Match Document Document Title
9035532 Ultrasonic sensor microarray and method of manufacturing same  
A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules...
9036229 MEMS device with independent rotation in two axes of rotation  
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable...
8987578 Energy conversion device  
According to one embodiment, an energy conversion device comprises a nuclear battery, a light source coupled to the nuclear battery and operable to receive electric energy from the nuclear battery...
8973250 Methods of manufacturing a micro-electro-mechanical system (MEMS) structure  
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate...
8970087 Ion conducting actuator  
Provided is an ion conducting actuator that easily allows reduction in size and integration thereof, compared to existing one, and gives a large generating force. The columnar ion conducting...
8957564 Microelectromechanical system megasonic transducer  
Megasonic cleaning systems and methods of fabricating and using the same are provided. In one embodiment, the system comprises a plurality of Micro-Electromechanical System (MEMS) transducers,...
8952595 Micro-electro-mechanical transducers  
Some examples include at least one capacitive micro-electro-mechanical transducer (cMUT). For instance, the cMUT may include a substrate, a plate, and a resilient structure therebetween. In some...
8941192 MEMS actuator device deployment  
A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to...
8933596 Micro rotary machine and methods for using same  
A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro...
8933611 Vibration power generator, vibration power generating device and communication device having vibration power generating device mounted thereon  
Electricity generated by a vibration power generator 200 can be extracted efficiently by providing the vibration power generator 200, a rectifier circuit bridge 205, an output controlling circuit...
8928203 Capacitive electromechanical transducer  
The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer...
8922094 Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions  
A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electro-static comb drive...
8909145 Wireless telemetry auto for torque measurement system  
A torque measurement system that includes a rotor device and a stator device can perform automatic tuning to improve the initial tuning performed during design and assembly. The stator device can...
8884474 Method of fabricating a micro machine  
A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be...
8878633 Vertical differential resonator  
A micromechanical device includes a substrate, a micromechanical structure supported by the substrate and configured for overtone resonant vibration relative to the substrate, and a plurality of...
8866363 Electrostatic actuator having urging members with varying rigidities  
According to one embodiment, an electrostatic actuator includes a substrate, an electrode unit, a film body unit, and an urging unit. The electrode unit is provided on the substrate. The film body...
8857044 System for manufacturing a field emission structure  
An system for manufacturing a field emission structure is provided that involves a magnet supplying device and a magnet placement device for placing each of a plurality of magnets at a...
8860283 Electrostatic actuator of a mobile structure with improved relaxation of trapped charges  
The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing...
8861062 MEMS device and methods for manufacturing and using same  
A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of...
8858447 Ultrasonic transducer and method of manufacturing the same  
An ultrasonic transducer and a method of manufacturing the same. The ultrasonic transducer includes a substrate, a supporting unit that is disposed on the substrate and comprises a through-hole, a...
8853975 Electrostatic actuator control  
In one embodiment, a device is provided that includes: a cascaded electrostatic actuator defining a stack in a substrate having a plurality of gaps between parallel plate electrodes; and a...
8853804 Tilting actuator with close-gap electrodes  
A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a...
8847708 MEMS vibrator and oscillator  
A MEMS vibrator according to the invention includes: a first electrode fixed to a surface of a substrate; and a second electrode having a beam portion including a second face facing a first face...
8841816 Energy conversion device of electrostatic induction type  
On an upper surface of a fixed substrate, a plurality of strap-shaped base electrodes are arranged in parallel to each other. On each of the base electrodes, an electret is formed. The electret...
8816565 Two-dimensional comb-drive actuator and manufacturing method thereof  
A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting...
8803256 Linearly deployed actuators  
A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to...
8803401 Vibration power generator, vibration power generating device, and electronic device and communication device that have the vibration power generating device installed  
A vibration power generator includes a first substrate, a first electrode on the first substrate, a second substrate spaced from and opposite the first substrate, and a second electrode on the...
8796901 Micro-electro-mechanical transducer having an insulation extension  
A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated by an insulator with an insulation extension is disclosed. The two electrodes define a transducing gap...
8797629 Method for operating a micromirror device with electromechanical pulse width modulation  
A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically...
8796902 Electrostatic induction power generator  
An electrostatic induction generator has a first substrate and a second substrate that can move relative to each other while remaining opposed to each other, an electret provided in the first...
8791620 Micromechanical actuator having multiple joints  
A micromechanical actuator includes a shaft and at least a first driving mechanism. The shaft and the first driving mechanism are connected by a first joint.
8779647 Electrostatic motor  
An electrostatic motor has a container having a main body, a stator fixed to the main body in the container; and a rotor which is disposed opposite to the stator in the container, and which is...
8772999 Signal amplification by hierarchal resonating structures  
An electromechanical resonating structure, including: first level major elements coupled to each other to form a second or higher level hierarchy; and first level sub-micron size minor elements...
8760032 Energy recovering device with a liquid electrode  
An energy recovery device including: at least one capacitor with variable capacitance, the capacitor including a fixed electrode, a dielectric layer, and a liquid electrode; and a mechanism to...
8749113 Electrostatic actuator including a plurality of urging units with varying rigities  
According to one embodiment, an electrostatic actuator includes an electrode unit, a conductive film body unit, a plurality of first urging units, and a plurality of second urging units. The...
8749112 Method for balancing the movement of mobile masses in a bi-linear electrodynamic motor  
The motion of the magnetized movable masses of a bilinear electrodynamic motor comprising two movable masses moving in opposite senses parallel to the axis (x-x) of the motor is balanced. At least...
8742873 MEMS resonator devices  
Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide...
8742854 Periodic signal generators having microelectromechanical resonators therein that support generation of high frequency low-TCF difference signals  
A periodic signal generator is configured to generate high frequency signals characterized by relatively low temperature coefficients of frequency (TCF). A microelectromechanical resonator, such...
8742872 MEMS element, and manufacturing method of MEMS element  
In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate...
8742644 Power generation apparatus  
A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the...
8736138 Carbon nanotube MEMS assembly  
A carbon nanotube MEMS assembly comprises a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device. An interstitial...
8736139 Optical image stabilizer and method of manufacturing the same  
Disclosed herein is an optical image stabilizer, including: a substrate; a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on...
8729770 MEMS actuators with combined force and bi-directional rotation  
A MEMS system comprises a first rotational actuator having a first drive mechanism configured to drive rotation of a first rotator about a first axis, a second rotational actuator having a second...
8727994 Cell and channel of ultrasonic transducer, and ultrasonic transducer including the same  
A cell of an ultrasonic transducer is provided. The cell includes a substrate; a supporting portion disposed on the substrate; a thin film spaced apart from the substrate and the supporting...
8716916 Vibration generator, vibration generation device, and electronic equipment and communication device provided with vibration generation device  
A vibration power generator including a first substrate; first electrodes disposed over one surface of the first substrate; a second substrate spaced from the first substrate and opposed to the...
8710712 Vibration power generator and vibration power generation device, and communication device and electronic equipment with vibration power generation device  
A vibration power generator is provided that increases output power by improving the electrostatic capacitance when the area of the overlap between electret electrodes and counter electrodes is...
8711460 Moving structure and micro-mirror device using the same  
In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The...
8704423 Asymmetric dielectric elastomer composite material  
Embodiments of the invention provide a dielectric elastomer composite material comprising a plurality of elastomer-coated electrodes arranged in an assembly. Embodiments of the invention provide...
8698376 Microelectromechanical systems (MEMS) resonators and related apparatus and methods  
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a...
8691099 Process for fabricating MEMS devices  
A process for fabricating a MEMS device with movable comb teeth and stationary comb teeth. A single mask is used to define, during a series of processing steps, the location and width of both...