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7346206 Optical object detector  
An optical object detector including a feed path, a reference pattern facing the feed path, and an optical sensor configured to view the reference pattern through the feed path, absence of the...
7215408 Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system  
An exposure apparatus for transferring a pattern onto an object via a projection optical system, including a moving body arranged on an image plane side with respect to the projection optical...
7170580 Lithographic apparatus, projection system, method of projecting and device manufacturing method  
A projection system includes at least one projection device configured to receive a beam of radiation coming from a first object and project the beam to a second object. The projection system...
7161717 Self-propelled image read module  
The present invention provides a self-propelled image read module, which comprises a sensor, a guide rod, a motor, a gear set, and a belt. The guide rod is fixed on a base of a scanner. The sensor...
7126671 Lithographic apparatus and device manufacturing method  
In a projection system for EUV, the positions of mirrors are measured and controlled relative to each other, rather than to a reference frame. Relative position measurements may be made by...
7116402 Lithographic apparatus and device manufacturing method  
A system and method are used to form features on a substrate. The system and method include using a first array including individually controllable elements that selectively pattern a beam of...
7082278 Variable magnification reflecting mirror apparatus  
An original reading apparatus can realize stepwise or sequential variable magnification using relatively small size optical system upon reading an original. The apparatus includes a first mirror...
7038761 Projection exposure apparatus  
An exposure apparatus includes a projection optical system of catadioptric type, and an optical element disposed on a reciprocating light path of the projection optical system, the optical element...
7027128 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory  
A scanning exposure apparatus for exposing a substrate to a pattern of a reticle. The apparatus includes an exposure system which exposes the substrate to the pattern with respect to a unit region,...
6963452 Compact imaging head and high speed multi-head laser imaging assembly and method  
An optical head having a laser source of beams at an input end and image forming beams at an output end and a plurality of optical components arranged along the beams between the input and output...
6897940 System for correcting aberrations and distortions in EUV lithography  
A system for correcting aberration and distortion in EUV lithography places a reticle on a deformable reticle chuck, and a reticle height sensor is used to measure the surface height of the reticle...
6816231 Method and apparatus for exposure  
Disclosed is an exposure method and apparatus (aligner) for exposure wherein there is reduced a physical load put on a driving mechanism which moves a supporting device for supporting a mask and an...
6549270 Exposure apparatus, exposure method and method for manufacturing devices  
In this exposure apparatus, position information such as the position, inclination, or shape of a first mirror, a second mirror, a third mirror, and a fourth mirror constituting a projection...
6426789 Aligner having shared rotation shaft  
An illumination optical system is revolved at a given speed around a rotation shaft and emanates exposure light onto a reticle. The light having passed through the reticle is projected onto a...
6403475 Fabrication method for semiconductor integrated device  
Annealing technology is capable of heating a wafer on which a copper film is formed at a desired temperature within a short period of time. A light-shielding plate 106 of SiC (silicon carbide)...
6359678 Exposure apparatus, method for producing the same, and exposure method  
When an illumination light beam is radiated by an illumination system at a predetermined angle of incidence θ with respect to a pattern plane of a mask, the illumination light beam is reflected by...
6259507 Radiation image read-out apparatus  
A stimulable phosphor sheet, on which a radiation image has been stored, is scanned with stimulating rays in a main scanning direction and moved in a sub-scanning direction, which is approximately...
6172784 Image reading apparatus  
An image reading apparatus includes a light source for illuminating an original, a plurality of mirrors for reflecting a light beam from the original illuminated with the light source, an imaging...
6141134 Multiple-resolution optical device  
A multiple-resolution optical device used to scan objects of variable sizes in various resolutions and forming corresponding images onto an image sensor is disclosed. The multiple-resolution...
5986744 Projection optical system, illumination apparatus, and exposure apparatus  
A projection optical system of the present invention comprises a shaping optical system which is disposed in an optical path between a first surface and a second surface on which an image of the...
5894371 Focus mechanism for varifocal lens  
A device (10) for changing the focus and field of view of an optical device having an optical element (19, 21) which is movable grossly to change field of view and movable incrementally to change...
5875376 Carriage positioning structure for a scanner  
A carriage positioning structure includes a carriage pivoted to a longitudinal guide rod and reciprocated along a longitudinal sliding rail inside a scanner between a bottom shell and a flat glass...
5845019 Image reader  
A low-cost and small-size image reader incorporating a variable power function. An original document is irradiated with the light from a light source. The light is reflected in a reading position....
5703676 Zoom lens system for a photographic copier  
A zoom objective for a photographic printer has a housing which accommodates two groups of lenses. One group is fixed and the other group is shiftable along the optical axis of the objective to...
5532091 Aligning method  
Three layer patterns are formed on a shot area, and wafer marks for X axis and wafer marks for Y axis are formed in each of the first to third layers. When a reticle pattern to be exposed has a...
5526095 Image reading apparatus having variable power optical system including first and second fixed focus lens groups  
An image reading apparatus equipped In an electronic copying apparatus has a variable-power optical system including a first and second fixed focus lens group mounted on a lens mount base. Each...
5486895 Optical system for printing normal and panoramic images  
An automatic printer for making prints of normal and panoramic format negative filmstrip image frames arbitrarily interspersed in a single filmstrip. Normal and panoramic projection systems are...
5457742 Wireless telephone remote control system  
A telephone remote control system for direct control of the dialing sequence of a telephone from a personal computer. The remote control system includes an RF transmitter unit mounted on a personal...
5369465 Image forming apparatus with magnification varying function  
There is provided an image forming apparatus having a magnification varying function for adjusting a lateral magnification and focus by varying the positions of a lens and a mirror of an exposure...
5367406 Optical device with inherent focusing error correction  
In an imaging apparatus, provided is an optical device which is capable of changing the magnifying power thereof. The optical device includes a zoom lens system having a power varying lens group...
5361122 Autofocusing device and projection exposure apparatus with the same  
A focusing method is disclosed wherein a substrate is moved substantially along a focal plane of a projection optical system up to a predetermined station adjacent to the focal plane of the...
5337121 Variable magnification copying apparatus  
A variable magnification copier apparatus includes an optical system which incorporates two pairs of moving mirror assemblies which are moved to maintain object and image conjugate requirements...
5329337 Lens loading apparatus  
A lens loading apparatus for loading a lens held by a holding member into a lens loading unit disposed in the center of a support plate which extends substantially in a horizontal direction. The...
5313250 Movement controlling device  
A variable power optical system having a mechanical system capable of moving a lens holder and a mirror holder having a predetermined relationship. A driving force moves the lens holder and the...
5237366 Scanning exposure-reproduction apparatus and scaling reproduction method therefor  
When an input reproduction scale m is equal to a value mla which lies in a reproduction scale section ml, rated moving speeds Ula and U2a corresponding to the reproduction scale m and a resonance...
5220378 Optical arrangement especially suitable for use in a high speed multi-magnification photofinishing printer  
A high speed multi-magnification photofinishing printer for selectively projecting images onto a projection plane containing photographic paper at a plurality of different magnifications is...
5202723 Method and device for driving a mirror for a photographic printer  
A mirror driving method, and device, for a photographic printer having a mirror diagonally movable into and out of a printing light path between a photographic film and a printing lens. The mirror...
5194894 Copying apparatus  
A copying apparatus is provided with a first scanning unit for scanning a first document to expose a photosensitive material and a second scanning unit for scanning a second document to expose the...
5153636 Reader printer  
When a film where a picture image is recorded in a vertical format is used in a reader printer with a horizontal type screen, the image rotating operation as well as the enlarging and reducing...
5146276 Rotatable focusing means and variable magnification electrophotocopier  
A variable magnification electrophotographic copier wherein the ratio of object and image distances is changed by rotating a focusing device about an axis orthogonal to its optical axis. In a...
5138369 Magnification adjusting mechanism  
In a magnification adjusting mechanism, preparatory movement position calculating means utilizes a current position where an optical system is positioned at present, and a target position for the...
5097290 Scanner for scanning an object from a plurality of positions  
A copying machine has an optical unit for forming a latent image on a photosensitive drum which corresponds to an original document supported for copying on a glass table of the copying machine....
5063406 Copying machine  
A copy machine (10) of the type for producing enlargements or reductions of an original material includes mirrors (14) for reflecting an image of the original material to a lens (16) and from the...
5057863 Variable magnification optics for an image forming apparatus  
Variable magnification optics for an image forming apparatus has a plurality of optical members, especially a first mirror and a lens located at the rear of the mirror, which are movable in...
5053810 Reprographic lens system and a reprographic camera comprising such a system  
A photographic lens system having three subsystems aligned about the optical center. The first system is a zoom lens. The second is a field lens or illumination source. The third subsystem is a...
5038168 Photographic printing apparatus  
The invention provides an apparatus for printing an image of a negative film on a photographic print paper. The apparatus is equipped with a zoom lens for changing a printing magnification rate and...
4965871 Continuous plural page copying method for a copier  
A continuous plural page copying method for a copier determines the size and lengthwise direction of a document which is laid on a glass platen, and produces magnifications on the basis of a...
4947206 Copying apparatus  
A copying apparatus has a paper size automatic selection function for automatically selecting papers of any desired size in a plurality of available sizes. The copying apparatus is provided with a...
4945384 Scanning-member-stop positioning device for the image forming apparatus  
A scanning-member-stop positioning device for the image forming apparatus, wherein a document in contact with a document glass plate is exposed due to the movement of a scanning member consisting...
4939545 Apparatus for adjusting optical system of an image forming apparatus  
Adjusting apparatus adapted to adjust the positions of a first moving frame and a second moving frame respectively engaged with a pair of wrapping power transmission members installed with a...
Matches 1 - 50 out of 221 1 2 3 4 5 >