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8408619 |
Robot hand
An aspect of the invention provides a robot hand that performs an action for gripping an object between plural finger sections provided to be capable of changing a distance between the finger...
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8393662 |
Robot hand for substrate transfer
There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On...
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8388035 |
Robot hand
A robot hand is configured such that a plurality of finger mechanisms are disposed on base and operate so as to cause fingertip portions thereof to get close to each other and separate from each...
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8382180 |
Advanced FI blade for high temperature extraction
An apparatus for transferring substrates in a processing system where the substrate is exposed to high temperatures is provided. In one embodiment a blade for transporting a substrate is provided....
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8376428 |
Integrated gripper for workpiece transfer
An integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can...
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8347811 |
System and method for supporting an object during application of surface coating
A system is provided that is capable of supporting an object during application of surface coating that would enable access to multiple surfaces of the object while minimizing the impact on any...
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8327529 |
Assembly tool system
An assembly tool is provided. The assembly tool comprises a body, a first vacuum channel defined within the body, and a first locating pin attached to the body. The first locating pin has a shaft...
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8322766 |
Wafer gripper
A gripper applied in a transport mechanism for transporting a wafer is provided. The transport mechanism includes a bar. The gripper includes a fixing member fixed to the bar, and a carrying...
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8317245 |
MEMS-based micro and nano grippers with two-axis force sensors
The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing...
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8260458 |
Robot, robot hand, and method of controlling robot hand
Disclosed are a robot, a robot hand, and a method of controlling the robot hand, in which the robot hand rapidly and correctly approaches an object to be gripped and safely grips the object...
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8240729 |
Gripper finger, gripper tool and method for adjusting a gripper tool
The disclosure relates to a gripper finger including a surface area for clamping. This area this area is covered with a membrane including at least one section, which is substantially made of a...
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8226142 |
Workpiece gripping integrity sensor
A workpiece gripping integrity device and method are provided having a charge-transfer sensing device configured to detect a change in charge associated with a gripper arm assembly based on a grip...
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8182009 |
End effector
An apparatus for transporting a substrate is provided. The apparatus includes an upper portion housing an electric motor, the electric motor having a drive shaft. A motor housing encloses the...
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8172291 |
Substrate transport apparatus and substrate transport method
A substrate transport apparatus includes: a pair of arm units having a substrate-carrying surface on which a substrate is placed; a support member freely rotatably supporting the arm unit; and an...
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8162366 |
Systems and methods for gripping a component
A gripper assembly is provided. The gripper assembly comprises an actuator and a plurality of gripper fingers. The plurality of gripper fingers are slidably mounted on the actuator. The actuator is...
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8157308 |
Gripping device for a robot
A gripping device arranged for gripping an article 44, such as a food article, in particular a piece of meat, said gripping device 1 comprising at least two gripping parts 5, 7 pivotally suspended...
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8157307 |
Handling device and handling method for wafers
The invention relates to a handling device and to a handling method for wafers, in particular for wafers with a thickness of less than 100 μm. According to the invention it is provided that an ...
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8146973 |
Tendon enhanced end effector
An end effector assembly for a substrate transfer robot is described. The end effector assembly includes a robot wrist. At least one end effector is secured to the robot wrist. The end effector has...
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8141926 |
Robot hand for substrate transfer
There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On...
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8104812 |
Disc picking device and disc processing apparatus having the same
A disc transporting mechanism includes a gripping mechanism having a plurality of gripping members configured to grip a disc, a transport arm provided with the gripping mechanism, and a moving...
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8100451 |
Multi-fingered robot hand
A multi-fingered robot hand has a minimum required number of joints in finger mechanisms and is capable of stably grasping a variety of articles. The multi-fingered robot hand includes: a first...
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8087708 |
Handling device and handling method for wafers
The invention relates to a handling device and to a handling method for wafers, in particular for wafers with a thickness of less than 100 μm. According to the invention it is provided that an ...
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8056949 |
Universal gripper block for a robotic arm
A robot gripper block is provided that facilitates the simultaneous attached of robot deployed tools to a plurality of distinct robot platforms having robot grippers with opposing moveable fingers....
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7988215 |
Surgical robotic system
A surgical robotic system includes a robotic arm, an end effector movably connected thereto and provided with a movable end effector element driven by an actuator, and a force sensor arranged...
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7878562 |
Semiconductor wafer carrier blade
A carrier blade for transferring a semiconductor wafers into and out of a deposition chamber may include transition surfaces sloping downward from ledge surfaces. The transition surfaces slope from...
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7748760 |
Work holding mechanism
A work holding mechanism for horizontally holding a flat work is incorporated in work transport equipment. The holding mechanism includes a base member for supporting the work and a plurality of...
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7717481 |
High temperature robot end effector
A robotic end effector or blade suitable for transferring a substrate in a processing system is provided. In some embodiments, an end effector can include a body having opposing mounting and distal...
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7654596 |
Endeffectors for handling semiconductor wafers
Various endeffector designs are disclosed for handling semiconductor wafers. For instance, an endeffector for handling wafers at a relatively low temperature is disclosed along with an endeffector...
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7641247 |
End effector assembly for supporting a substrate
Generally, an end effector assembly for a substrate transfer robot is provided. In one embodiment, an end effector assembly for supporting a quadrilateral substrate during substrate transfer...
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7520545 |
Robot for transfer of glass
Disclosed is a robot for transferring a substrate, wherein the robot has a robot arm, a hand part, which includes a plurality of plates. A plurality of pins protrude from the plates such that each...
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7490878 |
ESD safe vacuum wand tip
A device for safely handling electrically sensitive objects. A grounded dissipative material is used to form a handling surface so that electrically charged objects handled by the wand can slowly...
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7434856 |
Gripper and method of operating the same
The invention relates to a gripper for handling frames (2) that are covered with a film (3) that is intended for the transport of wafers (6). The gripper comprises at least two flat fingers (10)...
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7401828 |
Substrate conveyance device for fabrication of liquid crystal display device
A substrate conveyance device for fabricating a liquid crystal display device is provided. The substrate conveyance device conveys substrates and aligns substrates without using an additional...
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7384083 |
O-ring locking mount
An end effecter (201) is provided herein which comprises a blade (203) having a depression (213) formed in the surface (210) thereof, an elastomeric pad (209) disposed in the depression and a...
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7290813 |
Active edge grip rest pad
The present invention comprises a distal rest pad for supporting a portion of a wafer seated on an end effector. In one embodiment, the rest pad includes a bottom support pad and an edge stop. Each...
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7290976 |
Semiconductor substrate processing apparatus with a passive substrate gripper
According to one aspect of the present invention, a passive substrate gripper, including first and second segments, is provided. The second segment may be connected to the first segment, and the...
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7278817 |
Method for transferring and loading a reticle
An apparatus and method of transferring and loading a reticle onto a receiving station (for example, a reticle exposure stage). The reticle is first retrieved from a storage facility with an end...
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7175214 |
Wafer gripping fingers to minimize distortion
An apparatus for measuring semiconductor wafer shape that minimizes wafer distortion. The apparatus includes a plurality of wafer gripping fingers for holding a wafer in a predetermined position...
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7104579 |
Detection and handling of semiconductor wafers and wafer-like objects
An end effector has one or more vortex chucks to support a wafer, and at least two detectors for detecting different portions of the wafer before the wafer is picked up. If one of the detectors...
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7104578 |
Two level end effector
An end effector alternately (or simultaneously) transports susceptors and wafers. Separate contact surfaces are provided for wafer transport and for susceptor transport. In one embodiment, the...
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7073834 |
Multiple section end effector assembly
Embodiments of an end effector assembly for a substrate robot are provided herein. In one embodiment, the end effector assembly includes a wrist and a first and a second end effector coupled to the...
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7048316 |
Compound angled pad end-effector
This invention provides a method and a support device for a wafer transfer process which has a first vertical, second horizontal and third compound angled surfaces, as well as a pair of sidewalls...
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7011484 |
End effector with tapered fingertips
An apparatus for transporting a flat object from one position to another position. The apparatus includes an end effector having a base portion and at least one finger extending from the base...
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7004715 |
Apparatus for transferring and loading a reticle with a robotic reticle end-effector
An apparatus and method of transferring and loading a reticle onto a receiving station (for example, a reticle exposure stage). The reticle is first retrieved from a storage facility with an end...
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6976822 |
End-effectors and transfer devices for handling microelectronic workpieces
Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention...
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6929299 |
Bonded structures for use in semiconductor processing environments
A structure for use in a semiconductor processing environment is provided, including a first plate a second plate bonded to the first plate. A distal end of the second plate extends beyond a distal...
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6898487 |
Specimen sensing and edge gripping end effector
Robot arm end effectors rapidly transfer semiconductor wafers between a wafer cassette and a processing station. Preferred embodiments of the end effectors include proximal and distal rest pads,...
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6817640 |
Four-bar linkage wafer clamping mechanism
The wafer clamping mechanism comprises a linkage mechanism and a wafer contact point coupled to the linkage mechanism. The linkage mechanism includes a four-bar linkage having: a first link having...
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6634686 |
End effector assembly
Generally, an end effector assembly for a substrate transfer robot is provided. In one embodiment, an end effector assembly for a substrate transfer robot includes an end effector having a...
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6631935 |
Detection and handling of semiconductor wafer and wafer-like objects
An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The...
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