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7205649 |
Ball grid array copper balancing
A ball grid array device includes a substrate having a first major surface and a second major surface. The first major surface includes leads for electrical connections. The second major surface is...
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7205667 |
Semiconductor device having copper wiring
A first interlayer insulating film made of insulting material is formed over an underlying substrate. A via hole is formed through the first interlayer insulating film. A conductive plug made of...
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7205666 |
Interconnections having double capping layer and method for forming the same
Provided are an interconnection of a semiconductor device which includes a capping layer and a method for forming the interconnection. The interconnection of the semiconductor device is a copper...
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7205665 |
Porous silicon undercut etching deterrent masks and related methods
The disclosed invention relates to masked silicon structures and methods for making porous silicon in selected areas of a silicon substrate via anodic etching. The masked silicon structures...
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7202566 |
Crossed power strapped layout for full CMOS circuit design
An integrated circuit device and method thereof includes a substrate and a plurality of microelectronic devices. Each of the microelectronics devices includes a patterned feature located over the...
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7202565 |
Semiconductor device which employs an interlayer insulating film of a low mechanical strength and a highly reliable metal pad, and a method of manufacturing the same
A semiconductor device includes: multiple kinds of interlayer insulating films formed on a semiconductor substrate and having different elastic moduli, respectively; a metal pad arranged on said...
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7202567 |
Semiconductor device and manufacturing method for the same
A lower interconnection is provided on a semiconductor substrate. A MIM capacitive element is provided on a first interlayer insulation film in which the lower interconnection is buried, and...
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7203085 |
Semiconductor integrated circuit
First and second internal power source lines supply first and second voltages to an internal circuit, respectively. A first line 31 and a second line 32 are arranged parallel to the first and...
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7202157 |
Method for forming metallic interconnects in semiconductor devices
A method for forming a metallic interconnect in a semiconductor device is disclosed. An example method forms an IDL on a substrate including predetermined devices, forms a via hole in the IDL,...
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7199471 |
Method and apparatus for reducing capacitive coupling between lines in an integrated circuit
An integrated circuit ( 78 ) includes a memory circuit ( 10, 110, 210, 310, 410 ) having a group of bitlines ( 21–28, 121–128, 221–228, 321–328, 421–428 ), and having an array of memory...
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7199472 |
Semiconductor device
In a semiconductor device having the upmost wiring layer comprised of aluminum and the wiring layer immediately below it comprised of copper, the upmost wiring layer is made thicker than the wiring...
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7199415 |
Conductive container structures having a dielectric cap
Container structures for use in integrated circuits and methods of their manufacture. The container structures have a dielectric cap on the top of a conductive container to reduce the risk of...
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7199473 |
Integrated low-k hard mask
Embodiments of the invention provide a device with a hard mask layer between first and second ILD layers. The hard mask layer may have a k value approximately equal to the first and/or second ILD...
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7196422 |
Low-dielectric constant structure with a multilayer stack of thin films with pores
The present invention describes a structure having a multilayer stack of thin films, the thin films being a low-dielectric constant material, the thin films having pores, and a method of forming...
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7196426 |
Multilayered substrate for semiconductor device
A multilayered substrate for a semiconductor device, which has a multilayered substrate body formed of a plurality sets of a conductor layer and an insulation layer, and having a face for mounting...
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7196423 |
Interconnect structure with dielectric barrier and fabrication method thereof
An interconnect structure with dielectric barrier and fabrication thereof. The interconnect structure includes a semiconductor substrate and a plurality of stacked structures formed thereon, each...
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7196421 |
Integrated circuit having at least one metallization level
An integrated circuit is provided that includes at least one metallization level having a plurality of dummy conductors. At least one of the dummy conductors has an oriented shape made up of a...
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7196363 |
Multilayer metal structure of supply rings with large parasitic capacitance
A multilayer metal supply rings structure of an integrated circuit comprises at least two parallel perimetral metal rails defined in metal layers of different levels, geometrically superposed one...
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7193296 |
Semiconductor substrate
A semiconductor substrate is partitioned along scribing lines so as to form a plurality of IC regions encompassed by seal rings, wherein a passivation opening is formed in the scribing line in...
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7193324 |
Circuit structure of package substrate
A circuit structure for a package substrate or a circuit board is provided. The circuit structure has a dielectric layer with an upper surface and a lower surface, at least a first line and at...
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7193327 |
Barrier structure for semiconductor devices
An opening in a dielectric layer having a unique barrier layer structure is provided. In an embodiment, the opening is a via and a trench. The barrier layer, which may comprise one or more barrier...
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7193325 |
Reliability improvement of SiOC etch with trimethylsilane gas passivation in Cu damascene interconnects
A method of forming a SiCOH etch stop layer in a copper damascene process is described. A substrate with an exposed metal layer is treated with H 2 or NH 3 plasma to remove metal oxides....
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7190077 |
Semiconductor structure integrated under a pad
An integrated semiconductor structure has a substrate, a semiconductor element located on the substrate, a pad metal, metal layers located between the pad metal and the substrate, and insulation...
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7190043 |
Techniques to create low K ILD for beol
One aspect of the present subject matter relates to a method for forming an interlayer dielectric (ILD). In various embodiments of the method, an insulator layer is formed, at least one trench is...
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7190052 |
Semiconductor devices with oxide coatings selectively positioned over exposed features including semiconductor material
A semiconductor device structure includes a passivation layer through which only non-silicon-comprising structures are exposed. The semiconductor device structure is formed by selectively forming...
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7190823 |
Overlay vernier pattern for measuring multi-layer overlay alignment accuracy and method for measuring the same
An overlay vernier pattern for measuring multi-layer overlay alignment accuracy and a method for measuring the same is provided. A distance between a first alignment mark in a first material layer...
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7190079 |
Selective capping of copper wiring
Patterned copper structures are fabricated by selectively capping the copper employing selective etching and/or selective electroplating in the presence of a liner material. Apparatus for...
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7187015 |
High-density metal capacitor using dual-damascene copper interconnect
An electronic structure having a first conductive layer provided by a dual damascene fabrication process; an etch-stop layer provided by the fabrication process, and electrically coupled with the...
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7187084 |
Damascene method employing composite etch stop layer
A damascene structure is provided comprising a substrate, a lower intermetal dielectric layer over the substrate, an exposed conductive structure within the lower intermetal dielectric layer, a...
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7187085 |
Semiconductor device including dual damascene interconnections
A method (and structure) of forming an interconnect on a semiconductor substrate, includes forming a relatively narrow first structure in a dielectric formed on a semiconductor substrate, forming a...
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7183625 |
Embedded MIM capacitor and zigzag inductor scheme
A new method to form RF devices in the manufacture of an integrated circuit device is achieved. The method comprises providing a substrate. A top metal level is defined overlying the substrate. The...
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7183196 |
Multilayer interconnection board and production method thereof
A multilayer interconnection board is disclosed that allows reliable electrical connection between an interconnection having a large width and a large area and a via provided in a via hole formed...
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7183651 |
Power plane decoupling
A system and method for improved power plane decoupling. In a preferred embodiment, two dielectric layers with different dielectric constants are separated by a first conducting layer. Second and...
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7183653 |
Via including multiple electrical paths
A system includes a device having at least one integrated circuit. The integrated circuit further includes a first layer of conductive material, a second layer of conductive material, and a via...
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7180154 |
Integrated circuit devices having corrosion resistant fuse regions and methods of fabricating the same
Integrated circuit devices are provided including an integrated circuit substrate and first through fourth spaced apart lower interconnects on the integrated circuit substrate. The third and fourth...
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7180120 |
Semiconductor device having dual stacked MIM capacitor and method of fabricating the same
Semiconductor devices having a dual stacked MIM capacitor and methods of fabricating the same are disclosed. The semiconductor device includes a dual stacked MIM capacitor formed on the...
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7180191 |
Semiconductor device and method of manufacturing a semiconductor device
A semiconductor device 200 comprises a SiCN film 202 formed on a semiconductor substrate (not shown), a first SiOC film 204 formed thereon, a SiCN film 208 formed thereon, a second SiOC...
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7176569 |
Semiconductor device and method of manufacturing the same
Provided is a semiconductor device having a semiconductor chip mounted over a substrate, in which an interconnect is formed, by using an adhesive layer to permit contact conduction between a stud...
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7176486 |
Structure of test element group wiring and semiconductor substrate
A structure of test element group wiring includes, in addition to an electrode on a substrate including one or more layers of insulating films, and real wirings electrically connected to the...
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7176574 |
Semiconductor device having a multiple thickness interconnect
A conductive line varies in thickness to assist in overcoming RC delays and noise coupling. By varying line thickness, variation in conductor width is avoided if necessary to maintain a specified...
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7176573 |
Semiconductor device with a multi-level interconnect structure and method for making the same
A semiconductor device includes a semiconductor die and a multi-level interconnect structure that has a first insulating layer formed on the die, conductive horizontal bodies, each of which is...
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7175970 |
Mechanically robust interconnect for low-k dielectric material using post treatment
In an embodiment, a trench is formed above a via from a photo resist (PR) trench pattern in a dielectric layer. The trench is defined by two sidewall portions and base portions. The base portions...
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7173337 |
Semiconductor device manufactured by the damascene process having improved stress migration resistance
A semiconductor device including a second insulating film formed on a substantially flat surface, on which a surface of a first wiring and a surface of a first insulating film are continued, to...
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7170178 |
Capacitive integrated circuit structure
A capacitive structure is provided that includes secondary stacks of superposed secondary electrodes that each include transverse branches connected via a longitudinal branch, means for connecting...
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7170148 |
Semi-fusible link system for a multi-layer integrated circuit and method of making same
A semi-fusible link system and method for a multi-layer integrated circuit including active circuitry on a first layer having a metal one layer including a semi-fusible link element on a second...
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7170173 |
Magnetically lined conductors
A conductor with improved magnetic field per current ratio is disclosed. The conductor includes a magnetic liner lining a second surface and sides thereof. The corners of the conductor where the...
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7170177 |
Semiconductor apparatus
A disclosed semiconductor apparatus includes a substrate, a first insulating layer formed on the substrate, the first insulating layer including a Cu wiring part, and a second insulating layer...
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7170174 |
Contact structure and contact liner process
A contact structure and a method of forming thereof for semiconductor devices or assemblies are described. The method provides process steps to create a contact structure encompassed by a...
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7166922 |
Continuous metal interconnects
A method of forming an interconnection that includes introducing a barrier material in a via of a dielectric to a circuit device on a substrate in such a manner to deposit the barrier material on...
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7166923 |
Semiconductor device, electro-optical unit, and electronic apparatus
The invention provides a semiconductor device that allows high-scale integration of a pattern layout to reduce the pitch of wiring lines without changing a design rule, and to provide an...
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