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7629730 |
Piezoelectric electroacoustic transducing device
In order to simultaneously realize both improvements of the acoustic performance of a bimorph piezoelectric electroacoustic transducing device and the productivity, in a bimorph piezoelectric...
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7626319 |
Three-dimensional electroactive polymer actuated devices
Devices employing electroactive polymer actuators are disclosed. Acrylic dielectric material based actuators are optionally provided in which architectures are presented that allow for improved...
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7622846 |
Bulk acoustic wave resonator, filter and duplexer and methods of making same
A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one...
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7612485 |
Ultrasonic sensor
An ultrasonic sensor for detecting an ultrasonic wave, which is output from an ultrasonic generator and reflected by an object to be detected, the ultrasonic sensor includes: an acoustic matching...
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7608983 |
Piezoelectric actuator, liquid transporting apparatus, and liquid-droplet jetting apparatus
A piezoelectric actuator includes a piezoelectric layer, a vibration plate, a supporting member which has an relief portion. A thin wall portion is provided in a first area, of one of the...
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7603756 |
Method of forming piezoelectric actuator of inkjet head
A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes...
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7602105 |
Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory
A compact large density memory piezoactuated storage device and process for its fabrication provides an integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and...
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7602101 |
Piezoelectric thin-film resonator and filter using the same
A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and...
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7598659 |
Piezoelectric ceramic and method of manufacturing the same
A piezoelectric/electrostrictive device which exhibits an excellent piezoelectric characteristic and which has only a small dependence on a temperature is provided. The...
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7595580 |
Electroactive polymer actuated devices
Devices employing electroactive polymer actuators are disclosed. The devices include pumps, valves, cameras (where electroactive polymer actuators control either one or both of zoom and focus),...
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7594307 |
Method for manufacturing piezoelectric resonator
A method of manufacturing a piezoelectric resonator includes forming first electrodes larger than vibrating electrodes in an area D 1 including the vibrating electrodes on obverse and reverse...
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7587895 |
Micro heat engine and method of manufacturing
The present invention relates generally to micro heat engines (MHEs) and methods of manufacture. More particularly, the present invention relates to an MHE including a substrate having a sealed...
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7586234 |
Piezoelectric material and piezoelectric device
A piezoelectric material is expressed by a general formula (1) as follows: (Bi 1−x Ba x )(Fe 1−x Ti x )O 3 . . . (1), where x is greater than 0, but smaller than 1 (0<x<1).
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7586241 |
Electroacoustic transducer
An electroacoustic transducer having one end portion of a first piezoelectric element and one end portion of a second piezoelectric element fixed to a frame such that the first piezoelectric...
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7579753 |
Transducers with annular contacts
An electronic device and transducer structures are described.
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7579761 |
Piezoelectric thin-film resonator and filter
A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on...
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7566583 |
Method of determining adhesion quality
A method of determining adhesion quality and apparatus embodying the method are disclosed. The apparatus includes a substrate, a seed layer, and a resonator. The substrate defines a cavity and has...
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7567023 |
Piezoelectric thin-film resonator and filter using the same
A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the...
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7562429 |
Suspended device and method of making
A substrate defining a cavity comprising a wide, shallow first portion and a narrow, deep second portion is provided. The first portion of the cavity extends into the substrate from the front side...
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7560853 |
Thin film piezoelectric resonator, method of manufacturing the same, and filter including the same
A thin film piezoelectric resonator includes: a substrate having a cavity; a first dielectric layer provided on the substrate to cover the cavity; a second dielectric layer provided on the...
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7550900 |
Acoustic resonator device
Acoustic resonator device ( 1 ) includes an active element ( 6 ) and a support provided with a membrane ( 5 ). The active element ( 6 ) is provided with at least one piezoelectric layer ( 10 ) and...
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7550899 |
Piezoelectric electroacoustic transducing device
In order to improve the sound pressure level and the sound quality of a piezoelectric electroacoustic transducing device without impairing the size, the productivity, the cost, and the like of the...
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7536769 |
Method of fabricating an acoustic transducer
An acoustic pressure type sensor is fabricated on a supporting substrate by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The...
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7535154 |
Piezoelectric thin-film resonator
In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b)...
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7535156 |
Energy scavenger and method for manufacturing the same
A micro-electromechanical package includes a casing and a microelectronic circuit. At least one portion of the casing includes a piezoelectric material arranged such that, in use, dynamically...
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7530952 |
Capacitive ultrasonic transducers with isolation posts
A capacitive ultrasonic transducer is described which include one or more cells including a cavity defined by a membrane electrode supported spaced from a support electrode by insulating walls with...
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7531943 |
Acoustic resonator and filter
The area of an opening C of a cavity is equal to or greater than the area of a horizontal cross section D of a vibrating section. The vibrating section is placed on a support section at a position...
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7531946 |
Piezoelectric sounding body
A piezoelectric sounding body in which a stable high sound pressure can be obtained over a wide frequency band. The piezoelectric sounding body includes a resin film, a piezoelectric vibrating...
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7525399 |
Thin-film piezoelectric resonator, filter and voltage-controlled oscillator
A thin-film piezoelectric resonator includes a substrate, and first and second excitation portions. The substrate includes first and second cavities. The first excitation portion is disposed over...
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7521845 |
Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, and liquid discharge apparatus
A piezoelectric material, characterized in that a main component of the piezoelectric substance is PZT, which has perovskite type structure expressed in Pb(Zr x Ti 1-x )O 3 (x expresses an element...
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7504910 |
Thin-film piezoelectric resonator utilizing a second or higher harmonic mode
A thin-film piezoelectric resonator having a thin-film portion with a piezoelectric thin film disposed between a pair of opposing electrodes, an insulating layer formed on one of the pair of...
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7501739 |
Thin film piezoelectric resonator and manufacturing process thereof
A thin film piezoelectric resonator includes a substrate having a cavity, and a resonance portion located on the substrate and right above the cavity. The resonance portion includes a lower...
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7498718 |
Stacked piezoelectric diaphragm members
A diaphragm assembly ( 20 ) comprises at least two piezoelectric diaphragm members ( 22 ) arranged in a stacking direction ( 23 ). An interface layer ( 24 ) is situated between adjacent...
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7495373 |
Liquid transporting apparatus and method of producing liquid transporting apparatus
A piezoelectric actuator for a liquid transporting apparatus includes a drive plate having a base portion which is arranged, on an upper surface of a vibration plate covering a pressure chamber;...
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7486006 |
Piezoelectric resonator having improved temperature compensation and method for manufacturing same
A piezoelectric resonator includes a piezoelectric layer having a first resonance frequency temperature coefficient of a first sign, a first and a second electrode, the piezoelectric layer being...
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7481519 |
Actuator device and liquid-jet head
An actuator device includes a plurality of piezoelectric elements formed on a surface of a substrate. Each piezoelectric element is configured of a piezoelectric layer, an upper electrode, and a...
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7482733 |
Piezoactuator
The invention relates to a piezoactuator for miniaturized pumps, atomizers, valves or the like. The piezoactuator comprises a piezoceramic disk ( 1 ) and a pressure disk ( 2 ) coupled to the...
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7482738 |
Piezoelectric thin-film resonator and filter
A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film...
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7479685 |
Electronic device on substrate with cavity and mitigated parasitic leakage path
An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface...
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7477115 |
Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator
A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above...
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7466064 |
Ultrasonic element
An ultrasonic element has a membrane formed as a thin walled portion of a substrate, on which a piezoelectric vibrator is formed. The piezoelectric vibrator comprises a piezoelectric thin film and...
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7463117 |
Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR
A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the...
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7456548 |
Piezoelectric element, piezoelectric actuator, and ink jet recording head
A piezoelectric element having a piezoelectric film and one pair of electrodes being in contact with the piezoelectric film on a substrate, wherein the piezoelectric film has a structure in which a...
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7456709 |
Bulk acoustic resonator including a resonance part with dimple and fabrication method therefor
A bulk acoustic resonance and a method for fabricating the bulk acoustic resonator, the bulk acoustic resonator including: a substrate including an upper surface defining a predetermined area...
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7456707 |
Resonator and filter using the same
An acoustic resonator includes: a substrate; a resonator film which is supported above the main surface of the substrate and includes a piezoelectric film and a pair of a top electrode and a bottom...
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7443076 |
Diffractive thin-film piezoelectric light modulator and method of fabricating the same
Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when...
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7439659 |
Piezoelectric actuator, droplet ejection apparatus, and manufacturing method thereof
The piezoelectric actuator comprises: a plate-shaped piezoelectric body which has a portion polarized in a thickness direction of the piezoelectric body and a portion polarized in a direction...
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7436102 |
Piezoelectric thin-film resonator and method for producing the same
A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness...
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7429816 |
Piezoelectric vibrator and fabricating method thereof
The present invention relates to piezoelectric vibrators such as a resonator used as a timing element, discriminator, filter or the like, and fabricating methods thereof. The piezoelectric...
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7427820 |
Piezoelectric/electrostrictive film element
A lower electrode 4 and an auxiliary electrode 8 , a piezoelectric/electrostrictive film 5 , and an upper electrode 6 are sequentially arranged in layers on a substrate 1 . The lower...
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