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7620276 |
Optimized grating based biosensor and substrate combination
A grating-based biosensor is disclosed where the biosensor is constructed and arranged such that the grating lines of the sensor align with an optical axis of a birefringent substrate, so as to...
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7619736 |
Apparatus and method for obtaining sample information by detecting electromagnetic wave
A sample information obtaining apparatus includes an electromagnetic wave generator; a sample holding unit which holds a sample to be tested and serves as a polarizer having a polarization axis...
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7617075 |
Library accuracy enhancment and evaluation
The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated...
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7616319 |
Spectroscopic ellipsometer and polarimeter systems
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system,...
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7616312 |
Apparatus and method for probing integrated circuits using laser illumination
An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized...
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7612880 |
Advanced polarization imaging method, apparatus, and computer program product for retinal imaging, liquid crystal testing, active remote sensing, and other applications
A method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate an average degree of polarization, a weighted average degree of...
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7612321 |
Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner
An optical coupling apparatus for a dual column charged particle beam tool allowing both optical imaging of an area of an integrated circuit, as well as localized heating of the integrated circuit...
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7602307 |
Portable modular detection system
Disclosed herein are portable and modular detection devices and systems for detecting electromagnetic radiation, such as fluorescence, from an analyte which comprises at least one optical element...
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7596422 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables
One or more profile parameters of a structure fabricated on a wafer in a wafer application are determined by developing a correlation between a set of profile models and one or more key profile...
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7595879 |
Optically measuring substances using propagation modes of light
This application describes designs, implementations, and techniques for controlling propagation mode or modes of light in a common optical path, which may include one or more waveguides, to sense a...
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7589303 |
Method of determining and/or evaluating a differential optical signal
The invention relates to a method for determining and/or evaluating a differential, optical signal. According to the invention, at least two first light sources (S 1 , S 2 ) which are sequentially...
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7586623 |
Optical metrology of single features
The profile of a single feature formed on a wafer can be determined by obtaining an optical signature of the single feature using a beam of light focused on the single feature. The obtained optical...
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7586607 |
Polarization imaging
A system and method for inspection a substrate for various defects is herein disclosed. Polarizing filters are used to improve the contrast of polarization dependent defects such as defocus and...
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7586605 |
Method for testing a polarization state, method for manufacturing a semiconductor device, and test substrate for testing a polarization state
A method for testing a polarization state of polarized light includes forming a test photosensitive film on a test wafer, the test wafer having a flat surface and a grid pattern in which...
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7583834 |
Laser etched fiducials in roll-roll display
The present invention relates to a method of aligning comprising providing a support, applying a transparent layer, patterning at least the transparent layer to produce a pattern and an alignment...
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7583392 |
Surface profile measuring apparatus
A surface profile measuring apparatus includes a light source assembly, a spatial light modulator, a spectroscope, a wave-front sensor, and a control-processing device. The light source assembly...
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7567351 |
High resolution monitoring of CD variations
An optical metrology method is disclosed for evaluating the uniformity of characteristics within a semiconductor region having repeating features such a memory die. The method includes obtaining...
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7567345 |
Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample
A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on...
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7565037 |
Reducing depolarisation
The present invention provides a method for reducing spreading of a pulse in a transmission line, said spreading being as a result of polarization mode dispersion, comprising inducing predetermined...
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7564552 |
Systems and methods for measurement of a specimen with vacuum ultraviolet light
Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a...
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7557919 |
Apparatus for detecting position of substrate, ellipsometer, and film thickness measuring apparatus
In an apparatus for detecting a position of a substrate in a film thickness measuring apparatus, an image pickup area on a substrate by an image pickup device of an imaging part is rotated by a...
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7557918 |
Spectral polarimetric image detection and analysis methods and apparatus
Apparatus and methods for detecting and analyzing spectral polarimetric images are disclosed. Spectral polarimetric images are detected by selecting spectral bands of light within light received...
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7554662 |
Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation
Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having a hole therethrough with a non-unity aspect ratio.
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7551281 |
Position sensor
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space,...
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7542136 |
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample...
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7541600 |
Lithographic and measurement techniques using the optical properties of biaxial crystals
A method and apparatus for accurately retrieving the position of an optical feature. The method uses the optical properties of biaxial crystals to conically refract the optical feature and...
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7535566 |
Beam chromatic shifting and directing means
An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a...
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7525657 |
System and method for active optical target detection with polarized receiver
A receiver including an analyzer and a detector coupled to the output of the analyzer. The analyzer selects a polarized component of a return beam for input to the detector. The analyzer may be...
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7518725 |
Temperature controlled lens
Quasi-achromatic multi-element lens(es), the elements of which are mounted with respect to one another in a temperature controlled mounting system, and the application thereof in focusing, (and/or...
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7518724 |
Image acquisition, processing, and display
Image data is acquired, processed, and/or displayed in accordance with an embodiment of the present disclosure to display, monitor, and/or demonstrate the progress of an experiment substantially in...
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7515266 |
System and method for enhancing confocal reflectance images of tissue specimens
A confocal scanning microscope system ( 10 ) using cross polarization effects and an enhancement agent (acetic acid) to enhance confocal microscope reflectance images of the nuclei of BCCs (basal...
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7515265 |
Imaging systems and methods to improve backscattering imaging using circular polarization memory
An optical technique to improve the imaging of a target inside suspensions of scattering particles includes the illumination of the scattering particles with circularly polarized light. The...
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7515253 |
System for measuring a sample with a layer containing a periodic diffracting structure
To measure the critical dimensions and other parameters of a one- or two-dimensional diffracting structure of a film, the calculation may be simplified by first performing a measurement of the...
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7508511 |
Method and apparatus for improved ellipsometric measurement of ultrathin films
A method for implementing ellipsometry for an ultrathin film includes directing a polarized light beam incident upon a sample surface, receiving an initial reflected beam from the sample surface...
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7505154 |
Optical method for the characterization of laterally patterned samples in integrated circuits
Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for...
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7505134 |
Automated ellipsometer and the like systems
Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.
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7505133 |
Optical metrology systems and methods
Metrology systems and methods that measure thin film thickness and or index of refraction of semiconductor wafers with at least one deposited or grown thin film layer. The present invention...
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7499162 |
Method and apparatus for observing and inspecting defects
A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the...
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7492455 |
Discrete polarization state spectroscopic ellipsometer system and method of use
A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed...
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7489400 |
System and method of applying xenon arc-lamps to provide 193 nm wavelengths
Application of Xenon arc-lamps to provide UV/deep UV wavelengths in spectrophotometer, reflectometer, ellipsometer, polarimeter or the like systems.
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7489399 |
Spectroscopic multi angle ellipsometry
An ellipsometer having a light source for generating a probe beam along a probe beam path. A polarizing beam splitter passes the probe beam along the probe beam path, at least in part, as the probe...
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7483148 |
Ellipsometric investigation of very thin films
Use of spectroscopic data obtained by investigation of a witness sample having a relatively thick dielectric on a surface thereof during deposition of a thin film onto the witness sample and onto a...
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7480050 |
Lithographic system, sensor, and method of measuring properties of a substrate
A sensor measuring properties of a substrate in which radiation is projected onto the substrate by a radiation projector that has a first part configured such that the radiation projection can...
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7480047 |
Time-domain computation of scattering spectra for use in spectroscopic metrology
In an embodiment, a method of time-domain simulation for simulating scattering spectra is described. The method may provide for computing spatial derivatives including computing spectral...
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7477388 |
Sample masking in ellipsometer and the like systems including detection of substrate backside reflections
A system and method of preventing substrate backside reflected components in a beam of electromagnetic radiation caused to reflect from the surface of a sample in an ellipsometer or polarimeter...
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7468794 |
Rotating compensator ellipsometer system with spatial filter equivalent
Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a...
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7465591 |
Evaluating a geometric or material property of a multilayered structure
A structure having a number of traces passing through a region is evaluated by using a beam of electromagnetic radiation to illuminate the region, and generating an electrical signal that indicates...
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7463369 |
Systems and methods for measuring one or more characteristics of patterned features on a specimen
Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light...
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7463355 |
Nondestructive optical technique for simultaneously measuring optical constants and thickness of thin films
Optical systems and methods that simultaneously measure optical constants (n, k) and thickness of thin films. The systems and methods use of differential polarimetry (differential analysis of...
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7460230 |
Deviation angle self compensating substantially achromatic retarder
A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems....
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