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7999920 |
Method of performing model-based scanner tuning
A model-based tuning method for tuning a first lithography system utilizing a reference lithography system, each of which has tunable parameters for controlling imaging performance. The method...
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7738102 |
Layered film fabrication method, layered film defect detection method, layered film defect detection device, layered film, and image display device
Provided are a layered film defect detection device capable of performing defect detection considering irregularities of optical performance of a phase difference layer constituting the layered...
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6422097 |
Assembly line mounted assemblies with means for verification
An assembly line for mounting tires on wheels, for inflating the tire mounted on a wheel, for placement of the bead heels of the tire and for balancing which also includes apparatus for checking...
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6373576 |
Method for measuring concentrations of dopants in a liquid carrier on a wafer surface
A method for non-destructively testing for the concentration of a component of a film that is used for doping a region of a semiconductor wafer uses an image histogram of the light reflected from...
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6208418 |
Apparatus and method for measurement of the mechanical properties and electromigration of thin films
A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the...
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6100970 |
Apparatus for inspecting slight defects on a photomask pattern
A photomask defect inspection method is provided by which defects of pin holes with the diameter equal to or less than 0.35 μm can be detected with certainty. According to the inspection method, a ...
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6042995 |
Lithographic process for device fabrication using a multilayer mask which has been previously inspected
A lithographic process for semiconductor device fabrication is disclosed. In the process a patterned mask having a multilayer film formed on a substrate is illuminated by extreme ultraviolet (EUV)...
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5781657 |
Apparatus for inspecting pattern of photomask and method therefor
Graphic data for forming a light-shielding pattern and graphic data for forming a semitransparent pattern are stored in first and second memories, respectively. A synthesis circuit converts the...
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5772656 |
Calibration apparatus for laser ablative systems
A calibration apparatus is disclosed for measuring the properties of a laser beam. The apparatus includes a photoreactive element having a composition which reacts with laser radiation in a manner...
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5576833 |
Wafer pattern defect detection method and apparatus therefor
A scanning electron beam is formed as a rectangular electron beam. The electro-optical system which forms this rectangular beam has a rectangular-cathode light source and a quadrupole lens system....
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4938591 |
Method and apparatus for electronic and visual image comparing
The invention relates to a method and apparatus for acquiring, recording and storing information in photographic and electronic media. In particular, the invention relates to low flare image...
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4929972 |
Method and apparatus for electronic and photographic image recording
The invention relates to a method and apparatus for acquiring, recording and storing information in photographic and electronic media. In particular, the invention relates to low flare image...
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4879097 |
Dispensing device and recording apparatus
A recording apparatus has a holder for a plurality of reaction vessels including a support plate (11) having an array of holes (15) therein for receiving an array of reaction vessels (16), a...
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4843329 |
Method for contactless testing for electrical opens and short circuits in conducting paths in a substrate
A method for contactlessly testing for opens and shorts in conducting paths within or on a nonconducting substrate. There are a plurality of conducting pads on the surface of the substrate. Charges...
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4765743 |
Method of inspecting a master member
A method of inspecting a pattern of elements on a working plate includes producing a negative copy of the working plate and aligning the negative copy with a positive inspection plate having...
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4741622 |
Method and apparatus for detecting diversion
A method of detecting a registration diversion between a mask and a wafer prior to a main exposure. This method detects relative diversions between marks on the wafer and latent images of marks on...
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4718767 |
Method of inspecting the pattern on a photographic mask
A method whereby the circuit pattern on a photographic mask or a reticle used in the manufacture of semiconductor devices is inspected for defects by an image processing technique. In this...
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RE32487 |
Binocular presentation of visual information
Pairs of images are presented to an observer under conditions such that they are perceived as a single image and provide information about their mutual relationship. The pair are derived from...
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4623255 |
Method of examining microcircuit patterns
Examination of microstructures of LSI and VLSI devices is facilitated by employing a method in which the device is photographed through a darkfield illumination optical microscope and the resulting...
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4586822 |
Inspecting method for mask for producing semiconductor device
A method for inspecting the presence of foreign particles on a mask comprising the steps of forming alignment marks on a wafer onto which the pattern is trially replicated, aligning projected...
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4545678 |
Method and apparatus for testing lenses
The invention concerns a method and apparatus for testing aspherical lenses, particularly continuous-focus eyeglass lenses. The negative picture (7) of a test pattern (1) is produced by means of a...
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4508452 |
Arrangement for sensing the characteristics of a surface and determining the position of points thereon
The surface to be sensed or scanned is placed in the path of a projector which is moved along an axis of the surface. The path of motion of the projector is subdivided into predetermined sections...
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4461570 |
Method for dynamically recording distortion in a transparency
A method for dynamically recording distortion in a transparency includes a support fixture for mounting the transparency for movement about a predetermined horizontal or vertical axis, with a...
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4131472 |
Method for increasing the yield of batch processed microcircuit semiconductor devices
An improvement in the process of manufacturing integrated circuits to enhance the yield, including the steps of tracking which of the individual dies on a photomask or related series of photomasks...
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4126395 |
Method for determining the spatial location of points on a specular surface
The spatial locations of points defining a specular surface are determined by disposing the specular surface in the field of view of a lens and by using the specular surface to view by reflection...
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4075011 |
Electrostatic powder coating method
In an electrostatic powder coating method for coating a plate with electrostatic coating powder after or before the plate is provided with marking lines by electrophotographic print marking...
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4023036 |
Apparatus and method for transverse tomography
An apparatus and method for generating a two-dimensional back-projected image of a slice of an object. In accordance with the invention there is provided a carrier means having a plurality of...
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RE29194 |
Method and apparatus for transferring data
A cartographic means and method employs two or more compound microscopes having optical paths combined through semireflective means. One of the microscopes has means for receiving an input record...
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3994723 |
Electrophotograhic process involving steps of subsequent discharge of areas receiving insufficient exposure
A process for producing an electrostatographic image wherein a uniformly charged photoconductive plate is exposed to a pattern of light and shadow to produce an electrostatic latent image, the...
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3977791 |
Method of recognition and interpretation of objects in microscopic observations
The invention contemplates a method of microscopic analysis of biological, metallurgical or other specimens, wherein an image copy of a comparison or reference object is used to produce a...
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3976380 |
Holographic arrangement for testing materials without destroying same
A method and apparatus for nondestructive testing of articles by holography in which light beams from a virtual point source of laser light and from an observation point are reflected by a...
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3975101 |
Method of determining operating condition of city street lighting units
Method for visually checking the lighted condition of a plurality of ground light sources, such as municipal street lighting, by taking a night aerial photograph of an optimum area when all ground...
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3969114 |
Method for monitoring copy quality
A copy quality sensor for a reproduction machine of the type having a photoconductive member on which latent images of the original being copied are electrostatically formed and thereafter...
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3964191 |
Apparatus for simultaneous viewing of both sides of webs of photographic paper or the like
Apparatus for simultaneous viewing of front and rear surfaces of webs of exposed and developed photographic paper has a frame which supports a rearwardly and upwardly inclined transparent pane...
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3953129 |
Testing and inspecting lens by holographic means
Processes for the accurate, rapid and inexpensive testing and inspecting of oncave and convex lens surfaces through holographic means requiring no beamsplitters, mirrors or overpower optics, and...
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3930735 |
Traffic survey system
This invention is of a traffic survey system in which an aerial photo survey transparency is first made of a significant survey area, for example, two kilometers square. The transparency is then...
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3884577 |
Methods and apparatus for object reproduction
Methods and apparatus for photographically-assisted reproduction of continuous line boundaries of three-dimensional objects are disclosed wherein cooperative parts of continuous line boundaries are...
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3879133 |
Method and apparatus for comparing two objects having similar shapes and dimensions
A method and apparatus for comparing two objects having similar shapes and dimensions wherein one of the objects is illuminated by a collimated light beam whose intensity is modulated in a...
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3857640 |
IDENTIFICATION MEANS FOR AN ARTICLE AND METHOD AND APPARATUS FOR RECORDING SAME
An identification means is disclosed for an article such as an engine wherein a member permanently attached to or integral with the article to be identified is broken so as to provide a...
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3804527 |
MEASUREMENT OF RADIATION CONFIGURATION FACTOR
Method of and apparatus for measuring thermal radiation geometric configuration factors -- any such factor being that fraction of the total radiant energy emitted from an energy-radiating surface...
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3768907 |
SCANNING APERTURE PARTIALLY COHERENT OPTICAL CORRELATOR
A partially coherent optical correlator of, for example, the frequency pl type, has a slit of adjustable width that moves rapidly in the spatial domain P1 to scan a portion of the input signal...
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3762818 |
CONTOUR MEASUREMENT APPARATUS
A technique for measuring the contour of a surface by generating a pattern of optical interference between a periodic shadow pattern cast onto the surface and a periodic reference pattern....
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3744911 |
HOLOGRAPHIC METHOD FOR INTERFEROMETRIC MEASUREMENT OF MATERIAL CORROSION AND EROSION ON ARBITRARY SURFACES
To measure the material removal or build up resulting from corrosion or erosion of an object, a hologram is formed by recording on a photographic media the interference pattern between coherent...
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3726594 |
IMAGE POSITIONING OPTICAL ARRANGEMENT IN PROJECTION PRINTING SYSTEM
In the projection printing system of the type in which the image of an original plate formed with a pattern is projected for printing on a photosensitive plate through a projection lens system, an...
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3721498 |
SYNTHESIZED HOLOGRAM FOR AN ARTIFICIAL OPTICAL TEMPLATE
The interference patterns that would be recorded on a hologram from a complexly shaped surface such as the surface of an optical element or jet turbine blade, or the like, is calculated in a...
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3716301 |
FINGERPRINT IDENTIFICATION APPARATUS
A coherent optical processor fingerprint identification apparatus in which identification is established by correlating an optical beam pattern representative of the finger to be identified with a...
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3711205 |
INSPECTION METHOD AND APPARATUS FOR DETECTING OVERSIZED APERTURES IN RELATIVELY THIN SHEETS OF OPAQUE MATERIAL
An inspection method and apparatus for detecting oversized apertures in thin sheets of opaque material utilizing a light source positioned in an encasement means having a floor and a plurality of...
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3706495 |
METHOD OF MEASURING THE VELOCITY OF A SMALL MOVING OBJECT
The velocity of a small moving particle is determined by allowing the particle to pass between a laser light source and a photographic film or plate. The laser is caused to illuminate the...
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3679901 |
DEVICE FOR SIMULTANEOUS RADIOGRAPHICAL AND PHOTOGRAPHICAL EXAMINATIONS ON THE EYE AND THE ORBITAL REGION
The invention concerns a device for the localization of intraocular foreign bodies and for exophthalmometry. The device can be mounted on any standard model of an X-ray stand usable for skull...
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3661465 |
METHOD AND AN ARRANGEMENT FOR RECOGNIZING AN OBJECT OR ITS POSITION AND ORIENTATION IN SPACE
A method and apparatus for determining the positional changes in the surface of an object by recording a real image and speckle pattern produced by focusing the radiation scattered by the object...
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