optical beam including monitoring optical elements for determining the position of the optical beam in the array is disclosed. The...
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7355675 |
Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
A method for measuring information provided by a substrate. The substrate includes a feature that has been created by a lithographic apparatus. The method includes projecting a beam of light onto a...
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7339282 |
Topographically indexed support substrates
The present invention provides an indexed support substrate. The support substrate comprises at least one set of indexing features that are distinguishable from one another and from the surrounding...
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7333199 |
Aligning optical components with three degrees of translational freedom
The principles of the present invention relate to aligning optical components with three degrees of translational freedom. A lens pin, a lens base, and a molded package are aligned in a first...
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7332255 |
Overlay box structure for measuring process induced line shortening effect
The present invention enables the user to measure process line shortening (PLS) on an overlay tool. In an example embodiment ( 900 ), to obtain the PLS, the user applies a method to determine the...
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7315374 |
Real-time monitoring optically trapped carbon nanotubes
An embodiment of the present invention is a technique to monitor carbon nanotubes (CNTs). A carbon nanotube (CNT) is manipulated in a fluid by a laser beam. An illuminating light from a light...
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