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8183616 |
Semiconductor device, RF-IC and manufacturing method of the same
Provided is a technology capable of reducing parasitic capacitance of a capacitor while reducing the space occupied by the capacitor. A stacked structure is obtained by forming, over a capacitor...
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8178404 |
Metal-insulator-metal (MIM) capacitor structure and methods of fabricating same
A Metal-Insulator-Metal (MIM) capacitor structure and method of fabricating the same in an integrated circuit improve capacitance density in a MIM capacitor structure by utilizing a sidewall spacer...
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8169015 |
Semiconductor device and manufacturing method therefor
This semiconductor device according to the present invention includes a plurality of cylindrical lower electrodes aligned densely in a memory array region; a plate-like support which is contacted...
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8143723 |
Highly integrated and reliable DRAM and its manufacture
A semiconductor device and its manufacture method wherein the semiconductor substrate has first and second insulating films, the first insulating film being an insulating film other than a silicon...
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8143698 |
Semiconductor device
A problem of an increased manufacturing cost is caused in conventional semiconductor devices. A semiconductor device 1 includes: a lower electrode 102 provided on a semiconductor substrate 101; an...
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8134200 |
Nonvolatile semiconductor memory including a gate insulating film and an inter-gate insulating film
A nonvolatile semiconductor memory of an aspect of the present invention includes a memory cell including, a charge storage layer on a gate insulating film, a multilayer insulator on the charge...
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8129251 |
Metal-insulator-metal-structured capacitor formed with polysilicon
A METAL-INSULATOR-METAL structured capacitor is formed with polysilicon instead of an oxide film as a sacrificial layer material that defines a storage electrode region. A MPS (Meta-stable Poly...
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8120084 |
Ferro-electric device and modulatable injection barrier
Described is a modulatable injection barrier and a semiconductor element comprising same. More particularly, the invention relates to a two-terminal, non-volatile programmable resistor. Such a...
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8106438 |
Stud capacitor device and fabrication method
The present teachings relate to a method of forming a container capacitor structure on a substrate. In one embodiment, the method comprises etching a recess in the substrate, depositing a first...
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8093643 |
Multi-resistive integrated circuit memory
A capacitor for use in integrated circuits comprises a layer of conductive material. The layer of conductive material including at least a first portion and a second portion, wherein the first...
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8084367 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Provided herein are etching, cleaning and drying methods using a supercritical fluid, and a chamber system for conducting the same. The etching method includes etching the material layer using a...
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8053824 |
Interdigitated mesh to provide distributed, high quality factor capacitive coupling
Apparatuses and methods for increasing well distributed, high quality-factor on-chip capacitance of integrated circuit devices are disclosed. In one aspect, an integrated circuit device structure...
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8049259 |
Semiconductor device including memory cell having charge accumulation layer
A semiconductor device includes MOS transistors, capacitor elements, a voltage generating circuit, a contact plug, and a memory cell. The MOS transistor and the capacitor element are formed on a...
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8039344 |
Methods of forming a capacitor structure and methods of manufacturing a semiconductor device using the same
In a method of forming a capacitor, a seed stopper and a sacrificial layer is formed on an insulating interlayer having a plug therethrough. An opening is formed through the sacrificial layer and...
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8036038 |
Semiconductor memory device
A semiconductor memory device includes a memory cell array including a plurality of blocks each including a memory cell unit, and a selection transistor which selects the memory cell unit, and a...
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8030697 |
Cell structure of semiconductor device having an active region with a concave portion
A cell structure of a semiconductor device includes an active region, having a concave portion, and an inactive region that defines the active region. A gate pattern in the active region is...
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8030635 |
Polysilicon plug bipolar transistor for phase change memory
Memory devices and methods for manufacturing are described herein. A memory device described herein includes a plurality of memory cells. Memory cells in the plurality of memory cells comprise...
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8013377 |
Method for producing an integrated circuit and arrangement comprising a substrate
Embodiments of the invention relate to an integrated circuit comprising a carrier, having a capacitor with a first electrode and a second electrode. The first electrode has a dielectric layer A...
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8013417 |
Low cost substrates and method of forming such substrates
In one embodiment, the invention provides engineered substrates having a support with surface pits, an intermediate layer of amorphous material arranged on the surface of the support so as to at...
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7994558 |
Method for forming barrier metal layer of bit line in semiconductor memory device
A semiconductor memory device includes a titanium layer and a titanium nitride layer formed on a substrate, a thin layer formed on the titanium nitride layer, and a metal layer formed on the thin...
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7989815 |
Display device
The protective circuit is formed using a non-linear element which includes a gate insulating film covering a gate electrode; a first wiring layer and a second wiring layer which are over the gate...
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7985670 |
Method of forming U-shaped floating gate with a poly meta-stable polysilicon layer
A method of realizing a flash floating poly gate using an MPS process can include forming a tunnel oxide layer on an active region of a semiconductor substrate; and then forming a first floating...
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7977726 |
DRAM cell with enhanced capacitor area and the method of manufacturing the same
A dynamic random access memory (DRAM) cell and the method of manufacturing the same are provided. The DRAM cell includes a cell transistor and a cell capacitor. The cell capacitor includes a first,...
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7968929 |
On-chip decoupling capacitor structures
The present disclosure provides on-chip decoupling capacitor structures having trench capacitors integrated with a passive capacitor formed in the back-end-of-line wiring to provide an improved...
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7952130 |
eDRAM-type semiconductor device including logic circuit section featuring large capacitance capacitor, and capacitor DRAM section featuring small capacitance capacitor
In an eDRAM-type semiconductor device, a dynamic random access memory (DRAM) section and a logic circuit section are formed on a semiconductor substrate, and an insulating layer is formed on the...
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7919803 |
Semiconductor memory device having a capacitor structure with a desired capacitance and manufacturing method therefor
A semiconductor memory device in which a plurality of capacitors each including a columnar lower electrode, a capacitor insulation film and an upper electrode are stacked with interlayer films...
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7919386 |
Methods of forming pluralities of capacitors
The invention includes methods of forming pluralities of capacitors. In one implementation, a method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes...
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7915659 |
Devices with cavity-defined gates and methods of making the same
A method that includes forming a semiconductor fin, forming a sacrificial material adjacent the semiconductor fin, covering the sacrificial material with a dielectric material, forming a cavity by...
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7888725 |
Electronic devices including electrode walls with insulating layers thereon
An electronic device may include a substrate and a plurality of conductive electrodes on the substrate. Each of the conductive electrodes may have a respective electrode wall extending away from...
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7888773 |
Semiconductor integrated circuit device having MIM capacitor and method of fabricating the same
In a semiconductor integrated circuit device and a method of formation thereof, a semiconductor device comprises: a semiconductor substrate; an insulator at a top portion of the substrate, defining...
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7884408 |
One-transistor random access memory technology compatible with metal gate process
One-transistor RAM technology compatible with a metal gate process fabricates a metal gate electrode formed of the same metal material as a top electrode of a MIM capacitor embedded isolation...
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7880213 |
Bottom electrode of metal-insulator-metal capacitor
A structure and a method of fabricating a bottom electrode of a metal-insulator-metal (MIM) capacitor are provided. First, a transition metal layer is formed on a substrate. Thereafter, a...
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7876610 |
Memory cell array with specific placement of field stoppers
A plurality of first transistors formed on a substrate share a gate electrode. Isolation regions isolate the plurality of first transistors from one another. In the region where the plurality of...
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7875920 |
Semiconductor device and method of manufacturing the same
Provided are a semiconductor device and a method of manufacturing the semiconductor device, for example, a semiconductor device using carbon nanotubes or nanowires as lower electrodes of a...
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7872293 |
Capacitance cell, semiconductor device, and capacitance cell arranging method
A capacitance cell 21 is wired while using adjacent wiring layers Ma and Mb as a pair of electrode layers T1 and T2 orthogonally to opposed lateral end faces out of lateral end faces X1, X2, Y1,...
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7868338 |
Liquid crystal display array board and method of fabricating the same
A liquid crystal display array board includes a plurality of gate wiring lines formed on a substrate and a plurality of data wiring lines crossing the plurality of gate wiring lines, a plurality of...
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7863666 |
Capacitor pair structure for increasing the match thereof
A capacitor pair structure for increasing the match thereof has two finger electrode structures interlacing with each other in parallel and a common electrode being between the two finger electrode...
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7859901 |
Semiconductor memory device
A semiconductor memory device includes a memory cell array including a plurality of blocks each including a memory cell unit, and a selection transistor which selects the memory cell unit, and a...
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7859081 |
Capacitor, method of increasing a capacitance area of same, and system containing same
A capacitor includes a substrate (110, 210), a first electrically insulating layer (120, 220) over the substrate, and a fin (130, 231) including a semiconducting material (135) over the first...
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7851843 |
DRAM cylindrical capacitor
A structure of a DRAM cylindrical capacitor includes a substrate, a dielectric layer, an amorphous silicon spacer, a polysilicon plug, a HSG layer, a conductive layer and a capacitor dielectric...
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7843036 |
Enhanced on-chip decoupling capacitors and method of making same
An apparatus including a capacitor formed between metallization layers on a circuit, the capacitor including a bottom electrode coupled to a metal layer and a top electrode coupled to a metal via...
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7821047 |
Semiconductor apparatus and method for manufacturing the same
According to an aspect of the present invention, there is provided a semiconductor apparatus including: a semiconductor substrate; an element isolation region formed in the semiconductor substrate...
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7821052 |
Method for forming a buried digit line with self aligning spacing layer and contact plugs during the formation of a semiconductor device, semiconductor devices, and systems including same
A method for use during fabrication of a semiconductor device comprises the formation of buried digit lines and contacts. During formation, a buried bit line layer may be used as a mask to etch one...
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7795662 |
Semiconductor memory device and method for fabricating same
A semiconductor memory device has a first interlayer insulating film formed on a semiconductor substrate and having a capacitor opening portion provided in the film, and a capacitance element...
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7781819 |
Semiconductor devices having a contact plug and fabrication methods thereof
Provided are a semiconductor device and a method of fabricating the same. The semiconductor device includes an insulating layer that is formed on a supporting layer and has a contact hole. A first...
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7763924 |
Dynamic random access memory structure having merged trench and stack capacitors
A dynamic random access memory structure includes a recessed-gate transistor disposed in the substrate; a trench capacitor structure disposed in the substrate and electrically connected to a first...
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7759247 |
Manufacturing method of semiconductor device with a barrier layer and a metal layer
This invention provides a semiconductor device and a manufacturing method thereof which can minimize deterioration of electric characteristics of the semiconductor device without increasing an...
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7745868 |
Semiconductor device and method of forming the same
A semiconductor device may include a MOS transistor having source and drain regions in a semiconductor substrate, a first inter-layer insulator having first contact holes that reach the source and...
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7732817 |
Pattern formed structure, method of forming pattern, device, electrooptical device and electronic equipment
A partition-wall structure having a concave portion corresponding to a pattern formed by a functional liquid, including: a first concave portion provided corresponding to a first pattern; a second...
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7719044 |
Platinum-containing integrated circuits and capacitor constructions
In one aspect, the invention includes a method of forming a roughened layer of platinum, comprising: a) providing a substrate within a reaction chamber; b) flowing an oxidizing gas into the...
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