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8143590 |
Ion source apparatus
An ion source apparatus has an ion source assembly and a neutralizer. The ion source assembly has a body, a heat-dissipating device, an anode chunk and a gas distributor. The heat-dissipating...
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8080930 |
Self-regenerating nanotips for low-power electric propulsion (EP) cathodes
Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self-assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is...
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8022362 |
Ionization device
An ionization device includes an ionization chamber (1) and a charging chamber (20) separately prepared therefrom. The ionization chamber (1) has a discharge electrode (6) and an opposing electrode...
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7994474 |
Laser desorption ionization ion source with charge injection
An innovative ion source is disclosed that in some embodiments provides an injected independent ion beam to increase the ionization efficiency of the ion source.
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7911120 |
Source for providing an electron beam of settable power
The invention concerns a source supplying an adjustable energy electron beam, comprising a plasma chamber (P) consisting of an enclosure (1) having an inner surface of a first value (S1) and an...
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7870719 |
Plasma enhanced rapidly expanded gas turbine engine transition duct
A plasma enhanced rapidly expanded duct system includes a gas turbine engine inter-turbine transition duct having radially spaced apart conical inner and outer duct walls extending axially between...
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7667379 |
Industrial hollow cathode with radiation shield structure
In accordance with one embodiment of the present invention, the hollow-cathode apparatus comprises a small-diameter tantalum tube with a plurality of tantalum-foil radiation shields, wherein the...
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7655931 |
Techniques for improving the performance and extending the lifetime of an ion source with gas mixing
Techniques improving the performance and extending the lifetime of an ion source with gas mixing are disclosed. In one particular exemplary embodiment, the techniques may be realized as a method...
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7622721 |
Focused anode layer ion source with converging and charge compensated beam (falcon)
A focused ion source based on a Hall thruster with closed loop electron drift and a narrow acceleration zone is disclosed. The ion source of the invention has an ion focusing system consisting of...
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7589474 |
Ion source with upstream inner magnetic pole piece
A closed drift ion source is disclosed. The ion source has an open end 1 and a central axis 150 around which are arranged outer magnetic pole piece 3, inner magnetic pole piece 5, anode 2, shield 6...
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7584601 |
Charged particle thrust engine
Several methods of increasing the thrust and energy efficiency of charged particle jet engines operating in a gaseous or liquid medium have been developed. We identify the three main components of...
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7581380 |
Air-breathing electrostatic ion thruster
An improved air-breathing electrostatic ion thruster specially configured for use in low-Earth atmosphere comprises a housing having an electrically conductive inner surface defining an ionization...
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7566883 |
Thermal transfer sheet for ion source
One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable...
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7498586 |
Ion source control system
A gridless ion source operates from a control system (201) that generates an anode voltage (215) comprising a mains rectified signal such that the anode voltage modulates between a first voltage...
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7476869 |
Gas distributor for ion source
A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to...
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7439521 |
Ion source with removable anode assembly
An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include...
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7425711 |
Thermal control plate for ion source
A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base...
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7420182 |
Combined radio frequency and hall effect ion source and plasma accelerator system
This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma...
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7382087 |
Ozone generator system and ozone generating method
An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly...
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7372195 |
Electron beam source having an extraction electrode provided with a magnetic disk element
An electron beam source for use in an electron gun. The electron beam source includes an emitter terminating in a tip. The emitter is configured to generate an electron beam. The electron beam...
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7342236 |
Fluid-cooled ion source
An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to...
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7335896 |
Emitter for an ion source
An emitter for an ion source, such as a liquid metal alloy ion source (LMAIS). The emitter includes a binary alloy PrSi as a source material.
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7238952 |
Metal ion emission device and process for producing the same, ion beam irradiation device, processing apparatus and analyzing apparatus provided with emission device
A metal ion emission device for emitting a metal ion by applying voltage to a molten liquid metal includes a needle-like part having an internal opening in which the liquid metal can be moved. The...
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7230256 |
Ion doping system, ion doping method and semiconductor device
An ion doping system includes a chamber 11, an exhausting section 13 for exhausting gases from the chamber, an ion source 12 provided for the chamber, and an accelerating section 23 for extracting...
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7174703 |
Ion thrusting system
An ion thrusting system is disclosed comprising an ionization membrane having at least one area through which a gas is passed, and which ionizes the gas molecules passing therethrough to form ions...
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7164227 |
Hall effect thruster with anode having magnetic field barrier
An efficiency enhancing anode-magnetic structure of a Hall effect thruster produces a radially directed magnetic field between inner and outer poles at the exit portion of a gas distribution...
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7049736 |
Method of trapping accelerating electrons in plasma
Background plasma electrons in a laser wake field are trapped and accelerated using a sharp downward density transition. A short and intense laser pulse travels through low density plasma with a...
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7042145 |
Electron beam projector provided with a linear thermionic emitting cathode for electron beam heating
An electron beam gun comprises a beam waveguide and an accelerating anode fixed thereto. The accelerating anode is connected with the aid of high-voltage insulators and through a cathode plate to a...
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7005651 |
Liquid metal ion gun
An emitter of a Ga liquid metal ion source is constituted to include W12 of a base material and Ga9 of an ion source element covering a surface as construction materials. By making back-sputtered...
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6964396 |
Automatic accel voltage tracking system for an ion thruster
A voltage tracking system for an ion thruster includes a discharge chamber, a screen grid, an accelerator grid, and an accelerator grid voltage controller. The discharge chamber contains plasma at...
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6963162 |
Gas distributor for an ion source
A gas distributor for an ion source includes a plate having a recess and a series of apertures spaced radially outward from the recess. The apertures define paths for the flow of a gas through the...
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6960888 |
Method of producing and accelerating an ion beam
A method of producing and accelerating an ion beam comprising the steps of: providing a magnetic field with a cusp that opens in an outward direction along a centerline that passes through a vertex...
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6914386 |
Source of liquid metal ions and a method for controlling the source
The invention provides a system and method for controlling a source of liquid metal ions, the source comprises a tip a first electrode and a second electrode, the method includes the steps of: (i)...
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6909087 |
Method of processing a surface of a workpiece
A plasma generator generates positive ions and negative ions in a plasma. An ion extracting portion (4, 5) selectively extracts the generated positive ions and negative ions from the plasma, and...
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6909086 |
Neutral particle beam processing apparatus
A neutral particle beam processing apparatus comprises a workpiece holder (20) for holding a workpiece (X), a plasma generator for generating a plasma in a vacuum chamber (3) by applying a...
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6861643 |
Neutral particle beam processing apparatus
A neutral particle beam processing apparatus comprises a process gas inlet port (11) for introducing a process gas into a vacuum chamber (1), a plasma generating chamber (2) for generating positive...
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6849854 |
Ion source
An ion source 10 for producing a beam of ions from a plasma is disclosed. A plasma is created at the center of an anode 12 by collisions between energetic electrons and molecules of an ionizable...
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6786035 |
Ion thruster grid clear
The invention discloses a method and device for clearing an ion thruster grid of contaminants. A typical method includes applying a power supply to a grid to clear contaminants, monitoring an...
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6777862 |
Segmented electrode hall thruster with reduced plume
An apparatus and method for thrusting plasma, utilizing a Hall thruster with segmented electrodes along the channel, which make the acceleration region as localized as possible. Also disclosed are...
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6750600 |
Hall-current ion source
In accordance with one specific embodiment of the present invention, a Hall-current ion source of the end-Hall type has an anode that is contoured with one or more recesses in the...
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6735935 |
Pulsed hall thruster system
A pulsed Hall thruster system includes a Hall thruster having an electron source, a magnetic circuit, and a discharge chamber; a power processing unit for firing the Hall thruster to generate a...
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6707051 |
RF loaded line type capacitive plasma source for broad range of operating gas pressure
An RF loaded line type CCP source-having two collar type electrodes with an operating tube passing through these electrodes. One of the electrodes (high voltage electrode) is connected with the...
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6664739 |
Enhanced electron emissive surfaces for a thin film deposition system using ion sources
The invention pertains to the use of enhanced electron emitting surfaces to increase the supply of electrons in a thin film deposition system including the ion source in order to enhance the...
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6661014 |
Methods and apparatus for oxygen implantation
An oxygen ion containing plasma is generated using a hot filament ion source. The oxygen ions in the plasma come from an oxide source (e.g., a metal oxide) which has a lower free energy of...
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6640535 |
Linear gridless ion thruster
A linear gridless ion thruster (LGIT) is provided to serve as an ion source for spacecraft propulsion or plasma processing. The LGIT is composed of two stages: (1) an ionization stage composed of a...
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6642641 |
Apparatus for measuring total pressure and partial pressure with common electron beam
An apparatus for determining both total and partial pressures of a gas using one common electron beam includes a partial pressure ionization region and a total pressure ionization region separated...
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6635998 |
Ion beam processing apparatus and method of operating ion source therefor
An ion beam processing apparatus and a method of operating an ion source therefore are provided for reducing the frequency of breakdown due to particles, and for increasing an apparatus available...
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6612105 |
Uniform gas distribution in ion accelerators with closed electron drift
A system for uniformly distributing propellant gas in a Hall-effect thruster (10) (HET) includes an anode (42, 42′) and a porous material gas distributor (60, 89) (PMGD). The porous material (...
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6614181 |
UV radiation source for densification of CVD carbon-doped silicon oxide films
A UV radiation source is tunable to optimize the process of densifying a carbon-doped silicon oxide film. The composition and relative concentration of stimulated gases stimulated within an...
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6548946 |
Electron beam generator
An electron beam generator having circuit interconnections between individual components that are less prone to the adverse effects of thermal cycling. The generator includes a conductor rod within...
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