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7609067 Electronic portion of an ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement  
Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an...
7609003 Ion implantation system and control method  
Ion implantation with high brightness, ion beam by ionizing gas or vapor, e.g. of dimers, or decaborane, by direct electron impact ionization adjacent the outlet aperture ( 46, 176 ) of the...
7605379 Cold-cathode-based ion source element  
An ion source element includes a cold cathode, a grid electrode, and an ion accelerator. The cold cathode, the grid electrode, and the ion accelerator are arranged in that order and are...
7602111 Plasma accelerating apparatus and plasma processing system including secondary electron amplification coating layer formed at inner wall of channel  
A plasma accelerating apparatus and a plasma processing system having the same are provided. The apparatus includes a channel comprising an inner wall, an outer wall spaced apart from the inner...
7598500 Ion source and metals used in making components thereof and method of making same  
An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for...
7595594 Arrangement for switching high electric currents by a gas discharge  
The present invention is directed to an arrangement for switching high electric currents by way of a gas discharge at high voltages or for generating gas discharge plasma emitting EUV radiation. It...
7589474 Ion source with upstream inner magnetic pole piece  
A closed drift ion source is disclosed. The ion source has an open end 1 and a central axis 150 around which are arranged outer magnetic pole piece 3 , inner magnetic pole piece 5 , anode 2...
7581380 Air-breathing electrostatic ion thruster  
An improved air-breathing electrostatic ion thruster specially configured for use in low-Earth atmosphere comprises a housing having an electrically conductive inner surface defining an ionization...
7576337 Power supply for an ion implantation system  
A power supply system for an ion implantation system. In one particular exemplary embodiment, the system may be realized as a power supply system that includes a low frequency power inverter, a...
7560870 Power supply apparatus for ion accelerator  
A power supply apparatus for controlling a Hall thruster which is an ion accelerator includes an anode power supply for applying anode voltage Va to an anode of the Hall thruster, inner and outer...
7550719 Electron beam source device available for detecting life span of filament  
An electron beam source device is provided in which the disconnection and deterioration of a filament of the electron beam source device can be accurately predicted and determined, so as to avoid...
7550927 System and method for generating ions and radicals  
A system and method for producing electrons and ions are disclosed. One embodiment includes an outer electrode with a discharge chamber; an inner electrode positioned inside the discharge chamber,...
7528550 Ion implantation system and control method  
An ion implantation is disclosed that includes an ionization chamber having a restricted outlet aperture and configured so that the gas or vapor in the ionization chamber is at a pressure...
7520244 Plasma treatment apparatus  
A plasma treatment apparatus for thin-film deposition includes a reactor chamber; a pair of parallel-plate electrodes disposed inside the chamber; and a radio-frequency power supply system used for...
7498586 Ion source control system  
A gridless ion source operates from a control system ( 201 ) that generates an anode voltage ( 215 ) comprising a mains rectified signal such that the anode voltage modulates between a first...
7491931 Power supply regulation using a feedback circuit comprising an AC and DC component  
In various aspects, ion sources, mass spectrometer systems, and a power supply circuit coupled to a feedback circuit are provided. A power supply is provided that includes at least the power supply...
7476869 Gas distributor for ion source  
A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to...
7471266 Method and apparatus for driving plasma display panel  
There is disclosed a method and apparatus of driving a plasma display panel that is adaptive for reducing discharge delay upon reset discharge. A driving method and apparatus of a plasma display...
7435971 Ion source  
An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used...
7425709 Modular ion source  
A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode...
7410532 Method of controlling a fluid flow  
An electrostatic fluid accelerator includes an electrode array including an array of corona discharge electrodes and an array of accelerating electrodes. A detector is configured to sense a...
7405411 Ion source with multi-piece outer cathode  
In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The...
7372059 Plasma-based EUV light source  
Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme...
7365315 Method and apparatus for ionization via interaction with metastable species  
An apparatus for analyzing a sample material includes a desorption mechanism configured to desorb molecules from the sample material, a metastable generator separate from the desorption mechanism...
7301269 Image display apparatus provided with an ion pump assembly arranged within an external container  
Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to...
7298092 Device and method for gas treatment using pulsed corona discharges  
A novel plasma reactor is provided that includes a discharge chamber with dimensional characteristics and configuration of dielectric and electrodes that optimize efficiency based on the...
7279846 Image display apparatus  
Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for...
7269008 Cooling apparatus and method  
A cooling apparatus is provided with an electrostatic flow modifier to be complementarily positioned relative to a cooling fluid flow to modify at least one characteristic of the cooling fluid flow...
7259378 Closed drift ion source  
A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and...
7224567 Structural arrangements for ion generator to promote ionization efficiency  
An ionization electrode consists of a plate-like positive pole ( 31 a ) formed with plural pointed ends ( 31 b ) on its outer edge, and a spheric negative pole ( 32 a ) opposing a flat surface of...
7199374 Corona discharge lamps  
Excimers are formed in a gas ( 30,130 ) by applying a pulsed potential between a first electrode ( 14,114 ) and a counter electrode ( 26, 126 ) so that corona discharge occurs, substantially...
7166965 Waveguide and microwave ion source equipped with the waveguide  
A waveguide of the present invention comprises a waveguide main body made of a material selected from a boron nitride or an aluminum oxide, and a thin film made of a titanium nitride to cover an...
7150780 Electrostatic air cleaning device  
An electrostatic air cleaning device includes an array of electrodes. The electrodes include corona electrodes connected to a suitable source of high voltage so as to generate a corona discharge....
7109504 Extreme ultraviolet illumination source  
According to a first embodiment of the invention, a dual cathode electrode for generating EUV light is disclosed. The dual cathode electrode may include a first outer cathode, a second inner...
7088048 Device and process for switching and controlling an electron dose emitted by a micro-emitter  
This invention relates to a device for switching and controlling an electron dose emitted by a micro-emitter comprising a sensor module ( 30 ) that receives the output current from the...
7071626 Plasma generator  
Disclosed herein is a plasma generator, in which a plasma forming space, into which the air is introduced, is provided, band plate-like first and second electrodes are arranged in opposed relation...
7041984 Replaceable anode liner for ion source  
A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permits electrons to be projected into the anode wherein any insulating deposits adhere to the...
6987364 Floating mode ion source  
A cold-cathode closed-drift ion source includes an anode, a cathode and a power supply. In certain example embodiments, neither the positive nor negative terminals of the power supply are connected...
6979954 Inter-stage plasma source  
A high efficiency plasma pump for use in a plasma processing system that includes a plasma processing device having a first plasma density proximate a processing region and a second plasma density...
6936971 Methods and systems for generating high energy photons or quantum energy  
The invention generates high-energy particles, or quantum energy, from a quantum macro object. The method used comprises: (a) isolating a gaseous substance within a bounded area; (b) energizing the...
6919690 Modular uniform gas distribution system in an ion source  
A modular ion source design relies on relatively short modular anode layer source (ALS) components, which can be coupled together to form a longer ALS. For long ion sources, these shorter modular...
6903511 Generation of uniformly-distributed plasma  
Methods and apparatus for generating uniformly-distributed plasma are described. A plasma generator according to the invention includes a cathode assembly that is positioned adjacent to an anode...
6897617 Method and apparatus to reduce ozone production in ion wind device  
A method to limit ozone production in wind ion devices while simultaneously realizing incidents of high acceleration in such devices varies the high voltage potential across the array of emitter(s)...
6888314 Electrostatic fluid accelerator  
An electrostatic fluid accelerator having a multiplicity of closely spaced corona electrodes. The close spacing of such corona electrodes is obtainable because such corona electrodes are isolated...
6864486 Ion sources  
A closed loop exit hole is formed in a magnetically permeable end wall ( 2 ) of an enclosure ( 1 ) of a closed electron drift ion source. Parts of this end wall separated by the exit hole serve as...
6849854 Ion source  
An ion source 10 for producing a beam of ions from a plasma is disclosed. A plasma is created at the center of an anode 12 by collisions between energetic electrons and molecules of an...
6826222 Electric oxygen iodine laser  
A pulse circuit, a plasma generator, and a excited atomic molecular state generator useful in an electric oxygen iodine laser of the present invention. The invention also comprises a laser wherein...
6805779 Plasma generation using multi-step ionization  
The present invention relates to a plasma generator that generates a plasma with a multi-step ionization process. The plasma generator includes an excited atom source that generates excited atoms...
6768120 Focused electron and ion beam systems  
An electron beam system is based on a plasma generator in a plasma ion source with an accelerator column. The electrons are extracted from a plasma cathode in a plasma ion source, e.g. a multicusp...
6759808 Microwave stripline applicators  
An apparatus and method which maintains plasma discharges (for instance 25 ) in containers (for instance 20 ) which have an internal section of 1 cm or less in width are described. The very small...
Matches 1 - 50 out of 216 1 2 3 4 5 >