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7611596 |
Method of making a dunnage platform
A dunnage platform is in the general shape of a rectangular slab with legs extending form one side. The dunnage platform is made from an expanded polystyrene core. A chemical combination process is...
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7607647 |
Stabilizing a substrate using a vacuum preload air bearing chuck
Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
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7597774 |
Apparatus and method for fabricating bonded substrate
A bonded-substrate fabricating apparatus capable of reducing defective bonded substrates fabricated. A transfer robot sucks the outer edge area of the bottom surface of a substrate and spouts gas...
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7594644 |
Semiconductor device and method for manufacturing the same, circuit board, electronic apparatus, and semiconductor device manufacturing apparatus
A semiconductor device is provided including a semiconductor element having a circuit and at least one electrode of the circuit, a flexible substrate having at least one electrode pad and...
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7591061 |
Method for securing a subpad to a subpad support
A subpad support for use in a web format or belt format polishing apparatus for polishing one or more layers of semiconductor device structures. The subpad support includes a subpad retention...
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7584947 |
Reconfigurable workpiece support fixture
An exemplary reconfigurable workpiece support fixture according to an embodiment of the present invention includes a base, and a plurality of spaced-apart plates are removably attachable to the...
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7578642 |
Flexible single rail drilling system
An apparatus having a single, elongated flexible rail with a plurality of attachment devices connected to the rail and spaced at intervals therealong for releasably affixing the rail to a surface...
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7578629 |
Sheet handling device including suction chamber with flow obstructing material
A sheet handling device containing a sheet support element having a surface provided with suction holes which are connected to at least one suction chamber, the suction chamber being connected to a...
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7575147 |
Compliant wirebond pedestal
A wire bonder ( 900 ) with a rigid pedestal ( 902 ) having resilient inserts ( 920 ). A package ( 904 ) placed on the pedestal ( 902 ) contains an electrical device ( 906 ). The bond pads on the...
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7572411 |
Multiwell apparatus
A method for assembling a multiwell plate assembly, and a multiwell plate assembly prepared thereby, are provided. The method includes providing a lid for a multiwell plate body having at least one...
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7571538 |
Vacuum fixing jig for semiconductor device
The present invention relates to a Jig and method of manufacturing a semiconductor substrate including the back grind step, the dicing step, the pick up step, and the die bonding step of the wafer;...
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7568275 |
Apparatus, systems and methods for work piece isothermal dry machining and assembly fixtures
Isothermal work piece holding system uses vibration-damping, low thermal conductivity, low TCE polymer-composite holding body(ies) to damp machine tool vibration and chatter while accurately,...
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7557904 |
Wafer holding mechanism
A wafer holding mechanism for holding a wafer affixed to a frame with a tape utilizing a suction force. The wafer holding mechanism includes a suction body, a wafer holder with a holding surface...
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7556246 |
Unloading method of object, program storage medium, and mounting mechanism
There is provided a method for unloading an object vacuum-chucked on a mounting table having one or more gas flow paths opened at one or more locations on the mounting table, including the steps of...
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7544262 |
Method of making a dunnage platform
A dunnage platform is in the general shape of a rectangular slab with legs extending form one side. The dunnage platform is made from an expanded polystyrene core. A chemical combination process is...
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7527271 |
Fast substrate loading on polishing head without membrane inflation step
The present invention relates to an apparatus and method for improving and speeding up substrate loading process. One embodiment provides a method for vacuum chucking a substrate. The method...
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7520309 |
Method for adhering protecting tape of wafer and adhering apparatus
A method for adhering a protecting tape to a protection surface of a wafer is disclosed. The method comprises: cutting the protecting tape of which one surface is processed to be an adhering...
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7517419 |
Substrate support jig, circuit board production apparatus, and method of producing circuit board
A substrate support jig, for removably holding a substrate when mounting electronic components on the substrate, includes a base member having a first surface and a second surface facing and...
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7497921 |
Stringer holding device
An apparatus and method for securing a plurality of stringers to a mandrel during lay-up is provided, the plurality of stringers and mandrel forming a lay-up surface. The apparatus includes a...
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7497213 |
Wafer dividing apparatus
A wafer dividing apparatus for dividing a wafer whose strength is reduced along a plurality of dividing lines, along the dividing lines, which comprises a tape holding means for holding a...
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7469886 |
Working platform structure
A structure of a vacuum adsorbing working platform includes a lower body and an upper body. The lower body has a plurality of channels, and the top of the lower body has a plurality of cross...
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7455735 |
Width adjustable substrate support for plasma processing
An electrode assembly for use in a plasma processing system that includes removable rails that are adjustable for reconfiguring the electrode to accommodate substrates of different widths. The...
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7442257 |
Substrate processing apparatus and substrate processing method
The present invention relates to a substrate processing apparatus useful for plating a substrate or processing a substrate by dipping a substrate in a processing liquid. A substrate processing...
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7438286 |
Workpiece holding jig
A workpiece holding jig for holding a workpiece having a plurality of first dividing lines extending in a predetermined direction and a plurality of second dividing lines formed in a direction...
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7425238 |
Substrate holding device
Disclosed is a wafer chuck, which has protrusions for supporting a substrate, for attracting and holding the substrate by negative pressure while the substrate is being supported by the...
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7421776 |
Clamp to attach a stator bar to a clip
A clamp for attaching a clip to an end of a stator bar including: an anchor adapted to fit into an open end of the clamp; a bracket having a first leg extending radially from the anchor and a...
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7416176 |
Process and device for localized gripping and holding of a thin, flexible panel, in particular having a complex shape
A method for locally gripping and holding a thin, flexible panel having a complex, nondevelopable shape. The method includes placing a first surface of the panel against a three-point support...
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7406759 |
Releasing method and releasing apparatus of work having adhesive tape
In a method for releasing a work having an adhesive tape from a holding member which sucks and holds the work having the adhesive tape, the work having the adhesive tape is released from the...
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7396022 |
System and method for optimizing wafer flatness at high rotational speeds
The present invention is a chuck having a vacuum groove that is capable of holding a wafer as the chuck rotates on a spindle. As the chuck rotates the air pressure above the center of the wafer is...
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7384036 |
Sheet handling device for wide format sheets
A sheet handling device for wide format sheets including a sheet support plate having a top surface containing suction holes which are connected to at least one suction chamber, the at least one...
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7373718 |
Test device for a heat dissipating fan
A test device for a heat dissipating fan, which is suitable for testing if the fan wheel is secured to the housing firmly, includes a support post, a transverse slide unit, which is disposed at the...
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7367102 |
Method for mounting object and spindle device
A spindle device to mount and rotate an object, including: a housing; a main shaft supported by the housing rotatably to the housing wherein the main shaft includes a through hole which goes...
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RE40192 |
Vacuum process apparatus
The invention proceeds from a vacuum process apparatus for an article which is processed or treated, resp. at two stations, whereby each station has a charging and/or removing opening for the...
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7341087 |
Apparatus for applying discrete parts to a moving web
An apparatus and method for engaging and transferring a discrete part having a varying thickness to a substrate web. The apparatus includes one or more transfer assemblies and a web conveyor...
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7331097 |
Method of manufacturing a workpiece chuck
A workpiece chuck includes an upper assembly on which can be mounted a flat workpiece such as a semiconductor wafer. A lower assembly is mountable to a base that supports the chuck. A...
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7326457 |
Substrate holding device including adhesive face with hexagons defined by convex portions
In a method of the present invention for holding a substrate in a vacuum, a glass substrate ( 5 ) is held by an adhesive pad ( 20 ) or an adhesive sheet, both of which are made from a material...
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7326300 |
Coating apparatus and method using the same
A coating apparatus ( 2 ) includes a work table ( 20 ) having a plurality of blowing holes ( 201 ) for suspending a substrate ( 200 ) thereabove, a coating unit ( 22 ) having a photoresist coating...
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7314535 |
Structure for loading substrate in substrate bonding apparatus for fabricating liquid crystal display device
A substrate bonding apparatus for use in fabricating LCD devices substantially prevents substrates held to upper stages from sagging. The substrate bonding apparatus may, for example, include upper...
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7311302 |
Substrate support system
An improved substrate support system for clamping spring loaded pins that support substrates, such as printed circuit boards, which have even profiles, and uneven profiles due to components being...
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7310865 |
Gap setting tool and method of operating same
A gap setting tool for setting a gap between a pair of panels includes a first body portion, a second body portion, and a pin having a predetermined diameter. The first body portion, the second...
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7307697 |
Adaptive shape substrate support system
The present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the...
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7293501 |
Press with compact worm unit
A press includes an arm mechanism to input force transferred to upper and lower rollers by a worm unit. The worm unit occupies less space so that even if the size of the press is increased, the...
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7293354 |
Apparatus for mounting columns for grid array electronic packages
A vacuum controlled fixture is provided for positioning columns on sites of an electronic substrate. The fixture includes an internal chamber having spaced apart first and second surfaces extending...
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7282096 |
Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon
The invention relates to an arrangement comprising a support body with a substrate holder, mounted thereon on a gas bearing with rotating drive. The gas bearing and the rotating drive are formed by...
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7275749 |
Substrate supporting apparatus
A substrate supporting apparatus for supporting a substrate or wafer in a non-contact state by Bernoulli theorem is disclosed. The substrate supporting apparatus 1 comprises a housing 2 , a...
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7270735 |
System and method for holding and releasing a workpiece for electrochemical machining
A system and method are described for holding and releasing a workpiece for electrochemical machining. In one embodiment, a workpiece holder has a workpiece surface that couples to the workpiece...
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7268533 |
Optical testing device
A chuck adapted to test electrical and/or optical components on a device-under-test (DUT).
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7231857 |
Depaneling systems
A depaneling system is disclosed for cutting a panel. The depaneling system comprises a tooling apparatus and a cutting apparatus. The tooling apparatus helps hold the panel in place with suction...
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7220175 |
Device for carrying thin wafers and method of carrying the thin wafers
A thin wafer carrying device includes a laminated board made of layers of compound material so that the thin wafer is put on the circular board. The compound material includes reinforcement...
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7207554 |
Semiconductor element holding apparatus and semiconductor device manufactured using the same
A semiconductor element holding apparatus includes a collet for suctioning a semiconductor element by negative pressure to hold the semiconductor element. The collet has a protrusion formed at the...
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