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Match Document Document Title
7403291 Method of calculating two-dimensional wavefront aberration  
An adjusting method measures a wavefront aberration in a first direction of a target optical system and a wavefront aberration in a second direction different from the first direction of the target...
7403276 Photomask for measuring lens aberration, method of its manufacture, and method of its use  
A photomask for measuring lens aberration, a method of manufacturing the photomask, and a method of measuring lens aberration using the photomask are provided. In an embodiment, the photomask...
7400388 Method for determining distortion and/or image surface  
A method for determining at least one of distortion and de-focus for an optical imaging system. The method includes determining wavefront aberrations in a pupil plane of the optical imaging system...
7382447 Method for determining lithographic focus and exposure  
A method for determining one or more process parameter settings of a photolithographic system is disclosed.
7382446 Aberration measuring method  
Disclosed is a method of measuring aberration of a projection optical system, that includes an illuminating step for illuminating a reticle by use of light from a light source and through an...
7379171 Optical object distance simulation device  
An optical object distance simulation device is disclosed. The device has an optical lens module composed of a plurality of optical lens and the optical lens module is arranged between an optical...
7379170 Apparatus and method for characterizing an image system in lithography projection tool  
A system and method for characterizing an imaging system causes a diffraction image indicative of a test structure having a generalized line-grating to be formed and then extracts from a...
7375805 Reticle and optical characteristic measuring method  
A wavefront aberration measuring method for measuring wavefront aberration of a projection optical system. The method includes providing a reticle having lines and spaces in which, with respect to...
7365838 System and method for the measurement of optical distortions  
An apparatus measures optical deviations caused by an aircraft canopy. In this apparatus, a light source generates a beam of light. A collimator, optically coupled to the light source, then...
7355686 Optical system including molded optical element and method of manufacturing the optical system  
An optical system that includes a molded optical element having a non-uniform refractive index distribution due to molding and a method of manufacturing the optical system is disclosed. Data of the...
7352452 Method and apparatus for setting optical imaging properties by means of radiation treatment  
Method and apparatus for setting optical imaging properties using radiation treatment, specifically a method and an apparatus for setting the imaging properties of an optical system with radiation...
7349078 Characterization of lenses  
In accordance with one embodiment of the present invention, a method of characterizing a lens is provided. According to the method, an optical source such as a laser is configured to generate a...
7336370 Optical nulling apparatus and method for testing an optical surface  
An optical nulling apparatus for testing an optical surface includes an aspheric mirror having a reflecting surface for imaging light near or onto the optical surface under test, where the aspheric...
7333216 Apparatus for wavefront detection  
An apparatus for wavefront detection includes a wavefront source for the production of a wavefront, an optical system transforming the wavefront, a diffraction grating through which the transformed...
7327452 Light beam apparatus and method for orthogonal alignment of specimen  
A system for orthogonal alignment of a specimen disclosed. The system includes a light-beam illumination source, collection optics, imaging optics, and a tiltable specimen holder. The light-beam...
7324190 System for visualization of optical marking on an ophthalmic lens, stamp-marking device and method for orientation of lenses using such a system  
The system comprises a light source, supplying an incident light beam illuminating the ophthalmic lens. On the optical path of the incident beam, reflecting means are arranged downstream from the...
7315359 Method for monitoring micro-lens curvature in-line  
A method and system for monitoring a curvature of a micro-lens in-line is disclosed. According to embodiments, sizes of circles (or circle images) from a top view of a micro-lens are measured and...
7312860 Test pattern, inspection method, and device manufacturing method  
In a method according to one embodiment of the invention, aberrations in a lithographic apparatus are detected by printing a test pattern having at least one degree of symmetry and being sensitive...
7307708 Eccentricity measuring method and eccentricity measuring apparatus  
A surface to be tested and an optical system for projecting an index to an apparent spherical center position of the surface to be tested are moved relative to each other and an eccentric quantity...
7307707 Method and system for measuring the imaging quality of an optical imaging system  
An object pattern is imaged by an imaging system onto the image plane of the imaging system at a location where a reference pattern suited to the object pattern is situated in order to measure the...
7307706 Optical testing method and apparatus  
Estimating one or more optical characteristics of a Device-Under-Test (DUT). The method, includes directing an optical wavefront, generated by a source, towards a test location and generating at...
7301615 Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method  
An optical apparatus which includes an image forming optical system having a movable optical element, and a driving mechanism configured to move the optical element. The apparatus includes a first...
7301614 Lens-refracting characteristic measuring apparatus  
A lens-refracting characteristic measuring apparatus includes a measuring optical device to measure refracting characteristics of eyeglass lenses, an input device to input a pupillary distance of...
7295293 Apparatus and method for testing a reflector coating  
A method of testing a coating on a reflector having a first focal point includes placing a mirror at the first focal point of the reflector and angled to orient with an area on the coating....
7295292 Methods and systems for measuring an aberated wave front  
Methods and systems are described for a system for measuring aberrations in a wave front. In the improved system multiple closely-spaced, small-aperture laser beams traverse an aberrating flow that...
7295291 Apparatus and process for the determination of static lens field curvature  
A process for the determination of focal plane deviation uniquely due to the lens field curvature associated with a photolithographic projection tool is described. A series of lithographic...
7289199 Electronic imaging apparatus and microscope apparatus using the same  
An electronic imaging apparatus includes a connecting section connected to an optical apparatus; an optical element having a preset transmittance with respect to light in a preset wavelength...
7286212 Apparatus and method for measuring eccentricity of aspherical surface  
An apparatus for measuring the eccentricity of the aspherical surface has a light source unit; a condenser lens condensing light rays in the proximity of the center of paraxial curvature of a...
7286211 Methods and devices for measuring fundamental data of lenses  
A measurement device may illuminate lens 10 to be inspected with light at a plurality of different angles of incidence. The transmitted light that passes through lens 10 may be preferably...
7280193 Distinguishing mirror speckle from target images in weak signal applications  
Apparatus, and a related method, for eliminating the effect of speckle images caused by surface imperfections in a primary mirror of a stellar coronagraph. Depending on their size, mirror...
7280192 Lens meter  
A lens meter for measuring refractive power distribution of a progressive power lens and displaying its distribution map, has a lens rest having an aperture, an optical system including an axis, a...
7280191 Lens meter  
A lens meter that measures optical characteristics of lenses of an eyeglass unit and an inspection glass unit, including a glass unit support, light sources, light-projecting and -detecting optical...
7273277 Advanced vision intervention algorithm  
A method of optimizing the predictability of a vision correction procedure by comparing historical data, including the vision defect, the correction method and outcome, in terms of wavefront...
7261985 Process for determination of optimized exposure conditions for transverse distortion mapping  
A process for providing illumination source conditions for the accurate determination Zernike tilt coefficients in the presence of coma is described. Large feature-shift coma sensitivity is...
7256881 Systems and methods for inspection of ophthalmic lenses  
An automated lens inspection system that images the edge and surface of an ophthalmic lens transmits light through the ophthalmic lens to a camera to create a complete digital image of the lens...
7248349 Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device  
There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second...
7248348 Detection method and device for detecting quality of optical element  
A detection method for detecting quality of an optical element includes the following steps. Firstly, a point light source is provided. Then, the point light source is allowed to penetrate through...
7248347 Focus processing with the distance of different target wheels  
An apparatus and method for automatically focusing a miniature digital camera module (MUT) is described. A MUT is loaded onto a test fixture and aligned with an optics system of a test handler....
7245362 Lens meter  
A lens meter excellent in operability during alignment capable of informing in which direction a subject lens should be moved. A lens meter has a measurement optical system having an optical axis,...
7245361 Method for evaluating refractive index homogeneity of optical member  
A method for evaluating the refractive index homogeneity of an optical member includes passing light through an optical member ( 1 ) used for photolithography. The side surface ( 1 a ) with respect...
7242464 Method for characterizing optical systems using holographic reticles  
Characterization of an optical system is quickly and easily obtained in a single acquisition step by obtaining image data within a volume of image space. A reticle and image plane are positioned...
7236239 Illumination system and exposure apparatus  
Disclosed is an illumination system for illuminating a surface to be illuminated, with light from a light source, the illumination system including a first optical integrator having a plurality of...
7234813 Apparatus for displaying image by projection on retina of viewer with eliminated adverse effect of intervening optics  
An apparatus for use in image display, of projecting a light beam onto a retina of a viewer, to thereby allow the viewer to perceive an image, is disclosed. The apparatus is constructed to include:...
7230706 Position detection method and apparatus, and exposure method and apparatus  
A position detection apparatus for detecting a position of an object to be observed, including a position detection system, and an evaluation unit for measuring by the position detection system...
7230693 Lens meter  
A lens meter for measuring optical characteristics of a subject lens to be measured includes at least three light sources for measurement, a projecting lens which projects measurement light bundles...
7230692 Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method  
An optical apparatus including an image forming optical system having a movable optical element, and a driving mechanism. A first block obtains a linear evaluation value by normalizing, by a first...
7221446 Fluid dispenser and lens inspection device  
A fluid dispenser dispenses a fluid alternately from one of a pair of ports ( 29,31 ) that are provided on opposite ends of a syringe ( 26 ) by moving a piston ( 42 ) back and forth inside the...
7215431 Systems and methods for immersion metrology  
Fluid immersion technology can be utilized to increase the resolution and angular range of existing metrology systems. An immersion fluid placed between the metrology optics and the sample can...
7209224 Lens meter  
A lens meter obtaining 0D-reference-coordinates of target-images not detected in a reference state and measuring even progressive lenses, has a lens rest, an optical system having an optical axis,...
7190443 Reticle and optical characteristic measuring method  
A reticle having a test pattern for measurement of an optical characteristic of a projection optical system has a pattern adapted so that a high frequency component of a spectrum at a pupil plane...
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