Matches 1 - 50 out of 113 1 2 3 >
Match Document Document Title
7611122 Closure device for the vacuum-tight closing of an opening in a wall  
A closure device for closing an opening in a wall in a vacuum-tight manner comprises a closure plate, a carrying unit which carries the closure plate and which has at least one longitudinal...
7469715 Chamber isolation valve RF grounding  
A method and apparatus for grounding a chamber isolation valve are provided. Generally, the method makes use of an electrically conductive elastomeric member or members to effectively ground a...
7445019 Gate valve having service position  
A gate valve including a valve housing defining a valve chamber having an opening therethrough along a flow path, a gate support supported within the valve housing between a closed position in the...
7441747 Vacuum gate  
The improved vacuum gate of the present invention is capable of airtight isolation or interconnecting between two vacuum chambers. The improved vacuum gate is based on mechanical mechanism which...
7424855 Slide arrangement  
A slide arrangement for blocking or closing off a channel disposed between a coal pulverizer and coal dust burners, and conveying a gas having a high proportion of coal dust. The slide arrangement...
7422653 Single-sided inflatable vertical slit valve  
A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber...
7413162 Vacuum valve  
A vacuum valve comprises a valve housing which has an inlet opening and an outlet opening, a valve disk which is located in the interior space of the valve housing and which is arranged at a...
7396001 Valve for essentially gastight closing a flow path  
The invention relates to a valve, in particular a shuffle or sliding valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing ( 1;1 a) having a first wall ( 2...
7341238 Device for locking out a pressurized storage container and method for the same  
A device and method for locking out an explosion suppressor that includes a discharge valve with a load end and a discharge end. The load end and the discharge end define a discharge path...
7322561 Vacuum processing apparatus  
The invention provides a highly reliable plasma processing apparatus having stable sealing performance. The vacuum processing apparatus comprises a vacuum vessel 509 having its inside...
7296783 Vacuum processing apparatus  
An inexpensive and reliable vacuum processing apparatus is provided. The vacuum processing apparatus comprises a sealed gate located between two vacuum vessels for allowing them to communicate with...
7198251 Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same  
An opening/closing mechanism for a vacuum processing apparatus comprises a link mechanism comprising a supporting member having first and second valve elements for closing first and second opening...
7134642 Vacuum gate valve  
The invention provides a vacuum gate valve for closing off an opening. The vacuum gate valve can have a valve plate that can be turned so that the alignment of the valve plate will adapt to a valve...
7073776 Sluicing valve device  
A sluicing valve device in which a valve element is arranged in case members attachable to a pipe, and the valve element comprises a valve element core metal fitting, an elastic seal member...
7036794 Method for control of a vacuum valve arranged between two vacuum chambers  
A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the...
7007919 Slit valve method and apparatus  
An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve...
6994317 Regulating vacuum valve  
A regulating vacuum valve comprises a valve housing with a through-channel, first and second valve plates which lie in adjacent and parallel planes and are mounted so as to be adjustable in their...
6978980 Slide valve closure for the casting of a metal melt and a refractory plate unit belonging to it  
In a slide valve closure for the casting of a metal melt a slider plate and a stationary closure part are braced against each other by means of spring units or by other means. There is provided a...
6902145 Regulating slide valve  
Regulating slide valve comprising a valve body having a valve opening, and a valve plate which has two side surfaces and which is displaceable along a displacement path between an initial position...
6893001 Gate valve apparatus  
A gate valve apparatus comprising an elastic seal member inserted into a pipe, a pressure member for elastically deforming the elastic seal member under pressure, a drive shaft for moving the...
6863256 Seal ring for pendulum valve assembly  
A valve assembly including a housing having a flow channel, a slide plate movable between a closed position and an opened position, and a seal ring surrounding the flow channel and engaging the...
6764265 Erosion resistant slit valve  
Embodiments of the present invention provide structures for reducing erosion of a slit valve utilized in the fabrication of semiconductor devices. Specifically, non-metallic slit valve components...
RE38318 Bellows driver slot valve  
A slot valve assembly ( 10 ) including a housing ( 11 ) having a central opening ( 19 ), a valve plate ( 32 ), a strongback ( 20 ) for carrying the valve plate, a pair of actuators ( 34, 36 ) for...
6594017 Measuring sensor positioning  
The invention relates to a device and a method for moving a measuring sensor ( 2 ) into and out of a pressurized or flow-through conduit ( 1 ) or a pressurized or flow-through vessel. The device...
6488262 Gate valve for semiconductor processing system  
A gate valve ( 20 ) for a semiconductor processing system includes a base frame ( 28 ) configured movable along a guide ( 26 ) to move toward and away from a valve seat ( 22 ), which surrounds an...
6471181 Suspension of a valve plate of a vacuum valve  
A suspension of a valve plate of a vacuum valve at a valve rod has a bearing block of rubber-elastic material with first and second side surfaces, one of which side surfaces is fastened to the...
6454241 Gate valve and cylinder apparatus  
A gate valve in which the structure is simplified and inexpensive, movement of a valve body is smooth and high in speed, a force of inclination moving the valve body is strong, and a sealing...
6427973 Vacuum system with a vacuum plate valve  
A vacuum arrangement with a vacuum disc valve. A support plate is movably guided along a wall with an opening that is closed or opened by a valve. A seal plate is provided on the support plate...
6318402 Pneumatic tank truck closure apparatus  
A closure is movably mounted on the tank top of a pneumatic tank truck. The closure is movable between open and closed positions relative to an opening in the tank top by a pneumatically operated...
6311949 Apparatus for operating water gate  
An apparatus for operating a water gate has a door of the water gate provided in a water channel, and has a mechanism for vertically operating the door. A pressure receiving plate is fixed to the...
6299133 Gate valve  
A gate valve comprises a valve rod for making displacement in accordance with a driving action of a cylinder mechanism; a guide shaft for guiding the valve rod; a valve disk for opening/closing a...
6287051 Fixable seal sluice gate  
A fixable-seal sluice gate has a valve vise (18, 19, 25, 26, 31, 32) that forces a sluice-gate valve uniformly and tightly in sealing-surface contact with a domed seal ring (4) that is fixable...
6283446 Gate valve system  
The present invention provides an improved gate valve system for cutting off a fluid flowing through a pipe. The gate valve system includes a gate valve and at least one member. The gate valve...
6263542 Tolerance resistant and vacuum compliant door hinge with open-assist feature  
A hinge assembly and methods for mounting a hatch relative to a port defined in a cover of a vacuum chamber to close and open the port. A torsion rod mounted between the port and the hatch is in...
6248220 Radio frequency sputtering apparatus and film formation method using same  
A radio frequency sputtering apparatus and a film forming method using the same are disclosed. The method includes the steps of floating a shield adjacent to the substrate, applying an RF power to...
6116572 Valve  
6095741 Dual sided slot valve and method for implementing the same  
A dual sided slot valve is in a vacuum body between adjacent process and transport modules. Separate valves are provided for each of two valve body slots, one body slot being separately closed or...
6092786 Gate valve  
Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism...
6056267 Isolation valve with extended seal life  
A gate valve assembly having a primary and secondary seating surface for preventing process fluids from contacting the seals of the valve is provided. Additionally, a purge gas inlet can be...
6056266 Device for closing an opening of a tank or a tubular conduit  
A device for closing an opening of a tank or a tubular conduit and including a plate for closing the opening and movable substantially perpendicular to a plane of the opening toward the opening to...
6035805 Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment  
A method and apparatus for vacuum depositing a coating onto a substrate are provided. The method includes the steps of: introducing an evaporant into a magnetically defined deposition region of a...
5769952 Reduced pressure and normal pressure treatment apparatus  
A reduced pressure treatment unit comprising a plurality of treatment chambers conducting reduced pressure process treatment of a treatment object (wafer) and a normal pressure treatment unit...
5755426 Valve mechanism for a vacuum valve  
A valve mechanism for a vacuum sliding valve. The mechanism includes a valve housing defining a vacuum chamber having a throughgoing opening therein and being free from setting elements which move...
5711509 Isolation gate and frame assembly  
An isolation gate and frame assembly has a frame having a frame sealing surface extending around the frame and a fluid impervious gate having a gate sealing surface complementary to the frame...
5667197 Vacuum chamber gate valve and method for making same  
Disclosed is a method for implementing a gate drive valve assembly used to isolate interfacing chambers. The method includes: (a) providing a drive assembly having at least one surface for...
5667196 Slide valve to close large fluid conduits, in particular double-disk slide valve  
Slide valve to close large fluid conduits, in particular double-disk slide valve, with a slide gate (14) disposed within a valve housing (11) so that it can move transverse to the fluid conduit,...
5577707 Slide valve  
A slide valve including a housing having a flow channel, a slide plate for controlling flow through the channel, and a seal ring surrounding the flow channel and engaging the slide plate in its...
5566922 Gate valve device  
A gate valve device which includes a partition wall having an opening, a valve member movable along the partition wall to open or close the opening, a driving system for moving the valve member,...
5415375 Closing system for controlling a flow with precision  
The closing system has a closure member, and a carriage for translational displacement of the closing member along rails. A jack is mounted on the carriage for non-resilient axial displacements of...
5295510 Diverter valve  
An improved slide plate diverter valve having a manifold block and a backing plate with a linearly reciprocable slide plate sandwiched and clamped therebetween is provided with side rails between...
Matches 1 - 50 out of 113 1 2 3 >