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7619282 |
Hybrid circuit and electronic device using same
There is disclosed a hybrid circuit in which a circuit formed of TFTs in integrated with an RF filter. The TFTs are fabricated on a quartz substrate. A ceramic filter forming the RF filter is...
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7616167 |
Semiconductor device and method of producing the same
A semiconductor device includes a semiconductor substrate having a first surface and a second surface opposite to the first surface; a first through wiring penetrating through the semiconductor...
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7602047 |
Semiconductor device having through vias
A method of fabricating a semiconductor device is provided. The method may include forming an insulating layer on a wafer. The wafer may have an active surface and an inactive surface which face...
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7592703 |
RF and MMIC stackable micro-modules
A new method to form shielded vias with microstrip ground plane in the manufacture of an integrated circuit device is achieved. The method comprises, first, providing a substrate. The substrate is...
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7579671 |
Semiconductor device and manufacturing method thereof
Disconnection and deterioration in step coverage of wirings are prevented to offer a semiconductor device having higher reliability. A pad electrode is formed on a surface of a silicon die. A via...
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7576413 |
Packaged stacked semiconductor device and method for manufacturing the same
The present invention provides a packaged stacked semiconductor device which includes bumps serving as external electrode terminals, the bumps being provided on both a front surface and a back...
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7566968 |
Biosensor with smart card configuration
A biosensor that has a smart card configuration includes a semiconductor chip including a bioactive structure and contact areas disposed on a first side of the semiconductor chip, and a rewiring...
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7566656 |
Method and apparatus for providing void structures
The present invention relates to integrated circuits. In particular, but not exclusively, the invention relates to a method and apparatus for connecting elements of integrated circuits with...
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7564118 |
Chip and wafer integration process using vertical connections
A metallized feature is formed in the top surface of a substrate, and a handling plate is attached to the substrate. The substrate is then thinned at the bottom surface thereof to expose the bottom...
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7564115 |
Tapered through-silicon via structure
An integrated circuit structure includes a substrate; a through-silicon via (TSV) in the substrate, the TSV being tapered; a hard mask region extending from a top surface of the substrate into the...
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7560802 |
Electrical connections in substrates
A method of making an electrical connection between a first (top) and a second (bottom) surface of a conducting or semi-conducting substrate includes creating a trench in the first surface, and...
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7557017 |
Method of manufacturing semiconductor device with two-step etching of layer
The invention is directed to improvement of reliability of a process of separating a layer to be patterned such as a wiring layer in a semiconductor device manufacturing method. A wiring layer is...
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7547958 |
Semiconductor device, electronic device, and manufacturing method of the same
The present invention provides a technology that makes it possible to enhance the gain and the efficiency of an RF bipolar transistor. Device isolation is given between a p+ type isolation region...
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7547929 |
Semiconductor HBT MMIC device and semiconductor module
The present invention provides a semiconductor device which comprises active components, passive components, wiring lines and electrodes and are satisfactory in terms of mechanical strength,...
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7547630 |
Method for stacking semiconductor chips
In a semiconductor system ( 100 ) including a chip ( 101 ) and a workpiece ( 102 ), the chip has metal-filled vias ( 140 ) positioned between contact pads ( 120 ) and the respective edges ( 110 )....
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7545045 |
Dummy via for reducing proximity effect and method of using the same
A dummy via design for a dual damascene structure has a dielectric layer on a substrate, a dual damascene structure filled with a conductive material and inlaid in the dielectric layer, and a dummy...
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7534722 |
Back-to-front via process
A method performed on a semiconductor chip having a doped semiconductor material abutting a substrate involves creating a first via through at least a portion of the substrate extending from an...
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7531890 |
Multi-chip package (MCP) with a conductive bar and method for manufacturing the same
A multi-chip package (MCP) is provided. The MCP comprises a plurality of stacked semiconductor chips, each including a chip pad and a first insulating layer overlying the chip pad with an opening...
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7531455 |
Method for forming storage node contact in semiconductor device using nitride-based hard mask
A method for forming a storage node contact in a semiconductor device using a nitride-based hard mask is provided. The method includes: forming an inter-layer oxide layer on a substrate; forming a...
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7524753 |
Semiconductor device having through electrode and method of manufacturing the same
A method of manufacturing a semiconductor device having a through electrode, includes forming through holes 36 in a substrate 31 , forming a first metal layer 39 from one surface side of the...
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7521807 |
Semiconductor device with inclined through holes
A semiconductor device has a semiconductor substrate with an inclined through hole extending between its two major surfaces in a peripheral part of the substrate, providing an electrical...
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7511359 |
Dual die package with high-speed interconnect
Embodiments of the invention relate to the construction of a dual die package with a high-speed interconnect. A package is created having a first die on a first side of a base substrate and a...
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7498661 |
Manufacturing method for semiconductor device, semiconductor device, and electronic apparatus
A manufacturing method for a semiconductor device includes a hole portion formation step for forming hole portions whose entire width is substantially identical to the width of the opening portion...
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7495316 |
Methods of forming conductive vias and methods of forming multichip modules including such conductive vias
A method of forming a multiconductor via includes forming at least one seed layer in at least one through-hole of a substrate, selectively patterning the seed layer to form a plurality of laterally...
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7491582 |
Method for manufacturing semiconductor device and semiconductor device
A semiconductor device includes: a connecting body including a connecting electrode; and at least one semiconductor chip stacked on the connecting body, the semiconductor chip including: a...
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7485948 |
Front-end processing of nickel plated bond pads
A front-end method of fabricating nickel plated caps over copper bond pads used in a memory device. The method provides protection of the bond pads from an oxidizing atmosphere without exposing...
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7473984 |
Method for fabricating a metal-insulator-metal capacitor
A method fabricating multiple wiring metals in a semiconductor device. The method includes forming a lower wiring metal on a semiconductor substrate, forming an interlayer dielectric on the lower...
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7473616 |
Method and system for wafer bonding of structured substrates for electro-mechanical devices
A method for forming a composite substrate structure. The method includes providing a first substrate, the first substrate having a surface region and a backside region, providing a handling...
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7456098 |
Building metal pillars in a chip for structure support
Stacked via pillars, such as metal via pillars, are provided at different and designated locations in IC chips to support the chip structure during processing and any related processing stresses...
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7452751 |
Semiconductor device and method of manufacturing the same
Semiconductor device includes a pair of substrates ( 1, 2 ) disposed oppositely, semiconductor elements ( 5, 6 ) formed in the substrates ( 1, 2 ), respectively, and having semiconductor circuits (...
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7446424 |
Interconnect structure for semiconductor package
A semiconductor device includes a semiconductor substrate having top and bottom surfaces, the top surface having at least one device region thereon. At least one trench opening is formed through...
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7446418 |
Semiconductor device for preventing defective filling of interconnection and cracking of insulating film
The semiconductor device has insulating films 40, 42 formed over a substrate 10 ; an interconnection 58 buried in at least a surface side of the insulating films 40, 42 ; insulating films ...
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7443030 |
Thin silicon based substrate
Embodiments of the invention provide a device with a die and a substrate having a similar coefficient of thermal expansion to that of the die. The substrate may comprise a silicon base layer. Build...
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7436068 |
Components for film forming device
Herein disclosed are a component of a film-forming device, in which a thin films is formed on a substrate using a film-forming material, whose surface structure makes any breakage, peeling off...
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7420262 |
Electronic component and semiconductor wafer, and method for producing the same
The invention relates to an electronic component and a semiconductor wafer, and a method for producing them. The semiconductor wafer has strip-type separating regions. The separating regions are...
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7416963 |
Manufacturing method of semiconductor device
This invention offers a manufacturing method to reduce a manufacturing cost of a semiconductor device having a through-hole electrode by simplifying a manufacturing process and to enhance yield of...
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7413925 |
Method for fabricating semiconductor package
According to this invention, a method for fabricating a semiconductor package, in which a plurality of semiconductor chips having a through electrode is layered on a semiconductor interposer,...
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7408249 |
Packaged integrated circuits and methods of producing thereof
A packaged integrated circuit and method for producing thereof, including an integrated circuit substrate lying in a substrate plane and having electrical circuitry formed thereon, a package...
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7393770 |
Backside method for fabricating semiconductor components with conductive interconnects
A backside method for fabricating a semiconductor component with a conductive interconnect includes the step of providing a semiconductor substrate having a circuit side, a backside, and a...
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7391107 |
Signal routing on redistribution layer
A semiconductor wafer has a dielectric layer, a metal last layer, a passivation layer, and a redistribution layer. The metal last layer is formed over the dielectric layer, and the metal last layer...
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7387958 |
MMIC having back-side multi-layer signal routing
A method includes providing a single crystal wafer having MMIC chips. Each chip has an active device in a first surface portion of a semiconductor substrate provided by the wafer and an electrical...
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7381627 |
Dual wired integrated circuit chips
A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method...
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7371602 |
Semiconductor package structure and method for manufacturing the same
A semiconductor package structure comprises a chip, a plurality of pad extension traces, a plurality of via holes, a lid and a plurality of metal traces, wherein the chip has an optical component...
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7365413 |
Reduced power distribution mesh resistance using a modified swiss-cheese slotting pattern
Electrical interconnects with a slotting pattern are provided in the present invention. In addition, the masks for making such interconnects and semiconductor devices incorporating such...
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7358616 |
Semiconductor stacked die/wafer configuration and packaging and method thereof
A reciprocal design symmetry allows stacked wafers or die on wafer to use identical designs or designs that vary only by a few layers (e.g. metal interconnect layers). Flipping or rotating one die...
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7358602 |
Semiconductor chip, and semiconductor wafer including a variable thickness insulating layer
A semiconductor chip includes: a semiconductor substrate; a penetrating electrode which is formed through the semiconductor substrate from a first surface to a second surface of the semiconductor...
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7355267 |
Substrate, semiconductor die, multichip module, and system including a via structure comprising a plurality of conductive elements
A method of forming a multiconductor via includes forming at least one seed layer in at least one through-hole of a substrate, selectively patterning the seed layer to form a plurality of laterally...
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7341938 |
Single mask via method and device
A method of connecting elements such as semiconductor devices and a device having connected elements such as semiconductor devices. A first element having a first contact structure is bonded to a...
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7327022 |
Assembly, contact and coupling interconnection for optoelectronics
A novel micro optical system as a platform technology for electrical and optical interconnections, thermal and mechanical assembly and integration of electronic, optoelectronic, passive and active...
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7312521 |
Semiconductor device with holding member
Cost is reduced and reliability is improved with a BGA (Ball Grid Array) type semiconductor device which has ball-shaped conductive terminals. A first wiring is formed on an insulation film which...
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