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5444274 |
Photodetector and opto-electronic integrated circuit
A photodetector of the present invention is devised to reduce the dark current by employing a novel guard ring structure suitable for a mesa type photodiode (PD). Namely, the PD of the present...
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5444280 |
Photodetector comprising avalanche photosensing layer and interline CCD readout layer
The disclosed device and system enables the cell-based amplification of photo-e The disclop41 The detection device is realized by overlaying an amplifying semi-conductor structure, generally...
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5438217 |
Planar avalanche photodiode array with sidewall segment
A planar photosensitive device, such as an array of APDs, includes a planar block of n type semiconductor material having a plurality of p type wells in the block surrounded by a foundation of n...
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5346837 |
Method of making avalanche photodiode
A method of making an avalanche photodiode includes depositing a light-absorbing semiconductor layer of a first conductivity type on a semiconductor substrate of the first conductivity type;...
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5343055 |
Avalanche photodiode structure with Mg doping and method
An avalanche photodiode structure has a graded magnesium guard ring formed by diffusion from an organic-metallic source. Suitably masked APD layers are placed in an open flow reactor and heated...
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5338947 |
Avalanche photodiode including a multiplication layer and a photoabsorption layer
An avalanche photodiode includes a multiplication layer and a photoabsorption layer, and the multiplication layer is formed of a semiconductor superlattice structure composed of a number of well...
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5311044 |
Avalanche photomultiplier tube
A small, rugged photomultiplier tube is achieved by closely spacing a large area avalanche "photodetector" with respect to a photocathode in an opaque casing having a window for incident light. The...
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5311038 |
Photoelectric converter with electron injection preventive layer
An improved photoelectric converter with reduced dark current includes a first electrode on a substrate covered by a semiconductor layer for photoelectric conversion. A second electrode is disposed...
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5281844 |
Avalanche photodiode
A novel avalanche photodiode includes an n-type semiconductor substrate, an n-type light-absorbing layer on the substrate, an n-type multiplication layer on the light-absorbing layer, and a p-type...
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5272364 |
Semiconductor photodetector device with short lifetime region
A semiconductor photodetector device includes a second conductivity type region extending through a first conductivity type window layer to a first conductivity type light absorbing layer and a...
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5233209 |
Guard ring structure with graded Be implantation
An avalanche photodiode having a beryllium guard ring. The beryllium is implanted at a dosage of at least 5×10 14 per cm 2 and subsequently annealed to provide a guard ring profile with a p+core...
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5204539 |
Avalanche photodiode with hetero-periodical structure
An avalanche photodiode includes an avalanche multiplication layer of a hetero-periodical structure consisting of alternately provided barrier and well layers. Each barrier layer includes a...
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5189309 |
Avalanche photodiode with AliNAsP cap layer
A photodiode having a GaInAs light-absorbing layer on an InP substrate which can reduce temperature dependence of the spectral responsivity as well as enable the optical power measurement with less...
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5179430 |
Planar type heterojunction avalanche photodiode
In a planar type heterojunction avalanche photodiode comprising a light absorbing layer of a first conduction type provided on a substrate of the first conduction type, an avalanche multiplication...
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5162885 |
Acoustic charge transport imager
An Acoustic Charge Transport Imager, suitable for use as a High Definition Television (HDTV) camera element, is disclosed in which an array of amorphous hydrogenated silicon based avalanche...
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5157473 |
Avalanche photodiode having guard ring
For providing an avalanche photodiode having a good guard ring effect and a high speed response, a body of semiconductor materials is prepared, which includes a window layer of n-type InP...
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5144381 |
Semiconductor light detector utilizing an avalanche effect and having an improved guard ring structure
A semiconductor light detector includes a first semiconductor layer of a first conductivity type having a multi-layer structure including a light absorbing layer and an avalanche multiplicating...
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5132747 |
Avalanche photo diode
An avalanche photo diode in which the guard ring portion and the front of the pn junction of the light receiving portion are formed at the same depth from the surface of an InP layer, so that the...
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5115291 |
Electrostatic silicon accelerometer
A solid state accelerometer having an all silicon sensor for measuring accelerational and gravitational forces. The accelerometer measuring system also has associated electronics that include an...
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5101255 |
Amorphous photoelectric conversion device with avalanche
Disclosed is a photoelectric conversion device which comprises: a photoconductive layer made of amorphous semiconductor material which shows charge multiplication and which converts photo signals...
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5075750 |
Avalanche photodiode with adjacent layers
An avalanche photodiode (APD) includes an InP layer, a carrier multiplication layer, a light-absorbing layer, a light-reflecting layer, and an electrode. The carrier multiplication layer is...
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5057891 |
Planar heterojunction avalanche photodiode
A planar heterojunction avalanche photodiode (APD) having a first semiconductor layer of a first conductivity type for generating carriers by absorbing light, a second semiconductor layer of the...
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5021854 |
Silicon avalanche photodiode array
A wafer of neutron transmutation doped silicon having a pn junction between extended opposite surfaces is formed with bevelled edges. A plurality of reverse biased signal contacts is disposed on...
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4972242 |
Silicon avalanche photodiode with low multiplication noise
There is provided an n + -p-π-p + APD having a shallow and abrupt p-n junction located about 1 to 2 μm into the APD and having a p-type conductivity region containing acceptors in an...
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4935795 |
Avalanche photodiode with uniform avalanche multiplication
An APD of the invention has its avalanche multiplication layer, made of a material which can cause a resonant impact ionization therein, between its window layer having a big band gap energy and...
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4933731 |
Superlattice imaging device
A semiconductor imaging element for generating an electrical signal representing the intensity of incident light includes an avalanche photodiode, having sequential p-type, intrinsic, and n-type...
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4894526 |
Infrared-radiation detector device
A narrow-bandwidth, high-speed infrared radiation detector is based on tunneling of photo-excited electrons out of quantum wells. Infrared radiation incident on a superlattice of doped quantum...
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4857973 |
Silicon waveguide with monolithically integrated Schottky barrier photodetector
The invention comprises a Schottky barrier type infrared photodetector which is monolithically integrated on a silicon waveguide. A Schottky barrier contact is positioned directly on a silicon...
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4840916 |
Process for fabricating an avalanche photodiode
Disclosed is an avalanche photodiode wherein a light absorption layer and a multiplication layer are first grown on substrate. The multiplication layer is then mesa-etched and another semiconductor...
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4801990 |
HgCdTe avalanche photodiode
An HgCdTe avalanche photodiode for use at ambient temperature comprises an Hg 1 -x Cd x Te crystal substrate in which x is chosen between substantially 0.35 and substantially 0.5, a PN junction is...
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4745451 |
Photodetector array and a method of making same
A photodetector array having reflector means positioned over the low response regions between elements of the array. Light incident on the reflector means is reflected into a high response region...
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4722907 |
Method of forming an avalanche semiconductor photo-detector device and a device thus formed
An avalanche photodetector of the heterojunction type comprises an intermediate region between two end regions made from distinct semiconductor materials. The intermediate region comprises a...
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4684969 |
Heterojunction avalanche photodiode
An avalanche photodiode comprising an uppermost layer of one conductivity type, a second layer of the other conductivity type wherein the electrons or hole having the greater ionization rate are...
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4654678 |
Avalanche photodiode
The invention is an improved avalanche photodiode having reduced electrical noise arising from spurious surface generation of charge carriers. The avalanche photodiode includes active and...
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4616247 |
P-I-N and avalanche photodiodes
High-speed p-i-n and avalanche photodetectors (photodiodes) use a heavily doped buried layer to greatly limit minority carriers generated by incident light in the buried layers and the substrates...
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4587544 |
Avalanche photodetector
The invention relates to an avalanche photodetector having a charge-multiplication region which is spatially separated from the detector surfaces. This photodetector includes an absorptive region,...
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4586066 |
Avalanche photodetector
The invention relates to an avalanche photodetector having a charge-multiplication region which is spatially separated from the detector surfaces. This photodetector includes an absorptive region,...
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4586068 |
Solid state photomultiplier
A solid state photon detector includes a semiconducting blocking layer with sufficiently low donor and acceptor concentrations that substantially no charge transport can occur by an impurity...
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4586067 |
Photodetector with isolated avalanche region
The invention relates to an avalanche photodetector having a charge-multiplication region which is spatially separated from the detector surfaces. This photodetector includes an absorptive region,...
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4561007 |
Double mesa avalanche photodetector
The invention relates to a photodetector wherein the avalanche region is separated from the detector surfaces by a region in which the electric field under reverse bias will be less than in the...
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4505765 |
Manufacturing method for a planar photodiode with hetero-structure
In a method for manufacturing an avalanche photodiode with an epitaxial layer sequence on a carrier body, the carrier body is not the substrate for an epitaxy of the photodiode. One of the...
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4463368 |
Silicon avalanche photodiode with low k.sub.eff
An n-p-π-p + Si avalanche photodiode wherein the number of acceptors introduced into a Si body to form the p-type conductivity region has been reduced and this region extends a distance greater...
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4458260 |
Avalanche photodiode array
The invention is an APD array having a plurality of p-n junctions. The p-n junctions comprise a plurality of separate regions which extend a distance into a semiconductor body from a surface...
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4403397 |
Method of making avalanche photodiodes
A quadrant avalanche photodiode with large surface areas is made using photolithographic planar technology. The use of proton bombardment creates semi-insulating material around the quadrants....
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4366377 |
Dual sensitivity optical sensor
A dual sensitivity photodetector comprising a central region comprising a relatively high sensitivity reach through avalanche photo diode and a surrounding region comprising a relatively lower...
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4326211 |
N+PP-PP-P+ Avalanche photodiode
A radiation-sensitive semiconductor device includes a radiation-detecting avalanche diode which has a semiconductor layer structure made up of four layers of the same type conductivity. The fourth...
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4323909 |
Planar avalanche diode with a breakdown voltage between 4 and 8 volts
A diode comprising a N-type substrate in which is formed a P-type guard ring and a central diffusion of the same type but of reduced depth. Part of the central diffusion layer is interrupted by a...
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4321611 |
Avalanche photodetector for fiber-optical system and method of making same
A detector for luminous radiation transmitted by an optical fiber comprises an avalanche photodiode whose light-receiving surface, separated by a high-resistivity portion of a semiconductor body...
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4277793 |
Photodiode having enhanced long wavelength response
The light entry surface or back surface of an avalanche or p-i-n photodiode is contoured in a regular array of indentations which are hemispherical or almost hemispherical in shape. Light incident...
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4215358 |
Mesa type semiconductor device
A P type semiconductor layer is epitaxially grown on an N + type semiconductor substrate to form a PN junction between them so as to expose its circumference to the peripheral surface of the...
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