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8100413 |
Workpiece vacuum chuck head
A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base...
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8089615 |
Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method
A substrate holding apparatus includes a base part and a support part that is formed on the base part and supports a rear surface of the substrate. A first circumferential wall is formed on the...
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7992877 |
Non contact substrate chuck
A chuck for releasably retaining a substrate, where the chuck has a body with a substrate receiving surface disposed in an X-Y coordinate plane and adapted to receive the substrate. The body has...
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7987888 |
Releasing method and releasing apparatus of work having adhesive tape
In a method for releasing a work having an adhesive tape from a holding member which sucks and holds the work having the adhesive tape, the work having the adhesive tape is released from the...
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7955033 |
Method of drilling holes in glass plate and apparatus thereof
An apparatus for drilling holes in a glass plate has a supporting member for sucking and supporting a glass plate which is used for an automobile window or the like, as described later, and the...
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7954449 |
Wiring-free, plumbing-free, cooled, vacuum chuck
A solar cell production system utilizes self-contained vacuum chucks that hold and cool solar cell wafers during transport on a conveyor between processing stations during a fabrication process....
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7939153 |
Applicator head for an applicator device
An applicator head for a device with an air suction source for applying individual flat materials elements to objects. The applicator head has an applicator surface in air communication with the...
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7543867 |
Vacuum gripping system for positioning large thin substrates on a support table
A vacuum gripper for use in substrate positioning operations includes a vacuum pad adapted to make contact with the substrate and a shaft connected to the vacuum pad. The shaft is characterized by...
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7540503 |
Vacuum holder for integrated circuit units
A support device for supporting a set of integrated circuit units (65), the device comprising: a support member having a metal surface, said surface having an array of recesses (27); a soft...
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7527271 |
Fast substrate loading on polishing head without membrane inflation step
The present invention relates to an apparatus and method for improving and speeding up substrate loading process. One embodiment provides a method for vacuum chucking a substrate. The method...
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7488145 |
Method for manufacturing a doughnut-shaped glass substrate
A method for manufacturing a doughnut-shaped glass substrate by use of a glass substrate manufacturing apparatus, the glass substrate manufacturing apparatus comprising a work stage, three drilling...
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7425238 |
Substrate holding device
Disclosed is a wafer chuck, which has protrusions for supporting a substrate, for attracting and holding the substrate by negative pressure while the substrate is being supported by the...
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7406759 |
Releasing method and releasing apparatus of work having adhesive tape
In a method for releasing a work having an adhesive tape from a holding member which sucks and holds the work having the adhesive tape, the work having the adhesive tape is released from the...
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7396022 |
System and method for optimizing wafer flatness at high rotational speeds
The present invention is a chuck having a vacuum groove that is capable of holding a wafer as the chuck rotates on a spindle. As the chuck rotates the air pressure above the center of the wafer is...
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7367102 |
Method for mounting object and spindle device
A spindle device to mount and rotate an object, including: a housing; a main shaft supported by the housing rotatably to the housing wherein the main shaft includes a through hole which goes...
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7293354 |
Apparatus for mounting columns for grid array electronic packages
A vacuum controlled fixture is provided for positioning columns on sites of an electronic substrate. The fixture includes an internal chamber having spaced apart first and second surfaces extending...
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7275749 |
Substrate supporting apparatus
A substrate supporting apparatus for supporting a substrate or wafer in a non-contact state by Bernoulli theorem is disclosed. The substrate supporting apparatus 1 comprises a housing 2, a...
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7166019 |
Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same
A flexible membrane for a polishing head and a chemical mechanical polishing (CMP) apparatus having the same are provided. The flexible membrane for a polishing head includes a compressing plate...
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7160105 |
Temperature controlled vacuum chuck
A temperature controllable vacuum chuck includes a mounting bracket, a porous plate, a heating element, and a temperature sensor. The porous plate is mounted to the mounting bracket and is...
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7112889 |
Semiconductor device having an alignment mark formed by the same material with a metal post
A semiconductor device has an alignment mark which can be recognized by a conventional wafer prober. A redistribution layer connects electrodes of the semiconductor device to electrode pads located...
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7055535 |
Holding unit, processing apparatus and holding method of substrates
A holding unit holds a substrate to enable a surface of the substrate to be processed. The unit has a vacuum suction member that comes into contact with a peripheral portion of the surface of the...
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7044476 |
Compact pinlifter assembly integrated in wafer chuck
A compact pinlifter assembly is fitted in a substantially enclosed cavity within a wafer chuck such that an overall outside shape of the wafer chuck remains highly unaffected. The pinlifter...
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7037870 |
Ceramic sintered body and process for producing the same
A ceramic sintered body comprising from 90 to 99.8% by volume of cordierite and from 0.2 to 10% by volume of mullite based on 100% by weight of a total sum of the contents of the cordierite and the...
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7033445 |
Gridded susceptor
Susceptor designs are provided for controlling damage to wafers, particularly during cold wafer drops-off on a hot susceptor. The designs include axisymmetric grid designs, such that thermal...
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7021635 |
Vacuum chuck utilizing sintered material and method of providing thereof
A vacuum chuck for holding a semiconductor wafer during high pressure, preferably supercritical, processing comprising: a wafer holding region for holding the wafer; a vacuum region for applying...
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7010852 |
Apparatus and method for carrying substrate
A substrate carrying device reduces time necessary for conducting changing work for changing the types of flat panel displays or the like. A substrate support member (10) has a support body (11)...
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6966560 |
Device for fixing thin and flexible substrates
A device or chuck for fixing thin and/or flexible substrates allows a uniform and all-over sucking-up of the substrates without any disadvantageous warping or bending. The chuck has notches and...
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6958098 |
Semiconductor wafer support lift-pin assembly
A modular lift-pin assembly includes a lift-pin having a distal end, a connector, and an actuator pin. The connector includes an actuator end having a plurality of catch fingers disposed around the...
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6955720 |
Plasma deposition of spin chucks to reduce contamination of Silicon wafers
An apparatus for delivering a fluidic media to a wafer includes a housing defining a process chamber. A fluidic media delivery member is coupled to the process chamber. A rotatable chuck is...
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6767018 |
Machinable datum for a self-centering vacuum fixture
A machinable datum for use in a vacuum fixture is disclosed. The vacuum fixture comprises: a cylindrical stationary mandrel portion having a central cavity therethrough, and comprising: a first end...
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6760968 |
Die packing device
A die packing device including die holding mechanism comprising a connecting wire receiving shaft which is movable up and down, a pair of die holding levers which have die holding sections for...
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6746022 |
Chuck for holding a workpiece
The invention provides a chuck for holding a workpiece, such as a chip-array semiconductor Chip Scale Packages (CSP) substrate, having a plurality of components such as CSPs to be singulated, and...
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6739326 |
Semiconductor manufacturing equipment
By preventing warping of chips when detaching individual chips from a dicing sheet, improvement in quality without cracks and in productivity is realized. A collet (115) used in a step of detaching...
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6736408 |
Rotary vacuum-chuck with venturi formed at base of rotating shaft
In a first aspect, a rotary vacuum-chuck is provided that may hold a substrate such as a silicon wafer for rotation. The vacuum-chuck includes a hollow rotary shaft and a chuck mounted on the...
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6644703 |
Self-adaptive vacuum gripping system
A self-adaptive vacuum grip apparatus includes a vacuum source (51), a vacuum reservoir (54) fluidically connected to the vacuum source; a contact surface (56), and a plurality of conduits (55);...
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6634650 |
Rotary vacuum-chuck with water-assisted labyrinth seal
A rotary vacuum-chuck mounts a substrate such as a silicon wafer for rotation. The vacuum-chuck includes a hollow rotary shaft and a chuck mounted on the hollow rotary shaft and having a surface...
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6570374 |
Vacuum chuck with integrated electrical testing points
A vacuum chuck with a conductive circuit embedded.onto it's surface wherein the chuck provides a reliable conductive path for electrical testing as well as reliable and uniform mechanical support...
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6540014 |
Workpiece chuck
A workpiece chuck includes an upper assembly on which can be mounted a flat workpiece such as a semiconductor wafer. A lower assembly is mountable to a base that supports the chuck. A...
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6530103 |
Method and apparatus for eliminating wafer breakage during wafer transfer by a vacuum pad
A method for eliminating wafer breakage during a wafer transfer process in a grinding apparatus by a wafer transfer pad and an apparatus for conducting such method are disclosed. In the method, a...
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6454333 |
Rotatable gripping device for transport or machining of an arbitrarily shaped part
Rotatable gripping device for the transport or machining of an arbitrarily shaped part. A rotatable gripping device designed to be fitted on a universal table for the transport or machining of a...
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6437868 |
In-situ automated contactless thickness measurement for wafer thinning
A system for measuring the thickness of a wafer while it is being thinned this disclosed. The system and method provide integrating an optical reflectometer into a common wafer thinning apparatus....
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6375176 |
Workpiece chuck with guard layer having vacuum distribution pattern
A workpiece chuck includes an upper assembly on which can be mounted a flat workpiece such as a semiconductor wafer. A lower assembly is mountable to a base that supports the chuck. A...
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6336669 |
Parallel aligning quick disconnect articulated chuck apparatus and method
In an automatic chip test machine for testing electronic components, a novel quick disconnect articulated chuck for securing a chip nest, allowing rapid changes of the chuck and plunger head with...
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6290274 |
Vacuum system and method for securing a semiconductor wafer in a planar position
A system and method for holding a semiconductor wafer substantially flat on a chuck and for cooling the chuck is provided. The system for securing a wafer on a chuck includes first and second...
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6279976 |
Wafer handling device having conforming perimeter seal
A vacuum-assisted chuck assembly for coupling to a warped semiconductor wafer is provided. In one embodiment, the assembly comprises a wafer chuck and a conforming perimeter seal. The seal permits...
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6271676 |
Spiral chuck
A chuck is provided for holding a semiconductor wafer using a suction force. The chuck includes a chuck plate and may further include a manifold plate, and a seal plate to form a laminated chuck...
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6264185 |
Suction pad
A suction pad (A) is adapted to be placed on a suction table (2) a plurality of openings (2a) connected to a negative pressure generating source (3) in order to fix a work piece (W) by suction on a...
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6232578 |
Thermophoretic vacuum wand
A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface...
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6203644 |
Method and apparatus for manufacture of quartz oscillator
A method and apparatus for manufacturing high-frequency oscillator elements from a workpiece material includes a tool holder formed of magnetic material providing a magnetic field at a tip thereof...
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6192574 |
Method of manufacturing and attaching a coil to an electric circuit using a circuit fixture
A method of manufacturing a coil and attaching the coil to contact points of an electric circuit. One end of a winding filament is brought in a stretched state to a first position in a winding...
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