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7622808 |
Semiconductor device and having trench interconnection
A semiconductor device includes a first interconnection layer and a interlayer insulating layer. The first interconnection layer is formed on a upper side of a substrate, and includes a first...
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7619310 |
Semiconductor interconnect and method of making same
An integrated circuit interconnect structure includes a conductive line, a first barrier layer disposed on a bottom surface of conductive line, a second barrier layer disposed on the top surface of...
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7619283 |
Methods of fabricating glass-based substrates and apparatus employing same
Methods and apparatus provide for a glass or glass ceramic substrate, including: a bulk layer; an enhanced positive ion concentration layer; and a reduced positive ion concentration layer, wherein...
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7612453 |
Semiconductor device having an interconnect structure and a reinforcing insulating film
A semiconductor device includes in an interconnect structure which includes a first interconnect made of a copper-containing metal, a first Cu silicide layer covering the upper portion of the first...
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7608928 |
Laminated body and semiconductor device
A laminate includes a copper wiring layer ( 20 ) provided over a semiconductor layer and having a specific pattern, a protective layer ( 30 ) formed of a polybenzoxazole resin layer provided on the...
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7608926 |
Nonvolatile semiconductor memory device
A new method to polish down conductive lines in the manufacture of an integrated circuit device is achieved. The method comprises providing a plurality of conductive lines overlying a substrate. A...
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7605472 |
Interconnections having double capping layer and method for forming the same
Provided are an interconnection of a semiconductor device which includes a capping layer and a method for forming the interconnection. The interconnection of the semiconductor device is a copper...
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7605471 |
Semiconductor devices and methods for manufacturing the same
Semiconductor devices having a copper line layer and methods for manufacturing the same are disclosed. An illustrated semiconductor device comprises a damascene insulating layer having a contact...
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7602067 |
Hetero-structure variable silicon rich nitride for multiple level memory flash memory device
Charge storage stacks containing hetero-structure variable silicon richness nitride for memory cells and methods for making the charge storage stacks are provided. The charge storage stack can...
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7602066 |
Method of filling structures for forming via-first dual damascene interconnects
A method of forming via-first, dual damascene interconnect structures by using a gap-filling, bottom anti-reflective coating material whose thickness is easily controlled by a solvent is provided....
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7602048 |
Semiconductor device and semiconductor wafer having a multi-layered insulation film
The object of the present invention is to improve the interfacial adhesion between the film with low dielectric constant and protective film, without damaging the excellent dielectric, flatness and...
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7595556 |
Semiconductor device and method for manufacturing the same
Embodiments relate to a semiconductor device and a method for manufacturing the same. According to embodiments, the semiconductor device may include a semiconductor substrate formed with a metal...
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7595555 |
Method of forming air gaps in a dielectric material using a sacrificial film and resulting structures
A method of forming air gaps surrounding conductors in a dielectric layer, the dielectric layer comprising, for example, part of the interconnect structure of an integrated circuit device. The air...
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7595010 |
Method for producing a doped nitride film, doped oxide film and other doped films
Adding at least one non-silicon precursor (such as a germanium precursor, a carbon precursor, etc.) during formation of a silicon nitride, silicon oxide, silicon oxynitride or silicon carbide film...
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7592710 |
Bond pad structure for wire bonding
A bond pad structure of an integrated circuit is provided. The bond pad structure includes a conductive bond pad, a first dielectric layer underlying the bond pad, and an M top plate located in...
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7592660 |
Semiconductor device and method for manufacturing the same
There is provided a semiconductor device which includes a base insulating film formed on a semiconductor substrate, a capacitor formed on the base insulating film, an interlayer insulating film...
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7586132 |
Power FET with low on-resistance using merged metal layers
In one embodiment, relatively thin but wide metal bus strips overlying a high power FET are formed to conduct current to the source and drain narrow metal strips. A passivation layer is formed over...
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7582970 |
Carbon containing silicon oxide film having high ashing tolerance and adhesion
A semiconductor device includes an interlayer insulating film formed on or over a semiconductor substrate. An opening is formed in the interlayer insulating film and reaches a lower layer metal...
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7582969 |
Hermetic interconnect structure and method of manufacture
A hermetic interconnect is fabricated on a substrate by forming a stud of conductive material over a metallization layer, and then overcoating the stud of conductive material and the metallization...
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7576440 |
Semiconductor chip having bond pads and multi-chip package
A semiconductor chip comprises a semiconductor substrate having integrated circuits formed on a cell region and a peripheral circuit region adjacent to each other. A bond pad-wiring pattern is...
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7572728 |
Semiconductor device and method for manufacturing the same
A semiconductor device and method with a dual damascene pattern uses buffer layers to prevent photoresist layer poisoning due to a reaction between an interlayer dielectric and a photoresist layer....
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7572571 |
Image sensor and method for manufacturing the same
In a solid state imaging device, and a method of manufacture thereof, the efficiency of the transfer of available photons to the photo-receiving elements is increased beyond that which is currently...
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7564132 |
Semiconductor chip
A semiconductor chip 100 includes a semiconductor substrate (not shown), and a stacked film 150 formed over the semiconductor substrate, which includes carbon-containing insulating films such...
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7554200 |
Semiconductor devices including porous insulators
Semiconductor devices with porous insulative materials are disclosed. The porous insulative materials may include a consolidated material with voids dispersed therethrough. The voids may be defined...
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7553757 |
Semiconductor device and method of manufacturing the same
An interlayer insulator includes a first interlayer insulator and a second interlayer insulator formed on the first interlayer insulator and having a property of preventing diffusion of copper. A...
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7550824 |
Low k interconnect dielectric using surface transformation
Systems, devices and methods are provided to improve performance of integrated circuits by providing a low-k insulator. One aspect is an integrated circuit insulator structure. One embodiment...
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7550823 |
Nonvolatile memory cell, array thereof, fabrication methods thereof and device comprising the same
A nonvolatile memory cell is capable of reducing an excessive current leakage due to a rough surface of a polysilicon and of performing even at a low temperature process by forming the first oxide...
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7550822 |
Dual-damascene metal wiring patterns for integrated circuit devices
Methods of forming dual-damascene metal wiring patterns include forming a first metal wiring pattern (e.g., copper wiring pattern) on an integrated circuit substrate and forming an etch-stop layer...
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7550788 |
Semiconductor device having fuse element arranged between electrodes formed in different wiring layers
A semiconductor device includes a lower electrode, an upper electrode, and a fuse element that connects the lower electrode and the upper electrode. The height of the fuse element is greater than...
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7547977 |
Semiconductor chip having bond pads
In one embodiment, a semiconductor chip has one or more peripheral bond pads. The semiconductor chip comprises a semiconductor substrate having a cell region and a peripheral circuit region...
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7544992 |
Illuminating efficiency-increasable and light-erasable embedded memory structure
An illuminating efficiency-increasable and light-erasable embedded memory structure including a substrate, a memory device, many dielectric layers, many cap layers and at least three metal layers...
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7544983 |
MTJ read head with sidewall spacers
Following CMP, a magnetic tunnel junction stack may protrude through the oxide that surrounds it, making it susceptible to possible shorting to its sidewalls. The present invention overcomes this...
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7544608 |
Porous and dense hybrid interconnect structure and method of manufacture
A method for manufacturing a structure includes depositing a dense dielectric over the entire wafer, which includes areas that require low dielectric capacitance and areas that require high...
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7541646 |
Thin film transistor device and method of manufacturing the same
A thin film transistor device according to an embodiment of the invention includes: a thin film transistor having a silicon layer including a source region, a drain region, and a channel region, a...
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7541638 |
Symmetrical and self-aligned non-volatile memory structure
A memory structure in a semiconductor substrate essentially comprises a first conductive line, two conductive blocks, two first dielectric spacers, a first dielectric layer, and a second conductive...
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7535107 |
Tiled construction of layered materials
A method is described for combining the diverse strengths of two materials in a tiled film construction. The first material provides a foundation of intersecting grid lines on a substrate and the...
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7521802 |
Semiconductor device having a refractory metal containing film and method for manufacturing the same
A semiconductor device and a method for manufacturing the same of the present invention in which the semiconductor device is provided with a fuse structure or an electrode pad structure, suppress...
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7521381 |
Method for producing silicon wafer and silicon wafer
A silicon wafer is thermal-annealed in an atmosphere to form new vacancies therein by thermal annealing and the atmosphere in the thermal annealing contains a nitride gas having a lower...
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7518246 |
Atomic layer deposition of CeO2/Al2O3 films as gate dielectrics
The use of atomic layer deposition (ALD) to form a nanolaminate layered dielectric layer of cerium oxide and aluminum oxide acting as a single dielectric layer with a ratio of approximately two to...
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7518242 |
Semiconductor testing device
A semiconductor device has a bonding pad configured to be bonded to a bonding member, a test pad configured to contact with a test probe at a test, and an internal circuit electrically connected to...
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7514779 |
Multilayer build-up wiring board
Mesh holes 35 a and 59 a of upper solid layers 35 and upper solid layers 59 are formed to overlie on one another, so that the insulating properties of interlayer resin insulating layers 50...
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7508076 |
Information handling system including a circuitized substrate having a dielectric layer without continuous fibers
An information handling system which includes as part thereof a circuitized substrate comprising a first layer comprised of a dielectric material including a resin material including a...
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7507656 |
Method and structure for low k interlayer dielectric layer
An integrated circuit interconnect structure. The structure includes a substrate and a layer of transistor elements overlying the substrate. A first interlayer dielectric layer is formed overlying...
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7504731 |
Interconnect structure to reduce stress induced voiding effect
An interconnect structure that may reduce or eliminate stress induced voids is provided. In an embodiment, a via is formed below a conductive line to provide an electrical connection to an...
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7504699 |
Fabrication of a semiconductor device with air gaps for ultra-low capacitance interconnections
A method of forming an air gap or gaps within solid structures and specifically semiconductor structures to reduce capacitive coupling between electrical elements such as metal lines, wherein a...
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7495337 |
Dual-gate device and method
A dual-gate device is formed over and insulated from a semiconductor substrate which may include additional functional circuits that can be interconnected to the dual-gate device. The dual-gate...
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7488428 |
Method for forming stacked via-holes in printed circuit boards
A method for forming stacked via-holes on a printed circuit board includes the steps of: providing a printed circuit board having a conductive trace formed on a side surface thereof; forming a...
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7485964 |
Dielectric material
A dielectric material formed by contacting a low dielectric constant polymer with liquid or supercritical carbon dioxide, under thermodynamic conditions which maintain the carbon dioxide in the...
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7485915 |
Semiconductor device and method having capacitor and capacitor insulating film that includes preset metal element
A semiconductor device includes a capacitor which includes a capacitor insulating film at least including a first insulating film and a ferroelectric film formed in contact with the first...
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7485569 |
Printed circuit board including embedded chips and method of fabricating the same
A printed circuit board having embedded chips, composed of a central layer having an embedded chip, an insulating layer formed on one surface or both surfaces of the central layer and having a via...
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