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Document Title |
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7551979 |
Robot calibration system and method
A robot calibration system and method for robots in semiconductor wafer processing systems is disclosed. The calibration system comprises a calibration array, a dummy wafer and a control system...
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7436140 |
Image display device and stand for image display device
A self-supporting stand for a thin display device is to be controlled so that the display device faces in a preset screen direction in a one-touch manner. A function of constantly recognizing the...
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7433759 |
Apparatus and methods for positioning wafers
A method for calibrating a controller of a robotic arm in a microelectronics manufacturing apparatus that includes storing a default position for an edge detector, moving a blade on the robotic arm...
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7423404 |
Sample-loading system and anti-collision device and anti-collision method thereof
Some embodiments of the present invention provide an anti-collision device used for a sample-loading system. This device may include a code plate, an optical coupler, a location signal-detecting...
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7394219 |
Encoder unit and process of assembling same
An encoder unit releasably secured to the flange end of a motor with a form-fitting and positive connection comprises an encoder housing with guide grooves for receiving a printed circuit board...
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7282884 |
Procedure for driving a moveable part of an item of furniture
A method of driving a moveable part and, in particular, a drawer by a drive unit and, in particular, an electric drive unit. At least over a partial length of track (S 2 ), forming part of the...
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7239107 |
Flexure stage
In one embodiment, a flexure stage comprises a base, a stage, a positioning mechanism, and a control device. The base and stage have first and second portions that are spaced apart from each other....
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7233119 |
Method and circuit arrangement for the sensorless determination of load states of synchronous linear motors
The invention relates to a method and to a circuit arrangement used to regulate synchronous linear motors, especially linear drive mechanisms in film drawing systems. The force (F clip ) between...
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7227329 |
Wire-saving optical encoder having servomotor identification information
A wire-saving optical encoder having servomotor identification information is applied to a wire-saving transmission design to provide a circuit and a method for processing servomotor identification...
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7205741 |
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
A planar motor is controlled by supplying a three-phase alternating current to a coil assembly. Each phase is supplied to one of three coils. The coils are positioned in a magnetic field generated...
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7157877 |
Brushless motor driving device
A brushless motor driving device having a current detecting unit for detecting a phase-current of a brushless motor, a voltage detecting unit for detecting a phase voltage of the brushless motor,...
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7129665 |
Control apparatus for feed driving system
A control apparatus for a machine that can be operated at high precision in a stable control state is provided by driving a movable body with control parameters suited to the mechanical state. A...
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7126666 |
Lithographic apparatus, device manufacturing method and device manufactured thereby
A lithographic projection apparatus includes a passive magnetic bearing configured to provide support between a first and second part of the lithographic apparatus and allow both parts to be...
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7113256 |
Lithographic apparatus and device manufacturing method with feed-forward focus control
A lithographic apparatus includes an illumination system configured to provide a beam of radiation, a first support structure configured to support a patterning device, a second support that...
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7106300 |
Method for converting joystick deflection into motion in a computer vision system
A method is provided for converting joystick deflection into a speed of relative motion between a image system and a workpiece stage in a computer vision system. The conversion of joystick...
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7060969 |
Rotating machine having rotation sensors
Three rotation sensors circumferentially arranged at 90 degree intervals in a disk code wheel attached to a motor's output shaft respectively output a signal corresponding the rotational speed of...
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7053580 |
Autonomous machine
An autonomous machine comprises driving means for moving the machine along a surface of an area, and a navigation system. The navigation system causes the machine to follow a boundary of the area,...
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7039501 |
Method for determining a position of a robot
Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics,...
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6984947 |
Apparatus and method for adjusting components of an optical or mechanical system
An apparatus and a method for adjusting components of an optical system, the components including an adjustment device. An electric positioning motor can be engaged onto the adjustment device of...
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6933700 |
Positioning device
A positioning device that includes a pivotable shaft and a pivot drive mechanism, which has a stator and a rotor that moves relative to the stator. A position measuring arrangement includes a first...
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6882126 |
Holder mover for a stage assembly
A stage assembly ( 10 ) for moving and positioning a device ( 26 ) includes a device table ( 20 ), a device holder ( 24 ) that retains the device ( 26 ), and a stage mover assembly ( 14 ). The...
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6873129 |
Method of controlling rotational velocity of a rotatable member during encoder initialization for an imaging apparatus
A method of controlling a rotational velocity of a rotatable member during initialization of an analog encoder unit that generates a channel A signal and a channel B signal, includes the steps of...
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6822413 |
Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector
Robot system incorporates a versatile end effector that can be used to transport wafers, map wafers, and autocalibrate the movements of the robotic system. Typically, the end effector of the...
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6820508 |
Apparatus for rotating a sample
An apparatus rotates a sample to facilitate an accurate analysis of the sample. The apparatus includes a sample stage on which a plurality of samples are supported, a rotatable cap and a linearly...
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6727672 |
Driving device and light amount controller
There is provided a small-sized and slim driving device which is easy to manufacture and capable of producing high output. A magnet has a cylindrical shape, and at least the outer peripheral...
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6713984 |
Operating device for driving and controlling an electrical switching apparatus
The present invention is related to an operating device ( 200 ) for driving and controlling the opening and closing of an electrical high voltage or medium voltage switching apparatus, such as a...
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6631331 |
Database system for predictive cellular bioinformatics
A system for acquiring knowledge from cellular information. The system has a database comprising a database management module (“DBMS”). The system also has a variety of modules, including a...
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6548970 |
Two-axis motion machine
An individual section glassware forming machine that includes at least one blow mold for forming articles of glassware, a sweepout station for transferring glassware to a machine conveyor, and a...
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6522942 |
Transfer apparatus for semiconductor process
A semiconductor processing system includes a transfer apparatus for transferring a wafer. The transfer apparatus has a pick arm member with wings. The reference distances between the wafer located...
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6515445 |
Digital encoder control method
A digital encoder control method of a digital control apparatus has a driving unit, a frequency signal generating unit for generating a pulse signal of a frequency according to a driving velocity...
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6409143 |
Damper assembly with an electro-optical controller for positioning the damper vanes
A damper assembly having adjustable damper vanes and a motor mechanically coupled for moving the damper vanes is operatively associated with an electro-optical controller for repositioning the...
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6385503 |
Reactor for the processing of wafers, with a protection device
The invention relates to a reactor ( 1 ) for processing wafers ( 7 ) comprising at least one process chamber ( 5 ), at least one transport chamber ( 2 ) with a transport robot ( 3 ) for the wafers...
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6354550 |
Method for controlling screen direction of a video display stand
A video display stand having dual panning axes suitable for controlling a screen direction of appliances such as a TV set or a personal computer without bumping against a wall even in a state that...
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6339304 |
Swing control for altering power to drive motor after each swing cycle
A control ( 200 ) for an infant and child swing ( 40 ) driven by a direct current motor ( 160 ) includes a user interface ( 312 ) for selecting from a plurality of swing heights (or amplitudes), a...
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6324933 |
Planar movable stage mechanism
Apparatus for moving a platform in X and Y directions including a first shaft secured along a first edge of the platform and oriented axially in the X direction and a second shaft secured along a...
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6320645 |
Stage system and exposure apparatus, and device manufacturing method using the same
A stage system includes a movable stage, a guide mechanism for guiding the stage with respect to a predetermined direction, and a preloading mechanism for producing a magnetic attraction force with...
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6313596 |
Detection system for substrate clamp
The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly...
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6294892 |
Method of manufacturing organic thin-film EL device
In a method of manufacturing an organic thin-film electroluminescent device, a plurality of thin-film luminescent portions are arranged with fine pitches on a substrate. Each of the luminescent...
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6232736 |
Numerical control machine tool positioning system
The present invention is embodied in an automated system for the positioning and support of a machine tool within a workpiece supporting assembly, comprising a pair of generally parallel, planar...
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6215269 |
Method of exposing a path on a curved, or otherwise irregularly shaped, surface
A circuit on a curved surface is provided where the circuit includes at least one circuit element on the curved surface, at least one conductive path on, and integral with, the curved surface,...
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6194859 |
X-Y positioner based on X axis motions
Positioning apparatus to place a reference point at selected locations in a plane. Two carriages are independently mounted to a carriage rail. The rail bears location references and the carriage...
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6151105 |
Exposure apparatus having dynamically isolated support structure
An exposure apparatus includes an exposure device disposed between a mask and an object. The exposure device exposes a pattern of the mask onto the object. The apparatus also includes a mask stage...
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6144182 |
Motor control method for injection molding machine and motor controller for carrying out the same
The duty of a current to be supplied to an injection motor is calculated on the basis of the ratio between set injection time for which the injection motor operates and molding cycle time, a shaft...
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6133706 |
Printer subsystem motion-control sensor apparatus
In accordance with the described invention, a stepper motor that drives a printer's movable subsystem, e.g. a sled-mounted ink-jet service station, is replaced with a less expensive and quieter DC...
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6130517 |
Magnetic actuator producing large acceleration on fine stage and low RMS power gain
A pair of complementary magnetic actuators controls a stage in a high-precision positioning instrument in a single coordinate direction. Additional pairs of complementary magnetic actuators can be...
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6124588 |
Process and measuring system for locating a movable object by monitoring the absolute position of the object
A method for position determination of a rotating drive element with the aid of a measuring system is indicated, which comprises an absolute and an incremental measuring subsystem. Here, following...
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6078273 |
Infusion pump monitoring encoder/decoder
The present invention provides a method and apparatus for monitoring an infusion pump (10). The method and apparatus provides an encoder (101) which is used with a motor (65) of the infusion pump...
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6064169 |
Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
A control system for a tuning fork gyroscope uses motor frequency to control motor amplitude. The tuning fork gyroscope has a drive signal input and an output signal from which motor frequency is...
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6057976 |
Apparatus for detecting rotational displacement information of a rotating object
An angular division apparatus for circumferentially dividing a rotating object into a plurality of areas by using Doppler pulses includes an optical head for applying a beam emitted from a light...
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6037730 |
Degraded electronic throttle operation method and system
An electronic throttle assembly uses a torque motor and mechanical system to position the throttle. The assembly is configured to keep the throttle slightly open during times of electrical power...
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