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6538273 |
Ferroelectric transistor and method for fabricating it
A ferroelectric transistor is disclosed which has two source/drain regions and a channel region disposed in between in a semiconductor substrate. A metallic intermediate layer is disposed on the...
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6538301 |
Semiconductor device and method with improved flat surface
A semiconductor substrate has an element formation region and a scribe line region surrounding the element formation region. A metal wiring layer is formed so as to cover end portions of a...
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6525403 |
Semiconductor device having MIS field effect transistors or three-dimensional structure
A semiconductor projection is formed on a semiconductor substrate of the first conductivity type and has a semiconductor layer of the first conductivity type. The semiconductor projection has a top...
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6515348 |
Semiconductor device with FET MESA structure and vertical contact electrodes
A semiconductor device comprises one or more field effect devices (FD) having source and drain regions ( 5 and 6 ) spaced apart by a body region ( 3 a ). A gate structure ( 7 a , 7 b ),...
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6512275 |
Semiconductor integrated circuits
A semiconductor apparatus and method for making the same is disclosed herein in which the semiconductor apparatus includes a first active device formed in a mesa region of semiconductor material...
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6509626 |
Conductive device components of different base widths formed from a common conductive layer
A microelectronic device fabricating method includes providing a substrate having a mean global outer surface extending along a plane. A first portion is formed over the substrate comprising a...
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6472682 |
Optical modulator, semiconductor laser device equipped with an optical modulator, and optical communication system
An optical modulator and a semiconductor laser device including the optical modulator, both reducing variations in the refractive index of an optical modulator or making variations negative without...
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6462399 |
Multi-chip module employing a carrier substrate with micromachined alignment structures and method of forming
A micromachined insulative carrier substrate preferably formed of silicon and a multi-chip module formed from the micromachined substrate. The micromachined substrate is fabricated by forming mesas...
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6429042 |
Method of reducing shear stresses on IC chips and structure formed thereby
A method and structure for reducing mechanical shear stresses induced in an IC chip by metal interconnect lines that interconnect the chip with its surrounding substrate. A dielectric layer...
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6404027 |
High dielectric constant gate oxides for silicon-based devices
A high dielectric rare earth oxide of the form Mn 2 O 3 (such as, for example, Gd 2 O 3 or Y 2 O 3 ) is grown on a clean silicon (100) substrate surface under an oxygen partial pressure less than...
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6388334 |
System and method for circuit rebuilding via backside access
A circuit modification tool and method for a flip-chip IC permits access to circuit regions near the interconnects using an aperture formed through the circuit side. In one embodiment, an etching...
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6384439 |
DRAM memory cell and array having pass transistors with recessed channels
A dynamic random access memory (DRAM) cell and associated array are disclosed. In a first embodiment, the DRAM cell ( 300 ) includes a storage capacitor ( 304 ) and a pass transistor ( 302 ). The...
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6359290 |
Self-aligned bump bond infrared focal plane array architecture
A method of making a diode and the diode wherein there is provided a substrate of p-type group II-VI semiconductor material and an electrically conductive material capable of forming an ohmic...
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6351023 |
Semiconductor device having ultra-sharp P-N junction and method of manufacturing the same
A semiconductor device such as a P-N or P-I-N junction diode, includes a first semiconductor layer having a first conductivity-type and being mounted over a metal address line, and a second...
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6335559 |
Semiconductor device cleave initiation
The present invention relates to a method of etching a semiconductor wafer ( 100 ), particularly of a compound semiconductor, in order to facilitate cleaving of devices ( 200 ) from the wafer ( 100...
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6329702 |
High frequency carrier
A high frequency carrier is provided which comprises: (a) a planar ceramic substrate having first and second faces and (b) at least one feed-through extending from the first face to the second...
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6316833 |
Semiconductor device with multilayer interconnection having HSQ film with implanted fluorine and fluorine preventing liner
A semiconductor device with a multilevel interconnection has hydrogen silsesquioxane films which are made porous by etching action of hydrogen fluoride or by ion-implantation of impurities...
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6316796 |
Single crystal silicon sensor with high aspect ratio and curvilinear structures
In one aspect, the invention provides a semiconductor sensor which includes a first single crystal silicon wafer layer. A single crystal silicon structure is formed in the first wafer layer. The...
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6294841 |
Integrated semiconductor circuit having dummy structures
An integrated semiconductor circuit includes dummy structures. A portion of capacitive elements present in the dummy structures is used in order to adapt input/output parameters of pads of the...
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6294414 |
Method of fabricating heterointerface devices having diffused junctions
This invention is predicated upon applicants'discovery that the quality of high performance heterointerface devices having diffused junction depends significantly on the rate of cooling after...
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6288454 |
Semiconductor wafer having a layer-to-layer alignment mark and method for fabricating the same
A method of creating a layer-to-layer alignment mark in a semiconductor wafer includes the step of depositing a first conductor layer on a substrate associated with the semiconductor wafer. The...
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6268642 |
Wafer level package
A wafer level package structure. The method of forming the wafer level package structure includes covering a silicon chip having a plurality of integrated circuit devices thereon with an insulation...
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6265757 |
Forming attached features on a semiconductor substrate
A method for creating attached features while controlling the depth profile between the features is presented. First the features are formed with a separating barrier between the features. The...
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6248429 |
Metallized recess in a substrate
The present invention relates to the formation of a ball grid array testing receiver that is scalable for design consideration of miniaturization. A dielectric layer is formed upon a substrate that...
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6245653 |
Method of filling an opening in an insulating layer
The present invention is about a method for filling an opening in an insulating layer in a fast and highly reliable way and can be used to fill openings such as trenches and via holes...
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6236111 |
Hybrid circuit substrate mountable micro-electromechanical component
A micro-electromechanical component (10) which includes a micro-system in a chip made by deposit, photolithography and micro-manufacturing of successive layers. The micro-system comprises a...
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6208007 |
Buried layer in a semiconductor formed by bonding
Buried layers are formed within a semiconductor. Metallic or insulating buried layers are produced several microns within a semiconductor substrate. The buried layer can confine current to the...
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6208013 |
Microactuator with an improved semiconductor substrate and method of forming the same
The present invention provides semiconductor substrate for a microactuator having at least a movable part and a stator, wherein the semiconductor substrate has a plurality of semiconductor tapered...
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6198144 |
Passivation of sidewalls of a word line stack
A method of fabricating an integrated circuit on a wafer includes forming a gate electrode stack over a gate dielectric and forming nitride spacers along sidewalls of the gate electrode stack other...
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6198158 |
Memory circuit including a semiconductor structure having more usable substrate area
A semiconductor structure includes a first substrate portion having a surface and a first active region disposed in the first substrate portion. An insulator region is disposed on the first...
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6157060 |
High density integrated semiconductor memory and method for producing the memory
The high density integrated semiconductor memory has an EPROM cell in the form of a pillar. The cell has a floating gate and a control gate. The EPROM cell is dimensioned so thin that it is fully...
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6136667 |
Method for bonding two crystalline substrates together
A process for device fabrication is disclosed in which two substrates having different crystal lattices are bound together. In the process the substrate surfaces are thoroughly cleaned and placed...
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6127733 |
Check pattern for via-hole opening examination
To provide a check pattern whereby whether via-hole openings are made correctly or not can be examined without needing high precision positioning of the via-holes, a check pattern of the invention...
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6127717 |
Totally self-aligned transistor with polysilicon shallow trench isolation
A totally self-aligned transistor with shallow trench isolation. A single mask is used to align the source, drain, gate and isolation areas. Overlay error is greatly reduced by the use of a single...
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6121633 |
Latch-up free power MOS-bipolar transistor
A MOS bipolar transistor is provide which includes a silicon carbide npn bipolar transistor formed on a bulk single crystal n-type silicon carbide substrate and having an n-type drift layer a...
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6121651 |
Dram cell with three-sided-gate transfer device
A DRAM device and a process of manufacturing the device. The DRAM device includes a bit-line coupled to a signal storage node through a transfer device that is controlled by a word line. The...
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6100549 |
High breakdown voltage resurf HFET
A high breakdown voltage HFET includes a reduced surface field (RESURF) layer of p-type conductivity GaN positioned on a substrate with a channel layer of n-type conductivity GaN positioned...
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6091083 |
Gallium nitride type compound semiconductor light-emitting device having buffer layer with non-flat surface
A gallium nitride type compound semiconductor light-emitting device of the present invention includes: a substrate; a buffer layer, formed on the substrate, having a thick region and a thin region...
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6069390 |
Semiconductor integrated circuits with mesas
A semiconductor apparatus and method for making the same is disclosed herein in which the semiconductor apparatus includes a first active device formed in a mesa region of semiconductor material...
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6051871 |
Heterojunction bipolar transistor having improved heat dissipation
A heterojunction bipolar transistor has a mesa including collector 604, base 603, and emitter 602 layers. The mesa has first and second sidewalls 606. An improved heat dissipation structure...
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6051889 |
Semiconductor device having a flip-chip structure
A semiconductor device includes a substrate having a first principal surface carrying thereon a first wiring pattern and a semiconductor chip having a second principal surface carrying a second...
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6034332 |
Power supply distribution structure for integrated circuit chip modules
A power distribution structure for a multichip module including, a base plate, a plurality of mesas arranged in a pattern are formed on the base plate, the mesas having electrically conductive...
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6034416 |
Semiconductor device and method for fabricating the same
The top surface of a substrate in a peripheral circuit region is at a level that is higher than the top surface of the substrate in a memory cell region and that is substantially equal to the top...
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6028347 |
Semiconductor structures and packaging methods
A semiconductor structure having: semiconductor devices formed in an inner region of a semiconductor chip; a seal ring formed in the chip and disposed about the inner region; and, a plurality of...
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6022781 |
Method for fabricating a MOSFET with raised STI isolation self-aligned to the gate stack
A semiconductor structure comprising a transistor having a gate conductor that has first and second edges bounded by raised isolation structures (e.g. STI). A source diffusion is self-aligned to...
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6020603 |
Semiconductor device with a beveled and chamfered outer peripheral portion
A high voltage semiconductor device such as a gate turn-off thyristor, reduces surface field concentration of a main P-N junction part and attains withstand voltage increase. In a semiconductor...
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5994747 |
MOSFETs with recessed self-aligned silicide gradual S/D junction
The present invention includes a gate oxide. A gate is formed on the gate oxide. Undercut portions, formed under the gate. The substrate has recessed portions are adjacent to the gate. A silicon...
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5990519 |
Electrostatic discharge structure
A spike electrostatic discharge (ESD) cavity structure includes an etching stop layer including, for example, polysilicon or metal material. The etching stop layer is used as the etching stop to...
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5982023 |
Semiconductor device and field effect transistor
A dummy gate is removed together with an SiO 2 film thereon by lift-off to form a reverse dummy-gate pattern with the SiO 2 film. A photoresist pattern is formed to cover the reverse dummy-gate...
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5981975 |
On-chip alignment fiducials for surface emitting devices
An optoelectronic apparatus has, a die having a mesa (103) with a surface emitting optical device and a metallized p-type contact (209), a planar pad (201) adjacent the mesa for Z-height...
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