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7623229 |
Systems and methods for inspecting wafers
Systems and methods for inspecting wafers are provided. One system includes a detection subsystem configured to separately and simultaneously detect light scattered from different portions of a...
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7620235 |
Device for scanning three-dimensional objects
A scanning system and method for constructing a three-dimensional model of an object, the scanning system comprising: a scanning device ( 2 ) and a scanning template member ( 4 ). The scanning...
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7619729 |
Method for detecting particles and defects and inspection equipment thereof
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate...
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7617075 |
Library accuracy enhancment and evaluation
The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated...
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7599051 |
Calibration of a substrate inspection tool
A method for calibration of a substrate inspection tool is disclosed. The tool is used to inspect a standard substrate having simulated contamination defects with known characteristics. Performance...
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7595869 |
Optical metrology system optimized with a plurality of design goals
Provided is a method of designing an optical metrology system for measuring structures on a workpiece where the optical metrology system is configured to meet a plurality of design goals. Primary...
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7595482 |
Standard component for length measurement, method for producing the same, and electron beam metrology system using the same
A standard component for length measurement includes a first diffraction grating and a second diffraction grating. Each of components of the second diffraction grating is disposed between...
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7593103 |
Light intensity measuring method and electronic device
The present invention discloses a method for measuring an intensity of a part of an electromagnetic spectral range, and an electronic device implementing the method. The method comprises the steps...
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7589845 |
Process control using an optical metrology system optimized with signal criteria
Provided is system and method for controlling a fabrication cluster using at least one parameter of a structure measured with an optical metrology system designed and configured to meet one or more...
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7580129 |
Method and system for improving accuracy of critical dimension metrology
A method for improving accuracy of optical critical dimension measurement of a substrate is provided. A process parameter that influences the refractive index and extinction coefficient of a thin...
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7580124 |
Dual stage defect region identification and defect detection method and apparatus
A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive...
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7561269 |
Optical measurement system with systematic error correction
An optical measurement system and wafer processing tool for correcting systematic errors in which a first diffraction spectrum is measured from a standard substrate including a layer having a known...
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7557920 |
Method and apparatus for auto-adjusting illumination
A machine-vision system that provides changing and/or automatic adjustment of illumination angle, dispersion, intensity, and/or color of illumination. One such system includes a light source...
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7548309 |
Inspection apparatus, inspection method, and manufacturing method of pattern substrate
A defect inspection apparatus according to an aspect of the present invention includes a laser source generating light beam, an objective lens focusing the light beam emitted from the laser source...
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7542140 |
Detection method using electromagnetic wave and detection apparatus
A detection apparatus includes a sample holding section, an irradiation means, a detection means, a calculation means, and an evaluation means. The irradiation means irradiates a substance held in...
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7535560 |
Method and system for the inspection of integrated circuit devices having leads
The invention relates to optical inspection of integrated circuit devices, such as QFP and TSOP devices. There are provided methods of inspecting objects, such as integrated circuit devices, using...
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7532328 |
Circuit-pattern inspection apparatus
The disclosed subject matter is related to a circuit pattern inspection apparatus for detecting a gradual changing of defect expanding over a large area of the semiconductor wafer. In order to...
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7525658 |
System of correlating light measurements
A system provides a correlation between a field-tested measured light transmission, light reflection and/or light absorption in at least one transparent, translucent or semi-opaque medium to a...
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7518717 |
Exposure apparatus and a device manufacturing method using the same
A scanning type exposure apparatus includes a projection optical system which projects a pattern of a reticle onto a wafer, which is held by a wafer chuck, a scanning stage system which scanningly...
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7476856 |
Sample dimension-measuring method and charged particle beam apparatus
A method and apparatus for efficiently executing two types of measurements with an optical measuring device and a scanning electron microscope are provided. For example, the method and apparatus...
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7440093 |
Apparatus and methods for providing selective defect sensitivity
Disclosed are techniques and apparatus for accounting for differing levels of defect susceptibility in different pattern areas of a reticle in an inspection of such reticle or in inspection of a...
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7433032 |
Method and apparatus for inspecting defects in multiple regions with different parameters
In a method of inspecting defects, a first actual region of an actual object is inspected based on a first characteristic parameter as an inspection condition. A point where an inspection region of...
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7417750 |
Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer
Structures formed on a semiconductor wafer are consecutively measured by obtaining first and second measured diffraction signals of a first structure and a second structure formed abutting the...
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7394084 |
Method of generating image and illumination device for inspecting substrate
For generating an image for inspection of a substrate, a camera is provided above this substrate with an optical axis orienting downward and a plurality of multi-colored light emitting members are...
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7369236 |
Defect detection through image comparison using relative measures
Inspection of objects such as semiconductor wafers can include comparisons of shapes between inspection and reference images. As part of the inspection process, relative values may be assigned to...
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7365862 |
Methods and apparatus for inspecting an object
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto an object, and an imaging sensor for receiving light reflected from the...
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7359043 |
Pattern inspecting method and pattern inspecting apparatus
A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to...
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7349575 |
Pattern inspection method and apparatus, and pattern alignment method
In a pattern inspection method, a master pattern serving as a reference and the continuous tone image of a pattern to be measured that is sensed by a camera are aligned. At least the position of a...
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7339672 |
Solid-state image pickup device and signal reading method therefor
A solid-state image pickup device has a photoelectric conversion part performing photoelectric conversion on incident light, a comparison part connected to an output terminal of the photoelectric...
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7339661 |
Dark field inspection system
Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the...
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7339651 |
Exposure equipment and related control method
Exposure equipment adapted for use in the manufacture of semiconductor devices and a related control are disclosed. A wafer stage in the exposure equipment comprises an image sensor adapted to...
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7336374 |
Methods and apparatus for generating a mask
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light...
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7321433 |
Method and apparatus for optically measuring the topography of nearly planar periodic structures
The present invention discloses a non-destructive method and apparatus for measuring the 3D topography of a sample having periodic microstructure deposited onto the surface, or deposited onto a...
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7295301 |
Dual stage defect region identification and defect detection method and apparatus
A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive...
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7283235 |
Optical device and inspection module
Optical device for representing a central image ( 10 ) of an object ( 1 ) and at least one lateral image ( 11, 12, 13, 14 ) of the same object ( 1 ), with the length of the real optical path of...
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7280199 |
System for detecting anomalies and/or features of a surface
A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused...
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7271904 |
Seal dispenser for fabricating liquid crystal display panel and method for detecting discontinuous portion of seal pattern using the same
A seal dispenser for fabricating a liquid crystal display panel and a method for detecting a discontinuous portion of a seal pattern using the same are disclosed in the present invention. The seal...
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7271903 |
Apparatus and method for testing liquid crystal display panel
A device and a method for testing a liquid crystal display panel are disclosed in the present invention, which enable to conveniently inspect a cutting plane of an individual unit liquid crystal...
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7248351 |
Optimizing light path uniformity in inspection systems
An inspection system includes an illumination source configured to illuminate a blazed phase grating sample, image collection pathways and an imaging system configured to capture an image of a...
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7236255 |
Method and instrument for measuring bead cutting shape of electric welded tube
To precisely measure bead cutting shapes of electric resistance welded pipes without being affected by difference in luminance level between cut and uncut portions in optical cutting images, an...
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7222414 |
Component transfer systems
A system for transferring electrical components. The system may comprise a plurality of electrical components. Each of the components may include leads and a physically asymmetric fiducial marker...
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7221446 |
Fluid dispenser and lens inspection device
A fluid dispenser dispenses a fluid alternately from one of a pair of ports ( 29,31 ) that are provided on opposite ends of a syringe ( 26 ) by moving a piston ( 42 ) back and forth inside the...
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7218771 |
Cam reference for inspection of contour images
This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more...
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7190454 |
Automatic power controller
An automatic power controller includes a photo detector for detecting the output power of the laser light source and generating a detection signal, a comparator for comparing the detection signal...
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7170593 |
Method of reviewing detected defects
A method to solve the problem of a technique generally used to detect a defect of a semiconductor by calculating the differential image based on pattern matching, which requires that a reference...
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7170592 |
Method of inspecting a sphere without orienting the sphere
The present invention is directed to a method of inspecting a curved object comprising the steps of acquiring inspection image data of a curved object using a detector, generating adjusted image...
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7142708 |
Defect detection method and its apparatus
An object of the present invention is to provide a defect detection method and its apparatus which can adjust sensitivity easily by managing both reduction in the number of false reports and...
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7095496 |
Method and apparatus for position-dependent optical metrology calibration
A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics...
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7092484 |
Model-assisted reconstruction of volumetric data
The present invention is a method for inspecting objects. The method includes obtaining a structural model of a first object, the model providing dimensions and material properties for the first...
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7092096 |
Optical scatterometry method of sidewall spacer analysis
A method of analyzing structural characteristics of sidewall spacers fabricated on a wafer is disclosed. A grating bar having a plurality of grating targets is provided. A theoretical optical...
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