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7619349 |
Piezoelectric driven MEMS device
It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain...
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7612487 |
Contact mat for an actuator, and associated production method
A contact mat ( 9 ) for electrically contacting an actuator, particularly a piezo actuator for an injector of an injection system has several electrically conductive wires ( 5 ) that are placed...
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7608989 |
Compliant electroactive polymer transducers for sonic applications
Described herein are compliant electroactive polymer transducers for use in acoustic applications. A compliant electroactive polymer transducer includes a compliant electroactive polymer at least...
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7605520 |
Connecting piezoactuator
A circuit arrangement for operating a linear exhaust-gas probe has a measuring cell for measuring a gas concentration by determining a measuring-cell voltage, in addition to a pump cell for pumping...
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7605368 |
Vibration-type cantilever holder and scanning probe microscope
A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the...
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7602105 |
Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory
A compact large density memory piezoactuated storage device and process for its fabrication provides an integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and...
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7598657 |
Structure element for an aircraft
Nowadays floor structures in the fuselage of airplanes, which floor structures comprise transverse floor girders, are usually connected to the frame on the right and left by means of rivets and are...
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7595581 |
Thin-film piezoelectric device and method of manufacturing the same
A thin-film piezoelectric device is disclosed that includes a substrate, a piezoelectric pattern disposed on the substrate, the piezoelectric pattern including plural spaced-apart piezoelectric...
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7595579 |
Piezoelectric actuator module with a sheathed piezoelectric actuator
A piezoelectric actuator module having a piezoelectric actuator, fastened between an actuator head and an actuator foot, and having a sheath, surrounding the piezoelectric actuator, for electrical...
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7594309 |
Method of producing laminate-type piezoelectric element
A method of producing a laminate-type piezoelectric element, wherein a ceramic laminated body therein is formed through an intermediate laminated body-forming step of forming an intermediate...
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7592740 |
Miniature drug delivery pump with a piezoelectric drive system
A drug delivery pump which uses a piezoelectric drive system to advance a small syringe piston to deliver a liquid drug and a method thereof are disclosed. The present invention has a cost and size...
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7586392 |
Dual path acoustic data coupling system and method
A data coupler includes first and second acoustic isolation transformers that develop first and second isolated output signals in response to first and second modulated input signals. A first and a...
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7586243 |
Methods and systems for improving optical flatness in a path length control driver
A piezoelectric transducer is described that is configured for use within a path length control apparatus of an optical device. The transducer comprises at least one void formed within a central...
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7586239 |
MEMS vibrating structure using a single-crystal piezoelectric thin film layer
The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure having dominant lateral vibrations supported by a MEMS anchor system, and includes a single-crystal...
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7586238 |
Control and testing of a micro electromechanical switch having a piezo element
A micro electromechanical switch has a movable portion positioned to form an electrical connection between a first electrical contact and a second electrical contact. A piezoelectric electrode is...
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7586236 |
Tri-axial hybrid vibration isolator
A tri-axial vibration isolation device having: a passive isolation assembly including a first frame, a plurality of passive lateral isolators supporting the support frame on the base, and a...
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7583009 |
Actuator
An actuator is provided. The actuator includes a pair of electrode layers, and an ionically conductive polymer layer arranged between the pair of electrode layers. The ionically conductive polymer...
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7581295 |
Piezoelectric element and method of manufacturing the same
An array of piezoelectric elements is easily manufactured by making insulating portions at side surfaces smaller. The piezoelectric element includes: a multilayered structure in which piezoelectric...
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7579756 |
Piezoactuator with low stray capacitance
A piezoelectric actuator includes a stack of piezoceramic layers and electrodes among the piezoceramic layers. At least one edge region of the stack does not include electrodes. A cover layer is at...
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7579755 |
Electrical-to-mechanical transducer apparatus and method
A piezoelectric transducer able to convert an electrical signal into a mechanical motion. In various embodiments the transducer is used to form a motor and an actuator. In one embodiment a...
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7579754 |
Piezoelectric actuator
A piezoelectric actuator that can be operated in the d31 mode and which controls the potential energy of a spring is disclosed. The d31 mode of operation provides large actuator displacement and...
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7576475 |
Actuator device and method of manufacturing the same
An actuator device which is made as a laminated structure including a displacement-functioning layer having a region to be deformed by the electric field and an electrode-functioning layer having a...
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7574787 |
Methods to make piezoelectric ceramic thick film array and single elements with a reusable single layer substrate structure
A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element...
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7573181 |
Multilayer ultrasonic transducer and method for manufacturing same
A multilayer ultrasonic transducer includes a multilayer piezoelectric substrate assembly ( 100 ) laminated with a first and a second piezoelectric substrate on top of each other, and having a...
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7569974 |
Materials of the cylinders of active-piston actuators
The invention concerns an actuator which includes a linear piston ( 2 ) in an active material, and an inner sliding cylinder ( 7, 7 ′) which includes an outer cylinder ( 5, 5 ′) in which the...
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7567020 |
Laminated piezoelectric element including adhesive layers having small thickness and high adhesive strength
A laminated piezoelectric element according to the present invention includes a plurality of unit laminates and a plurality of adhesive layers. The unit laminates are stacked together. Each of the...
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7567019 |
Actuator system
An actuator using a piezoelectric element is stably operated at high speed. The actuator includes driving units provided to face a carrier stage and moving the carrier stage in an X-axis direction,...
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7567018 |
Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch
A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first...
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7567017 |
Piezoelectric linear motor with displacement amplifying means
A piezoelectric linear motor for amplifying the change in at least one dimension of a piezoelectric material is disclosed. A shaft is connected axial-movably to a piezoelectric actuator. The...
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7565723 |
Piezoelectric actuator and method of fabricating piezoelectric actuator
A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate...
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7564176 |
Laminated piezoelectric element and production method of the same
A laminated piezoelectric element capable of being sintered at low temperatures and high in piezoelectric properties is provided. The laminated piezoelectric element comprises a plurality of...
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7564173 |
Piezoelectric actuator device for ultrasonic motor
An ultrasonic motor piezoelectric actuator element uses a primary longitudinal mode and a secondary bending mode and includes a stacked piezoelectric element in which piezoelectric layers and...
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7564172 |
Micro-electro-mechanical transducer having embedded springs
A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base having a lower portion and an upper portion; a top plate disposed above the upper portion of the base...
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7564170 |
Piezoswitch
An actuating element for a function carrier ( 4 ) in a motor vehicle having a piezoelectric element ( 1 ), preferably a piezoelectric foil and a decorative surface ( 2 ), mounted above the...
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7564169 |
Piezo actuator and associated production method
A support assembly for a piezoelectric actuator ( 15 ), in particular for a piezoelectric actuator for driving an injector for the injection system of an internal combustion engine has a holder ( 5...
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7562451 |
Method of manufacturing actuator device for ink jet head
A method of manufacturing an actuator device configured to prevent separation of a vibration plate and to enhance durability and reliability, and a liquid-jet apparatus are provided. The method...
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7560854 |
Piezoelectric element and its manufacturing method
A piezoelectric element includes: a base substrate; a lower electrode provided above the base substrate; a lower dummy electrode provided on the base substrate and electrically insulated from the...
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7559130 |
Method for fabricating quartz-based nanoresonators
A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate....
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7559128 |
Method of manufacturing a piezoelectric/electrostrictive device
A piezoelectric/electrostrictive device is provided including a substrate section and an operation section disposed on the substrate section. The operation section includes a...
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7555824 |
Method for large scale integration of quartz-based devices
Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are...
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7554246 |
Piezoelectric composite device, method of manufacturing same, method of controlling same, input-output device, and electronic device
A piezoelectric composite device including: a feeding electrode; a common electrode; a signal detecting electrode; a first piezoelectric element joined between the feeding electrode and the common...
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7550898 |
Boundary acoustic wave device and process for producing same
In a method for producing a boundary acoustic wave device that includes a first medium, a second medium, and a third medium laminated in that order, and electrodes disposed at the interface between...
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7545080 |
Monolithic piezoactuator with rotation of the polarisation in the transition region and use of said piezoactuator
A piezoactuator has at least one piezoelectric-active partial stack with piezoceramic layers arranged one over the other with piezoceramic material and electrode layers arranged between the...
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7541719 |
Stage and X-Y stage each on which to place sample, and charged-particle beam apparatus
Provided is a stage on which to place a sample, which is capable of performing a high-precision positioning at a short time, and which prevents an image drift of a measuring object. The stage...
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7541715 |
Electrochemical methods, devices, and structures
The present invention provides devices and structures and methods of use thereof in electrochemical actuation. This invention provides electrochemical actuators, which are based, inter-alia, on an...
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7538476 |
Multi-layer piezoelectric actuators with conductive polymer electrodes
A multi-layer piezoelectric actuator with conductive polymer electrodes is described. The piezoelectric actuator comprises a stack of alternating conductive electrode layers and piezoelectric...
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7538475 |
Multilayer piezoelectric devices and method of producing same
A multilayer piezoelectric device has a laminated body having piezoelectric layers laminated in the direction of a given axis “A” and positive and negative internal electrode layers are...
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7538472 |
Programmable shims for manufacturing and assembly lines
Disclosed herein is a programmable shim 28 for positioning a work piece 12 comprising a first plate 30 ; an optional reference frame 32 ; and an actuator 34 in operative communication with...
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7535158 |
Stress sensitive element
A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed...
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7531947 |
Stacked piezoelectric element and production method thereof
A stacked piezoelectric element obtained by alternately stacking a piezoelectric ceramic layer and an electrode layer, wherein said electrode layer mainly comprises an electrically conducting base...
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