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7617593 |
Micromachine and method of fabricating the same
A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies...
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7616372 |
Piano MEMS with hidden hinge
The micro-electro-mechanical mirror device according to the present invention includes a platform pivotable about two perpendicular axes, and a hinge structure disposed beneath the platform. The...
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7612541 |
Charge-pump voltage converter
A charge-pump voltage converter for converting a low voltage provided by a low-voltage source to a higher voltage. Charge is inductively generated on a transfer rotor electrode during its transit...
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7612484 |
High-deformation composite microresonator
An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material...
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7612483 |
Harmonic cMUT devices and fabrication methods
Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a harmonic cMUT device generally comprises a membrane...
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7602097 |
Movable device
A movable device simultaneously enabling reduction of size down to the submicron level, higher speed operation, a streamlined production process, low costs, and greater reliability. A movable...
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7598652 |
Mechanical meta-materials
The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation...
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7598651 |
Mechanical meta-materials
The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation...
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7595708 |
MEMS resonator array structure
A MEMS array structure includes MEMS resonators that form an array. Each MEMS resonator includes beam sections. At least one of the beam sections of a first one of the MEMS resonators is a shared...
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7592737 |
MEMS device comprising an actuator generating a hysteresis driving motion
A MEMS device is provided which includes a driven element having a series of teeth. The MEMS device includes a driving element operable to engage the driven element when the driving element is in a...
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7586238 |
Control and testing of a micro electromechanical switch having a piezo element
A micro electromechanical switch has a movable portion positioned to form an electrical connection between a first electrical contact and a second electrical contact. A piezoelectric electrode is...
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7583006 |
MEMS digital linear actuator
In accordance with an embodiment of the present invention, an electrostatic actuator has a base having a plurality of base pillars formed thereon and has a stage having a plurality of stage pillars...
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7579747 |
Electrostatic actuator
An electrostatic actuator includes a stator having a plurality of protruding electrodes formed on a surface of a base material, where the surface serves as a counter surface, and a mover disposed...
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7579746 |
Actuator with Alternating Steady Voltage Combs and Variable Voltage Combs
An actuator includes: a base section; an object having a body portion and a holding portion holding the body portion in a manner that the body portion is movable against the base section; a movable...
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7564162 |
Process compensated micromechanical resonators
Disclosed are micromechanical tapered I-shaped bulk acoustic resonators. An exemplary resonator is formed on a substrate, which is preferably silicon. The resonator has a central rod (or...
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7550895 |
Method for driving micro-oscillating element having comb-teeth electrodes
A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines...
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7548011 |
Systems and methods for improved control of micro-electrical-mechanical system (MEMS) electrostatic actuator
Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive...
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7545239 |
Serrated MEMS resonators
One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface...
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7545075 |
Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same
The embodiments of the present invention provide a CMUT array and method of fabricating the same. The CMUT array has CMUT elements individually or respectively addressable from a backside of a...
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7542188 |
Optical scanning using vibratory diffraction gratings
An optical scanning apparatus includes an in-plane vibratory mass platform having at least one diffraction grating formed thereon as the scanning element, at least one flexure structure that...
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7538927 |
MEMS mirror with short vertical comb teeth and long in-plane comb teeth
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from...
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7538471 |
Microactuator having increased rigidity with reduced mass
There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A...
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7535611 |
Electromechanical dynamic force profile articulating mechanism
An electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in MEMS systems. The...
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7521836 |
Electrostatic actuator with fault tolerant electrode structure
A high-power electrostatic actuator comprising rotor and stator layers with fault-tolerant electrode structures, a housing to contain the electrodes and dielectric fluid, and electronic circuitry...
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7518283 |
Nanometer-scale electrostatic and electromagnetic motors and generators
It is an object of the present invention to provide NEMS that utilize electrostatic and electromagnetic forces to operate. In one nanoelectrostatic embodiment, a nanometer-scale beam is suspended...
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7514840 |
Electrostatic actuator
An electrostatic actuator includes a stator that includes a stator-side electrode group including a plurality of electrodes, a mover that includes a mover-side electrode group including a plurality...
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7508111 |
Biaxial actuators with comb electrodes having separated vertical positions
Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a...
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7505373 |
MEMS micromotor and timepiece equipped with this micromotor
The invention proposes a MEMS micromotor produced in a plate made of crystalline or amorphous material, in particular based on silicon, which comprises a lower layer forming a substrate, and an...
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7504785 |
System for controlling an electrostatic stepper motor
A system to control the fixed mass/spring mechanical resonance of the motor in conjunction with a model of the motor that estimates the present position and allows the determination of the motor...
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7504758 |
Electrostatic actuator and method for driving electrostatic actuator
An electrostatic actuator having a simple structure including a reduced number of systems that supply driving voltages and a method for driving the electrostatic actuator. Stator electrodes 23 ...
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7504757 |
Multi-finger z-actuator
Multi-level structures are formed in a semiconductor substrate by first forming a pattern of lines or structures of different widths. Width information on the pattern is decoded by processing steps...
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7503989 |
Methods and systems for aligning and coupling devices
A first device has a micrometer-scale or smaller first structure and is flexibly coupled to a first substrate. A second device has a micrometer-scale or smaller second structure and is coupled to a...
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7498715 |
Method and structure for an out-of plane compliant micro actuator
This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The...
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7498714 |
Multi-layer three-dimensional structures having features smaller than a minimum feature size associated with the formation of individual layers
Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum...
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7489211 |
Electromechanical filter and electrical circuit and electrical equipment employing electromechanical filter
An electromechanical filter capable of achieving overall miniaturization by employing a micro oscillator such as a carbon nanotube with superior conductivity so as to enable selection of signals of...
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7486000 |
Dielectrophoretic heat engine and method of energy conversion
A dielectrophoretic heat engine with temperature-dependent dielectric matter and energy conversion method exploiting the thermodielectrophoretic effect for effectively and efficiently converting...
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7482728 |
Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor
The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second...
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7479726 |
MEMS device using an actuator
A MEMS includes an actuator, first and second electrodes, and a fixed shaft. The actuator is provided above a substrate. The actuator has one end and the other end. The one end of the actuator is...
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7471031 |
Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element
In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable...
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7468572 |
Versatile digitally controlled micro-mechanical actuator
A micro-mechanical actuator includes a partially cylindrical rotatable rotor assembly, a stationary stator structure, rotatable connectors, connecting the rotor assembly and the stator structure,...
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7468571 |
Electrostatically driven latchable actuator system
An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is...
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7466060 |
Piezoelectric driving type MEMS apparatus
A piezoelectric driving type MEMS apparatus includes: a supporting portion provided on a substrate; and a piezoelectric actuator, which is supported on the supporting portion, including a...
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7462974 |
Inertial driving actuator
An inertial driving actuator includes a fixing member, a moving element that is fixed to the fixing member and generates a small displacement by extension and contraction, an oscillation substrate...
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7459827 |
Piezoelectric-driven MEMS device and method for manufacturing the same
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a...
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7456698 |
Mechanical self-reciprocating oscillator and mechanism and a method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components
A mechanical self-reciprocating oscillator and mechanism and method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic...
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7453183 |
Rotational actuator of motor based on carbon nanotubes
A rotational actuator/motor based on rotation of a carbon nanotube is disclosed. The carbon nanotube is provided with a rotor plate attached to an outer wall, which moves relative to an inner wall...
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7453182 |
Micro oscillating element
A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first...
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7451596 |
Multiple degree of freedom micro electro-mechanical system positioner and actuator
A micro electro-mechanical system (MEMS) positioner, including an actuator and method for making the same, includes a stage formed within a first layer of semiconductor material, along with a...
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7449811 |
Electrostatic induction conversion device
There is provided an electrostatic induction conversion device which is small, has high conversion efficiency between electric energy and kinetic energy, and can prevent degradation of an electret....
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7447119 |
Drive module comprising an MEMS micromotor, process for the production of this module and timepiece fitted with this module
The invention proposes a drive module intended to engage with a clock wheel having a plate made of crystalline or amorphous material comprising a lower layer, which forms a substrate, and an upper...
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