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7542140 |
Detection method using electromagnetic wave and detection apparatus
A detection apparatus includes a sample holding section, an irradiation means, a detection means, a calculation means, and an evaluation means. The irradiation means irradiates a substance held in...
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7476856 |
Sample dimension-measuring method and charged particle beam apparatus
A method and apparatus for efficiently executing two types of measurements with an optical measuring device and a scanning electron microscope are provided. For example, the method and apparatus...
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7446887 |
Matching optical metrology tools using hypothetical profiles
Optical metrology tools in a fleet of optical metrology tools can be matched using transforms. In particular, a first set of hypothetical profiles of one or more structures is obtained. The first...
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7446888 |
Matching optical metrology tools using diffraction signals
Optical metrology tools in a fleet of optical metrology tools can be matched using transforms. In particular, a first set of measured diffraction signals is obtained. The first set of measured...
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7368745 |
Pattern recognition system
A star pattern recognition system ( 1 ) comprises an optical filter arrangement ( 10 ) in the form of an array ( 12 ) of independently tiltable mirrors (M 1 ), (M 2 ). Light from a distant...
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7327476 |
Thin films measurement method and system
A method and system are presented for use in controlling the processing of a structure. First measured data is provided being indicative of at least one of the following: a thickness (d 2 ) of at...
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7307715 |
Method for the formation of a structure size measured value
The structure size of a structure ( 100 ) is measured by forming an auxiliary measured value (Dx′, Dy′). A calibration measured value (Px′, Py′) is determined on the basis of a calibration...
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6969836 |
Space carving for measurement of high-curvature areas on a mechanical part
A method of determining the leading edge (E) of a turbine blade or airfoil (P). The object is mounted in a desired position and backlit using a light source (S). The object and its leading edge are...
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6798515 |
Method for calculating a scale relationship for an imaging system
The disclosed methods and apparatuses leverage a known value of a characteristic of an object to partially calibrate an imaging system “on-the-fly”, and minimize, if not eliminate, the need for...
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6756241 |
Method of manufacturing semiconductor device and system for manufacturing the same
A manufacturing method of a semiconductor device to perform processing, including pre-processing and post-processing, on a semiconductor substrate, a characteristic of the processed semiconductor...
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6734970 |
Method and a device for determining the radiation-damage resistance of an optical material
A method and a device for determining the resistance of an optical material to radiation damage, wherein several sample volumes ( 1 a , 1 b ; 12 11 -12 33 ) within the optical material are...
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6704107 |
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
A method and apparatus for detection of a particular material, such as photoresist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced...
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6671423 |
Method of suppressing geometric distortion of an image space
A reference space includes a plurality of reference graphics. An image space is obtained by imaging the reference space. Affine transformation series are determined from the reference and image...
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6643017 |
Method and system for controlling the photolithography process
A method and measuring tool are presented for automatic control of photoresist-based processing of a workpiece progressing through a processing tool arrangement. Spectrophotometric measurements are...
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6603529 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates
An apparatus for processing substrates according to a predetermined photolithography process is presented. The apparatus includes a loading station in which the substrates are loaded, a coating...
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6545764 |
Non-contact topographical analysis apparatus and method thereof
Topographic analysis apparatus consists of a light source ( 1 ) and associated optics ( 2 ) for illuminating a mirrored surface O with a parallel light beam. Light reflected from the mirrored...
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6538739 |
Bubble diagnostics
The present invention is intended as a means of diagnosing the presence of a gas bubble and incorporating the information into a feedback system for opto-acoustic thrombolysis. In opto-acoustic...
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6512584 |
Quality control for laser peening
A method of testing the operation of a laser peening system includes providing a sensor in a possible laser beam path, applying a transparent overlay material to the sensor, directing a pulse of...
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6501549 |
Method of measuring chemical concentration based on spatial separation and resolution of luminescence
A method and associated apparatus for measuring chemical concentration in a liquid sample based on spatial separation and resolution of light is disclosed. The method is preferably applied to...
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6498648 |
Procedure for taking a reference measurement
Procedure for taking a reference measurement employing an optical device which comprises the following: an illuminating means having a source of radiation, its light being directed at a...
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6452677 |
Method and apparatus for detecting defects in the manufacture of an electronic device
The invention provides a unique method and apparatus for detecting defects in an electronic device. In one preferred embodiment, the electronic device is a semiconductor integrated circuit (IC),...
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6396942 |
Method and apparatus for locating ball grid array packages from two-dimensional image data
A ball grid array inspection and location method and apparatus includes a raw feature finding processor which uses a feature finding algorithm to find ball features (irrespective of number) and...
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6381013 |
Test slide for microscopes and method for the production of such a slide
A test slide for the calibration, characterization, standardization, use and study of photon and electron microscopes. The slide is created by forming patterns with specific types of geometries on...
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6373576 |
Method for measuring concentrations of dopants in a liquid carrier on a wafer surface
A method for non-destructively testing for the concentration of a component of a film that is used for doping a region of a semiconductor wafer uses an image histogram of the light reflected from...
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6336052 |
Data acquistion image analysis image manipulation interface
An interface apparatus for use with a computer system. The apparatus in the preferred embodiment having three concentric annular rings. The outer most of which is a solid ring, the two inner rings...
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6326606 |
Method and apparatus for checking shape
The level of a laser beam is controlled to the maximum level detectable by a sensor, and light transmitted through the pattern is normalized with branched light. The laser beam level is made up for...
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6314812 |
Apparatus and method for binocular measurement system
An apparatus and method are disclosed wherein a linear array of electromagnetic radiation emitting devices are arranged in association with a moving workpiece. Electromagnetic radiation emitted by...
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6271022 |
Device for incubating and monitoring multiwell assays
The present invention provides easy-to-use, adaptable, and convenient solutions to a heretofore unmet need for instruments that can incubate and kinetically monitor assays, especially multiwell...
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6222630 |
Measuring and compensating for warp in the inspection of printed circuit board assemblies
A system for inspecting potentially warped printed circuit board assemblies is disclosed. The system includes an inspection head with an axial, centrally located camera, and a laser disposed at an...
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6208418 |
Apparatus and method for measurement of the mechanical properties and electromigration of thin films
A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the...
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6184987 |
Process for detecting and correcting a misalignment between a fiber cable and a light source within a fiber module
A process for laser welding a ferrule of a fiber optic cable to a clip of a fiber module. The process can detect and correct a movement of the fiber optic cable so that the fiber is aligned with a...
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6157451 |
Sample CD measurement system
A sample CD measurement system adapted for measuring the CD of a measurement portion accurately even in the case where the shape of the measurement portion and the direction of measurement are...
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6134001 |
Fluid diagnostic technique
A non-obstructive fluid diagnostic technique is described which enables the measurement of different parameters in a fluid. The diagnostic technique includes the steps of focusing a laser (10) in a...
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6100970 |
Apparatus for inspecting slight defects on a photomask pattern
A photomask defect inspection method is provided by which defects of pin holes with the diameter equal to or less than 0.35 μm can be detected with certainty. According to the inspection method, a...
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6075607 |
Method for estimating durability of optical member against excimer laser irradiation and method for selecting silica glass optical member
A method is provided for estimating durability of an optical member against pulsed excimer laser beam irradiation. The method includes the steps of (a) irradiating a test sample for the optical...
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6075613 |
Optical scanner calibration device
An optical scanning system includes a power meter that during calibration operations is illuminated by an attenuated excitation beam. The power meter measures optical power in the attenuated...
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6069702 |
Method and apparatus configured for identification of a material
The present invention includes an apparatus configured for identification of a material, and methods of identifying a material. One embodiment of the invention provides an apparatus including a...
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6067163 |
Automated substrate pattern recognition system
The invention provides a process for evaluating a substrate, such as a wafer of semiconductive material having a semiconductor die at least partially formed thereon, as to the condition of an...
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6052193 |
Apparatus and method for inspecting loading state of wafers in carrier
A wafer loading-state inspection apparatus includes a transmissive wafer sensor including a light emitter and a light detector. The light emitter is spaced apart from the light detector in a...
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6040916 |
Process and apparatus for determining the condition of a road surface
In a process for determining the condition of a road surface, light is beamed onto the road surface and backscattered light is detected and spectrally analyzed. The light beam contains two light...
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6023335 |
Optoelectronic sensor
The invention relates to an optoelectronic sensor comprising a light transmitter for the transmission of light signals into a monitored region, and also a light receiver for the reception of light...
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6018394 |
Apparatus and method for imaging fired ammunition
An apparatus and method for imaging fired bullets and/or cartridges for forensic examination, which facilitate mounting of the ammunition to be imaged. The apparatus comprises a mounting support...
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6016201 |
Inspection method for a correction pattern
An inspection method for a correction pattern includes the following steps. An optical proximity correction is performed to an original pattern to obtain an optical proximity correction pattern. An...
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5995231 |
Method for calibrating a light traveling distance in a scanning module
The present invention provides a method for altering the light traveling distance in an optical scanning module using transparent glass. The optical scanning module comprises a transparent glass...
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5986764 |
Distance measurement device
A distance measurement device of the present invention detects a subject image with separation from the background and determines the distance to the subject regardless of backlit or forelit...
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5953112 |
Method and apparatus for evaluating the performance characteristics of endoscopes
In a method and apparatus for evaluating the performance characteristics of fiber-optic endoscopes, a beam of light defining a predetermined intensity pattern is transmitted through the endoscope...
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5933241 |
Laser calibration of IR sensors using pulsed signals
A calibration system in which calibration target illuminates the IR sensor with at least two distinct inputs spaced apart in time approximately equal to the time it takes the IR sensor to scan an...
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5926279 |
Test system for optical and electro-optical viewing systems
Test system for viewing systems, such as CCD cameras, infrared viewers, or binoculars or telescopes, which test system is provided with a test object having various component test objects to be...
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5917603 |
Wiper control apparatus
A wiper control apparatus of the water drop sensitive type for detecting of the amount of water or water drops adhering to or present upon the front surface of a windshield and for driving a wiper,...
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5857202 |
Comparing projectile shells
Digital data, each piece of data corresponding to a different criterion associated with an impression on a projectile, is stored in a database. A number of images of a target projectile are...
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