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7391043 |
Self calibrating media edge sensor
Various edge detection arrangements are disclosed, including an edge detection method and arrangement that utilizes outputs of commonly illuminated reference and edge sensors as the inputs for a...
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7369703 |
Method and apparatus for circuit pattern inspection
A system for measuring a pattern on a sample, including: a data processing system that processes a set of two-dimensional distribution data of intensities from the sample, to calculate: a set of...
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7345293 |
Device and method for inspecting piston ring
A piston-ring inspecting device includes a sensor unit ( 27 ) including a light emitting system ( 27 a ) that emits slit-like detection light toward an outer peripheral surface (Ps) of a piston (P)...
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7340087 |
Edge inspection
A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a...
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7280200 |
Detection of a wafer edge using collimated light
A system and method of inspecting a semiconductor wafer that may be employed to detect and to characterize defects occurring on an edge of the wafer. The wafer inspection system includes an optical...
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7279695 |
Edge position detecting apparatus and method, and program
There is provided an edge position detecting apparatus that includes a reflective optical sensor that outputs light to a supporting surface of a supporting member, and receives a reflected light; a...
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7276719 |
Device for a goniometric examination of the optical properties of surfaces
A device for examining the optical properties of surfaces having at least one first radiation device emitting radiation at least at one first predetermined spatial angle to a surface to be...
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7233014 |
Medium detection apparatus and medium detection method
A medium detection apparatus is provided with: a light emitting section adapted to emit light; a light receiving section adapted to detect reflected light and output an output value in accordance...
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7202491 |
Method for sensing wafers located inside a closed wafer cassette
Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the...
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7173269 |
Apparatus for processing photosensitive material and area measurement method
A plurality of microswitches are arranged in a photosensitive material receiving section in a row, in a direction perpendicular to the travel direction of a printing plate. The printing plate is...
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7157726 |
Method and apparatus for measuring shape of sheet
The method of making an online measurement of a shape of a conveyed sheet, the method comprises the steps of: imaging continuously at least two edge portions of entire the conveyed sheet in a...
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7154113 |
Techniques for wafer prealignment and sensing edge position
A prealignment sensor comprising a frame fixed to a base and having a U-shape when viewed from its side. A light source is attached to a lower part of the flame. A convex lens is attached to a...
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7151855 |
Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program
A pattern measurement method includes acquiring graphic data of a plurality of patterns including image data; processing the graphic data to detect a coordinate of an edge point of the pattern;...
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7149050 |
Diffractive position sensors and control systems
According to one aspect, systems and methods are provided for detecting the relative position of a transducer head with respect to a storage medium utilizing optically diffractive media. In one...
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7145163 |
Apparatus for detecting light-transmissive sheet-like body
Illuminating light emitted from a light source is led via a condenser lens, an optical fiber, a half-silvered mirror, and a condenser lens to a reflector. The reflector reflects the illuminating...
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7129508 |
Compact VCSEL sensor with multiple sensing capabilities
The invention includes also a sensor tat includes at least one laser, at least one detector, and at least one lens system that includes a sensor surface having three individual surfaces that are...
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7126146 |
Device and method for detecting the edge of a recording material
A device and a method for detecting the edge of a recording material, in particular, a printing plate, in an exposer for recording printing originals includes an exposer having an exposure drum...
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7120286 |
Method and apparatus for three dimensional edge tracing with Z height adjustment
A method and apparatus for tracing an edge contour of an object in three dimensional space is provided. The method and apparatus is utilized in a computer vision system that is designed to obtain...
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7115889 |
Device and method for sensing the position of an edge of a product
According to one exemplary embodiment of the present invention, a method for sensing the position of an edge of a stock being feed to a printing press is provided. The method includes the steps of...
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7109511 |
Techniques for wafer prealignment and sensing edge positions
A wafer prealignment apparatus comprising a CCD linear sensor and a wafer prealignment method which facilitate the sensing of wafer presence, improvement in precision of position sensing, and edge...
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7095884 |
Method and apparatus for circuit pattern inspection
The present invention provides a circuit pattern edge inspection method of finding out a failure in a fabricating process and image distortion in an observing apparatus by analyzing, by a...
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7078719 |
Optical apparatus for measuring objects having a rectilinear profile
Apparatus for measuring an object ( 4 ) with at least one rectilinear edge or profile ( 4 a, 4 b ) parallel to a given direction (y), comprising: a laser source ( 1 ) which emits radiation ( 2, 2...
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7057196 |
Device and method for detecting the edge of a recording material
A device and a method for detecting the edge of a recording material, in particular, a printing plate, in an exposer for recording printing originals includes an exposer having an exposure drum...
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7019848 |
Three-dimensional measuring instrument, filter striped plate, and illuminating means
For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional measuring instrument is provided which is capable of shortening the measurement...
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6985626 |
Pattern evaluation method, pattern evaluation system and computer-readable recorded medium
A pattern evaluation method includes processing image data of at least one pattern serving as an object to be evaluated and detecting coordinates of edge points of the pattern in an image of the...
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6969836 |
Space carving for measurement of high-curvature areas on a mechanical part
A method of determining the leading edge (E) of a turbine blade or airfoil (P). The object is mounted in a desired position and backlit using a light source (S). The object and its leading edge are...
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6956197 |
Method and an arrangement for detecting and discharging misplaced boards at a separation elevator
A method and a device for detection and removal of one or more misplaced boards ( 6 ) on an elevator for the separation of boards ( 6 ). The elevator comprises a frame ( 1 ) that supports carrier...
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6943363 |
Apparatus for detecting light-transmissive sheet-like body
Illuminating light emitted from a light source is led via a condenser lens, an optical fiber, a half-silvered mirror, and a condenser lens to a reflector. The reflector reflects the illuminating...
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6927864 |
Method and system for determining dimensions of optically recognizable features
A method and system for determining dimensions of optically recognizable features provides a low-cost and efficient high speed/high resolution measurement system for determining surface feature...
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6925203 |
Position detection apparatus and exposure apparatus
A position detection apparatus for detecting a position of a mark on an object includes a camera which captures an image of the mark, an extraction section which extracts a plurality of edge...
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6924900 |
Method and microscope for detection of a specimen
The present invention concerns a method and a microscope for detection of a specimen, having a light source that illuminates the specimen and an imaging system that images the specimen onto a...
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6920249 |
Method and measuring instrument for determining the position of an edge of a pattern element on a substrate
A method and a measuring instrument for determining the position of an edge to be measured on a pattern on a substrate are described. A complete, nonlinear model intensity profile, which identifies...
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6917050 |
Code learning method for tire monitoring device
A code learning method for a tire monitoring device includes providing a plurality of sensor modules installed in the tires of the vehicle for sensing a condition and acceleration of the tires,...
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6909791 |
Method of measuring a line edge roughness of micro objects in scanning microscopes
A line edge roughness of micro objects is determined in a microscope by corresponding scanning and determination of deviations of points of the edge from a straight line.
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6903359 |
Method and apparatus for edge detection
An embodiment of the present invention comprises a method and apparatus of detecting edges. Light directed from any angle at a smooth surface will not cast a shadow regardless of the printing on...
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6900451 |
Mapping sensor system for detecting positions of flat objects
The mapping sensor system of the invention is intended for use with a mechanical arm of an industrial robot which loads and unloads flat circular objects, such as semiconductor wafers, into and...
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6891181 |
Opto-electronic transmissive edge location sensor
Optical sensor methods and systems for detecting the edge of an object are disclosed. An optical sensor having dual equal area active regions can be provided, and a uniform light source located...
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6885463 |
Sensor device that provides part quality and profile information
A sensor device includes a source of radiation that irradiates a plurality of sensing elements. A test object is passed through the spacing between the source of radiation and the sensing elements...
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6876459 |
Method and apparatus for optical measurement of the leading edge position of an airfoil
Apparatus ( 10 ) for determining the leading edge (E) of an airfoil (A) includes a first light source (S 1 ) illuminating a portion of the airfoil including its leading edge and a first camera (M 1...
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6870177 |
Shadow-creating depression for establishing microchip location during visual inspection
An apparatus for accurately locating a micro-electronic chip in a chip-holding cavity for visual testing, the chip having at least a front wall and a pair of opposed, spaced-apart side walls,...
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6829047 |
Defect detection system
A defect detection system to check any defect in the pattern to be checked by comparing a pattern to be checked with a reference pattern includes an edge detection means for detecting a pattern...
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6825486 |
System for mapping wafers using predictive dynamic lighting
A wafer mapping system includes an imaging array, at least one lighting module and a controller coupled to the imaging array and the lighting module. The controller is adapted to receive...
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6816251 |
Method and apparatus for detecting defects along the edge of electronic media
An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the...
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6815702 |
Method and apparatus for detection of an edge of a printing plate mounted on a drum imaging system
A method and apparatus is disclosed to precisely locate an edge of an imageable plate mounted on a drum or other support surface. A light source and light sensor are used to measure the difference...
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6809330 |
Automatic calibration and built-in diagnostic procedures for line scan cameras
A new and improved line scan camera achieves the proper framing of the image field of view by using a first test card to calibrate the true bottom and leading edge portions of the test card which...
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6807302 |
Recognition apparatus and recognition method
A recognition apparatus of this invention for recognizing sorting information as a character string written within a cellophane region of a paper-like material extracts edge components according to...
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6806484 |
Sub-micron accuracy edge detector
An edge detector with sub-micron accuracy. The edge detector comprises two single mode optical fibers with an optical path between them. One fiber is coupled to a laser light source, and creates a...
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6798503 |
Edge flaw inspection device
This device is provided with an elliptical mirror 2 , a light source 5 that radiates coherent light towards an inspected edge 4 arranged near the location of its first focal point, a light...
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6770899 |
Work piece feeding machine
Work piece feeding machine capable of correctly and efficiently setting a work piece in a through-hole of a carrier. The machine includes a positioning unit which detects the amount of displacement...
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6765223 |
Sub-micron accuracy edge detector
An edge detector with sub-micron accuracy. The edge detector comprises two single mode optical fibers with an optical path between them. One fiber is coupled to a laser light source, and creates a...
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