|
Match
|
Document |
Document Title |
|
|
7623238 |
System for and method of reducing change caused by motor vibrations in ellipsometers, polarimeters or the like
A system and method which reduces change in locus of a beam of electromagnetic radiation which otherwise result from vibrations caused by operation of a motor which controls the rotation of an...
|
|
|
7623236 |
Spectroscopic polarimetry
To effectively reduce a measurement error in a parameter indicating a state of spectroscopic polarization generated by variations in retardation of a retarder due to a temperature change or other...
|
|
|
7620276 |
Optimized grating based biosensor and substrate combination
A grating-based biosensor is disclosed where the biosensor is constructed and arranged such that the grating lines of the sensor align with an optical axis of a birefringent substrate, so as to...
|
|
|
7619747 |
Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device
An analyzer plate positioned between a projection system and a radiation sensor is illuminated by a projected beam of radiation. The analyzer plate includes two crossing regions, each of which...
|
|
|
7619738 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker...
|
|
|
7612880 |
Advanced polarization imaging method, apparatus, and computer program product for retinal imaging, liquid crystal testing, active remote sensing, and other applications
A method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate an average degree of polarization, a weighted average degree of...
|
|
|
7612879 |
Method and device for three-dimensionally determining the refractive index of transparent or partially transparent layers
The present invention relates to a method and a device for three-dimensionally determining the refractive index and, if necessary, the layer thickness of transparent or partially transparent layers...
|
|
|
7595885 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
A process monitoring system has a process chamber configured to hold an object to be processed, an illumination source configured to emit a light to the object, a polarizer configured to polarize...
|
|
|
7593102 |
Polarization evaluation mask, polarization evaluation method, and polarization determination device
A polarization evaluation mask for evaluating the state of polarization of an illumination light in exposure equipment comprises a transparent substrate; a light interceptor formed in said...
|
|
|
7586607 |
Polarization imaging
A system and method for inspection a substrate for various defects is herein disclosed. Polarizing filters are used to improve the contrast of polarization dependent defects such as defocus and...
|
|
|
7586606 |
Near-field polarized-light measurement apparatus
A near-field polarized-light measurement apparatus 10 comprises a near-field probe 14 , an analyzer 18 , a detector 22 , and an analyzer-rotating unit 20 . The near-field probe 14 has at a...
|
|
|
7586605 |
Method for testing a polarization state, method for manufacturing a semiconductor device, and test substrate for testing a polarization state
A method for testing a polarization state of polarized light includes forming a test photosensitive film on a test wafer, the test wafer having a flat surface and a grid pattern in which...
|
|
|
7586083 |
Laser sensor apparatus and method for detecting transmission shaft torque
Presented herein is a non-contact torque sensing apparatus and method for measuring the instantaneous torque, or torsional stress/strain, transmitted through an elongated power transmission member...
|
|
|
7583367 |
Catheter surgery simulation
It is possible to observe a state of stress applied to a region around a cavity replicating a body cavity such as a blood vessel and the like in a three-dimensional model. In catheter insert...
|
|
|
7582857 |
Sensor and polarimetric filters for real-time extraction of polarimetric information at the focal plane
A polarimetric imaging system employs a pixel pitch matched filter for use within, for example, a 2 by 2 pixel neighborhood, in which one pixel samples the scene via a 0 degree polarization filter...
|
|
|
7580122 |
Image inspection method by polarized compensation for deformation of lens
A lens inspection device and method are provided. The lens inspection method includes the steps of providing a collimating light beam, polarizing the collimating light beam by a polarizer to...
|
|
|
7567345 |
Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample
A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on...
|
|
|
7564553 |
Polarization evaluation mask, polarization evaluation method, and polarization determination device
A polarization evaluation mask for evaluating the state of polarization of an illumination light in exposure equipment comprises a transparent substrate; a light interceptor formed in said...
|
|
|
7564552 |
Systems and methods for measurement of a specimen with vacuum ultraviolet light
Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a...
|
|
|
7564541 |
System for obtaining images in bright field and crossed polarization modes and chemical images in raman, luminescence and absorption modes
An integrated system including one or more light sources, at least one processor, an optical lens, a two-dimensional tunable filter, one or more two-dimensional array of detection elements and...
|
|
|
7551281 |
Position sensor
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space,...
|
|
|
7551280 |
Method for manufacturing optical element, method for manufacturing projector, optical element and projector
A method for manufacturing an optical element in which a display quality of a projection image is improved is provided. The method is for manufacturing an optical element having a polarization...
|
|
|
7548315 |
System and method to compensate for critical dimension non-uniformity in a lithography system
A system and method are used to compensate for critical dimension non-uniformity caused by different polarization directions in an illumination beam. A system comprises a source of radiation and an...
|
|
|
7541600 |
Lithographic and measurement techniques using the optical properties of biaxial crystals
A method and apparatus for accurately retrieving the position of an optical feature. The method uses the optical properties of biaxial crystals to conically refract the optical feature and...
|
|
|
7538876 |
Efficient and accurate alignment of stereoscopic displays
A method and apparatus for aligning the left and right image channels a two-image stereoscopic three-dimensional display is disclosed. A left and right alignment pattern may be shown on the...
|
|
|
7538875 |
Lithographic apparatus and methods for use thereof
A method for determining a polarization state of light passed through the projection lens of a lithographic apparatus is described. Polarizing structures are disposed on an object side of the...
|
|
|
7538334 |
Devices and methods for targeting printing plates and measuring dot coverage thereon
An apparatus, system and method for targeting an image formed on an imaging member. The imaging member includes an imaging sensitive layer formed thereon. The imaging member includes imaged and...
|
|
|
7535640 |
Imaging system for emulation of a high aperture scanning system
An optical imaging system for inspection microscopes with which lithography masks can be checked for defects particularly through emulation of high-aperture scanner systems is provided. The imaging...
|
|
|
7535566 |
Beam chromatic shifting and directing means
An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a...
|
|
|
7532325 |
Method and apparatus for the separation of fluoroscence and elastic scattering produced by broadband illumination using polarization discrimination techniques
An apparatus for separating fluorescent light from light elastically scattered/reflected from a material illuminated with a broadband illumination source includes a polarization discriminator,...
|
|
|
7528952 |
Hand-held fluorescence polarimeter
A small, portable, hand-sized apparatus for detecting microorganisms or chemicals in liquid samples by fluorescence polarization. The apparatus operates using a low power excitation light source,...
|
|
|
7525657 |
System and method for active optical target detection with polarized receiver
A receiver including an analyzer and a detector coupled to the output of the analyzer. The analyzer selects a polarized component of a return beam for input to the detector. The analyzer may be...
|
|
|
7525656 |
Exposure apparatus and device fabrication method
An exposure apparatus includes a reticle stage for supporting a reticle, an illumination optical system for illuminating the reticle, a projection optical system for projecting an image of a...
|
|
|
7522825 |
Method and device for skin cancer screening
A method for providing a preliminary diagnosis of skin cancer, more specifically a screening risk assessment of pigmented lesions receiving digital photographs of skin abnormalities from a...
|
|
|
7522785 |
Measurements of polarization-dependent loss (PDL) and degree of polarization (DOP) using optical polarization controllers
Devices and techniques that use a polarization controller and a feedback control to the polarization controller to systematically control the polarization of light output from the polarization...
|
|
|
7522279 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal...
|
|
|
7522278 |
Real-time linear-birefringence-detecting polarization microscope
Various embodiments of the present invention are directed to real-time capture, analysis, and output of polarizing microscopy images that quantify detected LB signals at discrete locations within...
|
|
|
7518725 |
Temperature controlled lens
Quasi-achromatic multi-element lens(es), the elements of which are mounted with respect to one another in a temperature controlled mounting system, and the application thereof in focusing, (and/or...
|
|
|
7515265 |
Imaging systems and methods to improve backscattering imaging using circular polarization memory
An optical technique to improve the imaging of a target inside suspensions of scattering particles includes the illumination of the scattering particles with circularly polarized light. The...
|
|
|
7511815 |
Device and method for measuring optical parameters of liquid crystal display
A device for measuring an optical property of a liquid crystal display is provided. The device has a light source providing a light, a first polarizer pervious to the light, a second polarizer...
|
|
|
7508510 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least...
|
|
|
7504641 |
Polarisation fluorometer
A polarization fluorometer and a method for calibrating such a fluorometer. The fluorometer includes an excitation channel with an excitation polarizer for generating light polarized in a first...
|
|
|
7502111 |
Differential optical technique for chiral analysis
A differential method has been developed which determines displacement from the midpoint of optical transmission (±45°) and utilizes the coupled nature of the two signals for common mode noise...
|
|
|
7502100 |
Three-dimensional position measurement method and apparatus used for three-dimensional position measurement
In three-dimensional measurement where circular polarized light or elliptical polarized light is projected as measurement light, correct measurement results can be obtained irrespective of the...
|
|
|
7495765 |
Fiber polarimeter, the use thereof, as well as polarimetric method
A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending...
|
|
|
7495764 |
Coherent radar and ladar polarimeter
A polarimeter includes a receiver that is configured to receive a first polarization (P 1 ) of the signal and to split the first polarization of the signal into the in-phase (I P1 ) and quadrature...
|
|
|
7492455 |
Discrete polarization state spectroscopic ellipsometer system and method of use
A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed...
|
|
|
7486897 |
Polarization duobinary optical transmitter
A polarization duobinary optical transmitter is disclosed. The transmitter includes a precoder for coding an electric signal and a light source for generating continuous light. The transmitter also...
|
|
|
7480050 |
Lithographic system, sensor, and method of measuring properties of a substrate
A sensor measuring properties of a substrate in which radiation is projected onto the substrate by a radiation projector that has a first part configured such that the radiation projection can...
|
|
|
7480049 |
Circular dichroism detection system
A detection system includes a modulator to apply a circular polarization modulation to an incident beam of radiation, a sample holder through which the modulated beam is pass, a grating to diffract...
|