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7622728 |
Device for optoelectronic monitoring of objects and detecting of light beams scattered at a faceplate
A device for optoelectronic monitoring of an object ( 26 ) contains a transmitting unit ( 12 ) and a receiving unit ( 14 ) that are located in a housing ( 10 ) covered by a faceplate ( 16 ). The...
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7616299 |
Surface inspection method and surface inspection apparatus
When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes...
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7589836 |
Optoelectronic sensor device
An optoelectronic sensor device is described for recording of soiling on a transparent cover, with at least one light source that emits at least two light beams, a test surface arranged in the...
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7577353 |
Device and method for optically inspecting a surface
The invention generally relates to a compact, inexpensive-to-manufacture, device of few components for optically inspecting a surface and a method for same employing the device. The section of the...
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7573576 |
Optical sensor device
An optical sensor device includes a photoconductor structure having first and second partial members ( 16, 18 ) and a coupling surface ( 20 ) for coupling the optical sensor device to an opposing...
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7567344 |
Apparatus and method for characterizing defects in a transparent substrate
An apparatus and method for detecting defects in a transparent substrate by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The...
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7518718 |
High throughput inspection system and a method for generating transmitted and/or reflected images
Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of...
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7511807 |
Method and apparatus for detection of inclusion in glass
Inclusions in a transparent panel ( 5 ) are detected by placing a light transmissive interface ( 3 ) in contact with the panel ( 5 ), and transmitting a beam of light ( 1 ) through interface ( 3 )...
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7505619 |
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each...
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7486403 |
Droplet shape measuring method and apparatus
In order to accurately measure a shape feature of a minute droplet arranged on a substrate by a simple method, with respect to the droplet, the substrate is perpendicularly irradiated with laser...
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7465948 |
Sheet-surface analyser and method of analysing a sheet-surface
The present invention relates to a sheet-surface analyser ( 10 ) including illuminating means ( 32 ) for casting shadows on the sheet-surface; capturing means ( 36 ) for capturing an image of the...
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7355694 |
Method and apparatus for measuring a particle diameter of foam on a malt alcoholic drink
A method and apparatus for measuring the particle diameter of foam on a malt alcoholic drink, which can detennine the quality of the foam of the malt alcoholic drink objectively, are provided. The...
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7349082 |
Particle detection device, lithographic apparatus and device manufacturing method
To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an...
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7339664 |
System and method for inspecting a light-management film and method of making the light-management film
A method of inspecting a light-management film comprises reflecting light from an overhead light source off a first side of the light-management film and examining the light-management film for...
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7307714 |
Apparatus and process for detecting inclusions
Disclosed are process and apparatus for inspecting internal inclusions in internally transmissive substrates. The process involves applying a black coating to one major surface of the substrate,...
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7301619 |
Evaluating a multi-layered structure for voids
A method and apparatus measure properties of two layers of a damascene structure (e.g. a silicon wafer during fabrication), and use the two measurements to identify a location as having voids. The...
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7289655 |
Device for inspecting illumination optical device and method for inspecting illumination optical device
The invention provides a device to inspect an illumination optical device and a method to inspect an illumination optical device that make it possible to efficiently inspect illumination optical...
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7286220 |
Test piece for optoelectronic image analysis systems
A test piece for an optoelectronic image analysis systems is disclosed. One embodiment has a planar substrate, on which a plurality of geometrical patterns of differing shapes and/or sizes are...
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7256884 |
Particle detecting system and method of detecting particles using the same
There is provided a particle detector system and to detect particles on target including reticle and pellicle. The system includes a light transmitting device adapted to transmit light beam to a...
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7245367 |
Method and apparatus for detecting contaminants on a window surface of a viewing system utilizing light
A method of detecting contaminants on a window surface of a viewing system comprises the steps of: reflecting light off of contaminants on the window surface; capturing the reflected light in an...
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7242797 |
Method and apparatus for mapping defects on the light transmissive support surface of a document scanning or photocopying device
The invention is directed to a method and apparatus for mapping defects on a light transmissive support surface of a document scanning or photocopying device. The method includes a step of cleaning...
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7215807 |
Nondestructive inspection method and apparatus
The present invention relates to a method for inspecting a crack in a metal surface or the like, and, particularly, to an inspection method and apparatus for nondestructive inspection such as...
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7193697 |
Apparatus for feature detection
An apparatus for feature detection of a test object includes at least one light source module and at least one image capturing unit. The light source module provides light to illuminate a test...
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7187440 |
Holographic sensor, especially for recognition of moisture on a glass pane of a motor vehicle
A holographic sensor for recognizing moisture on a glass pane of a motor vehicle is provided, having a casing, a carrier layer, a diffractive element and an adhesive layer, the diffractive element...
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7173270 |
Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same.
A lithographic apparatus transfers a pattern from a patterning device onto a substrate and includes a projection system to project a patterned radiation beam onto the substrate; a controllable...
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7064822 |
Evaluating a multi-layered structure for voids
A method and apparatus measure properties of two layers of a damascene structure (e.g. a silicon wafer during fabrication), and use the two measurements to identify a location as having voids. One...
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7065240 |
Reticle inspection apparatus
A reticle inspection apparatus for detecting defects on a reticle 16 includes an image data generator 42 for generating image data of the reticle 16 , a definition analyzer 44 for analyzing...
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7034932 |
Deposit detector and controller using the detector
The present invention provides an object-sensing device capable of estimating the presence of an object attached on a sensing surface, the kind of the object and the state of the object. An image...
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7002480 |
Deposit detector and control device using it
A deposit detector in which deposit on a detection surface has a surface shape effect, and generation of a flashing phenomenon caused by irregular reflection of the light incident on the deposit...
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6975391 |
Method and apparatus for non-destructive testing
Using an image signal acquired by picking up a sample to be inspected by a color video camera, penetrant inspection and magnetic-particle inspection, which are non-destructive inspections, are...
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6781684 |
Workpiece levitation using alternating positive and negative pressure flows
A support structure utilizes a combination of positive pressure openings and negative pressure openings to precisely position a workpiece, such as a sheet of float glass. The positive pressure...
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6770862 |
Scalable wafer inspection
An imaging system for detecting defects on a substrate. Sensor module ports are disposed on an imaging platform. Sensor modules are removably connected to the sensor module ports, and are adapted...
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6690841 |
Method and apparatus for image registration
A machine vision system includes an apparatus for registering an input image of an object, such as an aircraft engine blade, to a reference image comprising ideal specifications for the object in...
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6618136 |
Method and apparatus for visually inspecting transparent body and translucent body
A system and method of visually inspecting a transparent body and a translucent body comprises applying light to a reverse surface of an object to be inspected by a transmission light source, and...
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6577389 |
System and methods for inspection of transparent mask substrates
A method for detecting an anomaly on a first surface of a transparent substrate starts with providing a transparent substrate that has a reflective second surface. The method then comprises...
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6570999 |
Soil particle and soil analysis system
A soil analysis system for determining one or more categories of soil based upon the particle sizes in a soil sample. The soil analysis system includes an image sensor and an image analysis...
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6555804 |
Method and device for detecting objects on a windshield
The invention relates to a method and device for detecting objects ( 3 ) on a windshield ( 2 ). The method comprises the following steps: Placing an optical sensor array ( 4 ) on the inner side of...
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6549278 |
Contaminant inspecting device with multi-color light source
A contaminant inspecting device with multi-color light source comprises a support, a house mounted on the support, a transparent cover mounted on the house, a rotatable frame pivotally connected to...
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6528334 |
Semiconductor inspection system, and method of manufacturing a semiconductor device
There are described a semiconductor inspection system for inspecting recessed defects formed in a semiconductor wafer and a semiconductor device manufacturing method including an inspection step of...
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6508990 |
Substrate treating method and apparatus
A substrate treating method and apparatus which can perform in-situ monitoring of surface state of a semiconductor substrate. The substrate treating apparatus comprises substrate treating means for...
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6458213 |
Method and device for automatic cleaning of opto-electronic sensor systems for substance analysis
The invention concerns a method and device for automatic cleaning of opto-electronic measuring systems used in process-technology for the analysis of substances in liquids and gases by means of...
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6429933 |
Method of image processing for off the glass rain sensing
An assembly ( 10 ) for sensing moisture ( 20 ) on the exterior surface ( 22 ) of a windshield ( 14 ) from a position spaced from the interior surface ( 18 ) of the windshield ( 14 ). The assembly (...
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6404490 |
Method for detecting and localizing diffuse reflecting coatings situated on a translucent pane
The invention relates to a method and device for detecting and localizing diffuse-reflecting coatings situated on a translucent pane. The aim of the invention is to make it possible to detect any...
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6396579 |
Method, apparatus, and system for inspecting transparent objects
In an inspection method for a transparent object, a transparent object is irradiated with light from a light source, and the surface or interior of the transparent object is inspected by observing...
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6226080 |
Method for detecting defect of transparent body, method for producing transparent body
Defect of an acrylic plate is detected such that a light beam, which dominantly includes non-parallel rays not parallel to a principal surface of the acrylic plate, is introduced through a side...
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6208750 |
Method for detecting particles using illumination with several wavelengths
A process is provided for detecting small particles on wafer surfaces by irradiating the wafer surface with two light beams having a small difference in wavelength, collecting the light scattered...
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6204918 |
Apparatus for surface inspection
An apparatus for surface inspection according to the invention comprises an irradiating optical system for throwing an irradiating light beam from a light source onto the surface of an object of...
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6184976 |
Apparatus and method for measuring an aerial image using transmitted light and reflected light
Apparatus and method for measuring an aerial image whereby influences of various defects existing on patterns formed on a photomask as well as the surface of the photomask substrate can be...
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6175645 |
Optical inspection method and apparatus
A method and an apparatus for an optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object. First and second beams of an incident radiation are...
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6169601 |
Method and apparatus for distinguishing particles from subsurface defects on a substrate using polarized light
Particles are distinguished from pits, voids, scratches, and other subsurface defects in a surface of a substrate by impinging the defect with polarized light and integrating light scattered by the...
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