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8178829 |
Wafer prescence detector with end effectors having optical couplers and fibers
The presence of a workpiece on an end effector of a vacuum robotic handler is detecting using any of a number of non-contact techniques in which some or all of the detection hardware is positioned...
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8148704 |
Printing plate registration using a camera
A method and apparatus for determining the alignment of printing plate (14) mounted on an imaging drum (12), and applying an image to a printing plate while maintaining registration and alignment...
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8125651 |
Substrate detection device and substrate conveyance apparatus
An object is to provide a substrate conveyance apparatus and a substrate detection device capable of improving flexibility in arrangement layout. The substrate detection device includes a projector...
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8098412 |
Method for detecting the center of wafer and storage medium storing a program for executing the method
A method detects a center of a wafer having a notch when aligning the wafer mounted on a movable mounting table. The method includes capturing an image of the wafer by using an imaging unit, the...
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8099190 |
Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured
A method and an apparatus for transferring a substantially flat and substantially circular objects, such as wafers, from a pick-up position to a delivery position, the apparatus comprising, a...
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8031968 |
Image processing apparatus and image processing program
An image processing apparatus includes: an image obtaining unit that obtains an image captured with an image sensor; and a defect information generating unit that generates defect information...
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8028427 |
Apparatus and method for positioning a workpiece
A stage for aligning a workpiece relative to analyzing apparatus. The stage has a platform and means for maintaining a workpiece on the platform. The platform is operable to tilt relative to the...
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8010307 |
In-line overlay measurement using charged particle beam system
A method and system for controlling an overlay shift on an integrated circuit is disclosed. The method and system comprises utilizing a scanning electron microscope (SEM) to measure the overlay...
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7999243 |
Apparatus and method for determining a dimensional characteristic of an installed weld fastener
A tool determines a characteristic of an installed weld fastener using a dimensional measurement device, and includes a threaded portion engageable with the weld fastener and a cylindrical portion....
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7989788 |
Determining position of a media page using a slot in the imaging drum
A method for determining a position of a mechanical edge of a reference edge of a sheet of recording media relative to a first edge of a drum slot in a cylindrical surface of an imaging drum, the...
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7945087 |
Alignment of printed circuit board targets
A method for micromachining a material, including configuring an optical system to provide illumination of an illumination wavelength to a site via a given element of the optical system, the...
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7902494 |
System for detecting motion of a body
The invention relates to a system (1) for detecting motion of a body (2) comprising a first elongated grating strip (4) coupled to said body and a separate and substantially stationary second...
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7888664 |
Plate pallet alignment system
A plate pallet alignment and loading apparatus (10) for originally packed plate pallet (13) into a printing plate imaging device (71) includes plate pallet adaptor (11) wherein the originally...
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7884935 |
Pattern transfer apparatus, imprint apparatus, and pattern transfer method
A pattern transfer apparatus transfers an imprint pattern formed on a mold, provided with an alignment mark, to a resin material on a substrate, provided with an alignment mark. A first image...
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7880155 |
Substrate alignment apparatus comprising a controller to measure alignment during transport
A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement...
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7873407 |
Systems and methods for in-vivo optical imaging and measurement
Disclosed are methods and systems for: (i) positioning a specimen inside an optical measurement system according to a reference image of the specimen indicative of its position and orientation...
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7855377 |
Alignment structures for an optical assembly
An optical assembly is provided that includes a substrate. The substrate has one or more optical waveguides. A component is coupled to and spaced apart from the substrate. The component has one or...
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7854199 |
Printing plate registration using a camera
A method and apparatus for determining the alignment of printing plate (14) mounted on an imaging drum (12), and applying an image to a printing plate while maintaining registration and alignment...
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7840367 |
Multi-modality inspection system
An inspection artifact includes a central portion and multiple optical and coordinate measurement machine (CMM) alignment features arranged on the central portion. The optical and CMM alignment...
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7838858 |
Evaluation system and method of a search operation that detects a detection subject on an object
First, an operator inputs various parameters required for a mark recognition operation including a designated position coordinate designated via a mouse and a keyboard (step 201). Then, an edge...
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7777209 |
Product inspection system and a method for implementing same
An inspection system and a method for measuring physical characteristics of a component using the inspection system is provided, wherein the inspection system includes a light source, a sensing...
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7777210 |
Laser irradiation method in which a distance between an irradiation object and an optical system is controlled by an autofocusing mechanism and method for manufacturing semiconductor device using the same
The present invention is to provide a laser irradiation method for performing homogeneous laser irradiation to the irradiation object even when the thickness of the irradiation object is not even....
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7767956 |
Methods and systems for lithography process control
Methods and systems for evaluating and controlling a lithography process are provided. For example, a method for reducing within wafer variation of a critical metric of a lithography process may...
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7767982 |
Optical auto focusing system and method for electron beam inspection tool
A method and system for inspecting a semiconductor wafer. The method includes providing an illumination flux through a pattern plate and a lens to a surface of a specimen to project a pattern onto...
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7760359 |
Beam detector distance measurement
A projected beam smoke detector includes circuitry and control software to measure a distance a beam travels between the detector's transmitter and receiver. Either a time-based or a phase-based...
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7723710 |
System and method including a prealigner
A system and method for prealigning a substrate. One embodiment provides a rotor configured to rotate a carrier around a rotation axis in response to a rotation signal. The carrier includes a main...
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7719732 |
Light sensing element having two functions
A light sensing element having two functions is provided for a high-speed image scanning system to scan a document, including a set of matrix light-sensing cells for detecting a scanning location...
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7717661 |
Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer
A compact multiple diameter wafer testing device with a footprint of about 33 by 34 inches features on-chuck wafer calibration and integrated cassette-chuck transfer. It includes a five axes wafer...
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7711441 |
Aiming feedback control for multiple energy beams
Plural energy beam sources are aimed at an energy receiving device by way of feedback control signals. Each energy beam is uniquely modulated by way of amplitude, polarization and/or coning...
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7692144 |
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height...
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7675051 |
Sheet detector mechanism including sheet detector further including photoreceptors, and image forming apparatus including the same
An image forming apparatus includes an image forming mechanism, a sheet conveyance mechanism, and a sheet detector. The image forming mechanism forms an image and transfers it onto the sheet...
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7633041 |
Apparatus for determining optimum position of focus of an imaging system
Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view...
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7633075 |
Through hole formation state detecting device and electronic timepiece using the detecting device
When a light emission element emits no light, a detected signal from a photodetection element is captured as an intensity of external light. Then, a threshold value is offset by the intensity of...
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7570801 |
Device suitable for placing components on a substrate
A device comprises an imaging device, a placement element connected to the imaging device for placing a component on a substrate, as well as an optical system having an optical axis. The placement...
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7531821 |
Imprint apparatus and imprint method including dual movable image pick-up device
An imprint apparatus, comprising a first holder for holding a mold having an imprint pattern; a second holder for holding a workpiece to which the imprint pattern is transferred; a first...
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7504647 |
Method and apparatus for inspecting a sample having a controller for determining an estimated height of the detector from the sample
Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative...
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7485887 |
Passive alignment of photodiode active area in three axes using microscopic focus
A fixturing system and microscope/video camera setup enables an operator to manipulate a photodiode into position optically using known good targets for the X and Y location and using microscope...
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7456379 |
Printing plate registration and optical alignment device including locating at least a part of a reference edge in at least one digital camera image
A method and apparatus for determining the alignment of printing plate mounted on an imaging drum, and applying an image to a printing plate while maintaining registration and alignment between the...
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7449690 |
Inspection method and inspection apparatus using charged particle beam
To establish a technique that enables sorting of the elevation and azimuth angle in the direction of emitting secondary electrons and obtaining images with emphasized contrast, in order to perform...
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7446872 |
Positioning apparatus and positioning method using the same
An apparatus for positioning a transport system and a load port is described, including a signal emitting unit disposed on the transport system and a positioning board on the load port. The signal...
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7443505 |
Optical alignment method and apparatus
In disclosed optical alignment method and apparatus thereof, external reflection entering laser diode by feedback from transmission line of low cost bidirectional optical transceiver module without...
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7442951 |
Reticle for use in rapid determination of average intrafield scanning distortion having transmissivity of a complementary alignment attribute being different than the transmissivity of at least one alignment attribute
A method and apparatus for determining lens distortion in a projection imaging tool are described. The techniques include exposing at least one alignment attribute onto a substrate having a...
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7439531 |
Alignment systems and methods for lithographic systems
An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining...
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7405388 |
Video centerscope for machine alignment
This invention can be attached to the head of a milling machine and performs the functions of a center scope and an edge finder. Unlike a center scope or an edge finder it does not have to be...
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7388188 |
Apparatus, system and method for detecting a position of a movable element in a compartment
The apparatus, the system and the method measure a distance and/or an intensity of emitted light. The apparatus and the system have a compartment, a movable element and/or a sensor array in an...
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7382914 |
Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects
Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are...
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7375361 |
Optical alignment device for machine tool
The orientation of a machine 2 relative to a work-piece 10 is manually controlled by means of an alignment device 4. The device 4 includes a light source 24 rigidly attached to a foot 12 that is...
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7345748 |
Survey system capable of remotely controlling a surveying instrument
In a survey system in which guide light is emitted from the side of a target, and, on the side of a surveying instrument, a telescope is directed roughly toward the target by receiving the guide...
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7332734 |
Lithography apparatus and pattern forming method using the same having an liquid crystal panel for a photo mask function
A lithography apparatus is provided. The apparatus includes: a stage, a first light source unit, an optical system, an image obtaining means, an image edit means, an LC panel, and a second light...
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7329889 |
Electron beam apparatus and method with surface height calculator and a dual projection optical unit
An electron beam apparatus including a table which mounts a specimen and is movable in three dimensional directions, an electron beam optical system irradiating an electron beam onto a specimen and...
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