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7635843 |
In-line reliability test using E-beam scan
A method of testing a semiconductor wafer having a test structure performs an E-beam stress scan of the test structure in an E-beam system to electrically stress the test structure to produce a...
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7636155 |
System and method for resolving photoemission from semiconductor devices
A method for isolating the emitting devices may be applied to various emission and laser microscopy systems. A point spread function is convolved with CAD data of devices involved in the emission....
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7626403 |
Photosensor testing device with built-in light source and tester provided with said device
The present invention provides a photosensor testing device with a built-in light source and a tester provided with said device, which has a base and an upper cover disposed above the base,...
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7612571 |
System and method for estimation of integrated circuit signal characteristics using optical measurements
Systems and methods for making electrical measurements using optical emissions include positioning a sensor/photodetector to measure radiation emissions from devices to be tested. Radiation...
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7601941 |
Method and apparatus for evaluating solar cell and use thereof
Disclosed is a method for evaluating the performance of a solar cell which comprises a silicon semiconductor as the main component. This method comprises a current introduction step for introducing...
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7598755 |
Probe navigation method and device and defect inspection device
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can...
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7589541 |
Method and apparatus for inspecting solid-state image pick-up device
Provided is a method for inspecting a solid-state image pickup device by irradiating a solid-state image pickup device with measuring light emitted from a light source. The light source is a...
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7573271 |
Apparatus for measuring electric characteristics of semiconductor
An apparatus for measuring electric characteristics of a semiconductor includes a light irradiating means for irradiating light to a characteristic measured semiconductor, an alternating-current...
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7560940 |
Method and installation for analyzing an integrated circuit
A method and installation for analyzing an integrated circuit. The method includes, for a plurality of surface points of the integrated circuit, the following steps: applying a laser radiation, in...
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7554346 |
Test equipment for automated quality control of thin film solar modules
Provided is a method and test system for identifying a defective region of a photovoltaic cell from among a plurality of photovoltaic cells collectively forming a thin film solar module. A probe...
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7552018 |
Method for quickly quantifying the resistance of a thin film as a function of frequency
The present invention provides a baseline function, viz., a transmission-related parameter (transmission loss, transmission coefficient, etc.) as a function of resistance of a uniformly resistant...
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7538564 |
Methods and apparatus for utilizing an optical reference
A laser processing system implements a method for aligning a probe element (e.g., a probe pin) with a device interface element (e.g., a contact pad of a circuit substrate). First, the laser...
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7528615 |
Measurement method of the current-voltage characteristics of photovoltaic devices, a solar simulator for the measurement, and a module for setting irradiance and a part for adjusting irradiance used for the solar simulator
In a solar simulator for measuring the current-voltage characteristics of photovoltaic devices, it is to provide a measurement method using a solar simulator in which locative unevenness of...
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7528614 |
Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam
A method for electrically testing a wafer that includes: receiving a wafer having a first layer that is at least partly conductive and a second layer formed over the first layer, following...
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7521954 |
Method for determining a minority carrier diffusion length using surface photo voltage measurements
A method of determining a diffusion length of a minority carrier in a material which includes applying a first excitation light having a first photon flux to a material, measuring a first surface...
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7521946 |
Electrical measurements on semiconductors using corona and microwave techniques
A corona-microwave system can generate accurate capacitance-voltage (C-V) and resistance-voltage (R-V) curves, thereby allowing the accurate determination of gate film capacitance, sheet resistance...
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7501625 |
Electron microscope application apparatus and sample inspection method
A charge control electrode emitting photoelectrons is disposed just above a wafer (sample) in parallel thereto, and the electrode has a through hole so that ultraviolet light can be irradiated to...
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7498561 |
Arrangement for the detection of illumination radiation in a laser scanning microscope
An arrangement for the detection of the illumination radiation in a laser scanning microscope, wherein a portion of the illumination radiation is coupled out and detected at the main color...
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7471079 |
Microscope enclosure system
A light-tight enclosure system, displaceable along a surface, for housing an automated microscope, having electronically controllable components and an image capturing device. The enclosure system...
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7466151 |
Electric-field distribution measurement method and apparatus for semiconductor device
It comprises a voltage-application apparatus 2 for applying a predetermined voltage to a semiconductor device 1 , and holding it therein; a laser apparatus 3 for generating a laser beam 4 ...
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7411408 |
Measurement method using solar simulator
This invention provides a solar simulator measurement method capable of high-accuracy measurements with fast-response photovoltaic devices as well as with slow-response photovoltaic devices, and a...
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7408365 |
Image sensor testing method and apparatus
Disclosed are an optical test apparatus, related test method and method of operation, and related probe card adapted to optically test an image sensor. An illumination source of the optical test...
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7405580 |
Self-calibration in non-contact surface photovoltage measurement of depletion capacitance and dopant concentration
The surface photovoltage dopant concentration measurement of a semiconductor wafer is calibrated by biasing the semiconductor wafer into an avalanche breakdown condition in a surface depletion...
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7403023 |
Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a treatment temperature and time to substantially stabilize interstitial defect migration while leaving the vacancy defects substantially unaltered.
The invention relates to the use of the metrology methods and the related apparatus disclosed herein that incorporate thermal treatment devices and methods that improve defect detection....
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7397263 |
Sensor differentiated fault isolation
Disclosed is an apparatus and method for diagnostically testing circuitry within a device. The apparatus and method incorporate the use of energy (e.g., light, heat, magnetic, electric, etc.)...
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7378859 |
System and method for estimation of integrated circuit signal characteristics using optical measurements
Systems and methods for making electrical measurements using optical emissions include positioning a sensor/photodetector to measure radiation emissions from devices to be tested. Radiation...
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7375505 |
Method and apparatus for testing function of active microstructural elements and method for producing microstructural elements using the test method
A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning...
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7372283 |
Probe navigation method and device and defect inspection device
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can...
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7355419 |
Enhanced signal observability for circuit analysis
Methods and arrangements to enhance photon emissions responsive to a signal within an integrated circuit (IC) for observability of signal states utilizing, e.g., picosecond imaging circuit analysis...
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7348786 |
Probe module for testing chips with electrical and optical input/output interconnects, methods of use, and methods of fabrication
Probe modules, methods of use of probe modules, and methods of preparing probe modules, are disclosed. A representative embodiment of a probe module, among others, includes a redistribution...
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7323889 |
Voltage testing and measurement
An improved voltage test system.
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7323888 |
System and method for use in functional failure analysis by induced stimulus
A scanning/imaging system wherein an external stimulus is used for exciting a device under test (DUT). A stimulus source is included for providing a stationary stimulus with a controllable spot...
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7315175 |
Probe apparatus and method for examining a sample
A probe for examining a sample ( 5 ), the probe including an emitter ( 1 ) for emitting radiation, a detector ( 1 ) for detecting radiation and a dielectric member ( 3 ) configured to direct...
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7282930 |
Device for testing thin elements
A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any...
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7265571 |
Method and device for determining a characteristic of a semiconductor sample
The invention relates to a method for determining a characteristic of a semiconductor sample forming a surface. The method comprises the steps: simultaneously illuminating an area on the surface of...
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7253901 |
Laser-based cleaning device for film analysis tool
A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough...
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7250778 |
Wafer test apparatus including optical elements and method of using the test apparatus
Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An electrical...
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7239157 |
Optical trigger for PICA technique
Optical triggering system and method for synchronizing a test of an integrated circuit chip with its operation. An optical triggering system includes a testing mechanism, such as a PICA testing...
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7230436 |
Laser beam inspection equipment
The present invention relates to a laser beam inspection apparatus for inspecting a defect on a sample such as semiconductor integrated circuits by using a laser beam. The laser beam inspection...
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7202690 |
Substrate inspection device and substrate inspecting method
A laser beam irradiation unit irradiates a laser beam on a top surface pattern portion of a wiring to be inspected among plural wirings formed on a substrate, with an intensity high enough to cause...
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7190186 |
Method and apparatus for determining concentration of defects and/or impurities in a semiconductor wafer
To determine a concentration of defects and/or impurities in a semiconductor wafer, a first value of current is caused to flow in the semiconductor wafer having a substrate of semiconducting...
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7187186 |
Methods and systems for determining one or more properties of a specimen
Various methods and systems for determining one or more properties of a specimen are provided. One system for determining a property of a specimen is configured to illuminate a specimen with...
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7183759 |
Optical probes with spacing sensors for the wafer level testing of optical and optoelectronic chips
This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light to/from the top of the wafer. During the optical...
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7158284 |
Apparatus and methods of using second harmonic generation as a non-invasive optical probe for interface properties in layered structures
A method for non-invasively probing at least one interface property in a layered structure having at least one interface. In one embodiment, the method includes the steps of exposing the layered...
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7145353 |
Double side probing of semiconductor devices
A probe head for testing the properties of a semiconducting device ( 10 ) under test including a dielectric film ( 24 ) supporting at least one semiconducting device ( 10 ) under test with a...
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7138653 |
Structures for stabilizing semiconductor devices relative to test substrates and methods for fabricating the stabilizers
Stabilizers to be disposed on a surface of a semiconductor device or test substrate and methods of fabricating and disposing the stabilizers on semiconductor devices and test substrates....
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7133128 |
System and method for measuring properties of a semiconductor substrate in a non-destructive way
One aspect of the invention discloses a method of determining the dopant profile of doped regions in a semiconductor substrate. A pump laser is used to create excess carriers in this semiconductor...
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7129722 |
Methods of improving reliability of an electro-optical module
The quality and reliability of electro-optical modules can be improved, for instance, through improved testing and burn-in of an electro-optical sub-assembly. Reliability can also be enhanced...
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7119569 |
Real-time in-line testing of semiconductor wafers
A method and apparatus for measuring damage of an ion implanted semiconductor wafer during semiconductor processing. The method includes the steps of conveying the wafer such that a surface of the...
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7119347 |
Ion implantation apparatus and method
An ion implantation apparatus includes a laser beam irradiation unit which irradiates the surface of a target substrate with laser beam. The angle of an optical axis of the laser beam relative to...
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