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7631999 |
Line light irradiation device
In order to provide a line light irradiation device that can improve efficiency of condensing light with a compact size and that is almost free from unevenness of lighting, the line light...
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7630079 |
Equipment and method for measuring transmittance of photomask under off axis illumination
Provided are equipment and a method for measuring a transmittance of a photomask. The system includes an acoustic optical deflector (AOD) substrate interposed between a light source and the...
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7630068 |
Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same
Defect detection is performed with two settings, that is, setting of a focus position where a signal intensity obtained from a dot pattern is maximum and setting of a focus position where a signal...
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7623229 |
Systems and methods for inspecting wafers
Systems and methods for inspecting wafers are provided. One system includes a detection subsystem configured to separately and simultaneously detect light scattered from different portions of a...
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7619729 |
Method for detecting particles and defects and inspection equipment thereof
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate...
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7619730 |
Mask inspection DNIR replacement based on location of tri-tone level database images—2P shapes
Methods, systems, program storage devices and computer program products for mask inspection that automate the detection and placement of do not inspect regions (“DNIR”) for intentionally...
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7601954 |
Method and apparatus for reviewing defects
A method and an apparatus for reviewing defects detected by an optical particle inspection system or an optical profile inspection system in detail by an electron microscope are provided. In order...
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7602483 |
Device for dark field illumination and method for optically scanning of object
The invention relates to a device for dark-field illumination for an optical testing device for scanning a plane surface of an object together with a method for optical scanning of a plane surface...
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7599051 |
Calibration of a substrate inspection tool
A method for calibration of a substrate inspection tool is disclosed. The tool is used to inspect a standard substrate having simulated contamination defects with known characteristics. Performance...
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7599053 |
Pattern defect inspection method, photomask manufacturing method, and display device substrate manufacturing method
A defect inspection method is adapted to inspect a defect generated in a main pattern of a photomask. The main pattern includes a repetitive pattern in which unit patterns are periodically...
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7595869 |
Optical metrology system optimized with a plurality of design goals
Provided is a method of designing an optical metrology system for measuring structures on a workpiece where the optical metrology system is configured to meet a plurality of design goals. Primary...
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7592616 |
Detecting micropipes
An automated, non-invasive method for classifying, detecting, and counting micropipes contained within silicon wafers, and generally any assortment of transparent wafers. Classifying, detecting,...
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7586595 |
Method of scanning and scanning apparatus
A method of scanning an information recording medium and a scanning apparatus for an information recording medium that uses the method scan for defects in respective resin layers of an information...
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7586599 |
Method and system for detecting defects
A method for defect detection includes: (i) scanning at least one wafer by a monitoring system and providing defect size information for each defect that belongs to a group of defects; (ii)...
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7586608 |
Wafer-level testing of optical and optoelectronic chips
This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.
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7583833 |
Method and apparatus for manufacturing data indexing
A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as...
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7580124 |
Dual stage defect region identification and defect detection method and apparatus
A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive...
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7570354 |
Image intensification for low light inspection
An optical inspection system for inspecting a substrate. A beam source produces a light beam and directs it toward a surface of the substrate, thereby producing a reflected light beam that is...
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7570797 |
Methods and systems for generating an inspection process for an inspection system
Methods and systems for generating an inspection process for an inspection system are provided. One computer implemented method includes generating inspection data for a selected defect on a...
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7561263 |
Apparatus for illuminating and inspecting a surface
The present invention relates to an apparatus for illuminating and inspecting a specular surface, comprising a light source, a collector optics for collecting the light from the light source, a...
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7554655 |
High throughput brightfield/darkfield water inspection system using advanced optical techniques
The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield...
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7554654 |
Surface characteristic analysis
In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface...
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7551273 |
Mask defect inspection apparatus
The mask defect inspection apparatus including an illumination optical system for illuminating a mask on which a pattern is formed; an objective lens facing the mask; at least a pair of detection...
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7542134 |
System, method and apparatus for in-situ substrate inspection
A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of...
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7542136 |
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample...
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7535561 |
Defect inspecting apparatus
A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection...
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7528943 |
Method and apparatus for simultaneous high-speed acquisition of multiple images
A method and apparatus for simultaneous high-speed inspection and acquisition of multiple data channels is provided. The method and apparatus enables inspecting semiconductor wafers and reticles...
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7528942 |
Method and apparatus for detecting defects
A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an...
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7525634 |
Monitoring apparatus and method particularly useful in photolithographically
Apparatus for processing substrates according to a predetermined photolithography process includes a loading station in which the substrates are loaded, a coating station in which the substrates...
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7515258 |
Semiconductor device, and method and apparatus for inspecting appearance thereof
A semiconductor device includes a first wiring layer having a first wiring, a second wiring layer having a second wiring formed over the first wiring layer, and a first insulating layer interposed...
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7511806 |
Apparatus and method for inspecting defects
A defect-inspecting apparatus including an arrangement to convert detected light into a first signal corresponding to light illuminated by a high-angle illumination optical system and/or a second...
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7508504 |
Automatic wafer edge inspection and review system
A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights...
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7499157 |
System for monitoring foreign particles, process processing apparatus and method of electronic commerce
A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the...
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7499156 |
Closed region defect detection system
A method and apparatus for inspecting specimens or patterned transmissive substrates, such as photomasks, for unwanted particles and features, particularly those associated with contacts, including...
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7492451 |
Simultaneous multi-spot inspection and imaging
A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a...
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7489393 |
Enhanced simultaneous multi-spot inspection and imaging
A system and method for inspection is disclosed. The design includes focusing illumination beams of radiation at an optical axis to an array of illuminated elongated spots on the surface at oblique...
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7486392 |
Method of inspecting for defects and apparatus for performing the method
In a method of inspecting an object, a first light is irradiated onto a bare object and a first reflection signal is reflected from the bare object. A second light is irradiated onto a processed...
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7486391 |
System and method for haze control in semiconductor processes
A method for haze control on a semiconductor reticle, the method including performing a reticle inspection of a semiconductor reticle to detect haze formation on a periodic basis, performing a...
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7483127 |
Method and apparatus for generating an image of biomolecular sensor target area
Method and apparatus for imaging a target area. Apparatus comprises an adjustable light emitting device that provides a light beam with a user defined spectrum. A filter mechanism receives the...
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7483804 |
Method of real time dynamic CD control
A method of real time dynamic CD control in a system for patterning resist coated wafers. The method includes lithographically patterning the resist coated wafers using predetermined exposure dose...
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7483128 |
Foreign matter inspection apparatus and method
An apparatus for inspecting foreign matter on substrates on which circuit patterns, such as reticles or masks, are formed, reduces false detection due to scattered/diffracted light from circuit...
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7474394 |
Apparatus of inspecting defect in semiconductor and method of the same
When size of a defect on an increasingly miniaturized pattern is obtained by defect inspection apparatus in the related art, a value is inconveniently given, which is different from a measured...
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7471382 |
Surface inspection system with improved capabilities
Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick...
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7466405 |
Pattern inspection method, pattern inspection system and pattern inspection program of photomask
An image of an inspection object pattern formed on a photomask is acquired, which is to be transformed into inspection object pattern data as input data of light intensity distribution simulation...
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7463351 |
Process and assembly for non-destructive surface inspection
An optical system for detecting defects on a wafer that includes a device for producing a beam and directing the beam onto the wafer surface, producing an illuminated spot on the wafer's surface....
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7463350 |
Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal
Disclosed is a method and apparatus for inspecting defects of patterns of a sample at high speed and with high sensitivity while damage of the sample arising from high-power pulsed light is...
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7463352 |
Method and apparatus for article inspection including speckle reduction
A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a...
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7460221 |
Method and system for detecting defects
System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of...
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7453561 |
Method and apparatus for inspecting foreign particle defects
The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a...
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7443497 |
Mask inspection DNIR placement based on location of tri-tone level database images (2P shapes)
Methods, systems, program storage devices and computer program products for mask inspection that automate the detection and placement of do not inspect regions (“DNIR”) for intentionally...
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