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7383854 |
Solenoid valve for fluid media
A solenoid valve, particularly for hot water, has a diaphragm that is disposed with no folds that accumulate air or vapor bubbles. The diaphragm extends in a smooth curve between its outer edge and...
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7332040 |
Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material
A vaporizer can efficiently vaporize a liquid material under a depressurized atmosphere. The liquid material is temporarily stored in a liquid storing chamber, and is supplied to a vaporizing...
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7293581 |
Latching micro-regulator
A latching microregulator for regulating liquid flow on micro-scale levels comprises a substrate having an inlet port and an outlet port, a valve element defining a valve chamber for opening and...
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7228873 |
Valve design and configuration for fast delivery system
Embodiments of the invention relate to a substrate processing chamber. In one embodiment a substrate processing chamber includes a chamber body containing a substrate support, a lid assembly...
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7226035 |
Valve device
A valve member is located in a passage through which fluid passes. The valve member selectively opens and closes the passage. The valve member is supported by a support member formed a magnetic...
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7222636 |
Electronically actuated valve
The present invention relates to a method and apparatus for delivery of reactants to a substrate processing chamber. An electronically controlled valve assembly is provided for rapid delivery of...
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7201363 |
Valve
A valve body ( 12 ) has an inlet opening ( 22 ) and an outlet opening ( 24 ) interconnected by a fluid passageway ( 28, 30 ) having a flow aperture ( 34 ). The valve comprises a diaphragm ( 14 )...
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7131632 |
Microfluidic two-way isolation valve
A solenoid-operated valve design and method particularly for suited for micro-fluidic applications are disclosed. The solenoid valve contains various structure and features that provide for small...
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7080817 |
Electromagnetic valve
A valve of the pilot type including a housing with a circular cylinder end for mounting in a valve base. The housing has an inlet port, an outlet port, an internal cavity, and a flexible membrane...
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7070162 |
Valve actuating apparatus
A valve actuating apparatus for control of fluid flow that has a housing having a valve body with a first port and a second port that extend through the housing. In one embodiment the valve...
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7051991 |
Control valve
An actuator operated by a solenoid and a force amplifying means utilizing hydraulic pressure are used in combination with a diaphragm, to thereby provide a diaphragm valve made of Teflon™, and...
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7044407 |
Fluid dosing device with a throttle point
A fluid dosing device for a pressurized liquid is disclosed, which comprises a chamber ( 35 ) which is supplied with pressurized liquid by means of a liquid supply line ( 17, 19 ); a valve needle (...
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6986501 |
Control element, especially a pneumatic valve
A control element for media, for instance, a pneumatic valve or a hydraulic valve, comprising a valve body in which one or several channels are arranged, at least one moving element arranged in a...
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6957666 |
Spring valve implemented flow control valves
Improved low flow impedance flow control valves are disclosed in the present invention wherein spring valve means ( 12 ) captured between a valve spool ( 28 ) and a shoulder ( 30 ) are utilized for...
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6948697 |
Apparatus and method for controlling fluid flow
An actuator base, bobbin, and pole piece form a pocket for an armature that a flexible membrane encloses to form an armature chamber filled with an incompressible fluid. The membrane protects the...
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6941963 |
High-speed diaphragm valve for atomic layer deposition
A diaphragm valve includes a pressure vent communicating with an enclosed space behind the diaphragm for reducing resistance to transitioning of the diaphragm between the open and closed positions....
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6932316 |
Ferromagnetic/fluid valve actuator
A solenoid plunger ( 36 ) is disposed for reciprocation in a plunger pocket that is formed by the stationary parts of a solenoid-type actuator ( 10 ). A flexible diaphragm ( 22 ) closes the plunger...
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6929240 |
Solenoid valve
A valve 6 fixed on a tip 5 a of a rod 5 as a moving part, abuts a sealing part 9 of a fluid passage 8 when the rod 5 moved to the left, and interrupts a flow of fluid, is made, for...
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6916006 |
Electromagnetic valve device
An electromagnetic valve device for reducing noise resulting from an internal collision of a movable core against a guide member has a fixed core, a cylindrical movable core, a valve member, for...
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6910674 |
Valve for use in a breathing apparatus
A valve in a breathing device has a housing with an inlet and an outlet, a valve housing having an inlet and an outlet, a valve seat arranged in the housing, a valve body arranged in the housing to...
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6874755 |
Fixed shaft moisture intrusion shield for a valve pintle
A solenoid-actuated pintle valve assembly having a pintle shaft extending from a metering base sub-assembly into a solenoid actuator sub-assembly, the pintle shaft being equipped with a...
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6866242 |
Proportional valve
The object of the present invention is to provide a proportional valve which does not open or close by itself and is free of internal leakage. A valve element is formed integrally with a piston...
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6860293 |
Variable pressure solenoid control valve
A variable pressure solenoid (VPS) control valve. The VPS control valve includes an hydraulic section and a magnetic section. The hydraulic section includes a movable valve that receives a...
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6824116 |
Valve of infrared operated automatic water supplier
A valve structure of an infrared operated automatic water supplier includes a three-branch tube, a solenoid valve, and a pressure-balance switch unit wherein the three-branch tube has a projected...
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6820651 |
Electrically actuated valve
An electrically actuated valve includes firstly a fixed core ( 1 ) accommodating, at least, one coil ( 2 ) in, at least, one housing and forming therewith, at least, one electromagnet of the...
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6796322 |
Hydraulic pressure regulating valve
A hydraulic pressure regulating valve for regulating a pressure in an automatic transmission of a motor vehicle, comprising a magnetic part which includes an electrically controllable coil, a coil...
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6786468 |
Unibody valve and techniques for making same for a purge control device
A valve and method of constructing same for a purge control device are provided. The valve includes an integral body. The valve further includes a resilient member inserted into the integral body....
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6772919 |
Device for dispensing fluid foodstuffs, particularly for automatic or semiautomatic hot or cold beverage vending machines
A device for dispensing fluid foodstuffs, particularly for automatic or semiautomatic hot or cold beverage vending machines, comprising a hollow body inside which there is a chamber connected to an...
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6752371 |
Valve actuator having small isolated plunger
A solenoid plunger ( 36 ) is disposed for reciprocation in a plunger pocket that is formed by the stationary parts of a solenoid-type actuator ( 10 ). A flexible diaphragm ( 22 ) closes the plunger...
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6736370 |
Diaphragm valve with dynamic metal seat and coned disk springs
The disclosure pertains to a compact integrated fluid control valve useful in controlling process fluids handled as part of a semiconductor processing operation. In the wetted section of the valve,...
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6726173 |
Micro-valve
The microvalve comprises a drive housing ( 3 ) in which a magnetic drive is arranged that includes a solenoid ( 1 ) and an armature ( 6 ) adapted to be actuated by the solenoid. A flanged housing (...
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6722629 |
Flow control valve
A flow control valve capable of increasing a delivery flow rate gradually with a simple structure, comprising a flowout port ( 26 ) to deliver a pressure fluid to the outside, a valve disc ( 3 )...
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6688577 |
Self draining valve
A self-draining, valve for fluid flow control. Upon removal of fluid supply pressure from the valve, the valve automatically reverts to a partially open state allowing fluid in the valve to drain....
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6685165 |
Valve assembly having an adjusting diaphragm means
A valve assembly having a cap defining a first and second fluid flow passage for allowing the flow of fluid is attached to a seat member which is coupled to an actuator. A plunger having an...
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6672562 |
Electromagnetic fluid control valve
A retainer is coupled around a shaft of an electromagnetic fluid control valve. A first projection is provided at one axial end of the retainer. A second projection is provided at the other axial...
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6631883 |
Metering valve and fuel supply system equipped therewith
The invention relates to a metering valve for a fluid, provided with a housing with a metering opening and a movable closing member. The closing member is biased to one of its positions by biasing...
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6609698 |
Ferromagnetic/fluid valve actuator
An actuator base ( 16 ), bobbin ( 14 ), and pole piece ( 24 ) form a pocket for an armature ( 30 ) that a flexible membrane ( 40 ) encloses to form an armature chamber filled with an incompressible...
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6581904 |
Solenoid valve
A solenoid valve includes an electromagnetic drive unit for generating a magnetomotive force when being fed with electric power. There are a controlled-fluid passage and an accommodation chamber...
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6571766 |
Idle speed controller for internal combustion engine
The present invention provides an idle speed controller comprising a guide plate having a spigot portion fixedly attached to a cylindrical projected portion of a solenoid coil assembly for guiding...
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6543746 |
Shaft leakage containment system for a gas control valve
A system for containing leakage along a pintle shaft in a pintle-type gas control valve, such as an exhaust gas recirculation valve for an internal combustion engine or a reformate diverter valve...
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6537505 |
Reagent dispensing valve
A reagent dispensing valve particularly adapted for dispensing precise microfluidic quantities of fluids. The valve includes a valve portion and a solenoid actuator that are in fluid isolation from...
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6526951 |
Electromagnetic valve for ORVR system
A valve member includes a first communication passage for allowing a first passage to communicate with a first pressure chamber. When a pressure-receiving member contacts the valve member, a...
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6488050 |
Pneumatic valve assembly
An electrically-operated plunger-type valve assembly includes a housing, an electromagnetic actuator and a plunger assembly, which is positioned in the housing and supported for movement in the...
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6481689 |
Balanced fluid control valve
A dynamically balanced fluid control valve controls a fluid between two connection ports. A tube couples two diaphragms at opposing ends of the tube. A valve is coupled to the tube between the...
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6435472 |
Proportional variable force solenoid control valve with armature damping
Proportional variable force solenoid valve for controlling the pressure of a fluid in a fluid control system comprises a solenoid housing having therein a solenoid coil, an armature movable in...
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6415995 |
Microdispensing system for the open-jet dispensing of liquids
A microdispensing system is useful for the open-jet dispensing of liquids. A valve having a valve chamber is bounded by an impermeable elastic membrane and is filled with the liquid for dispensing....
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6394415 |
Fluid control valve and fluid supply/exhaust system
A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm 2 , has a response time in the order of several milliseconds can be made small in size, and a fluid...
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6352144 |
Flow-control valve and damper
A flow control valve assembly for an electro-rheological (ER) fluid has an inlet port, an outlet port and a flow path for ER fluid extending between the inlet and outlet ports. A flow control valve...
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6328279 |
Miniature electrically operated diaphragm valve
The present invention provides a miniature electrically operated valve that can stand off significant pressures, that can be inexpensively produced, and that can be made to operate without...
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6318408 |
Directional control valve
A three-way valve comprises a valve body which is formed to have a rectangular parallelepiped-shaped configuration and which has a plurality of ports provided in juxtaposition on a first side...
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