|
Match
|
Document |
Document Title |
|
|
7497221 |
Method for cleaning deposition chamber
A method for cleaning a tube-shaped chamber after performing at least one deposition process includes equipping a tube-shaped cleaner into a loading chamber, loading the tube-shaped cleaner into...
|
|
|
7441345 |
Laundering aid removing adherent matter from fabric articles
A laundering aid having a core member, such as an elastomeric ball member, that includes a covering comprising an abrasive or brush-like material adapted for engaging and lifting matter, such...
|
|
|
7383643 |
Method for drying veneers
An apparatus and method is provided to dry veneer or other items by vaporization of moisture in the item. Apparatus has an insulated chamber with a frame and a drawer with a door. A mesh surface of...
|
|
|
7367139 |
Vacuum processing apparatus and method operation thereof
This vacuum processing apparatus has a fixed processing chamber 24 and two movable load lock chambers 28 a and 28 b . A gate valve 26 is provided on the processing chamber 24, and gate...
|
|
|
7351307 |
Method of dewatering a fibrous web with a press belt
A method of dewatering a fibrous web in a paper machine including the steps of carrying the fibrous web on a side of a first fabric; contacting the fibrous web with a side of a second fabric, the...
|
|
|
7347007 |
Low pressure high capacity dryer for resins and other granular and powdery materials
A vacuum dryer and method for drying granular or powdery material including at least one canister for holding said material being movable among a series of locations including material heating and...
|
|
|
7347006 |
Processing apparatus and method for removing particles therefrom
A processing apparatus includes a first detection unit for detecting a temperature of an inner wall of the vacuum vessel, a second detection unit for detecting a temperature of the processing unit,...
|
|
|
7343698 |
Reduced pressure drying apparatus and reduced pressure drying method
A reduced pressure drying apparatus comprises a substrate stage section for disposing thereon a substrate having the surface coated with a coating liquid containing a film-forming component and a...
|
|
|
7306680 |
Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus
A lithographic mask is placed in a chamber which is then sealed. The gas pressure in the chamber is reduced to dislodge contaminant particles on the mask surface.
|
|
|
RE39824 |
Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum...
|
|
|
RE39823 |
Vacuum processing operating method with wafers, substrates and/or semiconductors
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum...
|
|
|
6996919 |
Process for obtaining dry extracts under mild conditions
The invention concerns a method for obtaining dry plant extracts under mild conditions, in which a liquid plant extract is introduced into a vacuum drying equipment having a multi-shaft stirrer...
|
|
|
6968631 |
Method and apparatus for determining presence of moisture in freeze dryer vacuum line
A freeze dryer having a collector chamber is provided with a sensor for detecting the presence of moisture in the chamber so that the vacuum pump cannot be operated if moisture is present. The...
|
|
|
6925731 |
Thin film forming apparatus cleaning method
A cleaning process for cleaning a thermal processing apparatus includes: a heating step of heating an interior of a reaction tube at 300° C., and a cleaning step of removing deposits deposited in...
|
|
|
6922912 |
Drying apparatus
The invention provides drying apparatus including a first chamber for receiving articles to be dried and having an outlet, a second chamber having an outlet, and a fan having a fan inlet and a fan...
|
|
|
6889447 |
Method for drying a wafer and apparatus for performing the same
An instantaneous pressure reducing heating and drying apparatus for an object, such as a wafer, includes a pressure reducing chamber; a vacuum pump for reducing a pressure in the pressure reducing...
|
|
|
6877249 |
Method of drying a lactulose solution
A method of drying a lactulose solution comprises introducing the solution into a vacuum chamber at elevated temperature and at reduced pressure so that the solution forms a foam, drying the foam...
|
|
|
6792693 |
Wafer dryer system for PRS wet bench
A wafer dryer system which is suitable for drying rinse water from substrates in the event of a system malfunction or failure during or after rinsing of the substrates. The wafer dryer system...
|
|
|
6746573 |
Method of drying fibrous structures
A method for drying fibrous webs utilizing a limiting orifice medium with a plurality of pores. The web is disposed on a supporting fluid permeable carrier. The web is pressed between the...
|
|
|
6739073 |
Method and apparatus for performing multiple cleaning and vacuum drying operations in enclosed vessels
A method for performing multiple cleaning and vacuum drying operations in enclosed vessels uses cleaning and vacuum drying apparatus, low-dissolved-air cleaning solution, and drain-to-vacuum...
|
|
|
6725565 |
Method for vacuum drying of substrate
A method for vacuum drying of a substrate which can eliminate not only the moisture adhered to the substrate surface but also the moisture impregnated inside of the films which form the devices in...
|
|
|
6722057 |
Method of drying thermoplastic norbornene resin and method of manufacturing magnetic recording medium
The gas components in thermoplastic norbornene resin pellets are suppressed below certain levels by drying the resin under vacuum or under the ordinary pressure and under vacuum. A substrate for...
|
|
|
6722055 |
Supporting fixture of substrate and drying method of substrate surface using the same
A supporting apparatus for supporting a substrate in drying a substrate surface of the substrate including a supporting rod having a hollow interior portion and a groove configured to support a...
|
|
|
6655045 |
Apparatus and method for pick and place handling
This invention relates to a method and apparatus for pick and place handling of electronic components that have been formed on a common substrate and then separated on a cutting chuck. A...
|
|
|
6640462 |
Method of drying wood and a system therefor
Disclosed is a method of drying timbers loaded in a drying chamber, which comprises the steps of heating the drying chamber by a heating system up to a temperature of 80 to 100° C., subjecting the...
|
|
|
6630031 |
Surface purification apparatus and surface purification method
By a simple apparatus construction and process, it is made possible to “clean precisely” a surface at the molecular/atomic level, and the purification degree of the surface processed minutely...
|
|
|
6569331 |
Method for animal excreta processing
The method and apparatus for processing of animal excreta or manure for further use or environmentally friendly disposal introduces a new first stage and ancillary elements for improved processing...
|
|
|
6550158 |
Substrate handling chamber
An apparatus and method for reducing particles in reactors. The apparatus includes an enclosure with a wafer handling chamber connected by an isolation gate valve to a processing chamber. Pipes...
|
|
|
6543155 |
Freeze-dried product and process and apparatus for producing it
Freeze-dried products of high quality produced from materials to be freeze-dried in a freeze-drying apparatus comprising a sealed vessel enclosing a processing chamber provided therein with a...
|
|
|
6470593 |
Ejector device for vacuum drying
The present invention relates to an ejector device for vacuum drying having at least first and second passages for connecting a first chamber with a second chamber, wherein the chambers are...
|
|
|
6457259 |
Portable apparatus for drying stator windings and related process
A transportable skid for drying and testing generator stator windings includes a platform supporting a compressor adapted to supply compressed air to the stator winding; a dryer arranged to receive...
|
|
|
6409932 |
Method and apparatus for increased workpiece throughput
A method is disclosed for speeding workpiece thoughput in low pressure, high temperature semiconductor processing reactor. The method includes loading a workpiece into a chamber at atmospheric...
|
|
|
6330755 |
Vacuum processing and operating method
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum...
|
|
|
6192601 |
Method and apparatus for reducing particle contamination during wafer transport
The present invention provides method and apparatus for reducing particulate contamination during the processing of a substrate. In one embodiment, the step of preheating a substrate in a preheater...
|
|
|
6170171 |
Vacuum drying of semiconductor fragments
A method and apparatus for drying semiconductor fragment material, has at least one vacuum-tight chamber with at least one receiving means for semiconductor fragment material, and there is a means...
|
|
|
6151796 |
Substrate drying device, drying method and substrate dried by the same
A substrate drying device includes a reduced pressure enclosure including an airproof door, and an exhaustion device. Inside of the enclosure is caused to be a sealed state when the airproof door...
|
|
|
6044576 |
Vacuum processing and operating method using a vacuum chamber
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum...
|
|
|
5939071 |
Process for producing pharmaceutical preparations having a higher content of active plant ingredients
The present invention relates to a process for preparing dry plant extracts and pharmaceutical preparations containing such extracts having a high content of active plant ingredients such as...
|
|
|
5857840 |
Vacuum pump with a centrifugal dust collector and a metal mesh dust collector mounted in parallel
The objects of the present invention are to remove the dust in a closed container, to keep the pressure in the closed container within a predetermined range, and to shorten the maintenance time of...
|
|
|
5647143 |
Vacuum-degreasing cleaning method
Herein disclosed are a vacuum-degreasing cleaning method for degreasing a work by cleaning it with a solvent vapor under reduced pressure, and a vacuum-cleaning machine for practicing the method....
|
|
|
5561914 |
Sand drying apparatus
A mobile Sand Dryer is disclosed. This dryer is substantially made up of two portions. The first portion of the Sand Dryer is a wet sand tank. This tank is essentially divided into two distinct...
|
|
|
5548905 |
Rapid dehydrating and drying method and device usable in low temperature
A high speed negative pressure air stream from a sucking-out nozzle or a combination of a high speed negative pressure air stream from the sucking-out nozzle and a high speed air jet stream from a...
|
|
|
5352250 |
Process of treating lacquer coagulum and its use
The invention relates to a process for treating (recycling) lacquer coagulum containing lacquer overspray and layered silicate containing coagulating agents, in which the layered silicate...
|
|
|
5263268 |
Vacuum drying system with cryopumping of solvent recovery feature
In the drying of solvents-containing material in a vacuum concentrator and which involves condensation of evolved solvents in a cold trap, simplified and inexpensive flow blocking devices are...
|
|
|
5249368 |
Apparatus and method for isolated remediation of contaminated soil
An apparatus and method is provided using a standard sized and shaped roll-off trash container sealed to contain contaminated soils to be treated with a central lengthwise vacuum tube to draw off...
|
|
|
5237756 |
Method and apparatus for reducing particulate contamination
A pressure sealed chamber such as a load lock for a apparatus for processing substrates is provided with a guide plate spaced from a substrate supported therein so as to form a gap which covers the...
|
|
|
5203927 |
Washing/drying method with an aqueous solution containing surfactant
A washing/drying method, comprising: dipping a material to be washed into an aqueous solution containing a surfactant having a water repellency so that at least one molecular layer of the water...
|
|
|
5199186 |
Vacuum-operated veneer dryer
A vacuum dryer that has upper and lower platens brought together against the load handled by the application of a vacuum. A manifold, with means for producing a pressure within the manifold...
|
|
|
5160628 |
Method of making a filler from automotive paint sludge, filler, and sealant containing a filler
A method for making a filler from automotive paint sludge is provided. Paint sludge containing water, solvent and uncured polymer resin is treated by removing a first portion of the water by...
|
|
|
5103578 |
Method and apparatus for removing volatile organic compounds from soils
Volatile compounds such as polychlorinated biphenyls (PCB's) which contaminate a soil can be removed--without incineration--by a process which generally involves: (1) introducing the contaminated...
|