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6649543 |
Methods of forming silicon nitride, methods of forming transistor devices, and transistor devices
The invention encompasses a method of forming silicon nitride on a silicon-oxide-comprising material. The silicon-oxide-comprising material is exposed to activated nitrogen species from a...
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6646296 |
Semiconductor integrated circuit and method for manufacturing the same
A semiconductor integrated circuit has a MOS transistor formed on an SOI substrate and a subsidiary transistor provided between a body node and a drain node of the MOS transistor and sharing a gate...
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6642576 |
Power semiconductor device having layered structure of power semiconductor elements and terminal members
An IGBT ( 121 ) and a diode ( 131 ) are joined onto an element arrangement portion ( 111 a ) of a first terminal member ( 111 ) and an element arrangement portion ( 112 a ) of a second terminal...
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6642076 |
Asymmetrical reset transistor with double-diffused source for CMOS image sensor
A new method to form CMOS image sensors in the manufacture of an integrated circuit device is achieved. The method comprises providing a semiconductor substrate. Sensor diodes are formed in the...
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6642577 |
Semiconductor device including power MOSFET and peripheral device and method for manufacturing the same
First and second trenches are formed on an n + type substrate at a power MOSFET formation region and a peripheral device formation region, respectively. An n − type epitaxial film, a p type...
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6639260 |
Semiconductor device having a vertical semiconductor element
A vertical type MOS field effect transistor has a super junction structure between a source electrode and an N + -type drain region. The super junction structure is constituted by a plurality of...
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6639273 |
Silicon carbide n channel MOS semiconductor device and method for manufacturing the same
A silicon carbide n channel MOS semiconductor device is provided which includes a silicon carbide substrate including a p base region, an n 30 source region and an n + drain region, a gate...
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6639279 |
Semiconductor transistor having interface layer between semiconductor and insulating layers
The present invention provides a semiconductor device capable of preventing deterioration in carrier mobility of a semiconductor layer, which is a quality of the interface between the semiconductor...
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6639278 |
Semiconductor device
At one of main surfaces of a silicon substrate serving as an N+type drain region is arranged an N type first high resistance drift layer. On the first high resistance drift layer is arranged an...
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6635946 |
Semiconductor device with trench isolation structure
A semiconductor device with trench isolation structure is disclosed. The invention uses a trench isolation structure that can be formed by using conventional methods to prevent problems such as...
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6633059 |
Semiconductor device having MOS transistor
A p type well region, a field insulation film, a gate insulation film, and a gate-use poly-Si layer are formed on the surface of a silicon substrate, after which a laminate of a silicon nitride...
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6630699 |
Transistor device having an isolation structure located under a source region, drain region and channel region and a method of manufacture thereof
The present invention provides a transistor device that does not experience the problems associated with the prior art transistor devices. The transistor device includes a dielectric region located...
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6630700 |
NMOS circuit in isolated wells that are connected by a bias stack having pluralirty of diode elements
An integrated NMOS circuit including an active stack having a plurality of isolated p-well active devices M 1 -M 3 , a bias stack having a plurality of diode-connected isolated p-well bias devices...
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6627488 |
Method for fabricating a semiconductor device using a damascene process
Disclosed herein is a method of fabricating a semiconductor device using a damascene process. The method comprises the steps of: forming a dummy gate electrode on a semiconductor substrate; forming...
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6627928 |
Method of manufacturing an integrated circuit, for integrating an electrically programmable, non-volatile memory and high-performance logic circuitry in the same semiconductor chip
A method for manufacturing an integrated circuit having a memory device and a logic circuit includes forming a plurality of first transistors in a first portion of a semiconductor substrate, a...
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6627973 |
Void-free interlayer dielectric (ILD0) for 0.18-micron flash memory semiconductor device
A method of eliminating voids in the interlayer dielectric material of 0.18-μm flash memory semiconductor devices and a semiconductor device formed by the method. The present invention provides a...
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6624489 |
Formation of silicided shallow junctions using implant through metal technology and laser annealing process
A method for producing MOS type transistors with deep source/drain junctions and thin, silicided contacts with desireable interfacial and electrical properties. The devices are produced by a method...
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6624455 |
Semiconductor device and method of manufacturing the same including drain pinned along channel width
In a semiconductor device, pining regions 105 are disposed along the junction portion of a drain region 102 and a channel forming region 106 locally in a channel width direction. With this...
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6617212 |
Semiconductor device and method for fabricating the same using damascene process
A semiconductor device and a method for fabricating the semiconductor device using a damascene process are disclosed. The method includes forming an Al 2 O 3 film over a dummy gate disposed over a...
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6617663 |
Methods of manufacturing semiconductor devices
A planarization method includes forming a dummy pattern in a film over a substrate. The dummy pattern includes a plurality of concave and convex portions. A chemical-mechanical polishing process is...
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6617624 |
Metal gate electrode stack with a passivating metal nitride layer
A low resistance gate stack for an integrated circuit transistor is provided including a metal layer having a first width and a metal nitride over surfaces of the metal layer being less than about...
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6617625 |
Solid state imager
A device region surrounded by a device isolation region has a rectangular shape with a width in a direction in which a gate electrode of a transfer gate extends. A signal accumulation region of a...
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6611021 |
Semiconductor device and the method of manufacturing the same
A semiconductor device includes an improved drain drift layer structure of alternating conductivity types, that is easy to manufacture, and that facilitates realizing a high current capacity and a...
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6611023 |
Field effect transistor with self alligned double gate and method of forming same
A fully depleted silicon on insulator (SOI) field effect transistor (FET) includes a gate positioned above a channel region and an aligned back gate positioned below the channel region and the...
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6608336 |
Lateral double diffused MOS transistor
To reduce ON-state resistance with desired withstand voltage secured, a semiconductor device provided with a gate electrode formed on a semiconductor substrate via a gate insulating film, an LP...
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6608352 |
Determination of thermal resistance for field effect transistor formed in SOI technology
In a system for determining thermal resistance of a field effect transistor, a p-n junction is formed with one of drain and source regions of the transistor for determining a current versus...
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6605498 |
Semiconductor transistor having a backfilled channel material
A stressed channel is formed in a PMOS transistor by etching a recess and subsequently backfilling the recess with an epitaxially formed alloy of silicon, germanium, and an n-type dopant. The alloy...
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6605846 |
Shallow junction formation
A method of forming junctions in a semiconductor substrate, where a gate dielectric layer is grown on the semiconductor substrate, a gate electrode layer is deposited on the gate dielectric layer,...
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6603160 |
MOS capacitor, liquid crystal display, integrated circuit and method of manufacture thereof
A MOS capacitor used in an active matrix liquid crystal display is manufactured by a process comprising the steps of forming capacitor electrodes with a dielectric layer between them in a...
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6603179 |
Semiconductor apparatus including CMOS circuits and method for fabricating the same
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6600205 |
Method for making low voltage transistors with increased breakdown voltage to substrate having three different MOS transistors
A high-breakdown voltage transistor ( 30; 30′ ) is disclosed. The transistor ( 30; 30′ ) is formed into a well arrangement in which a shallow, heavily doped, well ( 44 ) is disposed at least...
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6600182 |
High current field-effect transistor
A MOSFET that provides high current conduction at high frequency includes a deposited layer over a substrate of a first conductivity type, with source and drain regions adjoining a top surface of...
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6590241 |
MOS transistors with improved gate dielectrics
The specification describes silicon MOS devices with gate dielectrics having the composition Ta 1−x Al x O y , where x is 0.03-0.7 and y is 1.5-3, Ta 1−x Si x O y , where x is 0.05-0.15, and y...
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6589831 |
Transistor structure using epitaxial layers and manufacturing method thereof
First and second epitaxial layers are spaced apart from one another over the surface of a semiconductor substrate. A gate electrode is formed over the surface of the substrate, and extends within a...
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6590231 |
Transistor that uses carbon nanotube ring
A transistor of nanometer size is provided, which is capable of high-speed operation and operates at room temperatures by using carbon nanotubes for semiconductor devices. The transistor uses a...
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6586787 |
Single electron device
A single electron device. Fabricated from nanoparticle derivatives, particularly from Au and fullerene nanoparticle derivatives, the device reduces thermal fluctuation in the nanoparticle array and...
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6580108 |
Insulated gate bipolar transistor decreasing the gate resistance
An insulated gate transistor comprising a first semiconductor region, a second semiconductor region includes plural portions, a third semiconductor region, a fourth semiconductor region, a first...
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6576939 |
Semiconductor processing methods, methods of forming electronic components, and transistors
In one implementation, first and second layers are formed over a substrate. One of the layers has a higher oxidation rate than the other when exposed to an oxidizing atmosphere. The layers...
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6570235 |
Cells array of mask read only memory
A cells array of mask read only memory, at least includes numerous essentially parallel cells chains and numerous isolation dielectric layers which are located between any two adjacent cells...
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6563151 |
Field effect transistors having gate and sub-gate electrodes that utilize different work function materials and methods of forming same
Field effect transistors include a semiconductor substrate having a channel region of first conductivity type therein extending adjacent a surface thereof. Source and drain regions of second...
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6559489 |
Semiconductor device and method of manufacturing the same
A semiconductor device capable of a high-speed operation is provided. The semiconductor device is provided with low concentration impurity regions, a gate electrode formed with gate oxide film...
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6552388 |
Hafnium nitride gate dielectric
A field effect semiconductor device comprising a high permittivity hafnium (or hafnium-zirconium) nitride gate dielectric and a method of forming the same are disclosed herein. The device comprises...
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6552377 |
Mos transistor with dual metal gate structure
A method for making a ULSI MOSFET includes depositing a high-k gate insulator on a silicon substrate and then depositing a field oxide layer over the gate insulator. The field oxide layer is masked...
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6548842 |
Field-effect transistor for alleviating short-channel effects
An IGFET ( 40 or 42 ) has a channel zone ( 64 or 84 ) situated in body material ( 50 ). Short-channel threshold voltage roll-off and punchthrough are alleviated by arranging for the net dopant...
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6548864 |
High density MOS technology power device
A MOS technology power device comprises a semiconductor material layer of a first conductivity type, a plurality of elementary functional units, a first insulating material layer placed above the...
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6548847 |
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM
Herein disclosed is a semiconductor integrated circuit device fabricating process for forming MISFETs over the principal surface in those active regions of a substrate, which are surrounded by...
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6548872 |
Integrated circuitry comprising multiple transistors with different channel lengths
A method of defining at least two different field effect transistor channel lengths includes forming a channel defining layer over a substrate, the semiconductor substrate having a mean global...
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6548875 |
Sub-tenth micron misfet with source and drain layers formed over source and drains, sloping away from the gate
A semiconductor device having a low channel resistance without degrading transistor characteristics even for the 0.1 μm generation or later, and also: a manufacturing method of the device. The...
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6537921 |
Vertical metal oxide silicon field effect semiconductor diodes
The present invention includes methods and apparatus as described in the claims. Briefly, semiconductor diodes having a low forward conduction voltage drop, a low reverse leakage current, a high...
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6537843 |
Thin film transistor and method of manufacturing the same
A thin film transistor is disclosed, including an insulating substrate, a semiconductor layer formed on the insulating substrate, the semiconductor layer having an active region and an impurity...
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