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7636649 |
Automated process control of a fabrication tool using a dispersion function relating process parameter to dispersion
An optical metrology model for the structure is obtained. The optical metrology model comprising one or more profile parameters, one or more process parameters, and a dispersion. A dispersion...
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7631999 |
Line light irradiation device
In order to provide a line light irradiation device that can improve efficiency of condensing light with a compact size and that is almost free from unevenness of lighting, the line light...
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7622728 |
Device for optoelectronic monitoring of objects and detecting of light beams scattered at a faceplate
A device for optoelectronic monitoring of an object ( 26 ) contains a transmitting unit ( 12 ) and a receiving unit ( 14 ) that are located in a housing ( 10 ) covered by a faceplate ( 16 ). The...
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7619729 |
Method for detecting particles and defects and inspection equipment thereof
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate...
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7602482 |
Optical inspection method and optical inspection apparatus
An optical inspection apparatus irradiates a light beam onto the outer surface of an object to be inspected, in the form of an illumination spot having an illumination intensity which is higher in...
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7586595 |
Method of scanning and scanning apparatus
A method of scanning an information recording medium and a scanning apparatus for an information recording medium that uses the method scan for defects in respective resin layers of an information...
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7576850 |
In-process vision detection of flaws and FOD by back field illumination
A flaw and foreign object debris (FOD) detection system ( 11 ) for use during fabrication of a structure ( 12 ) includes an illumination device ( 13 ). The illumination device ( 13 ) is configured...
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7577353 |
Device and method for optically inspecting a surface
The invention generally relates to a compact, inexpensive-to-manufacture, device of few components for optically inspecting a surface and a method for same employing the device. The section of the...
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7567343 |
Method and apparatus for detecting defects on a wafer
As circuit patterns become finer in recent years, improvement in detection sensitivity of defects is required. To answer this, sensitivity is being enhanced using a laser with a wavelength of the...
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7557913 |
Optical apparatus for defect inspection
An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical...
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7554654 |
Surface characteristic analysis
In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface...
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7542134 |
System, method and apparatus for in-situ substrate inspection
A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of...
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7538866 |
Optical sensor and method for optically inspecting surfaces
In one aspect, an optical sensor is used to detect defects, which can appear on smooth surfaces, is provided. The sensor includes a telecentric laser scanner and a detection unit. The scanner...
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7535561 |
Defect inspecting apparatus
A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection...
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7528942 |
Method and apparatus for detecting defects
A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an...
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7525634 |
Monitoring apparatus and method particularly useful in photolithographically
Apparatus for processing substrates according to a predetermined photolithography process includes a loading station in which the substrates are loaded, a coating station in which the substrates...
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7518717 |
Exposure apparatus and a device manufacturing method using the same
A scanning type exposure apparatus includes a projection optical system which projects a pattern of a reticle onto a wafer, which is held by a wafer chuck, a scanning stage system which scanningly...
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7505619 |
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each...
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7499157 |
System for monitoring foreign particles, process processing apparatus and method of electronic commerce
A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the...
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7495758 |
Apparatus and methods for two-dimensional and three-dimensional inspection of a workpiece
Apparatus and methods for inspecting a workpiece are provided. According to one embodiment, a method for inspecting a workpiece comprises illuminating at least a portion of the workpiece with at...
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7486392 |
Method of inspecting for defects and apparatus for performing the method
In a method of inspecting an object, a first light is irradiated onto a bare object and a first reflection signal is reflected from the bare object. A second light is irradiated onto a processed...
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7477373 |
Surface inspection method and surface inspection device
A surface inspection method for projecting a laser beam to an inspection surface and for scanning and detecting foreign objects or the like on the inspection surface, comprising a step of being had...
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7466404 |
Technique for diagnosing and screening optical interconnect light sources
A method for testing a substrate by using a photoemission microscope is provided which includes providing the substrate and applying a reverse bias voltage to the substrate. The method further...
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7465935 |
Method for inspecting pattern defect and device for realizing the same
When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by...
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7463352 |
Method and apparatus for article inspection including speckle reduction
A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a...
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7453561 |
Method and apparatus for inspecting foreign particle defects
The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a...
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7443500 |
Apparatus for scattered light inspection of optical elements
An apparatus for scattered light inspection of optical elements, having a light-generating unit ( 2 ) for generating light that is irradiated onto the optical element ( 9 ) respectively to be...
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7440092 |
Method and apparatus for detecting defects
A method and apparatus for detecting a defect in which image signals of a same area of a sample are obtained by imaging the sample under different optical conditions, and the obtained image signals...
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7433033 |
Inspection method and apparatus using same
The invention relates to a method and device of inspecting contamination particles on an object comprising a patterned structure. The device includes a radiation system for directing a radiation...
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7433031 |
Defect review system with 2D scanning and a ring detector
A defect review system includes a stage, a light source, a turning mirror, and a ring of collectors. The stage supports and moves an article for inspection, the article having a surface. The light...
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7424828 |
Device for detecting a cracked substrate
A substrate detection system is disclosed to include a conveyer that delivers the substrates, a sensor that detects the length of each substrate being delivered by the conveyer over the top side of...
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7424902 |
In-process vision detection of flaw and FOD characteristics
An inspection system ( 9 ) includes an idler wheel ( 61 ) that is coupled to a fabrication system ( 8 ) and is in contact with a backing layer ( 65 ) of an applied material ( 64 ). A rotation...
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7403279 |
Information recording medium examining apparatus and method
In an examining apparatus, an electron gun irradiates an intended position of an information recording medium with an electron beam. A stage holds the information recording medium such that the...
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7394535 |
Optical metrology using a photonic nanojet
An inspection area on a semiconductor wafer can be examined using a photonic nanojet. The photonic nanojet, an optical intensity pattern induced at a shadow-side surface of a dielectric...
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7388659 |
Particle inspection apparatus and method, exposure apparatus, and device manufacturing method
An inspection apparatus for inspecting a surface of an object for a particle. The apparatus includes an irradiator configured to irradiate the surface with inspection light, a first detector...
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7383156 |
Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface
It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11 , by providing a means 21 for detecting aggregation of...
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7375362 |
Method and apparatus for reducing or eliminating stray light in an optical test head
An optical test head comprises one or more optical input paths by which a beam of light is communicated from a light source to a workpiece and one or more optical output paths by which light...
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7372062 |
Defect inspection device and substrate manufacturing system using the same
A defect inspection device which inspects for surface defects in substrates, and which includes an illumination section that irradiates the substrate with illumination light having a variable...
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7369223 |
Method of apparatus for detecting particles on a specimen
An apparatus for inspecting a pattern to detect a small pattern defect has an illuminating light source, as illuminating optical system having a plurality of illuminating portions for switching an...
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7365835 |
Dark-field laser-scattering microscope for analyzing single macromolecules
To further isolate the scattered light 112 of a specific particle from the scattered light of a different particle, a pin hole device 116 can be used. The pin hole device 116 prevents...
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7352890 |
Method for analyzing circuit pattern defects and a system thereof
A system for analyzing defects in electronic circuit patterns, including: comparing position information of structural defects with position information of electrical faults and extracting...
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7330265 |
Appearance inspection apparatus and projection method for projecting image of sample under inspection
An object of the present invention is to provide an appearance inspection apparatus that can change the method of illumination, the shape of illumination light, and a spatial filter for the...
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7324193 |
Measuring a damaged structure formed on a wafer using optical metrology
A method of measuring a damaged structure formed on a semiconductor wafer using optical metrology, the method includes obtaining a measured diffraction signal from a damaged periodic structure. A...
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7315364 |
System for inspecting a surface employing configurable multi angle illumination modes
Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal...
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7295302 |
Use of laser reflection pickup unit for detection of small particles on a relatively smooth and reflective surface
A method and apparatus for detecting stray particles upon a relatively smooth surface by measuring the amount of collimated light reflected from the surface from clear areas of the surface and from...
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7286219 |
Exposure system, semiconductor device, and method for fabricating the semiconductor device
In order to link a defect inspection process before forming contact holes with an exposure process for forming the contact holes, a position (physical coordinates) of a defect on a wafer is stored,...
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7280200 |
Detection of a wafer edge using collimated light
A system and method of inspecting a semiconductor wafer that may be employed to detect and to characterize defects occurring on an edge of the wafer. The wafer inspection system includes an optical...
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7277164 |
Process and station for inspecting the painting of motor vehicle bodywork parts
A method for inspecting the painting of bodywork parts using an optical measurement instrument that is moved parallel to the parts being inspected. An inspection station for implementing the method.
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7268865 |
Method of detecting foreign objects for display panel fabrication
A method of detecting foreign objects in display manufacturing process, wherein the method comprising steps as flows: First a laser source and a laser detector are provided on a first side of a...
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7245365 |
Apparatus and method for detecting particles on an object
An apparatus for detecting particles located on an object includes an emitter for irradiating lights to the particles. The object is disposed on a stage in a direction substantially parallel to a...
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