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7623007 |
Device including piezoelectric thin film and a support having a vertical cross-section with a curvature
An acoustic resonator includes a substrate, a support section provided on the substrate, a lower electrode provided on the support section, a piezoelectric body provided on the lower electrode, and...
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7619493 |
Bulk acoustic resonator and filter element
A bulk acoustic resonator has an acoustic reflector portion formed on a substrate and including one or more low acoustic impedance layers and one or more high acoustic impedance layers having a...
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7619492 |
Film bulk acoustic resonator and a method for manufacturing the same
A film bulk acoustic resonator (FBAR) including a substrate having an etched air gap therethrough; a resonance part having a first electrode, a piezoelectric film and a second electrode which are...
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7612635 |
MEMS acoustic filter and fabrication of the same
A MEMS acoustic filter has a MEMS resonator and at least two acoustic I/O ports to alter an input acoustic signal to an output acoustic signal. The first I/O port is adapted for interfacing with a...
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7609133 |
Piezoelectric thin film device having an additional film outside an excitation region
An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is...
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7609132 |
Hybrid resonant structure
A bulk wave acoustic resonant structure which is in accordance with the invention allows the difficulties encountered at high frequency, the impossibility of working at low frequency on simple...
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7602101 |
Piezoelectric thin-film resonator and filter using the same
A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and...
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7598827 |
Harmonic termination of power amplifiers using BAW filter output matching circuits
A system, apparatus and method for providing filtering functionality and impedance transformation within a BAW resonator network are disclosed. In particular, a BAW resonator network is designed to...
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7598826 |
Piezoelectric thin film device having a drive section with a weighted portion
There is provided a piezoelectric thin film device with its frequency impedance characteristic unsusceptible to spuriousness. A film bulk acoustic resonator has a configuration where an adhesive...
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7588960 |
Nanotube device structure and methods of fabrication
Nanotube device structures and methods of fabrication. A method of making a nanotube switching element includes forming a first structure having at a first output electrode; forming second...
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7586390 |
Bulk acoustic wave resonator, bulk acoustic wave filter, RF module including bulk acoustic wave resonator and/or filter, and bulk acoustic wave oscillator
A bulk acoustic wave resonator which has excellent elasticity and high electromechanical energy conversion efficiency. A bulk acoustic wave resonator comprises a substrate, a lower electrode formed...
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7583163 |
Acoustic wave filter and manufacturing method of the same
A technique capable of integrally forming SMR type acoustic wave filters corresponding to multiple bands on the same chip at low cost is provided. In SMR type acoustic wave filters including...
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7583162 |
Piezoelectric device and method for manufacturing the piezoelectric device
A piezoelectric device includes a piezoelectric substrate having a connection pad, a package having an electrode pad, and a connection member to connect the electrode pad to the connection pad, the...
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7579662 |
MEMS resonator and method of enhancing an output signal current from a MEMS resonator
The resonator comprises two capacitively coupled electrodes. One of the electrodes is made of a p-type doped semiconductor material, whereas the other electrode is made of an n-type doped...
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7573350 |
Resonator matching network
An input-matching network including an acoustic resonator providing a virtual impedance to match impedance between a first component and second component. As an example, the first component may be...
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7573178 |
Acoustic wave device, resonator and filter
An acoustic wave device includes a piezoelectric substrate, comb electrodes formed above the piezoelectric substrate, and a first dielectric film provided so as to cover the comb electrodes, the...
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7570135 |
Piezoelectric vibrator and method for producing the same, an oscillator, an electronic unit and a wave timepiece
A method is provided for producing a piezoelectric vibrator having an airtight terminal comprised of an annular stem, a lead disposed to pass through the stem and formed of a conductive material,...
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7562429 |
Suspended device and method of making
A substrate defining a cavity comprising a wide, shallow first portion and a narrow, deep second portion is provided. The first portion of the cavity extends into the substrate from the front side...
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7561010 |
Piezoelectric thin film resonators
A piezoelectric thin film resonator is formed on a base substrate such as made of Si in which the resonance frequency is substantially determined by the lateral size not by the thickness of the...
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7555824 |
Method for large scale integration of quartz-based devices
Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are...
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7554427 |
Thin film bulk acoustic wave resonator and filter, and radio frequency module using them
A thin film bulk acoustic wave (BAW) resonator structure and filter which can be fabricated by inexpensive manufacturing techniques and in smaller size than conventional such products are to be...
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7554426 |
Resonator, apparatus having the same and fabrication method of resonator
A resonator includes a substrate, and a resonating unit formed on the substrate, and having a lower electrode, a piezoelectric film, and an upper electrode. The lower electrode is formed of at...
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7548139 |
Coupled resonator filter and fabrication method thereof
A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second...
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7545077 |
Filter having multiple piezoelectric thin-film resonators
A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper...
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7535324 |
Piezoelectric resonator structure and method for manufacturing a coupled resonator device
A method for manufacturing a coupled resonator device includes forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the...
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7535322 |
Monolithic RF filter
A filter formed of film bulk acoustic resonators has a topology that enables a trimming inductor to be fabricated on the same substrate as the resonator arrays. The entire filter can be fabricated...
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7532091 |
Piezoelectric vibrator, surface-mounting type piezoelectric vibrator, oscillator, electronic apparatus and wave clock
A piezoelectric vibrator has an airtight terminal including leads each having a plane portion. A vibrating piece includes a first part having a preselected thickness and a second part having a...
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7528682 |
Electronic apparatus having display portion and oscillator and manufacturing method of the same
In an electronic apparatus comprising a digital display portion and first and second oscillators comprising first and second oscillating circuits, each of the first and second oscillating circuits...
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7528681 |
Acoustic devices using an AlGaN piezoelectric region
Provided is a method of forming an acoustic based device, including forming an AlGaN region having a first surface and a second surface. A first electrode is deposited on the first surface of the...
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7525399 |
Thin-film piezoelectric resonator, filter and voltage-controlled oscillator
A thin-film piezoelectric resonator includes a substrate, and first and second excitation portions. The substrate includes first and second cavities. The first excitation portion is disposed over...
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7522019 |
Internal electrostatic transduction structures for bulk-mode micromechanical resonators
An electrostatic transducer for micromechanical resonators, in which the electrode gaps are filled with a dielectric material having a much higher permittivity than air. This internal electrostatic...
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7522018 |
Electro-acoustic resonator with a top electrode layer thinner than a bottom electrode layer
An electro-acoustic resonator ( 1, 8, 17 ) of the membrane or FBAR type ( 1 ) or the solidly-mounted or SBAR type ( 8 ), with electrodes comprising a single conducting layer or multiple conducting...
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7504910 |
Thin-film piezoelectric resonator utilizing a second or higher harmonic mode
A thin-film piezoelectric resonator having a thin-film portion with a piezoelectric thin film disposed between a pair of opposing electrodes, an insulating layer formed on one of the pair of...
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7501068 |
Method for manufacturing resonator
A method for manufacturing a resonator of the present invention includes the steps of (a) forming a resonator film including a piezoelectric film made of piezoelectric material and (b) preparing a...
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7498904 |
Piezoelectric thin film resonator and devices provided with the same
A piezoelectric thin film resonator includes a substrate in which a cavity is formed, a first electrode having a first electrode edge and partly spanning the cavity on the substrate; a...
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7498900 |
System on chip structure comprising air cavity for isolating elements, duplexer, and duplexer fabrication method thereof
A duplexer which prevents effects between transmitter and receiver filters. The duplexer include a substrate, a transmitter filter fabricated in a predetermined first area on a surface of the...
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7492241 |
Contour-mode piezoelectric micromechanical resonators
A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode....
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7486160 |
Electronic component and manufacturing method thereof
There is provided an electronic component excellent in moisture resistance capable of ensuring electrical connection between electrodes and hermeticity of a sealed region including a vibrating part...
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7486003 |
Polymer bulk acoustic resonator
A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied...
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7482738 |
Piezoelectric thin-film resonator and filter
A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film...
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7479847 |
Filter using piezoelectric resonator
A series piezoelectric resonator 11 is connected in series between an input terminal 15 a and an output terminal 15 b . A first electrode of a parallel piezoelectric resonator 12 a is...
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7479685 |
Electronic device on substrate with cavity and mitigated parasitic leakage path
An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface...
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7466213 |
Resonator structure and method of producing it
In order to provide a resonator structure ( 100 ) in particular a bulk-acoustic-wave (BAW) resonator, such as a film BAW resonator (FBAR) or a solidly-mounted BAW resonator (SBAR), comprising at...
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7463118 |
Piezoelectric resonator with an efficient all-dielectric Bragg reflector
A piezoelectric resonator with an acoustic Bragg reflector that includes alternating layers of high and low acoustic impedance materials. The high and low acoustic impedance dielectric materials...
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7463117 |
Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR
A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the...
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7456709 |
Bulk acoustic resonator including a resonance part with dimple and fabrication method therefor
A bulk acoustic resonance and a method for fabricating the bulk acoustic resonator, the bulk acoustic resonator including: a substrate including an upper surface defining a predetermined area...
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7456708 |
Piezoelectric plate electric connection structure
A piezoelectric plate electric connection structure aims to receive an input voltage from a voltage source and goes through a polarization process to deliver an output voltage. It has an input...
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7456707 |
Resonator and filter using the same
An acoustic resonator includes: a substrate; a resonator film which is supported above the main surface of the substrate and includes a piezoelectric film and a pair of a top electrode and a bottom...
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7443270 |
Film bulk acoustic resonator, filter circuit and method for manufacturing a film bulk acoustic resonator
A film bulk acoustic resonator includes a substrate having a cavity at a surface of the substrate; a bottom electrode provided on the surface of the substrate so as to extend over the cavity; a...
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7439825 |
Integrated filter including FBAR and saw resonator and fabrication method therefor
An integrated filter including a film bulk acoustic resonator (FBAR) and a surface acoustic wave (SAW) resonator and a method of fabricating the integrated filter. The integrated filter includes: a...
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