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7432538 |
Field-effect transistor
A field-effect transistor includes a channel layer having a channel and a carrier supply layer, disposed on the channel layer, containing a semiconductor represented by the formula Al x Ga 1-x N,...
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7429534 |
Etching a nitride-based heterostructure
An improved solution for producing nitride-based heterostructure(s), heterostructure device(s), integrated circuit(s) and/or Micro-Electro-Mechanical System(s) is provided. A nitride-based etch...
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7417267 |
Non-planar III-nitride power device having a lateral conduction path
A III-nitride power semiconductor device that includes a heterojunction body with a sloping portion, a first power electrode, a second power electrode and a gate over the sloping portion of the...
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7416929 |
Monolithic vertical junction field effect transistor and schottky barrier diode fabricated from silicon carbide and method for fabricating the same
A switching element combining a self-aligned, vertical junction field effect transistor with etched-implanted gate and an integrated antiparallel Schottky barrier diode is described. The anode of...
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7408182 |
Surface passivation of GaN devices in epitaxial growth chamber
The present invention relates to passivation of a gallium nitride (GaN) structure before the GaN structure is removed from an epitaxial growth chamber. The GaN structure includes one or more...
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7374988 |
NFET and PFET devices and methods of fabricating same
A field effect transistor and method of fabricating the field effect transistor. The field effect transistor, including: a gate electrode formed on a top surface of a gate dielectric layer, the...
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7332810 |
Integrated circuit device and method of producing the same
An integrated circuit device having vias having good resistance to migration causing the breaking of a wiring line, or an integrated circuit device having a wiring structure that is fined by...
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7291873 |
High electron mobility epitaxial substrate
A compound semiconductor epitaxial substrate for use in a strain channel high electron mobility field effect transistor, comprising an InGaAs layer as a strain channel layer 6 and AlGaAs layers...
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7276747 |
Semiconductor device having screening electrode and method
In one embodiment, a semiconductor device is formed in a body of semiconductor material. The semiconductor device includes a screening electrode spaced apart from a channel region.
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7268362 |
High performance transistors with SiGe strain
A preferred embodiment of the invention comprises a semiconductor device having stress in the source/drain channel. The device comprises a substrate having a lattice constant greater than or equal...
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7238985 |
Trench type mosgated device with strained layer on trench sidewall
A MOSgated trench device has a reduced on resistance by forming a less than about a 13 nm thick strained SiGe layer on the silicon surface of the trenches and forming a thin (30 nm or less) layer...
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7161179 |
Semiconductor device and method of manufacturing the same
In a semiconductor device and a method of manufacturing the semiconductor device, the source wires 126 of a pixel portion 205 are formed of material having low resistance (representatively,...
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7145167 |
High speed Ge channel heterostructures for field effect devices
A method and a layered heterostructure for forming high mobility Ge channel field effect transistors is described incorporating a plurality of semiconductor layers on a semiconductor substrate, and...
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7144765 |
Semiconductor device with Schottky electrode including lanthanum and boron, and manufacturing method thereof
A semiconductor device and its manufacturing method. The semiconductor device has a semi-insulating GaAs substrate 310 , a GaAs buffer layer 321 that is formed on the semi-insulating GaAs...
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7084507 |
Integrated circuit device and method of producing the same
An integrated circuit device having vias having good resistance to migration causing the breaking of a wiring line, or an integrated circuit device having a wiring structure that is fined by...
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7067855 |
Semiconductor structure having an abrupt doping profile
A structure and method of forming an abrupt doping profile is described incorporating a substrate, a first epitaxial layer of Ge less than the critical thickness having a P or As concentration...
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6969875 |
Buried channel strained silicon FET using a supply layer created through ion implantation
A buried channel FET including a substrate, a relaxed SiGe layer, a channel layer, a SiGe cap layer, and an ion implanted dopant supply. The ion implanted dopant supply can be in either the SiGe...
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6949761 |
Structure for and method of fabricating a high-mobility field-effect transistor
A structure and method of fabricating a high-mobility semiconductor layer structure and field-effect transistor (MODFET) that includes a high-mobility conducting channel, while at the same time,...
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6905972 |
Semiconductor device and method for manufacturing the same
A method of manufacturing a semiconductor device comprising a plurality of single-crystal semiconductor layers formed, for example, in an opening of an insulating film, said semiconductor layers...
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6852600 |
Strained silicon MOSFET having silicon source/drain regions and method for its fabrication
A strained silicon MOSFET utilizes a strained silicon layer formed on a silicon geranium layer. Strained silicon and silicon germanium are removed at opposing sides of the gate and are replaced by...
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6723621 |
Abrupt delta-like doping in Si and SiGe films by UHV-CVD
A structure and method of forming an abrupt doping profile is described incorporating a substrate, a first epitaxial layer of Ge less than the critical thickness having a P or As concentration...
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6674100 |
SiGeC-based CMOSFET with separate heterojunctions
Si and SiGeC layers are formed in an NMOS transistor on a Si substrate. A carrier accumulation layer is formed with the use of a discontinuous portion of a conduction band present at the...
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6657223 |
Strained silicon MOSFET having silicon source/drain regions and method for its fabrication
A strained silicon MOSFET utilizes a strained silicon layer formed on a silicon germanium layer. Strained silicon and silicon germanium are removed at opposing sides of the gate and are replaced by...
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6593191 |
Buried channel strained silicon FET using a supply layer created through ion implantation
A method of fabricating a buried channel FET including providing a relaxed SiGe layer on a substrate, providing a channel layer on the relaxed SiGe layer, providing a SiGe cap layer on the channel...
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6555839 |
Buried channel strained silicon FET using a supply layer created through ion implantation
A circuit including at least one strained channel, enhancement mode FET, and at least one strained channel, depletion mode FET. The depletion mode FET includes an ion implanted dopant supply. In...
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6455871 |
SiGe MODFET with a metal-oxide film and method for fabricating the same
There is disclosed a method for fabricating a SiGe MODFET device using a metal oxide film. The present invention provides a SiGe MODFET device with improved operation speed and reduced non-linear...
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6399970 |
FET having a Si/SiGeC heterojunction channel
Si and SiGeC layers are formed in an NMOS transistor on a Si substrate. A carrier accumulation layer is formed with the use of a discontinuous portion of a conduction band present at the...
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6306211 |
Method for growing semiconductor film and method for fabricating semiconductor device
In a chamber, a substrate is mounted on a susceptor and then heated to an elevated temperature. Source and diluting gases are supplied into the chamber through source and diluting gas supply pipes...
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6225196 |
High electron mobility transistor and method of fabricating the same
There is provided a field effect transistor including (a) an amorphous semiconductor layer made of amorphous silicon hydride containing impurities doped therein, (b) a semiconductor layer made of...
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6190975 |
Method of forming HCMOS devices with a silicon-germanium-carbon compound semiconductor layer
Si and SiGeC layers are formed in an NMOS transistor on a Si substrate. A carrier accumulation layer is formed with the use of a discontinuous portion of a conduction band present at the...
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6117713 |
Method of producing a MESFET semiconductor device having a recessed gate structure
An insulating layer is formed on a semiconductor substrate, and a first resist layer having a first resist opening portion is formed on the insulating layer. Then, the insulating layer is etched...
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6049091 |
High electron mobility transistor
There is provided a field effect transistor including (a) an amorphous semiconductor layer made of amorphous silicon hydride containing impurities doped therein, (b) a semiconductor layer made of...
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6004137 |
Method of making graded channel effect transistor
A MISFET having a graded semiconductor alloy channel layer of silicon germanium in which the germanium is graded to a single peak percentage level. The single peak percentage level defines the...
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5821577 |
Graded channel field effect transistor
A MISFET having a graded semiconductor alloy channel layer of silicon germanium in which the germanium is graded to a single peak percentage level. The single peak percentage level defines the...
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5442205 |
Semiconductor heterostructure devices with strained semiconductor layers
A heterostructure includes a stained epitaxial layer of either silicon or germanium that is located overlying a silicon substrate, with a spatially graded Ge x Si 1 -x epitaxial layer overlain by...
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5285088 |
High electron mobility transistor
A semiconductor device capable of reducing element sizes exceedingly and a mask alignment accuracy in lithography is provided. This device has a pair of semiconductor layers for source/drain...
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5274255 |
Structure for providing high resolution modulation of voltage potential in the vicinity of a surface
A structure for modulating electrostatic potential in the vicinity of a surface of a structure comprises: a substrate; a first electrically conductive layer having an exposed surface and made of a...
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5221413 |
Method for making low defect density semiconductor heterostructure and devices made thereby
The present invention is predicated upon the discovery by applicants that by growing germanium-silicon alloy at high temperatures in excess of about 850° C. and increasing the germanium content at...
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