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7183576 |
Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD
A method and apparatus for depositing single crystal, epitaxial films of silicon carbon and silicon germanium carbon on a plurality of substrates in a hot wall, isothermal UHV-CVD system is...
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7173285 |
Lithographic methods to reduce stacking fault nucleation sites
Epitaxial silicon carbide layers are fabricated by forming features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The features...
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7173284 |
Silicon carbide semiconductor device and manufacturing method
A silicon carbide semiconductor device that includes J-FETs has a drift layer of epitaxially grown silicon carbide having a lower impurity concentration level than a substrate on which the drift...
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7170097 |
Inverted light emitting diode on conductive substrate
An electronic device includes a conductive n-type substrate, a Group III nitride active region, an n-type Group III-nitride layer in vertical relationship to the substrate and the active layer, at...
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7166866 |
Edge termination for silicon power devices
A silicon semiconductor die comprises a heavily doped silicon substrate and an upper layer comprising doped silicon of a first conduction type disposed on the substrate. The upper layer comprises a...
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7164154 |
Gate wiring layout for silicon-carbide-based junction field effect transistor
A silicon carbide semiconductor device includes: a semiconductor substrate including first and second gate layers, a channel layer, a source layer, and a trench; a gate wiring having a first...
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7161182 |
Charge separation type heterojunction structure and manufacturing method thereof
A charge separation heterojunction structure which uses a fullerene polymer film as a part of its constituent materials and which may be used to produce a solar cellor a light emitting diode...
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7154153 |
Memory device
A floating gate transistor has a reduced barrier energy at an interface with an adjacent gate insulator, allowing faster charge transfer across the gate insulator at lower voltages. Data is stored...
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7148512 |
Thermal interface with silver-filled carbon nanotubes
An exemplary thermal interface ( 40 ) includes a silver colloid base ( 32 ), and an array of carbon nanotubes ( 22 ) disposed in the silver colloid base uniformly. The carbon nanotubes have...
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7141824 |
Transistor with variable electron affinity gate
A SiC material composition is selected to establish the barrier energy between the SIC gate and a gate insulator. Various embodiments of selected SiC material composition include a memory...
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7135420 |
Semiconductor device and manufacturing method thereof
Single crystal silicon is grown in a [100] direction to make a bulk. Next, a silicon substrate with a normal of a surface extending in an inclined direction from a [100] direction is cut from the...
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7132355 |
Method of forming a layer comprising epitaxial silicon and a field effect transistor
This invention includes methods of forming layers comprising epitaxial silicon, and field effect transistors. In one implementation, a method of forming a layer comprising epitaxial silicon...
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7129133 |
Method and structure of memory element plug with conductive Ta removed from sidewall at region of memory element film
Disclosed are methods and structures for fabrication of reliable and efficient memory cells. The methods involve formation of a conformal diffusion barrier layer in a via, deposition of an...
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7122837 |
Structures formed in diamond
N-V centers in diamond are created in a controlled manner. In one embodiment, a single crystal diamond is formed using a CVD process, and then annealed to remove N-V centers. A thin layer of single...
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7118970 |
Methods of fabricating silicon carbide devices with hybrid well regions
MOS channel devices and methods of fabricating such devices having a hybrid channel are provided. Exemplary devices include vertical power MOSFETs that include a hybrid well region of silicon...
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7109521 |
Silicon carbide semiconductor structures including multiple epitaxial layers having sidewalls
An epitaxial silicon carbide layer is fabricated by forming first features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The first...
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7109548 |
Operating a memory device
A floating gate transistor has a reduced barrier energy at an interface with an adjacent gate insulator, allowing faster charge transfer across the gate insulator at lower voltages. Data is stored...
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7105875 |
Lateral power diodes
A lateral power diodes with an optimal drift doping formed in widebandgap semiconductors like Silicon Carbide, Aluminum Nitride and Gallium Nitride and Diamond are provided with a voltage rating...
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7091522 |
Strained silicon carbon alloy MOSFET structure and fabrication method thereof
A MOSFET structure utilizing strained silicon carbon alloy and fabrication method thereof. The MOSFET structure includes a substrate, a graded SiGe layer, a relaxed buffer layer, a strained silicon...
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7078329 |
Method of manufacturing silicon carbide semiconductor device
An insulating film ( 2 ) is formed on a semiconductor substrate ( 1 ) formed of silicon carbide. A contact hole ( 3 ) is formed in the insulating film ( 2 ) to expose a part of the upper surface of...
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7071490 |
Group III nitride LED with silicon carbide substrate
The present invention is a semiconductor structure for light emitting devices that can emit in the red to ultraviolet portion of the electromagnetic spectrum. The semiconductor structure includes a...
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7067847 |
Semiconductor element
On a substrate made of e.g., sapphire single crystal is formed an Al underlayer having FWHM X-ray rocking curve value of 90 seconds or below. A buffer layer is formed on the AlN underlayer and has...
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7067336 |
Electron-emitting device, electron source and image-forming apparatus, and manufacturing methods thereof
An electron-emitting device having favorable electron emitting characteristic stable for a long time, which is manufactured by a method comprising the steps of disposing an electrically conductive...
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7064352 |
Diamond semiconductor device and method for manufacturing the same
A diamond semiconductor device includes a substrate made of single crystal diamond; a first diamond layer, placed on the substrate, containing an impurity; a second diamond layer containing the...
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7064354 |
Color mixing light emitting diode
A color mixing light emitting diode (LED) is disclosed. The present invention is featured in that a plurality of LEDs emitting different colors of light can be electrically connected in series...
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7061021 |
System and method for fabricating diodes
This invention is directed to a system and method of fabricating PN and PiN diodes by diffusing an acceptor impurity into a substrate. This invention is particularly advantageous for fabricating...
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7061027 |
Semiconductor device with heterojunction
An aspect of the present invention provides a semiconductor device that includes a semiconductor base made of a first semiconductor material of a first conductivity type, a hetero-semiconductor...
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7053411 |
Method for treating semiconductor processing components and components formed thereby
A method for treating a semiconductor processing component, including: exposing the component to a halogen gas at an elevated temperature, oxidizing the component to form an oxide layer, and...
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7052932 |
Oxygen doped SiC for Cu barrier and etch stop layer in dual damascene fabrication
A method of forming a dual damascene structure with improved performance is described. A first etch stop layer comprised of oxygen doped SiC is deposited on a SiC barrier layer to form a composite...
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7049160 |
Gallium nitride compound semiconductor device and method of manufacturing the same
A GaN compound semiconductor device can be capable of free process design and can have optimum device characteristics. The device can include a group III nitride compound semiconductor laminate...
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7045879 |
Silicon carbide semiconductor device having enhanced carrier mobility
The principal surface of a p-type SiC substrate ( 1 ) is formed of a face intersecting (0001) Si-face at 10 to 16°. An n + source region ( 2 ) and an n + drain region ( 3 ) are formed in a...
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7030418 |
Structure of chip carrier for semiconductor optical device, optical module, and optical transmitter and receiver
A chip carrier includes a metal-coated portion formed on a front surface of a substrate and to be mounted a device, and a rear surface of the substrate being coated with a metal, in which a...
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7026669 |
Lateral channel transistor
A lateral channel transistor with an optimal conducting channel formed in widebandgap semiconductors like Silicon Carbide and Diamond is provided. Contrary to conventional vertical design of power...
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7026650 |
Multiple floating guard ring edge termination for silicon carbide devices
Edge termination for silicon carbide devices has a plurality of concentric floating guard rings in a silicon carbide layer that are adjacent and spaced apart from a silicon carbide-based...
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7023010 |
Si/C superlattice useful for semiconductor devices
A Si/C superlattice useful for semiconductor devices comprises a plurality of epitaxially grown silicon layers alternating with carbon layers respectively adsorbed on surfaces of said silicon...
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7009219 |
Diamond ultraviolet light-emitting device
A small, simple current-injection diamond ultraviolet light-emitting device comprising a high-quality diamond grown by chemical vapor deposition (CVD) method ( 1 ), a surface conductive layer ( 2 )...
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7009209 |
Silicon carbide and related wide-bandgap transistors on semi-insulating epitaxy for high-speed, high-power applications
A silicon carbide semi-insulating epitaxy layer is used to create power devices and integrated circuits having significant performance advantages over conventional devices. A silicon carbide...
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6995397 |
Semiconductor device
A semiconductor device having an accumulation channel SiC-MISFET structure includes a p-type SiC layer 10 formed on an SiC substrate, an n-type channel layer 20, a gate insulating film 11, a...
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6995036 |
Production method of α-SiC wafer
The present invention has its object to make it possible to produce an α-SiC wafer with stability and good reproducibility at low cost without using a seed crystal substrate that is expensive and...
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6995396 |
Semiconductor substrate, semiconductor device and method for fabricating the same
A SiC bulk substrate whose top face has been flattened is placed in a vertical thin film growth system to be annealed in an inert gas atmosphere. A material gas of Si is then supplied at a flow...
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6989553 |
Semiconductor device having an active region of alternating layers
An active region 30 is formed on a substrate 3 , which is made of SiC, GaN, or GaAs, for example, by alternately layering undoped layers 22 with a thickness of for example about 50 nm and...
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6984840 |
Optical semiconductor device having an epitaxial layer of III-V compound semiconductor material containing N as a group V element
An optical semiconductor device includes an SiC substrate having an n-type conductivity, and an AlGaN buffer layer having an n-type conductivity formed on the SiC substrate with a composition...
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6974720 |
Methods of forming power semiconductor devices using boule-grown silicon carbide drift layers and power semiconductor devices formed thereby
Methods of forming high voltage silicon carbide power devices utilize high purity silicon carbide drift layers that are derived from high purity silicon carbide wafer material, instead of...
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6972436 |
High voltage, high temperature capacitor and interconnection structures
Capacitors and interconnection structures for silicon carbide are provided having an oxide layer, a layer of dielectric material and a second oxide layer on the layer of dielectric material. The...
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6956249 |
Termination of semiconductor components
The invention relates to a semiconductor component which is capable of blocking such as an (IGBT), a thyristor, a GTO or diodes, especially schottky diodes. An insulator profile section ( 10 a , 10...
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6956238 |
SILICON CARBIDE POWER METAL-OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTORS HAVING A SHORTING CHANNEL AND METHODS OF FABRICATING SILICON CARBIDE METAL-OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTORS HAVING A SHORTING CHANNEL
Silicon carbide metal-oxide semiconductor field effect transistors (MOSFETs) and methods of fabricating silicon carbide MOSFETs are provided. The silicon carbide MOSFETs have an n-type silicon...
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6956239 |
Transistors having buried p-type layers beneath the source region
The present invention provides a unit cell of a metal-semiconductor field-effect transistor (MESFET). The unit cell of the MESFET includes a source, a drain and a gate. The gate is disposed between...
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6949769 |
Suppression of MOSFET gate leakage current
A MOSFET has greatly reduced leakage current between the gate electrode and the channel, source and drain regions. The gate electrode materials have lower electron affinities than the channel,...
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6946739 |
Layered semiconductor devices with conductive vias
A method of fabricating an integrated circuit on a silicon carbide substrate is disclosed that eliminates wire bonding that can otherwise cause undesired inductance. The method includes fabricating...
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6943376 |
Electrode for p-type SiC
An object of this invention is to provide an electrode for p-type SiC which can provide improved surface morphology and less thermal damage for a semiconductor crystal layer due to formation of an...
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