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7635843 |
In-line reliability test using E-beam scan
A method of testing a semiconductor wafer having a test structure performs an E-beam stress scan of the test structure in an E-beam system to electrically stress the test structure to produce a...
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7602198 |
Accuracy enhancing mechanism and method for current measuring apparatus
An optical interferometer used to measure the current in a conductor, where the gap between the mirror and the quarter wave plate is minimized, and the gap is shielded magnetically. Additionally,...
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7598755 |
Probe navigation method and device and defect inspection device
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can...
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7592826 |
Method and apparatus for detecting EM energy using surface plasmon polaritons
An apparatus and method are disclosed for detecting electromagnetic (EM) energy. An exemplary apparatus includes a dielectric layer for receiving incident EM energy, a metal film and a circuit. The...
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7560940 |
Method and installation for analyzing an integrated circuit
A method and installation for analyzing an integrated circuit. The method includes, for a plurality of surface points of the integrated circuit, the following steps: applying a laser radiation, in...
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7548077 |
Measuring apparatus and a measuring method for measuring a polarization characteristic of an optical system
A measuring apparatus is disclosed which includes an interferometer for measuring a wavefront of light transmitted through a test object by interference between light under test passed through the...
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7532019 |
Measuring apparatus and measuring method
A measuring apparatus includes an interferometer for measuring a wavefront of light transmitted through a test object by interference between light under test passed through the test object and...
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7521946 |
Electrical measurements on semiconductors using corona and microwave techniques
A corona-microwave system can generate accurate capacitance-voltage (C-V) and resistance-voltage (R-V) curves, thereby allowing the accurate determination of gate film capacitance, sheet resistance...
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7498561 |
Arrangement for the detection of illumination radiation in a laser scanning microscope
An arrangement for the detection of the illumination radiation in a laser scanning microscope, wherein a portion of the illumination radiation is coupled out and detected at the main color...
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7479779 |
Image sensor test system
An image sensor test system ( 10 ) bringing input/output terminals of an image sensor into contact with a contact ( 61 ) of a test head ( 60 ), emitting light to alight receiving surface of the...
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7453273 |
Method and apparatus for analyzing current in an integrated circuit under test
Method and apparatus for analyzing current in an integrated circuit under test is described. In one example, an image from detected photon emissions from the integrated circuit is generated. A...
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7446543 |
Non-contact electrical connections test device
A non-contact testing of electrical characteristics of substrates carrying dense electrical connections is non-contact in that an injection or an extraction of electrons in the conductors to be...
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7395518 |
Back end of line clone test vehicle
A test vehicle comprises at least one product layer having a east one product circuit pattern on the product layer, and one or more clone layers formed over the product layer ( 1902 ). The one or...
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7385412 |
Systems and methods for testing microfeature devices
Systems and methods for testing microelectronic imagers and microfeature devices are disclosed herein. In one embodiment, a method includes providing a microfeature workpiece including a substrate...
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7372283 |
Probe navigation method and device and defect inspection device
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can...
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7368925 |
Probe station with two platens
A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first...
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7348786 |
Probe module for testing chips with electrical and optical input/output interconnects, methods of use, and methods of fabrication
Probe modules, methods of use of probe modules, and methods of preparing probe modules, are disclosed. A representative embodiment of a probe module, among others, includes a redistribution...
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7339153 |
Photon counting methods and devices with electrical pulse duration and intensity measurement
Photon counting electronics and method that allow for counting single photons with sensitivity, linearity, and accuracy. The method for accurately counting photon numbers entering a photon...
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7339392 |
Apparatus measuring substrate leakage current and surface voltage and related method
An apparatus and related method for testing a semiconductor device are provided. The apparatus includes a unit depositing charge on an insulating layer formed on a semiconductor substrate, a unit...
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7253645 |
Detection of defects in patterned substrates
A method of detecting defects in a patterned substrate includes positioning a charged-particle-beam optical column relative to a patterned substrate, the charged-particle-beam optical column having...
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7235988 |
Method for generating high-contrast images of semiconductor sites via one-photon optical beam-induced current imaging and confocal reflectance microscopy
A method is disclosed that permits the generation of exclusive high-contrast images of semiconductor sites in an integrated circuit sample ( 19 ). It utilizes the one-photon optical beam-induced...
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7233155 |
Electrooptic device, electronic apparatus, and method for making the electrooptic device
The invention provides an electrooptic device and an electronic apparatus, in which the electrical characteristics of many thin-film switching elements formed in a substrate to support an...
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7215133 |
Contactless circuit testing for adaptive wafer processing
A system and method for measuring circuits on an integrated circuit substrate includes a measurement circuit formed on the integrated circuit substrate that measures at least one characteristic of...
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7212024 |
Inspection apparatus for liquid crystal drive substrates
The object of the present invention is to provide an inspection apparatus for liquid crystal drive substrates that improves the inspection accuracy of liquid crystal drive substrates, judges defect...
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7187187 |
Signal acquisition probing system using a micro-cavity laser
A signal acquisition probing system uses a micro-cavity laser to acquire an electrical signal from a device under test. The micro-cavity laser has a VCSEL gain medium and an electro-optic optical...
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7154287 |
Method and apparatus for light-controlled circuit characterization
Light-controlled circuit characterization techniques are disclosed. For example, a technique for testing an integrated circuit includes the following steps/operations. At least a portion of the...
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7148715 |
Systems and methods for testing microelectronic imagers and microfeature devices
Systems and methods for testing microelectronic imagers and microfeature devices are disclosed herein. In one embodiment, a method includes providing a microfeature workpiece including a substrate...
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7129722 |
Methods of improving reliability of an electro-optical module
The quality and reliability of electro-optical modules can be improved, for instance, through improved testing and burn-in of an electro-optical sub-assembly. Reliability can also be enhanced...
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7109730 |
Non-contact tester for electronic circuits
A non-contact tester for electronic circuits consists of an electronic circuit and independent scanning head, in combination. The electronic circuit includes a micro-fabricated wireless i/o cell...
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7091715 |
Method and apparatus for micro-machined sensors using enhanced modulated integrative differential optical sensing
Method and apparatus for sensing the displacements of micromachined devices and sensors. The method is referred to as the enhanced modulated integrative differential optical sensing (EMIDOS). The...
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7084649 |
Method and apparatus for measuring three-dimensional distribution of electric field
A method and apparatus are provided that make it possible to speedily measure, and obtain images of, the three-dimensional distribution of electric fields in integrated circuits, using...
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7084616 |
Method and device for measuring an electrical voltage
A method and device for measuring electrical voltage allow measurement under open-air conditions including high-voltage and very high voltage. Influence of temperature changes on electrical and...
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7071713 |
Probe navigation method and device and defect inspection device
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can...
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7071701 |
Online fiber optic sensor for detecting partial discharge and similar events in large utility station transformers and the like
An approved method and apparatus for detecting partial discharge events within a transformer comprises asserting a MEMS acoustical probe through the wall of the transformer to optically measure...
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7064568 |
Optical testing of integrated circuits with temperature control
Method and apparatus for optically testing (e.g., using a laser beam) an operating integrated circuit (device under test—DUT) that actively control the operating temperature of the DUT. This is...
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7056764 |
Electronic sensor device and method for producing the electronic sensor device
An electronic sensor device has at least one sensor component, which bears on a bearing base of a rewiring structure. Contact areas of the sensor component are electrically conductively connected...
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7049843 |
Signal acquisition probing system using a micro-cavity laser capable of sensing DC voltages
A signal acquisition probing system uses a micro-cavity laser to acquire an electrical signal from a device under test. The micro-cavity laser has VCSEL gain mediums and an electro-optic optical...
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7019511 |
Optical analysis of integrated circuits
The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an...
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6982819 |
Electro-optic array interface
A grating coupled surface plasmon resonance optical modulator is disclosed. A electro-optic polymer dielectric is deposited on the metallic surface of a diffraction grating to provide a...
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6972562 |
Near-field magneto-optical microscope
A device and method for mapping magnetic fields of a sample at a resolution less than the wavelength of light without altering the magnetic field of the sample is disclosed. A device having a...
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6956385 |
Integrated circuit defect analysis using liquid crystal
Defect analysis of an integrated circuit die having a back side opposite circuitry at a circuit side and a liquid crystal liquid is enhanced using near infrared (nIR) laser light. According to an...
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6952107 |
Optical electric field or voltage sensing system
An electric field sensing system is characterized so that a signal processor may derive an output representative of an electric field intended to be measured, particularly established by high...
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6950098 |
Method and system for real time correction of an image
The present invention relates to a system and method for real time correction of light output and/or colour of an image displayed on a display device. The system comprises:a display device ( 1 )...
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6922067 |
Determination of minority carrier diffusion length in solid state materials
An apparatus and method is provided for determining the minority carrier diffusion length from the back side of the wafer within predetermined areas using pattern recognition system. In particular...
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6919716 |
Precision avalanche photodiode current monitor
Precision measurement of optical signal power is provided. In one implementation, a Wilson current mirror senses current through an avalanche photodiode (APD) that has been exposed to the optical...
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6906506 |
Method and apparatus for simultaneous measurement of electric field and temperature using an electrooptic semiconductor probe
An apparatus and method to simultaneously measure electric and thermal fields with a single probe. Using an electrooptic semiconductor probe, the Pockels effect is employed to measure electric...
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6885202 |
Non-contact tester for electronic circuits
A non-contact tester for electronic circuits consists of an electronic circuit and independent scanning head, in combination. The electronic circuit includes a micro-fabricated wireless i/o cell...
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6879147 |
Package with environmental control material carrier
A drop-in environmental control material carrier assembly 55 , which improves the performance and lowers the cost of semiconductor packages. The disclosed approach positions the environmental...
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6873165 |
Near-field probe for use in scanning system
A near electric-field probe is driven by a short laser pulse delayed through an optical delay-line for detecting vectors of near-field components of electrical signals propagating through a device...
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6833716 |
Electro-optical analysis of integrated circuits
An integrated circuit die having silicon on insulator (SOI) structure is analyzed in a manner that improves the ability to obtain a signal from the SOI structure. According to one example...
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