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7183576 Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD  
A method and apparatus for depositing single crystal, epitaxial films of silicon carbon and silicon germanium carbon on a plurality of substrates in a hot wall, isothermal UHV-CVD system is...
7173285 Lithographic methods to reduce stacking fault nucleation sites  
Epitaxial silicon carbide layers are fabricated by forming features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The features...
7173284 Silicon carbide semiconductor device and manufacturing method  
A silicon carbide semiconductor device that includes J-FETs has a drift layer of epitaxially grown silicon carbide having a lower impurity concentration level than a substrate on which the drift...
7170097 Inverted light emitting diode on conductive substrate  
An electronic device includes a conductive n-type substrate, a Group III nitride active region, an n-type Group III-nitride layer in vertical relationship to the substrate and the active layer, at...
7166866 Edge termination for silicon power devices  
A silicon semiconductor die comprises a heavily doped silicon substrate and an upper layer comprising doped silicon of a first conduction type disposed on the substrate. The upper layer comprises a...
7164154 Gate wiring layout for silicon-carbide-based junction field effect transistor  
A silicon carbide semiconductor device includes: a semiconductor substrate including first and second gate layers, a channel layer, a source layer, and a trench; a gate wiring having a first...
7161182 Charge separation type heterojunction structure and manufacturing method thereof  
A charge separation heterojunction structure which uses a fullerene polymer film as a part of its constituent materials and which may be used to produce a solar cellor a light emitting diode...
7154153 Memory device  
A floating gate transistor has a reduced barrier energy at an interface with an adjacent gate insulator, allowing faster charge transfer across the gate insulator at lower voltages. Data is stored...
7148512 Thermal interface with silver-filled carbon nanotubes  
An exemplary thermal interface ( 40 ) includes a silver colloid base ( 32 ), and an array of carbon nanotubes ( 22 ) disposed in the silver colloid base uniformly. The carbon nanotubes have...
7141824 Transistor with variable electron affinity gate  
A SiC material composition is selected to establish the barrier energy between the SIC gate and a gate insulator. Various embodiments of selected SiC material composition include a memory...
7135420 Semiconductor device and manufacturing method thereof  
Single crystal silicon is grown in a [100] direction to make a bulk. Next, a silicon substrate with a normal of a surface extending in an inclined direction from a [100] direction is cut from the...
7132355 Method of forming a layer comprising epitaxial silicon and a field effect transistor  
This invention includes methods of forming layers comprising epitaxial silicon, and field effect transistors. In one implementation, a method of forming a layer comprising epitaxial silicon...
7129133 Method and structure of memory element plug with conductive Ta removed from sidewall at region of memory element film  
Disclosed are methods and structures for fabrication of reliable and efficient memory cells. The methods involve formation of a conformal diffusion barrier layer in a via, deposition of an...
7122837 Structures formed in diamond  
N-V centers in diamond are created in a controlled manner. In one embodiment, a single crystal diamond is formed using a CVD process, and then annealed to remove N-V centers. A thin layer of single...
7118970 Methods of fabricating silicon carbide devices with hybrid well regions  
MOS channel devices and methods of fabricating such devices having a hybrid channel are provided. Exemplary devices include vertical power MOSFETs that include a hybrid well region of silicon...
7109521 Silicon carbide semiconductor structures including multiple epitaxial layers having sidewalls  
An epitaxial silicon carbide layer is fabricated by forming first features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The first...
7109548 Operating a memory device  
A floating gate transistor has a reduced barrier energy at an interface with an adjacent gate insulator, allowing faster charge transfer across the gate insulator at lower voltages. Data is stored...
7105875 Lateral power diodes  
A lateral power diodes with an optimal drift doping formed in widebandgap semiconductors like Silicon Carbide, Aluminum Nitride and Gallium Nitride and Diamond are provided with a voltage rating...
7091522 Strained silicon carbon alloy MOSFET structure and fabrication method thereof  
A MOSFET structure utilizing strained silicon carbon alloy and fabrication method thereof. The MOSFET structure includes a substrate, a graded SiGe layer, a relaxed buffer layer, a strained silicon...
7078329 Method of manufacturing silicon carbide semiconductor device  
An insulating film ( 2 ) is formed on a semiconductor substrate ( 1 ) formed of silicon carbide. A contact hole ( 3 ) is formed in the insulating film ( 2 ) to expose a part of the upper surface of...
7071490 Group III nitride LED with silicon carbide substrate  
The present invention is a semiconductor structure for light emitting devices that can emit in the red to ultraviolet portion of the electromagnetic spectrum. The semiconductor structure includes a...
7067847 Semiconductor element  
On a substrate made of e.g., sapphire single crystal is formed an Al underlayer having FWHM X-ray rocking curve value of 90 seconds or below. A buffer layer is formed on the AlN underlayer and has...
7067336 Electron-emitting device, electron source and image-forming apparatus, and manufacturing methods thereof  
An electron-emitting device having favorable electron emitting characteristic stable for a long time, which is manufactured by a method comprising the steps of disposing an electrically conductive...
7064352 Diamond semiconductor device and method for manufacturing the same  
A diamond semiconductor device includes a substrate made of single crystal diamond; a first diamond layer, placed on the substrate, containing an impurity; a second diamond layer containing the...
7064354 Color mixing light emitting diode  
A color mixing light emitting diode (LED) is disclosed. The present invention is featured in that a plurality of LEDs emitting different colors of light can be electrically connected in series...
7061021 System and method for fabricating diodes  
This invention is directed to a system and method of fabricating PN and PiN diodes by diffusing an acceptor impurity into a substrate. This invention is particularly advantageous for fabricating...
7061027 Semiconductor device with heterojunction  
An aspect of the present invention provides a semiconductor device that includes a semiconductor base made of a first semiconductor material of a first conductivity type, a hetero-semiconductor...
7053411 Method for treating semiconductor processing components and components formed thereby  
A method for treating a semiconductor processing component, including: exposing the component to a halogen gas at an elevated temperature, oxidizing the component to form an oxide layer, and...
7052932 Oxygen doped SiC for Cu barrier and etch stop layer in dual damascene fabrication  
A method of forming a dual damascene structure with improved performance is described. A first etch stop layer comprised of oxygen doped SiC is deposited on a SiC barrier layer to form a composite...
7049160 Gallium nitride compound semiconductor device and method of manufacturing the same  
A GaN compound semiconductor device can be capable of free process design and can have optimum device characteristics. The device can include a group III nitride compound semiconductor laminate...
7045879 Silicon carbide semiconductor device having enhanced carrier mobility  
The principal surface of a p-type SiC substrate ( 1 ) is formed of a face intersecting (0001) Si-face at 10 to 16°. An n + source region ( 2 ) and an n + drain region ( 3 ) are formed in a...
7030418 Structure of chip carrier for semiconductor optical device, optical module, and optical transmitter and receiver  
A chip carrier includes a metal-coated portion formed on a front surface of a substrate and to be mounted a device, and a rear surface of the substrate being coated with a metal, in which a...
7026669 Lateral channel transistor  
A lateral channel transistor with an optimal conducting channel formed in widebandgap semiconductors like Silicon Carbide and Diamond is provided. Contrary to conventional vertical design of power...
7026650 Multiple floating guard ring edge termination for silicon carbide devices  
Edge termination for silicon carbide devices has a plurality of concentric floating guard rings in a silicon carbide layer that are adjacent and spaced apart from a silicon carbide-based...
7023010 Si/C superlattice useful for semiconductor devices  
A Si/C superlattice useful for semiconductor devices comprises a plurality of epitaxially grown silicon layers alternating with carbon layers respectively adsorbed on surfaces of said silicon...
7009219 Diamond ultraviolet light-emitting device  
A small, simple current-injection diamond ultraviolet light-emitting device comprising a high-quality diamond grown by chemical vapor deposition (CVD) method ( 1 ), a surface conductive layer ( 2 )...
7009209 Silicon carbide and related wide-bandgap transistors on semi-insulating epitaxy for high-speed, high-power applications  
A silicon carbide semi-insulating epitaxy layer is used to create power devices and integrated circuits having significant performance advantages over conventional devices. A silicon carbide...
6995397 Semiconductor device  
A semiconductor device having an accumulation channel SiC-MISFET structure includes a p-type SiC layer 10 formed on an SiC substrate, an n-type channel layer 20, a gate insulating film 11, a...
6995036 Production method of α-SiC wafer  
The present invention has its object to make it possible to produce an α-SiC wafer with stability and good reproducibility at low cost without using a seed crystal substrate that is expensive and...
6995396 Semiconductor substrate, semiconductor device and method for fabricating the same  
A SiC bulk substrate whose top face has been flattened is placed in a vertical thin film growth system to be annealed in an inert gas atmosphere. A material gas of Si is then supplied at a flow...
6989553 Semiconductor device having an active region of alternating layers  
An active region 30 is formed on a substrate 3 , which is made of SiC, GaN, or GaAs, for example, by alternately layering undoped layers 22 with a thickness of for example about 50 nm and...
6984840 Optical semiconductor device having an epitaxial layer of III-V compound semiconductor material containing N as a group V element  
An optical semiconductor device includes an SiC substrate having an n-type conductivity, and an AlGaN buffer layer having an n-type conductivity formed on the SiC substrate with a composition...
6974720 Methods of forming power semiconductor devices using boule-grown silicon carbide drift layers and power semiconductor devices formed thereby  
Methods of forming high voltage silicon carbide power devices utilize high purity silicon carbide drift layers that are derived from high purity silicon carbide wafer material, instead of...
6972436 High voltage, high temperature capacitor and interconnection structures  
Capacitors and interconnection structures for silicon carbide are provided having an oxide layer, a layer of dielectric material and a second oxide layer on the layer of dielectric material. The...
6956249 Termination of semiconductor components  
The invention relates to a semiconductor component which is capable of blocking such as an (IGBT), a thyristor, a GTO or diodes, especially schottky diodes. An insulator profile section ( 10 a , 10...
6956238 SILICON CARBIDE POWER METAL-OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTORS HAVING A SHORTING CHANNEL AND METHODS OF FABRICATING SILICON CARBIDE METAL-OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTORS HAVING A SHORTING CHANNEL  
Silicon carbide metal-oxide semiconductor field effect transistors (MOSFETs) and methods of fabricating silicon carbide MOSFETs are provided. The silicon carbide MOSFETs have an n-type silicon...
6956239 Transistors having buried p-type layers beneath the source region  
The present invention provides a unit cell of a metal-semiconductor field-effect transistor (MESFET). The unit cell of the MESFET includes a source, a drain and a gate. The gate is disposed between...
6949769 Suppression of MOSFET gate leakage current  
A MOSFET has greatly reduced leakage current between the gate electrode and the channel, source and drain regions. The gate electrode materials have lower electron affinities than the channel,...
6946739 Layered semiconductor devices with conductive vias  
A method of fabricating an integrated circuit on a silicon carbide substrate is disclosed that eliminates wire bonding that can otherwise cause undesired inductance. The method includes fabricating...
6943376 Electrode for p-type SiC  
An object of this invention is to provide an electrode for p-type SiC which can provide improved surface morphology and less thermal damage for a semiconductor crystal layer due to formation of an...