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7629730 Piezoelectric electroacoustic transducing device  
In order to simultaneously realize both improvements of the acoustic performance of a bimorph piezoelectric electroacoustic transducing device and the productivity, in a bimorph piezoelectric...
7626319 Three-dimensional electroactive polymer actuated devices  
Devices employing electroactive polymer actuators are disclosed. Acrylic dielectric material based actuators are optionally provided in which architectures are presented that allow for improved...
7622846 Bulk acoustic wave resonator, filter and duplexer and methods of making same  
A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one...
7612485 Ultrasonic sensor  
An ultrasonic sensor for detecting an ultrasonic wave, which is output from an ultrasonic generator and reflected by an object to be detected, the ultrasonic sensor includes: an acoustic matching...
7608983 Piezoelectric actuator, liquid transporting apparatus, and liquid-droplet jetting apparatus  
A piezoelectric actuator includes a piezoelectric layer, a vibration plate, a supporting member which has an relief portion. A thin wall portion is provided in a first area, of one of the...
7603756 Method of forming piezoelectric actuator of inkjet head  
A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes...
7602105 Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory  
A compact large density memory piezoactuated storage device and process for its fabrication provides an integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and...
7602101 Piezoelectric thin-film resonator and filter using the same  
A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and...
7598659 Piezoelectric ceramic and method of manufacturing the same  
A piezoelectric/electrostrictive device which exhibits an excellent piezoelectric characteristic and which has only a small dependence on a temperature is provided. The...
7595580 Electroactive polymer actuated devices  
Devices employing electroactive polymer actuators are disclosed. The devices include pumps, valves, cameras (where electroactive polymer actuators control either one or both of zoom and focus),...
7594307 Method for manufacturing piezoelectric resonator  
A method of manufacturing a piezoelectric resonator includes forming first electrodes larger than vibrating electrodes in an area D 1 including the vibrating electrodes on obverse and reverse...
7587895 Micro heat engine and method of manufacturing  
The present invention relates generally to micro heat engines (MHEs) and methods of manufacture. More particularly, the present invention relates to an MHE including a substrate having a sealed...
7586234 Piezoelectric material and piezoelectric device  
A piezoelectric material is expressed by a general formula (1) as follows: (Bi 1−x Ba x )(Fe 1−x Ti x )O 3 . . . (1), where x is greater than 0, but smaller than 1 (0<x<1).
7586241 Electroacoustic transducer  
An electroacoustic transducer having one end portion of a first piezoelectric element and one end portion of a second piezoelectric element fixed to a frame such that the first piezoelectric...
7579753 Transducers with annular contacts  
An electronic device and transducer structures are described.
7579761 Piezoelectric thin-film resonator and filter  
A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on...
7566583 Method of determining adhesion quality  
A method of determining adhesion quality and apparatus embodying the method are disclosed. The apparatus includes a substrate, a seed layer, and a resonator. The substrate defines a cavity and has...
7567023 Piezoelectric thin-film resonator and filter using the same  
A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the...
7562429 Suspended device and method of making  
A substrate defining a cavity comprising a wide, shallow first portion and a narrow, deep second portion is provided. The first portion of the cavity extends into the substrate from the front side...
7560853 Thin film piezoelectric resonator, method of manufacturing the same, and filter including the same  
A thin film piezoelectric resonator includes: a substrate having a cavity; a first dielectric layer provided on the substrate to cover the cavity; a second dielectric layer provided on the...
7550900 Acoustic resonator device  
Acoustic resonator device ( 1 ) includes an active element ( 6 ) and a support provided with a membrane ( 5 ). The active element ( 6 ) is provided with at least one piezoelectric layer ( 10 ) and...
7550899 Piezoelectric electroacoustic transducing device  
In order to improve the sound pressure level and the sound quality of a piezoelectric electroacoustic transducing device without impairing the size, the productivity, the cost, and the like of the...
7536769 Method of fabricating an acoustic transducer  
An acoustic pressure type sensor is fabricated on a supporting substrate by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The...
7535154 Piezoelectric thin-film resonator  
In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b)...
7535156 Energy scavenger and method for manufacturing the same  
A micro-electromechanical package includes a casing and a microelectronic circuit. At least one portion of the casing includes a piezoelectric material arranged such that, in use, dynamically...
7530952 Capacitive ultrasonic transducers with isolation posts  
A capacitive ultrasonic transducer is described which include one or more cells including a cavity defined by a membrane electrode supported spaced from a support electrode by insulating walls with...
7531943 Acoustic resonator and filter  
The area of an opening C of a cavity is equal to or greater than the area of a horizontal cross section D of a vibrating section. The vibrating section is placed on a support section at a position...
7531946 Piezoelectric sounding body  
A piezoelectric sounding body in which a stable high sound pressure can be obtained over a wide frequency band. The piezoelectric sounding body includes a resin film, a piezoelectric vibrating...
7525399 Thin-film piezoelectric resonator, filter and voltage-controlled oscillator  
A thin-film piezoelectric resonator includes a substrate, and first and second excitation portions. The substrate includes first and second cavities. The first excitation portion is disposed over...
7521845 Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, and liquid discharge apparatus  
A piezoelectric material, characterized in that a main component of the piezoelectric substance is PZT, which has perovskite type structure expressed in Pb(Zr x Ti 1-x )O 3 (x expresses an element...
7504910 Thin-film piezoelectric resonator utilizing a second or higher harmonic mode  
A thin-film piezoelectric resonator having a thin-film portion with a piezoelectric thin film disposed between a pair of opposing electrodes, an insulating layer formed on one of the pair of...
7501739 Thin film piezoelectric resonator and manufacturing process thereof  
A thin film piezoelectric resonator includes a substrate having a cavity, and a resonance portion located on the substrate and right above the cavity. The resonance portion includes a lower...
7498718 Stacked piezoelectric diaphragm members  
A diaphragm assembly ( 20 ) comprises at least two piezoelectric diaphragm members ( 22 ) arranged in a stacking direction ( 23 ). An interface layer ( 24 ) is situated between adjacent...
7495373 Liquid transporting apparatus and method of producing liquid transporting apparatus  
A piezoelectric actuator for a liquid transporting apparatus includes a drive plate having a base portion which is arranged, on an upper surface of a vibration plate covering a pressure chamber;...
7486006 Piezoelectric resonator having improved temperature compensation and method for manufacturing same  
A piezoelectric resonator includes a piezoelectric layer having a first resonance frequency temperature coefficient of a first sign, a first and a second electrode, the piezoelectric layer being...
7481519 Actuator device and liquid-jet head  
An actuator device includes a plurality of piezoelectric elements formed on a surface of a substrate. Each piezoelectric element is configured of a piezoelectric layer, an upper electrode, and a...
7482733 Piezoactuator  
The invention relates to a piezoactuator for miniaturized pumps, atomizers, valves or the like. The piezoactuator comprises a piezoceramic disk ( 1 ) and a pressure disk ( 2 ) coupled to the...
7482738 Piezoelectric thin-film resonator and filter  
A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film...
7479685 Electronic device on substrate with cavity and mitigated parasitic leakage path  
An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface...
7477115 Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator  
A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above...
7466064 Ultrasonic element  
An ultrasonic element has a membrane formed as a thin walled portion of a substrate, on which a piezoelectric vibrator is formed. The piezoelectric vibrator comprises a piezoelectric thin film and...
7463117 Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR  
A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the...
7456548 Piezoelectric element, piezoelectric actuator, and ink jet recording head  
A piezoelectric element having a piezoelectric film and one pair of electrodes being in contact with the piezoelectric film on a substrate, wherein the piezoelectric film has a structure in which a...
7456709 Bulk acoustic resonator including a resonance part with dimple and fabrication method therefor  
A bulk acoustic resonance and a method for fabricating the bulk acoustic resonator, the bulk acoustic resonator including: a substrate including an upper surface defining a predetermined area...
7456707 Resonator and filter using the same  
An acoustic resonator includes: a substrate; a resonator film which is supported above the main surface of the substrate and includes a piezoelectric film and a pair of a top electrode and a bottom...
7443076 Diffractive thin-film piezoelectric light modulator and method of fabricating the same  
Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when...
7439659 Piezoelectric actuator, droplet ejection apparatus, and manufacturing method thereof  
The piezoelectric actuator comprises: a plate-shaped piezoelectric body which has a portion polarized in a thickness direction of the piezoelectric body and a portion polarized in a direction...
7436102 Piezoelectric thin-film resonator and method for producing the same  
A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness...
7429816 Piezoelectric vibrator and fabricating method thereof  
The present invention relates to piezoelectric vibrators such as a resonator used as a timing element, discriminator, filter or the like, and fabricating methods thereof. The piezoelectric...
7427820 Piezoelectric/electrostrictive film element  
A lower electrode 4 and an auxiliary electrode 8 , a piezoelectric/electrostrictive film 5 , and an upper electrode 6 are sequentially arranged in layers on a substrate 1 . The lower...