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8154210 Ion implantation ion source, system and method  
An ion source is disclosed incorporating various aspects of the invention including i) a vaporizer, ii) a vaporizer valve, iii) a gas feed, iv) an ionization chamber, v) an electron gun, vi) a...
8143590 Ion source apparatus  
An ion source apparatus has an ion source assembly and a neutralizer. The ion source assembly has a body, a heat-dissipating device, an anode chunk and a gas distributor. The heat-dissipating...
8139354 Independently operable ionic air moving devices for zonal control of air flow through a chassis  
Airflow in a computer chassis may be enhanced or reduced to affect cooling of heat generating devices using an ionic air moving device. A plurality of ionic air moving devices enhance or reduce...
8129913 Closed electron drift thruster  
In a closed electron drift thruster, a magnetic circuit for creating a magnetic field in a main annular channel comprises at least one axial magnetic core surrounded by a first coil and an inner...
8110990 Atmospheric pressure plasma apparatus  
Disclosed is an atmospheric pressure plasma apparatus for enhancing and or controlling the dissociation of a secondary gas by converting a source gas into a plasma state at atmospheric pressure and...
8101922 Modular gas ion source  
A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical...
8071958 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions  
A method of manufacturing a semiconductor device includes the steps of: providing a supply of molecules containing a plurality of dopant atoms into an ionization chamber, ionizing said molecules...
8053747 Substrate processing apparatus and cleaning method of the same  
A method for cleaning a substrate processing apparatus in which a first ion beam generator and a second ion beam generator are arranged opposite to each other to sandwich a plane on which a...
8049426 Electrostatic fluid accelerator for controlling a fluid flow  
An electrostatic fluid accelerator includes an electrode array comprising an array of corona discharge electrodes and an array of accelerating electrodes for moving a fluid. A detector is...
8044348 Ion source vessel and methods  
An ion source and method for providing ionized particles to a molecular/atomic analyser, such as a mass spectrometer, are disclosed. The ion source includes a vessel defining a channel; a gas inlet...
7948185 Inductively-driven plasma light source  
An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of...
7910896 Micro discharge device ionizer and method of fabricating the same  
A micro discharge device (MDD) ionizer and a method for fabricating the MDD ionizer are disclosed. The MDD ionizer includes a dielectric barrier having a first open end connected to an electrically...
7911146 High-velocity, multistage, nozzled, ion driven wind generator and method of operation of the same adaptable to mesoscale realization  
Gas flows of modest velocities are generated when an organized ion flux in an electric field initiates an ion-driven wind of neutral molecules. When a needle in ambient air is electrically charged...
7872422 Ion source with recess in electrode  
An ion source capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions is provided. The ion source includes at least one...
7855513 Device and method for gas treatment using pulsed corona discharges  
A plasma reactor is provided, which includes a discharge chamber with dimensional characteristics and configuration of dielectric and electrodes so as to enhance efficiency based on the...
7853364 Adaptive controller for ion source  
An ion source, often used for materials processing applications in a vacuum processing chamber, is provided with an adaptive control system. The adaptive control system has a microprocessor and...
7847241 Power supply regulation using a feedback circuit comprising an AC and DC component  
In various aspects, ion sources, mass spectrometer systems, and a power supply circuit coupled to a feedback circuit are provided. A power supply is provided that includes at least the power supply...
7825601 Axial Hall accelerator with solenoid field  
The present patent letters discloses a Hall Current accelerator with a solenoid Hall field, a collimated gas source, an anode, intermediate Hall effect ionization magnetic field structures and...
7812542 Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge  
The object of an arrangement and a method for generating extreme ultraviolet radiation by an electrically operated gas discharge is to improve the adjustment of the layer thickness and, in...
7800312 Dual mode ion source for ion implantation  
A direct electron impact ion source is disclosed that includes a vaporizer for producing a process gas; an electron source for generating an electron beam; and an ionization chamber. The electron...
7791019 Ambient pressure pyroelectric ion source for mass spectrometry  
A compact, low power ambient pressure pyroelectric ionization source. The source can be constructed using a z-cut lithium niobate or lithium tantalate crystal with an attached resistive heater...
7791350 Ionization vacuum gauge  
An ionization vacuum gauge includes a linear cathode, an anode, and an ion collector. The linear cathode, the anode, and the ion collector are concentrically aligned and arranged from center to...
7786455 Laser-driven light source  
An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized...
7768267 Ionization gauge with a cold electron source  
An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization...
7750314 Elevated temperature RF ion source  
An elevated temperature RF ion source system, comprising an ion source body, an RF antenna coil external to the ion source body, a vacuum enclosure surrounding both the outside surface of the ion...
7687784 Method and device of ion source generation  
An implanter is equipped with an ion beam current detector, a temperature sensor, a temperature controller and a cooling system to increase the ratio of a specific ion cluster in the ion source...
7674337 Gas manifolds for use during epitaxial film formation  
The present invention provides methods, systems, and apparatus for epitaxial film formation that includes an epitaxial chamber adapted to form an epitaxial layer on a substrate; a deposition gas...
7659505 Ion source vessel and methods  
An ion source and method for providing ionized particles to a molecular/atomic analyser, such as a mass spectrometer, are disclosed. The ion source includes a vessel defining a channel; a gas inlet...
7655928 Ion acceleration column connection mechanism with integrated shielding electrode and related methods  
Ion accelerating devices including connection mechanisms with integrated shielding electrode and related methods are disclosed. According to an embodiment, an ion accelerating device of an ion...
7655931 Techniques for improving the performance and extending the lifetime of an ion source with gas mixing  
Techniques improving the performance and extending the lifetime of an ion source with gas mixing are disclosed. In one particular exemplary embodiment, the techniques may be realized as a method...
7652431 Electrostatic fluid accelerator  
An electrostatic fluid accelerator having a multiplicity of closely spaced corona electrodes. The close spacing of such corona electrodes is obtainable because such corona electrodes are isolated...
7609067 Electronic portion of an ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement  
Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an...
7609003 Ion implantation system and control method  
Ion implantation with high brightness, ion beam by ionizing gas or vapor, e.g. of dimers, or decaborane, by direct electron impact ionization adjacent the outlet aperture (46, 176) of the...
7605379 Cold-cathode-based ion source element  
An ion source element includes a cold cathode, a grid electrode, and an ion accelerator. The cold cathode, the grid electrode, and the ion accelerator are arranged in that order and are...
7598500 Ion source and metals used in making components thereof and method of making same  
An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for...
7595594 Arrangement for switching high electric currents by a gas discharge  
The present invention is directed to an arrangement for switching high electric currents by way of a gas discharge at high voltages or for generating gas discharge plasma emitting EUV radiation. It...
7589474 Ion source with upstream inner magnetic pole piece  
A closed drift ion source is disclosed. The ion source has an open end 1 and a central axis 150 around which are arranged outer magnetic pole piece 3, inner magnetic pole piece 5, anode 2, shield 6...
7581380 Air-breathing electrostatic ion thruster  
An improved air-breathing electrostatic ion thruster specially configured for use in low-Earth atmosphere comprises a housing having an electrically conductive inner surface defining an ionization...
7576337 Power supply for an ion implantation system  
A power supply system for an ion implantation system. In one particular exemplary embodiment, the system may be realized as a power supply system that includes a low frequency power inverter, a...
7560870 Power supply apparatus for ion accelerator  
A power supply apparatus for controlling a Hall thruster which is an ion accelerator includes an anode power supply for applying anode voltage Va to an anode of the Hall thruster, inner and outer...
7550927 System and method for generating ions and radicals  
A system and method for producing electrons and ions are disclosed. One embodiment includes an outer electrode with a discharge chamber; an inner electrode positioned inside the discharge chamber,...
7550719 Electron beam source device available for detecting life span of filament  
An electron beam source device is provided in which the disconnection and deterioration of a filament of the electron beam source device can be accurately predicted and determined, so as to avoid...
7520244 Plasma treatment apparatus  
A plasma treatment apparatus for thin-film deposition includes a reactor chamber; a pair of parallel-plate electrodes disposed inside the chamber; and a radio-frequency power supply system used for...
7498586 Ion source control system  
A gridless ion source operates from a control system (201) that generates an anode voltage (215) comprising a mains rectified signal such that the anode voltage modulates between a first voltage...
7491931 Power supply regulation using a feedback circuit comprising an AC and DC component  
In various aspects, ion sources, mass spectrometer systems, and a power supply circuit coupled to a feedback circuit are provided. A power supply is provided that includes at least the power supply...
7476869 Gas distributor for ion source  
A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to...
7471266 Method and apparatus for driving plasma display panel  
There is disclosed a method and apparatus of driving a plasma display panel that is adaptive for reducing discharge delay upon reset discharge. A driving method and apparatus of a plasma display...
7425709 Modular ion source  
A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode...
7425710 Anode layer particle beam device  
An anode layer particle beam device includes a base, at least an anode placed on top of the base, an insulation layer set between the anode and the base, at least one magnetic pole, made of...
7410532 Method of controlling a fluid flow  
An electrostatic fluid accelerator includes an electrode array including an array of corona discharge electrodes and an array of accelerating electrodes. A detector is configured to sense a...
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