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7627959 |
Centrifugal dryer and methods for the control thereof
A dryer for the removal of moisture or solvents from fine specialty chemicals and pharmaceuticals after their production, comprises a rotating drying compartment ( 2 ) which consists of at least...
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7621213 |
Salad spinner
A salad spinner is disclosed, comprising an outer bowl; an inner basket receivable in the outer bowl; a lid placed over the outer bowl; a drive and brake mechanism combination comprising a rotary...
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7618471 |
Method and apparatus for separating liquid droplets from a fluid flow stream
A device for recovering liquid droplets from a fluid flow stream including a rotatable element comprising wall elements configured to partially enclose a volume with an annular perimeter wall that...
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7596886 |
Method and system to separate and recycle divergent chemistries
In one embodiment of the invention, an apparatus for collecting fluid within a wafer cleaning chamber is provided. The apparatus includes a rotatable annular manifold configured to support a wafer...
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7559155 |
Method and system for drying semiconductor wafers in a spin coating process
The invention provides methods and apparatus for drying the backside of semiconductor wafers in a spin-coating environment. Solvent is evaporatively dried from a semiconductor wafer held in a spin...
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7448315 |
Food drying device with separable lid and cover
A device for drying food is disclosed in an embodiment as a container including a bowl having a side wall terminating at a top edge defining an opening and a cover substantially covering the...
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7337712 |
Vessel for separating and collecting excess oil from deep fried foods disposed therein before the sauteing thereof
A vessel for separating and collecting excess oil from deep fried foods disposed therein before the deep fried foods are sauted. A colander is rotatably mounted in a pot and holds the fried foods....
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7325329 |
Salad spin-drier
A salad spin-drier with a bowl of glass or ceramic so that part of the water collection bowl, which until now has been purely functional, may be simultaneously used as a serving bowl for the salad....
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7228645 |
Multi-zone shower head for drying single semiconductor substrate
A shower head processes a wafer with a plate having a plurality of nozzles positioned thereon, each of the nozzles assigned to one of a plurality of processing zones for the wafer; and a manifold...
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7171720 |
Device for expelling liquid from a wiping element
The invention relates to a device for expelling liquid from a wiping element which is held on a wiping head of a surface cleaning device so as to form a wiping surface, comprising a container, in...
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7127828 |
Lockdown rotor for a processing machine
A rotor that may be used by itself or in a processing machine for processing semiconductor wafers includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by...
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7111546 |
Salad spinner with improved drive assembly
A salad spinner for drying food articles and household items includes a transparent bowl and a perforated basket disposed in the bowl. The basket further includes a cylindrical wall connected to a...
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7103990 |
Rotary silicon wafer cleaning apparatus
It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the...
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7100304 |
Megasonic cleaner and dryer
An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying...
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7080463 |
Food drying, mixing and serving apparatus
A salad spinner and mixer may be made from two substantially identical transparent bowls that can be joined together at their rims to define a chamber; two substantially identical colanders that...
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7028415 |
Canted manually loaded produce dryer
A drying apparatus for use with many kinds of objects, but is particularly suited for use in drying most kinds of produce and vegetables including leaf vegetables. In one embodiment, the dryer...
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7002134 |
Dryer lid/robot collision prevention system
A dryer lid/robot collision prevention system which prevents inadvertent collision of a spin dryer lid with a transfer robot as the robot approaches and loads wafer-containing cassettes into the...
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6993854 |
Centrifugal dryer, manufacturing method for semiconductor device and semiconductor manufacturing apparatus
A centrifugal dryer of the present invention includes: a chamber for performing drying processing for plural substrates; a cradle, installed inside chamber, and drying plural substrates by rotation...
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6988327 |
Methods and systems for processing a substrate using a dynamic liquid meniscus
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to...
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6938357 |
Forced air circulation for centrifugal pellet dryer
An improved centrifugal pellet dryer that employs forced air in the direction opposite that of the pellet travel through the dryer. The air may be preheated depending on the particular product. The...
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6928751 |
Megasonic cleaner and dryer system
An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a...
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6899021 |
Salad spin dryer
A salad shaker having a lower part of a container and a cover which is placed on the cover and has a cable pull drive by which the salad sieve can be rotated. The drive is connected to a rotating...
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6892472 |
Method and apparatus for cleaning and drying a workpiece
A method and apparatus for rinsing and spin-drying a hydrophobic material such as a hydrophobic semiconductor wafer improves wafer drying while at the same time reduces the formation of residual...
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6848194 |
Apparatus for monitoring a semiconductor wafer during a spin drying operation
An apparatus for spin drying a semiconductor wafer includes a hollow core spindle and a chuck assembly having grippers for supporting a wafer at an edge thereof. A sleeve is disposed in the central...
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6837969 |
Method for the concentration of liquid mixtures
A method for the concentration of liquid mixtures includes the step of causing a continuous stream of the liquid mixtures to flow in the form of a turbulent thin layer in contact with a heated...
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6834440 |
Wafer spin drying apparatus with a plurality of supply nozzles and methods for using the same
An apparatus for drying a wafer includes a rotating chuck configured to rotate the wafer. A movable de-ionized water supply member and an organic solvent supply member are positioned adjacent a...
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6827092 |
Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same
An apparatus for preparing a wafer is provided. The apparatus includes a wafer backside plate and a central shaft. The wafer backside plate has a top surface that includes a cylindrical edge lip,...
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6763605 |
Centrifugal drill cuttings drying apparatus
A vertical, centrifugal separator used for drying drill cuttings prior to transport or further processing. The separator is adapted to receive scavenged heat from any source and is further adapted...
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6754980 |
Megasonic cleaner and dryer
An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying...
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6754975 |
Microelectronic substrate retainer apparatus providing reduced microelectronic substrate damage
An apparatus for attenuating physical damage to a substrate, along with an attendant method, comprises as a first component a base plate having defined therein a location for receiving a substrate...
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6745489 |
Apparatus for drying a stack of flats
Spin drying of a stack of flats such as egg trays is performed within a housing by movement of a rotatable lifting head into engagement with the undersurface of the stack. A stack lifting device...
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6742279 |
Apparatus and method for rinsing substrates
Embodiments of the invention provide a spin rinse dry (SRD) chamber for a semiconductor processing system. The SRD chamber includes a selectively rotatable substrate support member having an upper...
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6739457 |
Deflector for centrifugal pellet dryer screen
A deflector mounted on the internal surface of a cylindrical screen in a centrifugal pellet dryer. The deflector is one or more vertical strips mounted in spaced relation on the interior surface of...
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6729038 |
Roller squeegee and spinner adapter
A roller squeegee and spinner adapter tool is disclosed for safely, easily, speedily and thoroughly removing paint or other coating material from a roller by squeegeeing or sliding the major bulk...
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6725564 |
Processing platform with integrated particle removal system
Embodiments of the invention generally provide a multistage semiconductor processing tool, wherein the processing tool includes a first transfer chamber having a first substrate transfer robot...
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6702900 |
Wafer chuck for producing an inert gas blanket and method for using
A wafer chuck for use in a semiconductor process chamber capable of producing an inert gas blanket positioned on the chuck from residual chemical vapor in the chamber is disclosed. A plurality of...
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6658761 |
Method and apparatus for centrifugally dehydrating workpiece
In a method for centrifugally dehydrating a pallet or the like, the pallet or the like is held on a diagonal line thereof, and is rotated in a state where the diagonal line is substantially aligned...
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6655039 |
Centrifugal dryer
For separating and drying pellets from a suspension, centrifugal dryers have proved successful wherein a rotor equipped with conveyor blades and disposed vertically in an outside housing for...
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6622618 |
Salad spinner
A battery-operated two-speed salad spinner. The bowl receives one of two differently sized baskets. A cover includes a driving mechanism that rotates a selected bowl through a driving wheel.
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6618956 |
Device for dewatering and drying suspensions
The operation of dewatering and drying devices which consist of a dewatering centrifuge and a concentrically arranged spray drier may be disturbed by leaks between the drier housing and the...
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6612014 |
Dual post centrifugal wafer clip for spin rinse dry unit
An apparatus and associated method for securing a wafer to a SRD spider, the SRD spider has a plurality of spider arms. The apparatus includes a plurality of spaced surfaces disposed on a distal...
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6598278 |
Sponge sleeve installation appliance
A sponge sleeve installation appliance for installing a sponge sleeve onto a roller has an elongated socket body including a sleeve portion and a tapered portion. The sleeve portion has an outer...
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6591514 |
Centrifuge for draining washed egg trays
A centrifuge for draining washed egg trays comprises a centrifuge chamber in a housing ( 9 ). A bottom ( 8 ) for receiving a washed stack ( 7 ) of egg trays in a feeding position is displaceable...
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6571488 |
System for sensing position of spin dryer cover
Embodiments of the present invention relate to an apparatus for spin drying substrates in a spin dryer tank. A spin dryer cover is movable between a closed position to close an opening of the spin...
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6536131 |
Wafer handling system
A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a...
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6510785 |
Hand operated centrifugal dryer
A centrifugal dryer for leafy comestibles includes a basket within a cylindrical cabinet. Overlying the cabinet is a cover assembly having a lid, an external crank arm and a gear train sealed...
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6506311 |
Method and apparatus for processing wet material
A wet material treatment apparatus includes an inlet hopper for introducing the wet material into the apparatus. The hopper feeds the wet material into an injector auger that physically directs the...
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6487792 |
Method and apparatus for agitation of workpiece in high pressure environment
An apparatus for agitating a workpiece in a high pressure environment comprises a workpiece holder, a bearing, a pressure chamber housing, and a nozzle. The workpiece holder couples to the pressure...
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6473988 |
Auxiliary container for salad spinner
A food drying device of the type which includes an outer housing, a perforated main container in the housing and a drive apparatus on the housing for rotating the main container relative to the...
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6460269 |
Wafer dryer comprising revolving spray nozzle and method for drying wafers using the same
A wafer dryer for drying a wafer includes a chamber and a support adapted to support the wafer in the chamber. A spray nozzle is disposed in the chamber. A source gas supply tank is in fluid...
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