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8134257 Lithographic apparatus having a lorentz actuator with a composite carrier  
An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet...
8097987 Movable magnet type linear motor with improved end cover assembly  
A movable magnet type linear motor with an improved end cover assembly includes a mover having a housing and an accommodating space extending along an axis of the housing for receiving therein a...
8097989 Reciprocating linear actuator  
A reciprocating linear actuator in which a slide and a counter slide are arranged for linear movement within a hollow guide. The actuator has driving force generating means for generating a driving...
8093766 Cylindrical linear motor armature, cylindrical linear motor field pole, and cylindrical linear motor using them  
A cylindrical linear motor capable of solving the problem that a leak flux links an aluminum frame at both ends of an armature of a conventional cylindrical linear motor, which causes a viscous...
8076815 Pole tooth with end face laminate for connection of pole tooth halves and corresponding method for production of a pole tooth  
Electrical machines having pole teeth which can be equipped with a permanent magnet are intended to be capable of being assembled more easily. Provision is made for this purpose for two pole tooth...
8013480 Linear vibration motor  
A linear vibration motor according to an aspect of the invention may include: a case having a cavity to receive a mass therein; a movable part generating a magnetic field inside the case and moving...
7989993 Magnet yoke of linear motor  
A magnet yoke of a linear motor includes a plurality of recesses set in equidistance in a side surface of the magnet yoke and defining a plurality of peaks and valleys arranged alternately and a...
7973435 Electrical linear drive  
An electrical linear drive device comprises an outer housing consisting of a housing tube and two housing covers disposed at the ends thereof The outer housing defines in the interior thereof a...
7952237 Primary part having a cover for a linear motor  
A primary component for a linear motor includes at least one laminated core. A winding for creating a first magnetic field is arranged in the grooves of the laminated core. Permanent magnets create...
7919888 Linear drive with a moving, reduced-mass and laterally guided passive unit  
The invention relates to a linear drive having a stationary active unit (1), a stationary return flow element (11), a movably mounted passive unit in the form of a thin tooth rack (10) and a...
7880344 X-Y table actuator  
An X-Y table actuator is constituted by stacking a stationary plate, an intermediate plate, and a movable plate. Between the stationary plate and the intermediate plate, arranged is an X-direction...
7825548 Cylindrical linear motor  
The cylindrical linear motor includes: a stator 1 that has a plurality of coils 5 coiled in a cylindrical shape and arranged in an axial direction on an inner side of a metal pipe 4; a mover 2...
7719144 Vertical actuator having a gravity compensation device  
A vertical actuator has a stationary part that includes an upper part made of magnetic material which is magnetically separated from a yoke which bears a coil. The upper magnetic part generates an...
7699097 Mover stabilizing and stator cooling arrangement of a 3-phase linear motor of a submersible oil pump  
A mover stabilizing and stator cooling arrangement includes an upper sleeve surrounding the mover of the linear motor, a lower sleeve, a thermoconducting sleeve surrounding the stator and axially...
7663270 Canned linear motor armature and canned linear motor  
In the canned linear motor armature, both the side surfaces of the armature winding (18) are fixed by two winding fixing frames (4) so as to sandwich the armature winding in between them in the...
7633188 Sliding device with onboard moving-magnet linear motor  
A sliding device with onboard moving-magnet linear motor is envisaged making the reciprocating stroke of a table longer, and enhancing the propulsion, high velocity and response of the table even...
7348692 Linear compressor  
A linear compressor comprises an external casing forming a compressing chamber, an outer core disposed in the external casing, an inner core assembly disposed inside of the outer core interacting...
7287638 Apparatus, method of manufacturing and method of using a linear actuator  
A linear actuator, method manufacturing and method of using the linear actuator are provided. The invention includes a linear actuator having a plurality of annular magnets surrounded by a bobbin...
7256518 Shape memory alloy actuators  
Linear actuators comprised of a plurality of geometric links connected together in displacement multiplied fashion by a plurality of SMA wires. The links may have a trigon or chevron configuration....
7218018 Actuator  
An actuator includes a casing, a stationary member having a coil member and mounted in the casing and a movable member having a moving element and supported by the casing. The moving element has a...
7078833 Force motor with increased proportional stroke  
The force motor of the present invention controls the local magnetic field through a uniquely designed mechanical structure of the internal components. The mechanical structure divides the magnetic...
6921991 Air-cooled coil unit of a linear motor  
The present invention is directed to a coil unit of a single-acting linear engine. The coil unit includes an iron core with coils that are linked with the iron core by way of a cast compound...
6915881 Linear drive  
A linear drive comprising a housing and a rail, which is mounted on the housing such that they can move relatively. Drive elements on the housing and on the rail to produce relative movement...
6847133 Linear motor and method to manufacture said linear motor  
Linear motor and method to make the same. The motor comprises an armature equipped with compartments (15) inside which are housed electric coils (16), and two fixed bars (22) cooperating with...
6806595 Low backlash linear actuator  
A high-precision, low backlash linear actuator drive mechanism characterized by minimal positional repeatability error irrespective of the direction from which a selected or target position is...
6639333 Linear motor stage system for use in exposure apparatus  
A linear motor includes a magnet, a coil, and a jacket having an inside member that is comb-shaped having teeth, extending along a driving direction. The coil is engaged by the teeth of the...
6566771 Linear motor and secondary part for said linear motor  
A linear motor includes a rotor (70) and a secondary member (80), wherein the secondary member (80) carries a cover for protection against mechanical damage, aggressive liquids etc. The cover (40)...
6551045 Wafer stage chamber  
A wafer stage chamber assembly is provided to isolate semiconductor substrates, a wafer stage device, and the process of making semiconductor wafers from the atmosphere so that the resulted wafers...
6548918 Linear guide  
In a linear guide comprising a guide housing (1, 16) configured as a profiled support, and at least one guide rail (2) fixed therein, a guide carriage (3) being supported for longitudinal...
6460466 Drive device  
The invention provides a driving device comprising a tubular housing (2) and a moving unit (4) which is positioned on the housing (2) in such a way that it can be moved lengthwise therein. Said...
6445094 Hoisting drive for use in the iron and steel industry  
The invention relates to a hoisting drive comprising several linear motors, as well as to a linear slide track with a carriage. All primary parts and all secondary parts of the linear motors are...
6433447 Linear/rotary actuator  
A linear/rotary actuator capable of carrying out linear motion at a high speed. A linear motor is used as a linear driving motor. The linear motor has a linear shaft connected to an output shaft of...
6400047 Linear drive  
A linear drive, which has a housing (2) delimiting a receptacle (4), in which the drive means (6) are arranged and from which the force or power transmitting member (12) extends, which cooperates...
6392322 Rugged explosion-proof actuator with integral electronics  
An explosion-proof actuator assembly includes an explosion-proof housing, a motor, motor control electronics, and an actuator. The housing has at least one inner cavity and at least one exit path...
6365993 Round linear actuator utilizing flat permanent magnets  
A linear actuator which includes a housing assembly, a shaft assembly disposed within the housing assembly, a plurality of flat magnets disposed within said housing about said shaft, and a...
6323567 Circulating system for shaft-type linear motors  
A circulating system (10) for cooling a shaft-type linear motor (12) is provided herein. The motor (12) includes a magnet array (22) and a coil assembly (16). The circulating system (10) includes...
6313550 Coil mounting and cooling system for an electric motor  
A coil assembly (14) used with a magnet assembly (12) for a linear or planar electric motor (10) is provided herein. The coil assembly (14) includes a plurality of coils (18) attached to a coil...
6297570 Electric linear motor, in particular the design of the primary part and a method of manufacturing the primary part  
A primary part of a linear motor has a terminal compartment at the end of the linear motor for connecting motor windings to feeder cables, with the walls of the terminal compartment being formed...
6285102 Drive mechanism having a gas bearing operable under a negative pressure environment  
A drive mechanism provides a friction free movement of a movable member operated under a negative pressure environment. A gas bearing arrangement movably supports the movable element relative to a...
6278203 Cooling structure for a linear motor  
Apparatus and associated method for cooling a linear motor coil includes a motor coil having side walls, and at least one enclosure member which encloses each linear side wall and extends generally...
6271606 Driving motors attached to a stage that are magnetically coupled through a chamber  
A motor combination (10) for enclosing and moving a stage (28) (30) for an exposure apparatus (32) is provided herein. The motor combination (10) includes a motor (12) and a chamber (14). The motor...
6242823 Linear electric machine  
The present invention relates generally to linear electric machines, capable of converting electrical current into mechanical work or mechanical work into electrical current. More specifically,...
6241230 Guide apparatus having dustproof structure  
A guide apparatus having a dustproof structure comprises: a linear guide device; an outer cover mounted to the linear guide device so as to cover the linear guide device and provided with an...
6175168 Overmolded stator for fuel metering solenoid and method of manufacturing same  
An encapsulated stator for use in solenoid-actuated liquid metering device has a bobbin assembly and a plunger guide which are substantially surrounded by a plastic overmold to hold the assembly...
6114781 Cooling system for a linear or planar motor  
An outer wall temperature of an enclosure containing a heat source, such as a coil array of a linear or planar motor, e.g. for driving a photolithography wafer positioning stage, is controlled by...
6100609 Compact electric linear actuator  
An electric actuator including a gear motor (1), a tubular body (3) containing a piston (2), and a connection of the motor to the piston. The piston consists of a tube (2) slidable within the body....
6084319 Linear motor, and stage device and exposure apparatus provided with the same  
A linear motor including a coil and a jacket which covers the coil and allows a cooling medium to be supplied through a space in the jacket. The jacket is made of an insulating material, such as a...
6008553 Linear motor with negative pressure cooling circuit  
An apparatus and method for cooling a linear motor armature assembly is provided for maintaining minimal separation between a motor housing and a magnet plate, wherein the motor housing has a...
5952746 Electrical machine and method for mounting such electrical machine on a unit  
An electrical machine with a stator and a rotor rotatable about an axis of rotation and having no bearing elements rotatably mounting the rotor relative to the stator or for defining the axis of...
5909067 Motor vehicle starter contactor incorporating an auxiliary control relay  
A contactor for a motor vehicle starter comprises a contactor coil, a movable contactor core actuated by a control rod, and a fixed contactor core. It also has an electromagnetic auxiliary control...
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