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7615830 |
Transistors with multilayered dielectric films
Transistors that include multilayered dielectric films on a channel region are provided. The multilayered dielectric comprises a lower dielectric film that may have a thickness that is at least 50%...
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7612403 |
Low power non-volatile memory and gate stack
Non-volatile memory devices and arrays are described that facilitate the use of band-gap engineered gate stacks with asymmetric tunnel barriers in reverse and normal mode floating node memory cells...
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7608899 |
Semiconductor device
Diffusion layers 2 - 5 are formed on a silicon substrate 1 , and gate dielectric films 6, 7 and gate lectrodes 8, 9 are formed on these diffusion layers 2 - 5 so as to be MOS transistors....
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7605436 |
Manufacture of semiconductor device having insulation film of high dielectric constant
A method contains the steps of (a) heating a silicon substrate in a reaction chamber; and (b) supplying film-forming gas containing source gas, nitridizing gas, and nitridation enhancing gas to a...
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7605422 |
Semiconductor device
A semiconductor device capable of realizing low-voltage drivability and large storage capacity (miniaturization) by achieving large threshold voltage shifts and long retention time while at the...
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7602030 |
Hafnium tantalum oxide dielectrics
A dielectric layer containing a hafnium tantalum oxide film and a method of fabricating such a dielectric layer produce a dielectric layer for use in a variety of electronic devices. Embodiments...
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7602003 |
Semiconductor device structure for reducing hot carrier effect of MOS transistor
A semiconductor device structure is described, including a MOS transistor, a silicon-rich silicon nitride layer having a refractive index of about 2.00-2.30, and a dielectric layer. The...
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7598576 |
Environmentally robust passivation structures for high-voltage silicon carbide semiconductor devices
An improved termination structure for high field semiconductor devices in silicon carbide is disclosed. The termination structure includes a silicon carbide-based device for high-field operation,...
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7595538 |
Semiconductor device
A P-type MOSFET 120 includes a semiconductor substrate (N-well 102 b ); a gate insulating film formed on the semiconductor substrate, composed of a high-dielectric-constant film 108 which...
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7592678 |
CMOS transistors with dual high-k gate dielectric and methods of manufacture thereof
CMOS devices with transistors having different gate dielectric materials and methods of manufacture thereof are disclosed. A CMOS device is formed on a workpiece having a first region and a second...
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7592674 |
Semiconductor device with silicide-containing gate electrode and method of fabricating the same
There is provided a semiconductor device which is capable of solving a problem of threshold control in CMOS transistor, accompanied with combination of a gate insulating film having a high...
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7586159 |
Semiconductor devices having different gate dielectrics and methods for manufacturing the same
A semiconductor device includes first and second transistor devices. The first device includes a first substrate region, a first gate electrode, and a first gate dielectric. The first gate...
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7585698 |
Thin film transistor having oxide semiconductor layer and manufacturing method thereof
A thin film transistor has a semiconductor thin film including zinc oxide, a protection film formed on entirely the upper surface of the semiconductor thin film, a gate insulating film formed on...
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7579661 |
Semiconductor device, electronic device and electronic apparatus
An semiconductor device ( 1 ) of the invention includes a semiconductor substrate provided with a channel region ( 21 ), a source region ( 22 ) and a drain region ( 23 ), a gate insulating film ( 3...
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7576656 |
Apparatuses and methods for high speed bonding
Apparatuses and methods for high speed bonding for an RFID device are provided. A first substrate includes an antenna and is coupled to a strap assembly by an adhesive material. The adhesive...
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7576398 |
Method of composite gate formation
Methods for forming a nitride barrier film layer in semiconductor devices such as gate structures, and barrier layers, semiconductor devices and gate electrodes are provided. The nitride layer is...
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7573110 |
Method of fabricating semiconductor devices
Method of fabricating TFTs (thin-film transistors) having a crystallized silicon film and a gate-insulating film. First, an amorphous silicon film is formed on an insulating substrate. A first...
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7566938 |
Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures
A method of fabricating hafnium oxide and/or zirconium oxide films is provided. The methods include providing a mixture of Hf and/or Zr alkoxide dissolved, emulsified or suspended in a liquid;...
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7566904 |
Thin film transistor having oxide semiconductor layer and manufacturing method thereof
A thin film transistor has a semiconductor thin film including zinc oxide, a protection film formed on entirely the upper surface of the semiconductor thin film, a gate insulating film formed on...
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7564114 |
Semiconductor devices and methods of manufacture thereof
Semiconductor devices and methods of manufacture thereof are disclosed. A preferred embodiment comprises a method of forming an insulating material layer. The method includes forming an interface...
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7564108 |
Nitrogen treatment to improve high-k gate dielectrics
A MOSFET having a nitrided gate dielectric and its manufacture are disclosed. The method comprises providing a substrate and depositing a non-high-k dielectric material on the substrate. The...
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7560361 |
Method of forming gate stack for semiconductor electronic device
A method of forming a gate stack for semiconductor electronic devices utilizing wafer bonding of at least one structure containing a high-k dielectric material is provided. The method of the...
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7554161 |
HfAlO3 films for gate dielectrics
A dielectric film containing HfAlO 3 and a method of fabricating such a dielectric film produce a reliable gate dielectric having an equivalent oxide thickness thinner than attainable using SiO 2...
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7550823 |
Nonvolatile memory cell, array thereof, fabrication methods thereof and device comprising the same
A nonvolatile memory cell is capable of reducing an excessive current leakage due to a rough surface of a polysilicon and of performing even at a low temperature process by forming the first oxide...
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7550802 |
Nonvolatile semiconductor memory device and manufacturing process of the same
A nonvolatile semiconductor memory device which can shorten data writing and erasing time, significantly improve the endurance characteristic and be activated with low power consumption includes an...
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7547951 |
Semiconductor devices having nitrogen-incorporated active region and methods of fabricating the same
A semiconductor device may include a semiconductor substrate having a first region and a second region. The nitrogen-incorporated active region may be formed within the first region. A first gate...
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7545000 |
Schottky barrier tunnel transistor and method of manufacturing the same
Provided are a Schottky barrier tunnel transistor and a method of manufacturing the same that are capable of minimizing leakage current caused by damage to a gate sidewall of the Schottky barrier...
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7541246 |
Method of manufacturing semiconductor device
A gate insulating film and a gate electrode are formed on a silicon substrate. The gate insulating film contains at least hafnium, oxygen, fluorine, and nitrogen. The fluorine concentration is high...
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7535067 |
Transistor in semiconductor devices and method of fabricating the same
Disclosed are a transistor in the semiconductor device and method of fabricating the same. A gate oxide film is formed using a nitrification oxide film in a low voltage device region and a gate...
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7535066 |
Gate structure and method
A MOSFET structure including silicate gate dielectrics with nitridation treatments of the gate dielectric prior to gate material deposition.
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7531868 |
Non-volatile semiconductor memory device
In a non-volatile semiconductor memory device typically of a MONOS type storing data by trapping charge in a multilayer film composed of a plurality of insulating films, which includes: source and...
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7521346 |
Method of forming HfSiN metal for n-FET applications
A compound metal comprising HfSiN which is a n-type metal having a workfunction of about 4.0 to about 4.5, preferably about 4.3, eV which is thermally stable on a gate stack comprising a high k...
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7518199 |
Insulating film containing an additive element and semiconductor device
An insulating film includes an oxide or an oxynitride of a constituent element having a positive valence. The oxide or the oxynitride contains an additive element having a larger valence than the...
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7514758 |
Dual-oxide transistors for the improvement of reliability and off-state leakage
The invention provides a transistor having low leakage currents and methods of fabricating the transistor on a semiconductor substrate. The transistor has a gate and a nonuniform gate oxide under...
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7511326 |
ALD of amorphous lanthanide doped TiOx films
The use of atomic layer deposition (ALD) to form an amorphous dielectric layer of titanium oxide (TiO x ) doped with lanthanide elements, such as samarium, europium, gadolinium, holmium, erbium and...
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7511321 |
Method for forming a dielectric layer and related devices
A dielectric layer may be formed by depositing the dielectric layer to an intermediate thickness and applying a nitridation process to the dielectric layer of intermediate thickness. The dielectric...
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7507629 |
Semiconductor devices having an interfacial dielectric layer and related methods
A semiconductor device includes a semiconductor substrate including silicon and an oxide layer on the substrate. The oxide layer includes silicon. An interfacial dielectric layer is disposed on the...
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7498643 |
Semiconductor device and method for manufacturing the same
It is possible to prevent the deterioration of device characteristic as much as possible. A semiconductor device includes: a semiconductor substrate; a gate insulating film provided above the...
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7488634 |
Method for fabricating flash memory device
A method for fabricating a flash memory device is disclosed that improves hot carrier injection efficiency by forming a gate after forming source and drain implants using a sacrificial insulating...
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7485919 |
Non-volatile memory
A non-volatile memory and a method of fabricating the same are described. First, a substrate is provided. Then, a plurality of stack structures is formed on the substrate. Each stack structure...
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7482623 |
Organic semiconductor film and organic semiconductor device
An organic semiconductor device includes a substrate, a gate electrode formed directly on the substrate , gate insulating film formed directly on the gate electrode, a source electrode and a drain...
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7476936 |
Substrate, liquid crystal display having the substrate, and method for producing substrate
The substrate ( 10 ) of the present invention includes: a first electrode ( 26 ) and a second electrode ( 30 ). The second electrode ( 30 ) is formed on an insulation film ( 52 ) covering at least...
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7473625 |
LDMOS device and method of fabrication
An LDMOS device and method of fabrication are provided. The LDMOS device has a substrate with a source region and a drain region formed in the substrate. An insulating layer is provided on a...
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7470931 |
Thin film transistor and flat panel display using the same
A thin film transistor, and a flat panel display with the same, including a gate electrode, source and drain electrodes, an organic semiconductor layer, and a gate insulating layer. A first...
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7468301 |
PMOS transistor with increased effective channel length in the peripheral region and a multi-height substrate
In manufacturing a PMOS transistor, a semiconductor substrate having an active region and a field region is formed with a hard mask layer, which covers a center portion of the active region on the...
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7462915 |
Method and apparatus for increase strain effect in a transistor channel
A semiconductor device having a transistor channel with an enhanced stress is provided. To achieve the enhanced stress transistor channel, a nitride film is preferentially formed on the device...
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7459757 |
Transistor structures
The invention encompasses a method of incorporating nitrogen into a silicon-oxide-containing layer. The silicon-oxide-containing layer is exposed to a nitrogen-containing plasma to introduce...
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7456468 |
Semiconductor device including high-k insulating layer and method of manufacturing the same
A semiconductor memory device a first dopant area and a second dopant area, the first dopant area and the second dopant area disposed in a semiconductor substrate, an insulating layer disposed in...
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7449756 |
Semiconductor device with a high-k gate dielectric and a metal gate electrode
A semiconductor device is described. That semiconductor device comprises a high-k gate dielectric layer that is formed on a substrate that applies strain to the high-k gate dielectric layer, and a...
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7446380 |
Stabilization of flatband voltages and threshold voltages in hafnium oxide based silicon transistors for CMOS
The present invention provides a metal stack structure that stabilizes the flatband voltage and threshold voltages of material stacks that include a Si-containing conductor and a Hf-based...
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