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7312866 Methods and systems for substrate surface evaluation  
A method for determining a surface quality of a substrate sample using a differential interference contrast microscope is described. The microscope includes an eyepiece, an eyepiece focus...
7312865 Method for in situ monitoring of chamber peeling  
A method for in situ monitoring of particles generated by a reaction by-product film peeling from an interior wall of a reaction chamber of a semiconductor fabrication apparatus to determine...
7310141 Inspection device and inspection method for pattern profile, exposure system  
Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The...
7310140 Method and apparatus for inspecting a wafer surface  
In a method and an apparatus for inspecting a wafer surface, a wafer is loaded into a chamber. An incident light including a first light for sensing a vertical position of the wafer and a second...
7308127 Method for determining and evaluating defects in a sample surface  
In this method, the surface to be investigated is first of all exposed to collimated light and the radiation rejected therefrom supplied to a position-resolving image processing means. Then, a mask...
7307713 Apparatus and method for inspection of a wafer  
The invention concerns an apparatus and a method for inspection of a wafer. The apparatus encompasses at least one stroboscopic incident-light illumination device for emitting a pulsed...
7307712 Method of detecting mask defects, a computer program and reference substrate  
A method of detecting mask defects in which a reference substrate is patterned by the mask immediately after manufacture of the mask is disclosed. The reference substrate is stored in clean...
7304731 Systems and methods for providing illumination of a specimen for inspection  
Systems and methods for providing illumination of a specimen for inspection are provided. One system includes one or more first optical elements configured to illuminate a diffuser with a...
7301620 Inspecting apparatus, image pickup apparatus, and inspecting method  
An inspecting apparatus includes an illuminating optical system which irradiates irradiation light onto an object to be inspected, an object placing stage which moves the object along a first...
7301165 Methods and apparatus for inspecting an object  
A method for inspecting an object using a structured light measurement system that includes a light source for projecting light onto a surface of the object and an imaging sensor for receiving...
7298496 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry  
Methods and apparatus based on optical homodyne displacement interferometry, optical coherent-domain reflectometry (OCDR), and optical interferometric imaging are disclosed for overlay, alignment...
7298471 Surface inspection apparatus and surface inspection method  
A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus...
7298470 Defect inspection device for metal ring end faces of a continuously variable transmission belt  
A defect inspection device for metal ring end faces of a Continuously Variable Transmission (CVT) V-belt which enables automated inspection of end face defects in the metal rings along with...
7295301 Dual stage defect region identification and defect detection method and apparatus  
A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive...
7295300 Detecting surface pits  
A system to detect pits in a surface comprises first and second radiation targeting assemblies to target a second radiation beam onto a surface, a first radiation collecting assembly that collects...
7295299 Device for optically measuring surface properties  
An apparatus for optical measurement of surface properties wherein a light spot is produced by an illumination device and reflected light is measured by a multiplicity of optical sensors. In the...
7292949 Method and apparatus for estimating surface moisture content of wood chips  
Method and apparatus for estimating surface moisture content of wood chips employing a surface moisture measurement obtained from a non-contact surface moisture sensor, which measurement is...
7292341 Optical system operating with variable angle of incidence  
An optical system for use in measurements in a sample comprising a light source ( 102 ) operable to produce an incident light beam propagating in a certain direction towards the sample (S) through...
7292335 Optical measurements of patterned structures  
A method and a system for optical measuring in a structure having a pattern in the form of spaced-apart parallel elongated regions of optical properties different from that of spaces between said...
7292330 Wafer inspection with a customized reflective optical channel component  
A method is described that adjusts the position of a item and sets a tilt angle for each of a plurality of micro-mirrors of a digital micro-mirror device. The setting of the tilt angles is to...
7292329 Test head for optically inspecting workpieces comprising a lens for elongating a laser spot on the workpieces  
An optical test head comprises a laser source for providing a laser beam. The laser beam passes through a cylindrical lens for modifying the shape of the beam and a spherical lens for concentrating...
7292328 Method for inspection of a wafer  
Defects on a wafer ( 26 ) can be detected using bright-field and/or dark-field illumination. The radiation incident onto the wafer ( 26 ) has, in this context, a substantial influence on the...
7292327 Circuit-pattern inspection apparatus  
The disclosed subject matter is related to a circuit pattern inspection apparatus for detecting a gradual changing of defect expanding over a large area of the semiconductor wafer. In order to...
7289234 Method and system for thin film characterization  
A method and system are presented for optical measurements in multi-layer structures to determine the properties of at least some of the layers. The structure is patterned by removing layer...
7289200 Confocal reflectommeter/ellipsometer to inspect low-temperature fusion seals  
A device and method for measuring a fusion seal quality within a structure comprising a source for providing a focused optical beam of a known intensity to a fusion seal within a structure, the...
7286218 System and method for inspecting a workpiece surface using surface structure spatial frequencies  
A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising...
7283235 Optical device and inspection module  
Optical device for representing a central image ( 10 ) of an object ( 1 ) and at least one lateral image ( 11, 12, 13, 14 ) of the same object ( 1 ), with the length of the real optical path of...
7283225 Particle detection device, lithographic apparatus and device manufacturing method  
To enable differentiation between a particle and a ghost particle, a detector system resolves radiation from a ghost particle from radiation from an actual particle. The detector system outputs at...
7280199 System for detecting anomalies and/or features of a surface  
A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused...
7280197 Wafer edge inspection apparatus  
A wafer edge inspection system utilizes a novel camera and mirror arrangement which conveys the images of the various near-edge wafer regions in piecewise fashion to a linear sensor array on a...
7277164 Process and station for inspecting the painting of motor vehicle bodywork parts  
A method for inspecting the painting of bodywork parts using an optical measurement instrument that is moved parallel to the parts being inspected. An inspection station for implementing the method.
7276127 Method and apparatus for cleaning with internally reflected electromagnetic radiation  
A method and apparatus for cleaning, detecting, and/or removing contamination from the surfaces of nominally transparent materials utilizing internal illumination of those surfaces with at least...
7274813 Defect inspection method and apparatus  
A method of inspecting defects of a plurality of patterns that are formed on a substrate to have naturally the same shape. According to this method, in order to detect very small defects of the...
7274445 Confocal scatterometer and method for single-sided detection of particles and defects on a transparent wafer or disk  
A problem in the inspection of transparent wafers and disks is the detection of top surface particles. More precisely, it is being able to assign a scattering site as being due to a particle at the...
7274444 Multi mode inspection method and apparatus  
An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to...
7274443 Corrosion monitoring system, optical corrosion probe, and methods of use  
Optical corrosion monitoring and detection systems as well as methods to detect and monitor corrosion under process conditions and generally in real time using electromagnetic radiation,...
7271900 Magneto-optical imaging method and device  
A quantitative magneto-optical imaging method is used to form an image of a target material. An active material is placed close to the target material and produces a Faraday rotation in a polarized...
7271890 Method and apparatus for inspecting defects  
In a method for inspecting a defect in accordance with one aspect of the present invention, an object is divided into a plurality of regions. Reflectivity of each of the plurality of regions is...
7271889 Device and method for inspecting an object  
A device and method for inspecting an object ( 2 ) uses a bright field illumination beam path ( 4 ) of a bright field light source ( 5 ), said beam path being formed so that it passes through the...
7268940 Illuminating device  
An illuminating device, as for a microscope, includes a light source and a reflecting filter system. The beam of light of the light source undergoes a plurality of reflections in the reflecting...
7268895 Inspection system and a method for inspecting a semiconductor wafer  
An inspection system for inspecting a wafer and an inspection method thereof are provided. The inspection system includes a rotating means for turning and arranging a wafer to an inspection...
7266232 Apparatus and method for inspecting pattern  
An inspection apparatus ( 1 ) has an image pickup part ( 2 ) for performing an image pickup of a substrate ( 9 ), an operation part ( 4 ) to which an image signal is inputted from said image pickup...
7259844 High throughput darkfield/brightfield wafer inspection system using advanced optical techniques  
The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield...
7253891 Method and apparatus for simultaneous 2-D and topographical inspection  
Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical...
7251024 Defect inspection method and apparatus therefor  
A defect inspection apparatus for inspecting a fine circuit pattern with high resolution to detect a defective portion is constructed to have an objective lens for detecting an image of a sample, a...
7248366 Method for marking defect and device therefor  
The defect marking method comprises the steps of: installing a surface defect tester to detect surface flaw and a marker device to apply marking at defect position, in a continuous processing line...
7248352 Method for inspecting defect and apparatus for inspecting defect  
The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said...
7245366 Surface inspection method and surface inspection apparatus  
A surface inspection apparatus includes an LD ( 10 for emitting a laser beam (L 0 ), an irradiation optical system for entering the emitted laser beam (L 0 ) onto an inspection surface ( 210 ) of...
7245365 Apparatus and method for detecting particles on an object  
An apparatus for detecting particles located on an object includes an emitter for irradiating lights to the particles. The object is disposed on a stage in a direction substantially parallel to a...
7242467 Method and apparatus for high-resolution defect location and classification  
In the manufacture of integrated circuits on a wafer, it is necessary to monitor the manufacturing process by inspecting the ICs as to whether errors or defects have occurred during production. It...
Matches 1 - 50 out of 782 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >