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8113065 |
Force sensor
A force sensor 1 includes: a force sensor chip 2 including an action portion 21, a connecting portion 23 on which strain resistive elements are disposed, and a support portion 22 for supporting the...
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8033009 |
Method for producing a force sensor
There is provided a method for producing a force sensor including: a force sensor chip; and an attenuator, in which the force sensor chip and the attenuator are joined at joint portions with a...
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7950139 |
Method of making a deposit on an SiC-covered substrate
The invention relates to a method of depositing a coating on a part having its surface made of silicon carbide. The method comprises the following steps: a) applying laser treatment to the SiC...
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7765870 |
Acceleration sensor and method of manufacturing the same
An acceleration sensor includes a semiconductor element built in a substrate, a wiring layer formed on the substrate, and a piezoresistor, formed on the substrate and made up of a part of the...
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7627943 |
Method of manufacturing a pressure sensor
A method of manufacturing a pressure sensor is provided whereby the pressure sensor includes a joint, a diaphragm, and an adapter disposed between the joint and the diaphragm. The adapter includes...
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7562432 |
Method for manufacturing magnetostrictive torque sensor
A method for manufacturing a magnetostrictive torque sensor having low nonuniformity of sensitivity characteristics. The residual austenite content in the rotating shaft of the torque sensor is...
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7398587 |
Method for manufacturing a capacitance type sensor with a movable electrode
Disclosed is a method for manufacturing a capacitance type sensor comprising an insert molding process for insert-molding, with an insulating material, a part of a lead wire of a leadframe and a...
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7194923 |
Strain detector and pressure sensor
A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5)...
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7181831 |
Method of manufacturing strain sensor
A strain sensor comprising a metal substrate, a first electrode provided on the metal substrate, a glass layer formed on the first electrode, and a second electrode and a strain detecting resistor...
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7065861 |
Method of producing a strain-sensitive resistor arrangement
The invention relates to a strain-sensitive resistor, comprising a resistance layer arranged on a support element and an electromechanical transducer produced with this resistor. An increase in the...
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6993828 |
Method for manufacturing metal thin film resistor
A metal resistor and a method for manufacturing the resistor are provided. A first insulation film is formed on a substrate, a photosensitive film is applied on the insulation film, and an...
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6983521 |
Method of manufacturing a strain element
The invention relates to a method of manufacturing a strain element. In one aspect, the method of the invention comprises forming a coating film of titanium or a titanium compound on a surface of a...
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6865799 |
Method of manufacturing strain-detecting devices
A method of manufacturing strain-detecting devices is provided. First, plural cylindrical substrates, each of which has one end closed by a diaphragm, are fixedly placed at predetermined positions...
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6842965 |
Method for manufacturing a strain detector
A strain detector where water does not reach a strain-resistance element and which supplies stable output at all times is provided. In the strain detector, a first protective layer made of glass is...
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6725514 |
Method of making thick film pressure and temperature sensors on a stainless steel diaphragm
A method of making a low-cost metal diaphragm sensor that integrates both pressure and temperature sensing in a single sensor assembly utilizes thick-film processing to form a circuit including...
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6684487 |
Method of producing a load cell
A load cell is constructed with several strain gauges. Each of the strain gauges are formed with a meandering conductive portion on a substrate or base member. Portions of the meandering conductive...
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6571456 |
Method for making torsional sensing load cells
A method for manufacturing a torsional sensing load cell includes providing a member configured to sense torsion. Strain gauges are provided on selected portions of the member, such that torsion...
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6570485 |
Transducer packaging assembly for use in sensing unit subjected to high G forces
A transducer packaging assembly for use in a sensing unit subjected to high forces of acceleration includes a base having a cavity. A pressure sensitive semiconductor die is bonded to a large...
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6442812 |
Method of manufacturing a piezoelectric torque sensor
A method of manufacturing a piezoelectric torque transducer is provided, comprising the steps of (a) forming a prepared area on a surface of a torsion member adapted to be strained by an applied...
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6301775 |
Alumina encapsulated strain gage, not mechanically attached to the substrate, used to temperature compensate an active high temperature gage in a half-bridge configuration
A temperature compensation element for a high-temperature strain gage and the method of fabricating the same. Preferably, the element is a "dummy" strain gage not mechanically attached to the...
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6269534 |
Method for producing an electric resistor and a mechano-electric transducer
A method for producing an electric resistor, in particular a resistance strain gauge, in which an insulating layer and a resistive layer are sequentially applied to a carrier element. The...
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6267159 |
Method for filling the measuring chamber of a transducer measuring pressure or pressure differential with a pressure transmission liquid and a pressure differential measuring transducer
A method of filling a measuring chamber of a transducer measuring a pressure or a pressure differential with a pressure transmission fluid through a filling channel is described.In this method, a...
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6240785 |
Cryogenic, absolute, high pressure sensor
A pressure sensor is provided for cryogenic, high pressure applications. A highly doped silicon piezoresistive pressure sensor is bonded to a silicon substrate in an absolute pressure sensing...
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6185814 |
Method of manufacturing a sensor detecting a physical action as an applied force
A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13)...
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6150917 |
Piezoresistive sensor bridge having overlapping diffused regions to accommodate mask misalignment and method
A piezoresistive pressure sensor (30) has four resistive diffused regions (32) coupled into a bridge configuration (33) with four junctions (36) and four inside corners (40). Each of the diffused...
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6148662 |
High-sensitivity strain probe
The present invention is a high-sensitivity strain probe used in high-sensitivity sensor elements of force type. By the use of semiconductor process and wire bonding technology as well as...
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5954850 |
Method for making glass pressure capacitance transducers in batch
The present provides a method for making glass pressure sensors in batch. First glass plates of appropriate dimensions are scribed. Then electrodes are sputters onto each of the plates, followed by...
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5867886 |
Method of making a thick film pressure sensor
A media-compatible, high-pressure transducer cell (12), a rugged sensor assembly (10) incorporating the cell (12), and a method for its production. The pressure cell (12) generally includes a metal...
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5761957 |
Semiconductor pressure sensor that suppresses non-linear temperature characteristics
A semiconductor pressure sensor includes a diaphragm of an octagonal shape formed on a (110) silicon substrate by anisotropic etching. When a distance between two sides of the diaphragm, which are...
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5734107 |
Acceleration sensor
An acceleration sensor having a piezoelectric sensor element, which is supported as a flexural resonator in a holding module and whose electrodes are connected to an evaluation circuit. The holding...
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5714690 |
Piezoresistive silicon pressure sensor manufacture implementing long diaphragms with large aspect ratios
A form pressure sensor diaphragm and method of making that allows for formation of long rectangular plate structures in semiconducting materials, especially silicon. A plurality or multiplicity of...
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5544399 |
Method for making a pressure transducer
A monolithic capacitive pressure transducer (12, 12') is made by separately forming under pressure a diaphragm (22, 22') and a base (24, 24') having a recess (26) in the top surface using ceramic...
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5507090 |
Method for making stress sensors
A method for making a plurality of stress sensors includes creation of cavities and corresponding diaphragms in a thin metal front plate, preferably by an acid etching process. A thin back plate,...
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5407501 |
Method of manufacture of pressure sensor having a laminated substrate
A pressure sensor sub-assembly (18) has a solid-state sensing element (22) mounted on a laminated ceramic substrate (20) and has the electrical signal contacts (22a) on the sensing element...
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5400489 |
Method of stabilizing the surface properties of objects to be thermally treated in a vacuum
To avoid any deterioration of the surface properties of objects of ceramic, glass, or a single-crystal insulating material which are subjected to a vacuum temperature process, a thin layer of a...
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5375474 |
Compensated high temperature strain gage
A device for measuring strain in substrates at high temperatures in which the thermally induced apparent strain is nulled. Two gages are used, one active gage and one compensating gage. Both gages...
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5369875 |
Method of manufacturing strain sensors
A method of manufacturing individual strain sensors (20) each comprised of a generally rectangular substrate (21) having first and second major surfaces opposite to each other, a strain detecting...
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5369057 |
Method of making and sealing a semiconductor device having an air path therethrough
This invention generally relates to the provision of a vent path during the bonding of silicon wafers and the subsequent encapsulation of the individual devices. A double-sided polished silicon...
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5351550 |
Pressure sensor adapted for use with a component carrier
A pressure transducer is provided with a housing member that attaches to a rigid and generally planar member, such as a ceramic circuit board. The legs of the housing member can pass through holes...
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5349867 |
Sensitive resistive pressure transducer
A resistive pressure transducer wherein a flexible diaphragm is mounted in a spaced apart relationship to the upper surface of a base member. A conductive path is deposited on one surface of the...
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5349746 |
Process for the manufacture of a force sensor
A process and a device are proposed for manufacturing sensors, particularly those intended for the determination of pressure forces. In thick-film technology, initially at least one insulating...
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5335550 |
Semiconductor pressure sensor including multiple silicon substrates bonded together and method of producing the same
A small, precise semiconductor pressure sensor has a flat, thin diaphragm of uniform thickness that is formed by a simple process. A first silicon substrate and a second silicon substrate are...
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5333505 |
Semiconductor pressure sensor for use at high temperature and pressure and method of manufacturing same
In a semiconductor pressure sensor, a dam which prevents a sheathing resin from flowing into a diaphragm portion during the molding of the sheathing resin is disposed on the outer periphery of...
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5332469 |
Capacitive surface micromachined differential pressure sensor
A surface layer and a sacrificial layer are deposited on a substrate. A conductive structural layer bridges over the sacrificial layer and is anchored to the surface layer for creating paired...
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5327785 |
Pressure sensor with improved heat dissipation characteristics
A pressure sensor is provided with a means for efficiently removing heat from a circuit portion of a sensor die by providing an elastomeric member between a first surface of the sensor die and...
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5328551 |
Method of making high output strain gage
A method of making a foil-type electrical resistance strain gage having a gage factor of at least 4. A PtW foil is adhesively bonded to a polyimide substrate with an FEP adhesive cured under heat...
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5325716 |
Apparatus for determining the pressure distribution along a limited distance and method for manufacturing it
An apparatus for determining the pressure distribution along a limited distance comprises a plurality of pressure sensors arranged at predetermined distances to each other and connected to an...
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5325081 |
Supported strain gauge and joy stick assembly and method of making
A self terminating supported printed circuit strain gauge structure has a printed circuit including at least one strain gauge, interconnecting circuitry interconnecting the strain gauge to a...
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5319980 |
Board construction for resistive strain gauge pressure sensors
A resistive strain gauge pressure sensor including upper and lower housings coacting to define a pressure chamber within the housing. A board member assembly is clamped between the housings and...
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5320705 |
Method of manufacturing a semiconductor pressure sensor
A semiconductor pressure sensor of this invention is intended to provide a semiconductor pressure sensor having an excellent electrical isolation between the supporting means of the semiconductor...
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