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7609361 |
Substrate processing method and substrate processing system
A substrate processing method and a substrate processing system exclude wafers W provided with a protective film having surface defects that will cause components of a resist to dissolve in an...
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7604424 |
Substrate processing apparatus
A substrate processing apparatus comprises an indexer block, an edge-cleaning processing block, an anti-reflection film processing block, a resist film processing block, a development processing...
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7599042 |
Coating and developing apparatus, substrate processing method and computer-readable recording medium
With regard to a group of substrates preceding a substrate of which residence time is under calculation, a time t 1 and a time t 2 are calculated, t 1 being a time interval from a time point in...
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7597492 |
Coating and developing system, coating and developing method and storage medium
A buffer module is installed in a coating film forming unit block of a coating and developing system to reduce the number of interface arms needed by an interface block, and the manufacturing cost...
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7591601 |
Coater/developer, coating/developing method, and storage medium
A coater/developer is disclosed that includes a heating module having a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each...
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7586581 |
Developing method of photoresist and developing device
A developing device according to the present invention comprises a turntable, a motor for rotating the turntable and a spraying nozzle for spraying mixture of developer and nitrogen gas onto the...
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7575382 |
Coating/developing apparatus and operation method thereof
A coating/developing apparatus has a carrier block including a first transfer device, a process block including processing modules, an examination block including examination modules and a second...
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7563043 |
Coating/developing apparatus and substrate transfer method
In a coating/developing apparatus, a process section includes post-exposure baking units each having a waiting position and configured to perform a baking process on a substrate. An interface...
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7563042 |
Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus
A substrate carrying apparatus includes an arm body; supporting portion provided in the arm body and adapted to support a region inside the periphery of the rear face of the substrate; a one-side...
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7549811 |
Substrate treating apparatus
A forward direction-only path (first substrate transport path) is formed for transporting substrates in a forward direction to pass the substrates on to an exposing apparatus. A separate, substrate...
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7537401 |
Photo apparatus and method
A photo process apparatus including: a loading/unloading unit that loads and unloads a substrate; a coating line that coats photoresist on the substrate; an exposure line that exposes the...
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7530749 |
Coater/developer and coating/developing method
A coating and developing system prevents wetting its component units with water when the coating and developing system forms a resist film on a substrate and processes the substrate processed by...
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7525634 |
Monitoring apparatus and method particularly useful in photolithographically
Apparatus for processing substrates according to a predetermined photolithography process includes a loading station in which the substrates are loaded, a coating station in which the substrates...
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7510341 |
Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus
A temperature calibration method for a baking apparatus comprising forming a photoresist film onto a substrate, forming a latent image of a dose monitor mark onto the photoresist film, preparing...
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7508486 |
Exposure apparatus, exposure and developing system, and method of manufacturing a device
An exposure apparatus for exposing a substrate coated with a photosensitive material to radiant energy comprises a first controller and a second controller. The first controller is configured to...
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7497633 |
Substrate processing apparatus and substrate processing method
A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a drying/development processing block, and an interface block....
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7488127 |
Resist pattern forming apparatus and method thereof
A resist pattern forming apparatus comprising a controller having a controlling portion that controls a processing of a coating and developing apparatus with a coating unit and a developing unit...
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7486377 |
Developing method and developing apparatus
A developing method is used for subjecting a light-exposed resist film disposed on a wafer W to a developing process by a developing solution and a rinsing process by a rinsing liquid. In a state...
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7474377 |
Coating and developing system
A coating and developing system for enabling maintenance of an exposure system combined therewith. The system carries a substrate, delivered to a carrier handling block, to a processing block to...
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7461933 |
Sheet heater assembly having air bearing platelets
An air bearing sheet heater assembly is provided for heating a sheet in an ink imaging printer. It includes a heater plate that has a heating element and defines a first side of a sheet path...
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7445884 |
Photothermographic material, development method and thermal development device thereof
A thermal development device including: a thermal development section for heating to develop a latent image formed on a light-sensitive surface of a photothermographic material; a cooling section...
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7435021 |
Automatic development method of photosensitive lithographic printing plate and automatic development device thereof
A developer replenishing method of an automatic development device of photosensitive lithographic printing plate including developing a plurality of exposed photosensitive lithographic printing...
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7429036 |
Method and system for efficiently printing and sorting multiple orders of transaction cards
A system and method for printing and sorting non-identical transaction cards concurrently includes a printer which is configured to print onto multiple sheets (i) each of a plurality of...
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7422383 |
Photosensitive material processor
Developer is supplied to a first spray pipe disposed in a developing bath. The inside of the developing bath is provided with a heater. A liquid-flow generating unit comprises a liquid-flow...
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7403259 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method
A rework station and a metrology device(s) are incorporated into a lithographic processing cell so that a faulty substrate can be reworked directly and reprocessed without, for example, an overhead...
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7372537 |
Print processing apparatus capable of calibration printing
A photographic printing apparatus includes a transporting section for cutting photosensitive material drawn from one of a plurality of magazines each accommodating therein an elongated...
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7362344 |
Thermal developing apparatus
A thermal developing apparatus for thermally developing a latent image formed on a thermal developing recording material by a thermal developing portion, the apparatus comprising: a heating unit...
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7344322 |
Drying device and drying method
A drying device, which dries a photosensitive layer of a photosensitive planographic printing plate using infrared rays, includes an infrared emitting device and a filter that is arranged between...
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7338223 |
Developing method and apparatus for performing development processing properly and a solution processing method enabling enhanced uniformity in the processing
A substrate processing apparatus and method provide for exhausting air from a first peripheral region α around a substrate undergoing processing, and for exhausting air from a second peripheral...
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7330200 |
Thermal processor employing replaceable sleeve
A thermal processor for thermally developing an image in an imaging material. The processor includes an oven, at least one rotatable member positioned within oven, and a sleeve adapted to slideably...
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7316515 |
Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid
In a liquid processing apparatus a spin chuck holds a wafer having a surface supplied with a liquid to be applied through a nozzle receiving the liquid through a feed path and whether the liquid...
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7304657 |
Image processing apparatus, method, and program
An image processing apparatus including an exposing device, a developing device, a density measuring device to measure a density value of the developed film sheet, a calibrating device to calibrate...
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7284917 |
Coating and developing system and coating and developing method
A coating and developing system is capable of preventing the contamination of a substrate with particles while the same coats a surface of a substrate with a resist film and develops the resist...
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7283144 |
Heat developing apparatus and heat developing method
This heat developing method includes a step of forming a latent image on a heat developing photosensitive film sheet and a step of developing the film sheet, while the film sheet on which a latent...
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7281869 |
Coating and developing system and coating and developing method
A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film...
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7275879 |
Processing device of photo-sensitive material
Disclosed is a processing device of a photo-sensitive material which comprises a conveying device for conveying a photo-sensitive material, a slot die for applying a processing liquid to the...
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7274429 |
Integrated lithographic fabrication cluster
An integrated lithographic fabrication cluster system, as presented herein, comprises an exposure apparatus to expose a pattern onto a substrate with an associated exposure controller to control...
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7268853 |
Exposing systems providing post exposure baking and related methods
A system for photolithography may include an exposure chamber providing a first isolated environment, an exposure stage in the exposure chamber, a radiation source, an interface chamber providing a...
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7262829 |
Coating and developing apparatus and coating and developing method
A coating and developing apparatus includes a process block which includes a unit block for coating-film formation which applies a resist, and a unit block for development which performs a...
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7230672 |
Image recording apparatus and image recording method
A movable guide is switchable between a guide position for regulating a flexure of a cut paper, and a release position for allowing the flexure of the cut paper. The movable guide is disposed...
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7224376 |
Photo-thermographic recording apparatus
A photo-thermographic recording apparatus, comprises a film loading device capable of loading a sheet type photo-thermographic film, a conveyance device for conveying the photo-thermographic film...
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7215350 |
Thermal developing equipment
A thermal developing equipment including a conveying unit for conveying a sheet-like photosensitive material and a heating unit for thermally treating a latent image formed on an image forming...
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7210865 |
Automatic developing apparatus and process for forming image using the same
A photographic light-sensitive material having a support having a thickness of from 160 to 225 μm is processed with an automatic developing apparatus, in which at least one of rollers of a...
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7210864 |
Coating and developing apparatus
A wafer flow recipe is prepared. Based on this wafer flow recipe, there are estimated and calculated respectively a PCD time from a time point at which a process for coating a resist liquid on a...
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7182531 |
Developing method and apparatus
In this developing method and apparatus, a concentration measuring unit 222 picks part of developing fluid in a blending tank 186 to measure the resist concentration by an absorption photometry and...
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7168866 |
Multi-chamber washing device for photosensitive material
A washing bath in a photographic paper processor has plural washing chambers for washing photographic paper with washing water by passage of the photographic paper. Plural cell units are coupled...
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7158216 |
Heat developing apparatus
A heat developing apparatus comprising an image exposure portion in which a heat development recording material containing a heat development photosensitive material or a photosensitive...
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7158164 |
Thermal development method and apparatus
In a thermal development method for generating a image from a latent image recorded on an image formation layer of a photosensitive photothermographic recording material, by means of heating the...
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7153045 |
Electro-mechanical system and method for mixing replenishment for plate precursor developers
The present invention provides a system and method for replenishing a lithographic printing plate developer. The system includes a developer unit containing a seasoned developer and adapted to...
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7147390 |
Replenishment system for a print media processor
A system for supplying a processing solution to a printing device, such as a photographic processor or a printer, which includes a supply tank with processing solution or ink and a delivery system...
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