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7385687 |
Inspection device
A device for inspecting a substrate having at least one printed-on layer, including a guide carrier on which the substrate is supported. An inspection head is movable in at least two directions...
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7385686 |
Method and apparatus for inspecting semiconductor device
A laser diode chip is scanned and irradiated with laser light penetrating the interior of crystal of a chip and having a wavelength which produces no electromotive force by optical excitation. When...
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7383156 |
Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface
It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11 , by providing a means 21 for detecting aggregation of...
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7382450 |
Method of detecting an edge bead removal line on a wafer
To determine an edge bead removal line ( 17 ) on a wafer ( 10 ), first lines or edges ( 38, 40, 42, 44 ) in the edge area ( 19 ) of the wafer ( 10 ) are detected. A first line area ( 48 ) and a...
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7379580 |
Method for detecting defects
A method for inspecting a substrate for defects, including: (a) obtaining an inspected pixel and a reference pixel; (b) calculating an inspected value and a reference value, the inspected value...
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7379185 |
Evaluation of openings in a dielectric layer
A patterned dielectric layer is evaluated by measuring reflectance of a region which has openings. A heating beam may be chosen for having reflectance from an underlying conductive layer that is...
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7379172 |
Method and apparatus for inspection of optical component
An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beam 24 and a second light beam 26 ...
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7375362 |
Method and apparatus for reducing or eliminating stray light in an optical test head
An optical test head comprises one or more optical input paths by which a beam of light is communicated from a light source to a workpiece and one or more optical output paths by which light...
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7372557 |
Surface defect inspection apparatus and surface defect inspection method
The present invention aims to provide a surface defect inspection apparatus and a surface defect inspection method for properly inspecting for a concave-shaped flaw (or a part thereof)...
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7372556 |
Apparatus and methods for inspecting a composite structure for inconsistencies
A system and method of inspecting material laid by a material placement machine. Light is directed onto the material in a direction essentially normal to the material to illuminate a section of the...
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7372555 |
Method of fabrication of semiconductor integrated circuit device
In the fabrication of a semiconductor integrated circuit device, a 2D-3D inspection technique for solder printed on a substrate is provided which permits easy preparation of data and easy visual...
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7372062 |
Defect inspection device and substrate manufacturing system using the same
A defect inspection device which inspects for surface defects in substrates, and which includes an illumination section that irradiates the substrate with illumination light having a variable...
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7369236 |
Defect detection through image comparison using relative measures
Inspection of objects such as semiconductor wafers can include comparisons of shapes between inspection and reference images. As part of the inspection process, relative values may be assigned to...
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7365837 |
Vision inspection apparatus using a full reflection mirror
The present invention relates to a vision inspection apparatus and method using total reflection mirrors. The present invention provides a vision inspection apparatus using the total reflection...
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7365835 |
Dark-field laser-scattering microscope for analyzing single macromolecules
To further isolate the scattered light 112 of a specific particle from the scattered light of a different particle, a pin hole device 116 can be used. The pin hole device 116 prevents...
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7362423 |
Digital diagnostic apparatus and vision system with related methods
A high speed, low cost, apparatus and method of identification, examination of objects and quality control of manufactured parts and sheet materials, the apparatus including a comparator having...
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7359043 |
Pattern inspecting method and pattern inspecting apparatus
A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to...
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7359042 |
Inspection system for limited access spaces
A limited access space inspection system comprising: an imaging device for imaging a region in the limited access space, a mounting for mounting the imaging device to scan about the limited access...
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7356177 |
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image...
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7355693 |
Pattern inspection apparatus
The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is...
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7355689 |
Automatic optical inspection using multiple objectives
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical...
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7355193 |
Dust and scratch detection for an image scanner
Multiple scans of the same object are obtained, where for any given line on the object to be scanned, the angle of the illumination is different for each scan. The different scans are obtained from...
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7348585 |
Surface inspection apparatus
A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface...
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7345754 |
Fourier filters and wafer inspection systems
Fourier filters and wafer inspection systems are provided. One embodiment relates to a one-dimensional Fourier filter configured to be included in a bright field inspection system such that the...
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7342654 |
Detection of impurities in cylindrically shaped transparent media
The invention relates to a system and method of detecting impurities in a cylindrically shaped transparent medium, wherein the cylindrically shaped transparent medium is illuminated with...
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7339660 |
Illumination device for product examination
An illumination device for use with a product inspection machine inspecting products according to at least one characteristic. The invention also pertains to an illumination device for use in...
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7333192 |
Apparatus and method for inspecting defects
A defect inspection apparatus includes an irradiation optical system 20 , a detection optical system 30 , and an image processor 40 . In the irradiation optical system, a mirror 2603 is...
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7332314 |
Biosensor for analyzing quantitatively analyte with a predetermined size and larger than, and manufacturing method thereof
The present invention discloses a biosensor for quantitatively analyzing a bio-material and a manufacturing method thereof. The biosensor has an exposed conductive region of a few-nanometer scale...
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7327449 |
Exposure apparatus inspection method and exposure apparatus
An inspection method for an exposure apparatus for illuminating a photomask on a first installation member by an illumination optical system, and for projecting an image of a pattern of the...
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7327448 |
Laser-ultrasonic detection of flip chip attachment defects
Underfill voids and solder ball defects are detected via laser generation and laser detection of an ultrasonic wave at the top surface of flip chips. High resolution is provided by using small...
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7324192 |
Test apparatus and method for examining sheet-like components for perforations
A test apparatus ( 1 ) is provided for examining sheet-like components ( 8 ), in particular membrane electrode assemblies for use in a fuel cell, at least in sections and preferably continuously,...
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7321421 |
Apparatus and methods for scanning conoscopic holography measurements
Apparatus and methods for scanning conoscopic holography measurements are disclosed. In one embodiment, a system includes a conoscopic holography sensor, a beam directing assembly, and a control...
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7319516 |
Measurement instrument for inspecting painted bodywork parts, the instrument being provided with an anti-damage device
The invention relates to an optical measurement instrument for inspecting the quality of paintwork at the outlet from a line for painting motor vehicle bodywork parts, the instrument including a...
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7317529 |
Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples
Systems and methods for providing and enhancing electromagnetic radiation beam radial energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation...
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7316322 |
Quality evaluation apparatus for fruits and vegetables
In order to provide a quality evaluation apparatus having excellent measurement accuracy in obtaining quality evaluation values of fruits and vegetables, transmitted light from one or more measured...
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7315362 |
System and method for inspecting a mower
A system and method for inspecting mowers that utilizes a video camera to allow a single technician to look directly at a selected reference point on a crankshaft of the operating mower to thereby...
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7315361 |
System and method for inspecting wafers in a laser marking system
An illumination system is disclosed for use in a semiconductor wafer back side inspection assembly. The illumination system includes an illumination source that is configured to direct illumination...
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7310155 |
Extraction of tool independent line-edge-roughness (LER) measurements using in-line programmed LER and reliability structures
A system that facilitates extraction of line edge roughness measurements that are independent of proprietorship of a metrology device comprises a structure patterned onto silicon with known line...
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7310143 |
NIST traceable automated visual inspection system for an inspection of particles in solution
A method for the substantially complete detection and measurement of all particles, within a predetermined size, range, contained in an injectable solution comprising the steps of: a) rotation of...
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7310139 |
Evaluation method and device for gel state or sol-gel state change of object
A system and method for evaluating a material body by a scattered light observation system which observes a gel state or a gel-formable sol state material body illuminated with a coherent light...
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7308069 |
Device and method for controlling the exterior aspect of fuel rods for nuclear reactors
The invention concerns a device ( 1 ) for controlling the exterior aspect of fuel rods ( 2 ) for nuclear reactors, said device comprising optical means ( 40 ) having at least one camera ( 42, 42′...
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7307714 |
Apparatus and process for detecting inclusions
Disclosed are process and apparatus for inspecting internal inclusions in internally transmissive substrates. The process involves applying a black coating to one major surface of the substrate,...
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7304740 |
Methods for detecting compression wood in lumber
Methods are provided for detecting compression wood, blue stain, or pitch in lumber. A light beam is projected towards the wood sample. Line or area cameras acquire images of light that is...
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7304730 |
Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask
A photolithography mask inspection apparatus has at least two sensors. One sensor is configured to sense light transmitted through an object to be inspected, and the other sensor senses light...
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7302787 |
Defect detection device and bag packaging system equipped with defect detection device
A bag packaging system includes a bag packager and a defect detection device that receives bags manufactured by the bag packager and conveys the bags while checking for defects. The defect...
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7301619 |
Evaluating a multi-layered structure for voids
A method and apparatus measure properties of two layers of a damascene structure (e.g. a silicon wafer during fabrication), and use the two measurements to identify a location as having voids. The...
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7298499 |
Method and system for characterizing structural damage from observing surface distortions
This process includes arranging a grid on the surface a structure to be inspected, directing a light source onto this grid so as to create a shadow on the structure, recording an image of the...
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7298470 |
Defect inspection device for metal ring end faces of a continuously variable transmission belt
A defect inspection device for metal ring end faces of a Continuously Variable Transmission (CVT) V-belt which enables automated inspection of end face defects in the metal rings along with...
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7295330 |
Film mapping system
A materials properties measuring system for using electromagnetic radiation interactions with selected materials positioned at a measuring location to determine selected properties thereof having...
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7295314 |
Metrology/inspection positioning system
A metrology/inspection system moves the imaging and/or measuring equipment of the system relative to a wafer. Accordingly, measurement or inspection of the wafer does not require that the wafer be...
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