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7616327 |
Optical measuring device using optical triangulation
An optical triangulation measuring device includes an emmiter that emits two alternating light beams with different wavelengths along the same path; a beam splitter; an optical separator that...
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7612876 |
Systems and methods for characterizing laser beam quality
A measure of the quality of a laser beam is obtained by comparing the power of a theoretical Gaussian beam through a (certain sized area) pinhole to the power of a test beam through a same sized...
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7538875 |
Lithographic apparatus and methods for use thereof
A method for determining a polarization state of light passed through the projection lens of a lithographic apparatus is described. Polarizing structures are disposed on an object side of the...
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7538872 |
Diagnostic methods and apparatus for directed energy applications
Determining relationships between one laser beam and an object onto which such beam is directed including: directing such beam onto the object; collecting radiation from the beam that is reflected...
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7518711 |
Optical waveform measurement apparatus and optical waveform measurement method
A first polarization controller controls a polarization state of measured light. A second polarization controller controls a polarization state of an optical sampling pulse. The measured light and...
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7508512 |
Continuous optical self-alignment for light curtains and optical presence sensors for simplification and maintenance of alignment
Systems and methods are disclosed that facilitate tolerating and/or correcting light beam misalignment in a light-emitting device, such as a light curtain. Attributes of the light beam can be...
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7492446 |
Active beam catcher
A beam catcher ( 3 ) for a light beam ( 1 ) includes a photodetector ( 6 ) having a plurality of photodiodes ( 8 ) which are offset along a line in a defined manner with respect to a reference...
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7486893 |
Dynamic optical interconnect system reference signal formation
The disclosed technology provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with the disclosed technology, two...
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7477365 |
Optical spot geometric parameter determination using calibration targets
A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the...
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7474393 |
Method and apparatus for determining a vertical intensity profile along an illuminating beam
An assembly is provided for the direct measurement of a vertical intensity profile through a plane of focus along an illuminating beam, a determination of a depth of the focal plane and a maximum...
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7463347 |
Simulator of optical intensity distribution, computer implemented method for simulating the optical intensity distribution, method for collecting mask pattern, and computer program product for the simulator
A simulator of an optical intensity distribution includes a field divider dividing an exposure field on a substrate into a first and second fields, the first field being to be directly exposed to a...
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7445335 |
Sequential wavefront sensor
A sequential wavefront sensor comprises a light beam scanning module, a sub-wavefront focusing lens, a detector with more than one photosensitive area and a processor for calculating the...
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7442909 |
Optical measuring system
Apparatus and methods are described for of measuring amplitude and phase variations in a spatially coherent beam of light. A beam of coherent light is made incident upon a spatial array of phase...
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7440088 |
Methods and devices for measuring a concentrated light beam
Methods and devices are provided for profiling a beam of light that includes a wavelength λ. The beam of light is received. Secondary light is generated at a wavelength λ′ different from...
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7436502 |
Illumination beam measurement
A method of measuring the angular intensity distribution of an illumination beam produced by an illumination system of a lithographic apparatus includes measuring an angular intensity distribution,...
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7423739 |
Method of and system for determining the aberration of an imaging system test object and detector for use with the method
For determining aberrations of an optical imaging system (PL), a test object ( 12,14 ) comprising at least one delta test feature ( 10 ) is imaged either on an aerial scanning detector ( 110 ) or...
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7414759 |
Scanner linearity tester
Linear spot velocity or position variations are measured in a scanning system by a process and apparatus. The process comprises providing at least two radiation detectors that can move in tandem...
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7414712 |
Large dynamic range Shack-Hartmann wavefront sensor
A wavefront sensor for measuring a wavefront contains an array of lenslets, a detector array, and a mask having a temporally fixed pattern containing one or more opaque regions that are...
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7408631 |
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask
An illumination mask ( 10 a ) for a device for the range-resolved determination of scattered light, having one or more scattered-light measuring structures ( 11 a ) which respectively include an...
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7405815 |
Systems and methods for characterizing laser beam quality
A measure of the quality of a laser beam is obtained by comparing the power of a theoretical Gaussian beam through a (certain sized area) pinhole to the power of a test beam through a same sized...
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7397546 |
Systems and methods for reducing detected intensity non-uniformity in a laser beam
A method of increasing the spatial uniformity of the detected intensity of a beam of light from a laser in a system including the laser and a light detector. In one embodiment the method includes...
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7390999 |
Differential Shack-Hartmann curvature sensor
A differential Shack-Hartmann curvature sensor for measuring a curvature including principal curvatures and directions of a wavefront. The curvature sensor includes a Shack-Hartmann sensor with an...
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7352118 |
Optimized ultraviolet reflecting multi-layer coating for energy efficient lamps
A metal halide lamp ( 10 ) includes a light-transmissive envelope ( 12 ) which encloses a metal halide pool ( 30 ) for generating a discharge when spaced apart electrodes ( 20, 22 ) within the...
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7315358 |
Evaluation apparatus and method of optical parts
An evaluation apparatus of optical parts has a holder having a frame which can hold a lens fixedly and another lens movably, a chart having a first transmission hole group and a second transmission...
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7301613 |
Device for analysing a wavefront with enhanced resolution
A wavefront analysing device, of the Hartmann or Shack-Hartmann type, comprises in particular a set of sampling elements arranged in an analysis plane, and forming as many micro-lenses for sampling...
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7295292 |
Methods and systems for measuring an aberated wave front
Methods and systems are described for a system for measuring aberrations in a wave front. In the improved system multiple closely-spaced, small-aperture laser beams traverse an aberrating flow that...
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7274442 |
Closed-loop wavefront sensor using field programmable gate array
A system capable of determining wavefront characteristics, such as air induced wavefront aberrations, includes a field programmable gate array (FPGA) device executing a phase diversity algorithm....
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7256880 |
Goniophotometer
A hemispherical goniophotometer is disclosed, in which two pivoting arms are articulated on a revolving rotating arm and are each fitted with a measurement head. The geometry of the arrangement is...
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7256879 |
Semiconductor array tester
An array tester ( 10 ) characterizes individual ones ( 111 ) of a semiconductor devices of an array ( 11 ) based on polarization-resolving an optical far-field measurement of the individual chips (...
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7193693 |
Apparatus for manufacturing flat panel display devices
A mechanism for always measuring the spatial intensity distribution of a laser beam and displacement of the optical axis of the laser beam is provided so that a measured signal is processed when...
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7161128 |
Optical instrument employing a wavefront sensor capable of coarse and fine phase measurement capabilities during first and second modes of operation
An improved wavefront sensor for characterizing phase distortions in incident light including optical elements that spatially sample the incident light and form a dispersed spot with a fringe...
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7130033 |
Portable device for measuring the light intensity from an object, and the use of such a device
The invention relates to a device for measuring the light intensity of an object or object portion. The device comprises a dioptric central portion and a catadioptric peripheral portion that are...
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7113707 |
Dynamic optical interconnect
This invention provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with this invention, two optical beams emanate...
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7113268 |
Scintillation tolerant optical field sensing system and associated method
An optical field sensing system and an associated method are provided that are tolerant of scintillation. The system includes a wavefront sensor that measures gradients across a wavefront at a...
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7092080 |
Light intensity distribution measuring method and light intensity distribution measuring device
A light intensity distribution measuring method for measuring the light intensity distribution of a laser beam emitted by a semiconductor laser comprises the steps of measuring light intensities at...
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7092079 |
Digital optical beam profiler
An agile optical beam profiler using a two-dimensional small tilt digital micromirror device/chip, a translation stage, and single photodetector or pair of photodetectors. A method of profiling an...
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7039553 |
Phase determination of a radiation wave field
A method and apparatus for quantitative determination of the phase of a radiation wave field is disclosed. A representative measure of the rate of change of intensity of the radiation wave field...
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7027155 |
Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or...
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7023551 |
Method, system and computer program product for assembling an optical module
A method, system and computer program product for assembling an optical module incorporates a far field pattern (FFP) optical measurement system and optionally a near field pattern (NFP) optical...
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6985218 |
Method of determining at least one parameter that is characteristic of the angular distribution of light illuminating an object in a projection exposure apparatus
A method of determining at least one parameter that is characteristic of the angular distribution of light illuminating an object in a projection exposure apparatus is described. This parameter may...
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6985217 |
System and method for inspecting a light source of an image reader
An area CCD scanner (image reader) comprises an LED unit (light source), an area CCD and an image-forming lens. The LED unit includes a large number of light emitting elements of each color of...
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6982785 |
Apparatus for determining radiation beam alignment
This invention provides a radiation directing device, including a screen having a mirrored surface interrupted by one or more pin holes that pass through the screen, the pin holes having an...
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6980290 |
Optical sampling waveform measuring apparatus
An optical sampling waveform measuring apparatus can measure waveform of a high-speed signal light P 8 sensitively, accurately, and in high time resolution, Raman shift light which is generated...
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6975387 |
Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device
Before measuring a wavefront aberration of a projection optical system, an image formation position of an image of a pattern of a test reticle which is formed on a predetermined surface is detected...
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6972836 |
Measuring method of illuminance unevenness of exposure apparatus, correcting method of illuminance unevenness, manufacturing method of semiconductor device, and exposure apparatus
There is disclosed a measuring method of illuminance unevenness of an exposure apparatus in which the illuminance unevenness resulting from a projection optical system, to project the light passed...
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6947130 |
Method of evaluating whiteness, method of evaluating comparative whiteness, light source and luminaire
In evaluating whiteness of light from a light source or a luminaire, whiteness W is given by the following equation,
W =−5.3 C...
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6937340 |
Device for inline measurement laser pulses and measuring method by photoacoustic spectroscopy
A piezoelectric sensor ( 7 ) is dedicated to making a precise measurement of the light amplitude of pulses ( 2 ) from a laser ( 1 ), so that quantitative measurements such as photo-acoustic...
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6922233 |
Digital optical beam profiler
An optical beam profiler using a spatial light modulator and photodetector. In an embodiment, the spatial light modulator is a two-dimensional (2-D) small tilt digital micromirror device. The...
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6922232 |
Test system for laser diode far-field pattern measurement
A test system for positioning and measuring the far-field pattern of a laser diode under test (LDUT) using a single objective lens and two relay lenses. Positioning is achieved by passing light...
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6917426 |
Real-time wavefront sensor system
The system includes a first polarizing element; an electro-optically driven birefringent element; a second polarizing element; an optical assembly; and, an optical-to-electronic imaging sensor...
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