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7323821 |
Device for generating and/or influencing electromagnetic radiation from a plasma
A device generates and/or influences electromagnetic radiation from a plasma, for the lithographic production of semiconductor elements. For example, the device generates and/or reflects...
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7298092 |
Device and method for gas treatment using pulsed corona discharges
A novel plasma reactor is provided that includes a discharge chamber with dimensional characteristics and configuration of dielectric and electrodes that optimize efficiency based on the...
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7230256 |
Ion doping system, ion doping method and semiconductor device
An ion doping system includes a chamber 11 , an exhausting section 13 for exhausting gases from the chamber, an ion source 12 provided for the chamber, and an accelerating section 23 for...
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7201851 |
Vacuum processing apparatus and substrate transfer method
An etching processing apparatus 1 has a transfer chamber 2 , a plurality of processing chambers 3 and 4 , and a plurality of cassette chambers 7 and 8 . Inside the transfer chamber 2 , a...
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7196337 |
Particle processing apparatus and methods
This invention relates to an apparatus for processing particles. The apparatus comprises a particle source having an exist aperture; an extraction electrode located at the exist aperture; an...
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7192505 |
Wafer probe for measuring plasma and surface characteristics in plasma processing environments
There is provided by this invention a wafer probe for measuring plasma and surface characteristics in plasma processing environment that utilizes integrated sensors on a wafer substrate. A...
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7164236 |
Method and apparatus for improved plasma processing uniformity
A method and apparatus for generating and controlling a plasma ( 130 ) formed in a capacitively coupled plasma system ( 100 ) having a plasma electrode ( 140 ) and a bias electrode in the form of a...
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7138767 |
Surface wave plasma processing system and method of using
A SWP source includes an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of the EM wave...
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7075095 |
Plasma accelerator system
A multistage plasma accelerator system includes at least one intermediate electrode between the plasma chamber between electrodes that include each other. An especially good efficiency can be...
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7000565 |
Plasma surface treatment system and plasma surface treatment method
A plasma surface treatment system for irradiating a surface of a substrate to be treated with a nitrogen plasma excited by a high-frequency electric field to introduce nitrogen into the surface of...
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6998785 |
Liquid-jet/liquid droplet initiated plasma discharge for generating useful plasma radiation
Plasma discharge sources for generating emissions in the VUV, EUV and X-ray spectral regions. Embodiments can include running a current through liquid jet streams within space to initiate plasma...
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6998626 |
Method of producing a dopant gas species
This invention relates to a method of producing a dopant gas species containing a required dopant element for implanting in a target and to an ion source for implementing such a method. In...
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6987364 |
Floating mode ion source
A cold-cathode closed-drift ion source includes an anode, a cathode and a power supply. In certain example embodiments, neither the positive nor negative terminals of the power supply are connected...
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6984941 |
Extreme UV radiation source and semiconductor exposure device
A usable 13.5 nm radiation source in which Sn is the radiation substance, in which rapid transport with good reproducibility is possible up to the plasma generation site and in which formation of...
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6963162 |
Gas distributor for an ion source
A gas distributor for an ion source includes a plate having a recess and a series of apertures spaced radially outward from the recess. The apertures define paths for the flow of a gas through the...
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6955054 |
Method and device for cooling a working medium and method for generating a microwave emission
The invention relates to thermal physics, in particular to a method and apparatus for cooling a working medium and a method for generating microwave radiation. The object is to reduce the power...
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6929712 |
Plasma processing apparatus capable of evaluating process performance
A high-frequency current detector of a plasma processing apparatus detects a high-frequency current produced when high-frequency power in the range that does not cause generation of plasma in a...
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6870320 |
Device and method for ion beam acceleration and electron beam pulse formation and amplification
The present invention relates to a device for electron beam pulse formation and amplification comprising an electron beam axis ( 5 ) for microstructuring and amplifying current pulses. Such a...
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6852969 |
Atmospheric pressure, glow discharge, optical emission source for the direct sampling of liquid media
A glow discharge spectroscopy (GDS) source operates at atmospheric pressure. One of the discharge electrodes of the device is formed by an electrolytic solution 27 containing the analyte...
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6815900 |
Radiation source with high average EUV radiation output
The invention is directed to a radiation source for generating extreme ultraviolet (EUV) radiation based on a hot, dense plasma generated by gas discharge. The object of the invention, to find a...
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6784620 |
Plasma filter
A low/band/high pass filter includes first and second plasmas, each with a path for the flow of electromagnetic energy at frequencies above the plasma frequency. A path for the flow of...
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6765216 |
Method and apparatus for producing atomic flows of molecular gases
A method and device are presented for producing an intensive flow of atoms from an input flow of a molecular gas. Effects of ignition of a gas discharge of a complex type and dissociation of the...
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6727654 |
Plasma processing apparatus
The invention provides a plasma processing apparatus, in which the uniformity of the plasma density can be improved, and the electron temperature can be kept low. A vacuum vessel 21 for...
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6717133 |
Grating pattern and arrangement for mass spectrometers
A method and apparatus for generating electrical fields within the ion flight path of a mass spectrometer are provided. Gratings having a planar array of parallel conductive strands and...
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6710333 |
Process for structural modification of surfaces by treatment with an atomic or molecular gaseous medium excited to metastable level
A process for modification of a surface structure by exposing the surface to a flow of neutral atomic or molecular gaseous medium excited to metastable level which is produced in a process of...
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6635883 |
Gas cluster ion beam low mass ion filter
Incorporating the use of a permanent magnet within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam to facilitate improved processing of workpieces. In an alternate...
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6608446 |
Method and apparatus for radio frequency (RF) metrology
A radio frequency (RF) probe head apparatus is provided for measuring voltage and current of an RF signal in a sampled transmission line. The probe head apparatus includes a conductive housing, a...
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6603268 |
Method and apparatus for reducing ozone output from ion wind devices
Ozone output in ion wind devices using one or more emitters ( 10 ) and an array of collectors ( 20 ) (accelerators) may be reduced through catalytic conversion of the produced ozone back to oxygen...
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6518693 |
Method and apparatus for magnetic voltage isolation
A method and apparatus for using a magnetic field generated by a thruster magnet to control electron current emitted by a cathode assembly. The magnetic field reduces leakage current drawn by an...
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6515238 |
Analytical balance for weighing electrostatically charged weighed goods
An analytical balance that includes a balance scale, a wind guard encircling the balance scale, and an apparatus for generating an ionized stream of air for dissipating electrostatic charges of...
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6448714 |
Spark gap switch and switching method thereof
In a spark gap switch 12 of a pulse generating circuit 2 of a plasma generator T, an intermediate electrode 15 , which is not connected to any electrical source, is disposed at a nearly middle...
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6445134 |
Inner/outer coaxial tube arrangement for a plasma pinch chamber
A plasma pinch having an inner/outer coaxial tube arrangement, which nested tube arrangement yields a higher-performance pinchlamp than is capable with a single-tube configuration. Further, each...
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6441569 |
Particle accelerator for inducing contained particle collisions
A particle accelerator for inducing contained particle collisions. The particle accelerator includes two hollow dees of electrically conductive material which are separated and electrically...
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6396212 |
Apparatus and method for discharge treatment
An apparatus for a discharge treatment, comprising a pair of electrodes located opposite to each other; an element for applying an alternating current-high voltage between the electrodes; and an...
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6396211 |
Microwave discharge type electrostatic accelerator having upstream and downstream acceleration electrodes
A microwave discharge-type electrostatic accelerator propulsion device is provided that features a simplified system configuration, and accordingly, high reliability and low fabrication costs. A...
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6369493 |
Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket
A plasma applicator having a tube that is surrounded by a cooling jacket such that a volume is defined proximate the tube. The volume is filled with a thermal transfer medium to couple heat from...
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6363881 |
Plasma chemical vapor deposition apparatus
Disclosed is a plasma chemical vapor deposition apparatus for forming an amorphous thin film, a microcrystalline thin film or a polycrystalline thin film on a surface of a target substrate by...
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6242749 |
Ion-beam source with uniform distribution of ion-current density on the surface of an object being treated
The invention provides a multiple-cell ion-beam source in which magnetic poles of all adjacent cells have alternating polarities, i.e., the cells arranged in a single row from the center to the...
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6215089 |
Plasma welding torch
A plasma welding torch comprises a non-consumable electrode arranged in a chamber provided in the torch and having a free flat end face extending substantially perpendicularly to a longitudinal...
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6031334 |
Method and apparatus for selectively distributing power in a thruster system
A single power control circuit selectively distributes power from a power supply to cathode heater, cathode keeper and thruster magnets of a thruster. The power control circuit utilizes a plurality...
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6028393 |
E-beam/microwave gas jet PECVD method and apparatus for depositing and/or surface modification of thin film materials
A novel high speed, high quality plasma enhanced surface modification or CVD thin-film deposition method and apparatus. The invention employs both microwave and e-beam energy for creation of a...
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5523939 |
Borehole logging tool including a particle accelerator
A borehole logging tool includes a particle accelerator including a Cockcroft-Walton voltage multiplier that provides linear axial and radial fields. The Cockcroft-Walton voltage multiplier...
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5502354 |
Direct current energized pulse generator utilizing autogenous cyclical pulsed abnormal glow discharges
A cold cathode vacuum discharge tube is used in a circuit for generating pulsed autoelectronic emissions which are particularly intense and frequent in the abnormal glow discharge region, and...
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5465030 |
Trigger apparatus for spark gap dischargers
An improved means for triggering high voltage spark gap devices for current injection and pulse power applications which utilizes the high voltage source itself to trigger the discharge. A switch...
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5369953 |
Three-grid accelerator system for an ion propulsion engine
Apparatus for an ion engine comprises a three-grid accelerator system with the decelerator grid biased negative of the beam plasma. This arrangement substantially reduces the charge-exchange ion...
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5355056 |
Sparkplug voltage detecting probe device for use in internal combustion engine
In a sparkplug voltage detecting probe device for use in internal combustion engine comprising, a sensor is provided to form a static capacity between the sensor and an ignition coil which is...
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5329205 |
High voltage crossed-field plasma switch
A CROSSATRON switch is capable of operating with voltages in excess of 100 kV by the use of a deuterium gas fill to increase the Paschen breakdown voltage, axial molybdenum cathode corrugations to...
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5325284 |
Electrostatic particle accelerator having linear axial and radial fields
A particle accelerator comprises a Cockcroft-Walton voltage multiplier that provides linear axial and radial fields. The Cockcroft-Walton voltage multiplier includes capacitors that are arranged...
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5229842 |
Method and apparatus for controlling fluorescent lamp mercury vapor pressure
A fluorescent lamp light output is maximized by cooling the cathode regions. Mercury vapor pressure is maintained at an optimum or desired level for light production by cooling the cathode areas of...
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5220246 |
Method and apparatus for transmitting information using arc
An information transmission method using arc and apparatus thereof are applied to a loudspeaker and the like having the function of illumination. The information transmission method is...
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