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7351348 |
Evaporation control using coating
A novel arrangement and method for depositing evaporation control agents so as to coat immersion lithographic solutions which are employed on the surface of semiconductor wafers in connection with...
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7274433 |
Objective, optical analyzer, method of driving optical analyzer, and microscope
An objective having an apical lens and a lens frame which supports the apical lens, includes an elastic member which supports the lens frame by exerting a bias force in a central axial direction of...
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7224436 |
Lithographic apparatus and device manufacturing method
In a lithographic projection apparatus, a liquid supply system provides liquid in a space between the final element of the projection system and the substrate of the lithographic projection...
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7145641 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
A lithographic apparatus is disclosed. The apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning...
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7113257 |
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus
An assembly according to an embodiment of the invention includes a sensor for determining at least one of tilt and height of a surface of a substrate in a lithographic apparatus. The substrate is...
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7113259 |
Lithographic apparatus and device manufacturing method
In a lithographic projection apparatus, a space between an optical element is filled with a first fluid and a second fluid separated by a transparent plate. The first and second fluids have...
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7081943 |
Lithographic apparatus and device manufacturing method
In an immersion lithography apparatus, a member surrounds a space between a projection system and a substrate table. A seal is formed to contain liquid in the space.
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7023523 |
Exposure system and exposure method
Exposure systems are disclosed having a configuration in which a field stop is positioned in proximity to a reflection-type mask, but that satisfactorily minimize adverse effects on the...
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7014986 |
Writing device and writing method
A writing device is provided which, in simple processes, can write in two dimensions and three dimensions, and which can form highly accurate patterns. An exposure head, a conductive material...
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6954256 |
Gradient immersion lithography
In a lithographic projection apparatus, a space between an optical element is filled with a first fluid and a second fluid separated by a transparent plate. The first and second fluids have first...
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6934009 |
Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method
There is provided an illumination apparatus including an optical integrator including multiple optical systems for receiving light from a light source, and for producing multiple beams for...
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6781670 |
Immersion lithography
Apparatus, methods, and systems for immersion lithography. In one implementation, a hemispherical lens element is positioned near a target surface covered by photoresist. An immersion liquid is...
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6731377 |
Laser output control method, laser apparatus and exposure apparatus
The present invention relates to a method of controlling the output of laser pulses where laser pulses are continuously emitted while performing charging for each pulse. This method comprises: a...
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6602727 |
Scatterometry based active control of exposure conditions
A system for regulating an exposure condition determining process is provided. The system includes one or more light sources, each light source directing light to one or more gratings exposed on...
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6501534 |
Automated periodic focus and exposure calibration of a lithography stepper
The present invention is directed to a system and a method for calibrating a lithography stepper system. The system includes a lithography stepper system, measurement system such as a scatterometry...
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6391677 |
Aperture for an exposure apparatus for forming a fine pattern on a semiconductor wafer
An aperture body has a light transmissive region defined therein which includes first, second, third and fourth curved segments. During an exposure process, each curved segment of the light...
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6226129 |
Imaging optical system and image forming apparatus
Disclosed is an imaging optical system and an image forming apparatus that provide a small-size design and high resolution. An optical system (telecentric optical system) between the composite...
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6072562 |
Apparatus for producing photographic prints
A printing apparatus is disclosed which includes an original positioning device (3) for transporting an original (F) to and positioning it in a printing position, a printing material positioning...
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5863712 |
Pattern forming method, projection exposure system, and semiconductor device fabrication method
The pattern forming method is capable of forming a projected image or photoresist pattern that is faithful to a designed pattern without performing complex correction of a mask pattern. A...
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5750294 |
Best focus determining method
Disclosed is a method of determining a best focus position or best exposure amount of a projection lens in an arrangement wherein a reticle is placed on a plane perpendicular to an optical axis of...
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5440370 |
Photographic copier having different magnifications
A photographic copier has a copying station with a platen for a master to be reproduced and a platen for copy material. A straight guide extends across the copying station below the platen for the...
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5329337 |
Lens loading apparatus
A lens loading apparatus for loading a lens held by a holding member into a lens loading unit disposed in the center of a support plate which extends substantially in a horizontal direction. The...
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5293242 |
Short range object photographing device
A photographing device includes a camera mounting unit on which a camera is detachably mounted, a light source unit arranged at a predetermined distance from the camera mounting unit, and a table...
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5218404 |
Lens shift device for a photographic printer
A lens holder is pivotally mounted at its one end on an axle, and is movable up and down along the axle. The lens holder has a fork formed in the other end. The fork and an arched holding member...
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5150153 |
Lithographic device with a suspended object table
A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is...
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5078487 |
Projecting apparatus
A projecting apparatus comprises support device for supporting an original, a projection optical system for forming the image of the original, an optical element disposed on the image side of the...
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4757354 |
Projection optical system
A projection optical system for photolithography includes a refraction sub-system and a cata-dioptric sub-system optically connected to each other. The refraction sub-system extends at an object...
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4703334 |
Optical recording head and belt positioning apparatus
An optical recording apparatus includes an imaging member which is advanced along a predetermined path, an optical recording head for applying light containing image information to the imaging...
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4620784 |
Planetary camera
The camera head of a planetary camera system is movably mounted on a frame of the system. Film members (e.g. aperture cards) are exposed in the camera head. A stationary film-processing station is...
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4497574 |
Slide supporting assembly for color-slide duplicator
In a color-slide duplicator having a housing containing a light source which illuminates an opening in a housing wall, and a support for a camera above the housing for photographic reproduction of...
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4479712 |
Apparatus and method for producing a selected enlargement of a graphic image
Apparatus for producing an enlargement of a graphic image including a light tight housing having an extended hollowed out central area and a light tight aperture located at one end thereof which is...
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4432638 |
Alignment structure
In a photographic enlarger apparatus having a carriage operatively connected to a vertical column for movement thereon to a selected position, an alignment structure is provided for maintaining the...
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4365892 |
Apparatus for making a copy in one of three sizes of X-ray film
An apparatus for making a photographic reduction of various sized film negatives having a light box, a camera spaced within a housing a positioned above said light box, a removable film container,...
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4355889 |
Apparatus and method for resizing artwork
An apparatus and method for resizing artwork by using in combination with a headline setter device, an apparatus which allows the headline setter device to be used in addition to its normal...
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4310231 |
Close-up copy photography apparatus
A system for close-up and copy photography is so designed that a zoom lens whose total barrel length remains unchanged during zooming operation is attached to a camera as the master lens with an...
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4295735 |
Optical projection system having a photorepetition function
An optical system for projecting patterns in order to reproduce the image of at least one modulating object on a mask or semiconductor wafer coated with photosensitive material for the fabrication...
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4294538 |
Image forming optical system
An optical system for forming a spot object or an arcuate object into an arcuate image or a spot image. This optical system has a band-like spherical mirror obtained by sectioning a concave...
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4239382 |
Photographic printing or enlarging apparatus
A photographic printing or enlarging apparatus incorporates a negative carrier, a lens stage, and a positioning device for positioning the lens stage toward and away from a negative carrier. The...
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4220410 |
Apparatus and method for producing an enlargement of a graphic image
An apparatus for producing an enlargement of a graphic image having a light tight housing with an opening on one side of the housing which cooperates with a light tight door to provide access to a...
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4208124 |
Apparatus for making color slides from black-and-white art using regular and color film rolls
A platform-shaped device is designed to be placed over the illuminating aperture of a color-controllable light-box of known construction, and under a camera which is loaded with a roll of color...
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4183661 |
Enlarger lens system having stop-value scale illuminating mechanism
An enlargement lens system has a light guide element positioned in the gap between the outer periphery of a rear lens group frame and a lens mount. A dispersion lens is provided on a portion of the...
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4165934 |
Microfilm camera
A microfilm camera is provided which has a camera head positioned above an exposure table. The exposure table included a pivotable glass plate and originals to be photographed can be placed beneath...
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4097136 |
Projector for visual images
A projector for visual images which may be used for projection upon its own base or a wall. The projector has a base, an upstanding column, an adjustable arm and a projection housing. The projector...
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4097144 |
Adjustment device for photographic enlarging or reproducing apparatus
A device for displacing a body along a guiding column which is particularly suitable for the projection head of an enlarging or reproducing apparatus. The device comprises in a conventional manner...
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4095891 |
On-the-fly photoresist exposure apparatus
A system for exposing photoresists "on-the-fly" is disclosed. The system incorporates a dye laser having an output pulse duration of less than about 250 nanoseconds to expose the photoresist while...
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4093379 |
Method and apparatus for making photographic copies
This improved photocopying system projects light from the finder of a camera and through the camera lens to illuminate, on a copy support, the exact area that the camera will photograph. The...
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4076413 |
Apparatus and method for producing colored reproductions of black and white negatives
Apparatus for use in the production of a colored photographic reproduction of a black and white negative which consists essentially of a light-free enclosure, a baffle having an aperture and...
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4066356 |
Anti-backlash means for adjusting enlargers
An anti-backlash means, particularly adapted for photographic enlargers including a channel shaped optical bench having a pair of guideways; a frame movable along the guideways, having a pair of...
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4061424 |
Photographic enlarger with means for trimming
The disclosed photographic enlarger has a vertically movable head portion which includes a housing for a light source and a mounting for a negative which can be moved together in a horizontal plane...
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4050815 |
Photographic enlarging apparatus with hinged image holder
The hinged image holder of a photographic enlarger has its upper portion loosely attached to the lamp housing so that it is automatically opened for inserting and removing original images when the...
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